Vacuum coating processing mode

By monitoring and comparing the parameters of the coating layer in real time during the vacuum coating processing, the problem of difficulty in effectively monitoring and controlling multiple film thicknesses and proportions in the prior art is solved, and an efficient and accurate coating process is achieved, and the coating quality and efficiency are improved.

CN119710565AActive Publication Date: 2025-03-28SUZHOU YOULUN VACUUM EQUIP TECH CO LTD
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Patent Information

Application Number
CN202411967977.0
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-12-30
Publication Date
2025-03-28
Estimated Expiration
2044-12-30

AI Technical Summary

Technical Problem

The existing vacuum coating technology is difficult to effectively monitor and control the thickness and proportion of multiple films, resulting in difficult to ensure the quality and efficiency of coating.

Method used

A vacuum coating processing method is adopted to monitor the parameters of the coating layer in real time, such as rate, coating time, thickness, vacuum degree, power and crystal oscillator frequency, and compare according to the set reference value range. If it is not satisfied, shut down and analyze and process it to ensure the stability and quality of the coating process.

Benefits of technology

Accurate monitoring and control of the vacuum coating process is achieved, the coating quality and efficiency are improved, and the vacuum degree stability and the crucible safety are ensured.

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Abstract

The invention provides a vacuum coating processing mode, coating is carried out after the vacuum degree of the corresponding layer is met through the steps 1, 2, 3 and 4 in sequence, the influence on the vacuum degree during the previous vacuum coating processing is reduced, the vacuum degree requirement during coating is ensured, the coating quality is improved, and the coating efficiency is improved by monitoring the coating rate. And when the speed reaches the upper limit or cannot be detected, the equipment is shut down, and meanwhile, the upper limit of the single-layer coating time is monitored, so that the safety of the crucible is ensured, and the speed is more convenient to monitor.
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