Alumina ceramic heating ring and processing method

By setting up a multi-layer ring groove structure and thermal conductive coating in the alumina ceramic heating ring, the problem of insufficient thermal conductivity and heating efficiency of the traditional heating ring is solved, and more uniform heat conduction and higher heating efficiency are achieved, while ensuring the precision and cleanliness of the product.

CN119697817APending Publication Date: 2025-03-25HANGZHOU DAHE NEW MATERIAL TECH CO LTD
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Patent Information

Application Number
CN202411714807.1
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-11-27
Publication Date
2025-03-25

AI Technical Summary

Technical Problem

Traditional alumina ceramic heating rings have shortcomings in heating efficiency and thermal conductivity, and it is difficult to meet the requirements of semiconductor etching equipment for high-precision ceramic components.

Method used

By setting the first and second-level sinking ring grooves in the alumina ceramic heating ring, and setting the thermally conductive aluminum coating in the second-level sinking ring groove, and setting the alumina coating in the first-level sinking ring groove to cover the thermally conductive aluminum coating to improve the heat conduction efficiency.

Benefits of technology

The thermal conductivity and heating efficiency of the alumina ceramic heating ring are improved, making the heat conduction more uniform, and at the same time ensuring the flatness, parallelism and cleanliness of the product.

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Abstract

The invention discloses an aluminum oxide ceramic heating ring and a processing method, and aims to overcome the defect of poor heating efficiency of the aluminum oxide ceramic heating ring. The upper surface of the ceramic base body is provided with a primary sinking ring groove; the bottom of the primary sinking ring groove is provided with a secondary sinking ring groove; the bottom of the secondary sinking ring groove is circumferentially and uniformly provided with a plurality of sinking grooves; heating bodies are arranged in the sinking grooves, a heat-conducting aluminum coating is arranged in the secondary sinking ring groove, and an aluminum oxide coating is arranged in the primary sinking ring groove; and the aluminum oxide coating covers the heat-conducting aluminum coating. According to the technical scheme, the heat conduction performance of the aluminum oxide ceramic heating ring is improved, heat conduction of the aluminum oxide ceramic heating ring is uniform, and the heating efficiency is high.
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