Three-axis gyroscope inter-axis consistency adjusting method, terminal, system and medium

Abstract

The invention provides a three-axis gyroscope inter-axis consistency adjusting method, a terminal, a system and a medium. The method comprises the following steps: acquiring a gyroscope driving frequency of a to-be-adjusted three-axis gyroscope and a detection frequency of each detection axis; calculating the detection frequency difference of each detection shaft according to the gyroscope driving frequency and the detection frequency corresponding to each detection shaft; determining a target removal amount corresponding to the to-be-adjusted elastic beam according to the detection frequency difference of each detection shaft; wherein the target removal amount is used for representing the size adjustment amount of the to-be-adjusted elastic beam, so that the inter-axis consistency of the to-be-adjusted three-axis gyroscope is adjusted. According to the method, the detection frequency difference between the detection axes of the three-axis gyroscope is used as a reference quantity for determining whether the three-axis gyroscope reaches the consistency between the axes or not. Due to the fact that the frequency of the three-axis gyroscope is extremely sensitive to the rigidity of the elastic beams, the error amount is reduced by adjusting the size of the corresponding elastic beams in the detection shafts, and then rapid adjustment of the consistency between the axes of the three-axis gyroscope is achieved.

Description

Technical Field

[0001] The present invention relates to the technical field of gyroscopes, and in particular to a method, terminal, system and medium for adjusting the inter-axis consistency of a three-axis gyroscope. Background Art

[0002] As an inertial sensor, gyroscopes are mainly used to sense the angular velocity of objects when they rotate. MEMS gyroscopes are manufactured using micro-electromechanical processing technology and have the advantages of small size, light weight, and easy integration. They are widely used in consumer fields such as smartphones and smart wearable devices, and industrial fields such as autonomous driving and industrial robots.

[0003] As various application scenarios have put forward higher requirements for volume and power consumption, single-chip integrated three-axis MEMS gyroscopes have become an important development trend. Detection sensitivity is an important indicator of a three-axis MEMS gyroscope. During design, the detection sensitivity of the three axes is often designed to be consistent, and the size of the sensitivity value is closely related to the detection frequency difference. However, due to the limitations of processing technology and material uniformity, the gyroscope drive frequency and the detection frequency of the three axes will deviate from the design value, the detection frequency difference will change, and the consistency between axes will deteriorate; in addition, there will be frequency fluctuations of several hundred hertz between the chips on the same wafer, resulting in a decrease in the yield rate. Therefore, how to improve the consistency between axes of three-axis gyroscopes, such as three-axis MEMS gyroscopes, has become an urgent problem to be solved. Summary of the invention

[0004] The embodiments of the present invention provide a method, terminal, system and medium for adjusting the inter-axis consistency of a three-axis gyroscope, so as to solve the problem of poor inter-axis consistency of gyroscopes at present.

[0005] In a first aspect, an embodiment of the present invention provides a method for adjusting inter-axis consistency of a three-axis gyroscope, comprising:

[0006] Obtaining the gyro driving frequency of the three-axis gyroscope to be adjusted and the detection frequency of each detection axis;

[0007] Calculate the detection frequency difference of each detection axis according to the gyro driving frequency and the detection frequency corresponding to each detection axis;

[0008] According to the detection frequency difference of each detection axis, the target removal amount corresponding to the elastic beam to be adjusted is determined; wherein the target removal amount is used to characterize the size adjustment amount of the elastic beam to be adjusted, so as to achieve inter-axis consistency adjustment of the three-axis gyroscope to be adjusted.

[0009] In a possible implementation, after determining the target removal amount corresponding to the elastic beam to be adjusted according to the detection frequency difference of each detection axis, the method further includes:

[0010] The target removal amount is sent to the laser adjustment device, so that the laser adjustment device focuses the focus of the target array laser on the elastic beam to be adjusted, and adjusts the size of the elastic beam to be adjusted based on the target removal amount.

[0011] In one possible implementation, the target array laser is obtained by:

[0012] A shaping signal is sent to the spatial light modulator so that the spatial light modulator shapes the light beam of the single pulse laser to obtain a target array laser.

[0013] In a possible implementation, after sending the target removal amount to the laser adjustment device so that the laser adjustment device focuses the focus of the array laser on the elastic beam to be adjusted and adjusts the size of the elastic beam to be adjusted based on the target removal amount, the method further includes:

[0014] Determine whether the inter-axis consistency of the adjusted three-axis gyroscope meets the design value;

[0015] If not, return to the step of obtaining the gyro driving frequency of the to-be-adjusted three-axis gyroscope and the detection frequency of each detection axis until the inter-axis consistency of the adjusted three-axis gyroscope meets the design value.

[0016] In a possible implementation, determining a target removal amount corresponding to the elastic beam to be adjusted according to the detection frequency difference of each detection axis includes:

[0017] According to the detection frequency difference of each detection axis and the detection frequency difference design value, the detection frequency difference error value of each detection axis is obtained;

[0018] According to the detection frequency difference error value of each detection axis, the target removal amount corresponding to the elastic beam to be adjusted is determined.

[0019] In a possible implementation, determining a target removal amount corresponding to the elastic beam to be adjusted according to the detection frequency difference error value of each detection axis includes:

[0020] The elastic beam in the detection axis with the largest detection frequency difference error value is used as the elastic beam to be adjusted;

[0021] Based on the correspondence between the removal amount and the detection frequency change amount, the target removal amount is determined.

[0022] In a possible implementation, the detection frequency difference of each detection axis is calculated according to the gyro driving frequency and the detection frequency corresponding to each detection axis, including:

[0023] For any detection axis, the difference between the detection frequency corresponding to the detection axis and the gyro driving frequency is taken as the detection frequency difference of the detection axis.

[0024] In a second aspect, an embodiment of the present invention provides a terminal, comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein when the processor executes the computer program, the steps of the first aspect or any possible implementation method of the first aspect are implemented.

[0025] In a third aspect, an embodiment of the present invention provides a three-axis gyroscope inter-axis consistency adjustment system, including a detection device, the terminal provided in the second aspect, and a laser adjustment device;

[0026] A detection device is used to detect the three-axis gyroscope to be adjusted, and send the detected gyroscope driving frequency and the detection frequency of each detection axis to the terminal;

[0027] The laser adjustment device is used to receive the target removal amount corresponding to the elastic beam to be adjusted sent by the terminal, and adjust the size of the elastic beam to be adjusted based on the target removal amount corresponding to the elastic beam to be adjusted, so as to adjust the inter-axis consistency of the three-axis gyroscope to be adjusted.

[0028] In a fourth aspect, an embodiment of the present invention provides a computer-readable storage medium, wherein the computer-readable storage medium stores a computer program, and when the computer program is executed by a processor, the steps of the method described in the first aspect or any possible implementation method of the first aspect are implemented.

[0029] The embodiment of the present invention provides a method, terminal, system and medium for adjusting the inter-axis consistency of a three-axis gyroscope. Since the sensitivity between each detection axis of the three-axis gyroscope is inversely proportional to the corresponding detection frequency difference, the detection frequency difference between each detection axis of the three-axis gyroscope is used as a reference for determining whether the three-axis gyroscope has achieved inter-axis consistency. Since the frequency of the three-axis gyroscope is extremely sensitive to the stiffness of the elastic beam, if the detection frequency difference between each detection axis of the three-axis gyroscope is inconsistent, the error amount is reduced by adjusting the size of the corresponding elastic beam in the detection axis, thereby realizing rapid adjustment of the inter-axis consistency of the three-axis gyroscope. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments or related technical descriptions are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0031] Figure 1 It is a structural schematic diagram of a three-axis gyroscope inter-axis consistency adjustment system provided by an embodiment of the present invention;

[0032] Figure 2is a flow chart of an implementation method of a three-axis gyroscope inter-axis consistency adjustment method provided by an embodiment of the present invention;

[0033] Figure 3 is a schematic diagram of simulation results of a method for adjusting inter-axis consistency of a three-axis gyroscope provided in an embodiment of the present invention;

[0034] Figure 4 is a flow chart of an implementation method of a three-axis gyroscope inter-axis consistency adjustment method provided by another embodiment of the present invention;

[0035] Figure 5 is a schematic diagram of a terminal provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0036] In the following description, specific details such as specific system structures, technologies, etc. are provided for the purpose of illustration rather than limitation, so as to provide a thorough understanding of the embodiments of the present invention. However, it should be clear to those skilled in the art that the present invention may be implemented in other embodiments without these specific details. In other cases, detailed descriptions of well-known systems, devices, circuits, and methods are omitted to prevent unnecessary details from obstructing the description of the present invention.

[0037] In order to make the purpose, technical solutions and advantages of the present invention more clear, specific embodiments will be described below in conjunction with the accompanying drawings.

[0038] Figure 1 Schematic diagram of the structure of the three-axis gyroscope inter-axis consistency adjustment system provided by the embodiment of the present invention. Figure 1 As shown, the system may include a detection device 1 , a terminal 2 and a laser adjustment device 3 .

[0039] The detection device 1 is used to detect the three-axis gyroscope to be adjusted, and send the detected gyroscope driving frequency and the detection frequency of each detection axis to the terminal 2.

[0040] The laser adjustment device 3 is used to receive the target removal amount corresponding to the elastic beam to be adjusted sent by the terminal 2, and adjust the size of the elastic beam to be adjusted based on the target removal amount corresponding to the elastic beam to be adjusted, so as to adjust the inter-axis consistency of the three-axis gyroscope to be adjusted.

[0041] In this embodiment, the detection device 1 may include a probe station, and the three-axis MEMS gyroscope may be placed on the probe station. The sweep frequency range is set to 15 to 30 kHz by the signal generator 7 to test the driving frequency of the three-axis MEMS gyroscope and the detection frequencies of the three detection axes. The detection device 1 sends the driving frequency and the detection frequencies of the three detection axes to the terminal 2. The signal generator 7 also includes a power supply for powering the entire system.

[0042] Terminal 2 is based on Figure 2 The method provided in the relevant steps calculates the target removal amount corresponding to the elastic beam to be adjusted, and sends the target removal amount corresponding to the elastic beam to be adjusted to the laser adjustment device 3.

[0043] The laser adjustment device 3 includes a laser 31, an aperture 32, a spatial light modulator 33 and a light gate 34. The laser 31 is used to emit laser light; the aperture 32 is used to control the laser mode and beam quality to ensure the stability and accuracy of the laser; the spatial light modulator 33 is used to shape a single laser beam into an array laser, and the light gate 34 is used to control the opening time.

[0044] The laser adjustment device 3 emits a laser beam and focuses it on the upper surface of the adjustment position of the elastic beam through a dichroic mirror 4 and an objective lens 6, and accurately determines the laser focus position through a charge-coupled device (CCD) 5 to adjust the elastic beam.

[0045] Figure 2 1 is a flow chart of the implementation of the method for adjusting the inter-axis consistency of a three-axis gyroscope provided by an embodiment of the present invention. Figure 2 As shown below, combined Figure 2 , the method implemented by terminal 2 is described as follows:

[0046] Step 110: Obtain the gyro driving frequency of the three-axis gyroscope to be adjusted and the detection frequency of each detection axis.

[0047] In this embodiment, the three-axis gyroscope to be adjusted can be a three-axis MEMS gyroscope, which can be a three-axis gyroscope on a single chip; it can also be corresponding three-axis gyroscopes on multiple chips on the same wafer. That is, this embodiment can adjust the inter-axis consistency of the three-axis gyroscope on a single chip, and can also adjust the inter-axis consistency of the corresponding three-axis gyroscopes on multiple chips on the same wafer at the same time, ensuring good consistency between the chips on the same wafer, which is conducive to improving the yield rate.

[0048] In this embodiment, the three-axis gyroscope to be adjusted can be placed on a probe table, that is, on the monitoring device 1, and the gyroscope driving frequency of the three-axis gyroscope to be adjusted and the detection frequency of each detection axis can be obtained by performing frequency sweep measurement through the detection device 1. The frequency sweep range can be 10 to 50 kHz.

[0049] Step 120: Calculate the detection frequency difference of each detection axis according to the gyro driving frequency and the detection frequency corresponding to each detection axis.

[0050] In this embodiment, the gyroscope to be detected has three detection axes, each detection axis corresponds to a detection frequency. For any detection axis, the difference between the detection frequency corresponding to the detection axis and the gyroscope driving frequency is used as the detection frequency difference of the detection axis.

[0051] In this embodiment, the detection sensitivity corresponding to each detection axis may also be determined according to the detection frequency difference corresponding to each detection axis, wherein the detection sensitivity corresponding to each detection axis is inversely proportional to the detection frequency difference corresponding to it.

[0052] In this embodiment, the essence of adjusting the inter-axis consistency of the gyroscope to be detected is to make the detection sensitivity of each detection axis meet the sensitivity setting value. Based on the inverse relationship between the detection sensitivity corresponding to each detection axis and its corresponding detection frequency difference, the detection frequency difference can be adjusted to achieve inter-axis consistency of the gyroscope to be detected.

[0053] Step 130: determining a target removal amount corresponding to the elastic beam to be adjusted according to the detection frequency difference of each detection axis; wherein the target removal amount is used to characterize the size adjustment amount of the elastic beam to be adjusted, so as to achieve inter-axis consistency adjustment of the three-axis gyroscope to be adjusted.

[0054] In this embodiment, considering that the detection frequency of the gyroscope is extremely sensitive to the stiffness of the elastic beam, the inter-axis consistency can be adjusted by adjusting the size of the elastic beam and thus changing its stiffness.

[0055] In this embodiment, determining the target removal amount corresponding to the elastic beam to be adjusted according to the detection frequency difference of each detection axis in step 130 may include:

[0056] Step 131: Obtain the detection frequency difference error value of each detection axis according to the detection frequency difference of each detection axis and the detection frequency difference design value.

[0057] Step 132: Determine the target removal amount corresponding to the elastic beam to be adjusted according to the detection frequency difference error value of each detection axis.

[0058] In this embodiment, when the detection sensitivity of each detection axis does not meet the sensitivity setting value, the detection frequency difference error value of each detection axis caused by processing technology, material unevenness and other factors is obtained according to the detection frequency difference of each detection axis and the detection frequency difference design value.

[0059] Considering that all three detection axes may have detection frequency difference error values, in this embodiment, the detection axis with the largest detection frequency difference error value can be adjusted preferentially. Since each detection axis has an independent elastic beam, the elastic beam determines the detection frequency of this detection axis, and the elastic beam is symmetrical in structure, which determines which detection axis to adjust, and also determines the removal position. That is, in this embodiment, the elastic beam in the detection axis with the largest detection frequency difference error value can be used as the elastic beam to be adjusted.

[0060] For the elastic beam to be adjusted, based on the corresponding relationship between the removal amount and the detection frequency change, the target removal amount corresponding to the elastic beam to be adjusted is determined to reduce the detection frequency difference error value of the detection axis corresponding to the elastic beam to be adjusted, thereby making the detection sensitivity of the three detection axes of the three-axis gyroscope to be adjusted consistent between axes, or in other words, making the inter-axis consistency of the three-axis gyroscope to be adjusted meet the design value.

[0061] In this embodiment, the corresponding relationship between the removal amount and the detection frequency change amount can be obtained through simulation. Figure 3 Schematic diagram of simulation results of the method for adjusting the inter-axis consistency of a three-axis gyroscope provided by an embodiment of the present invention. Figure 3 This embodiment is described.

[0062] like Figure 3 As shown, it shows the corresponding relationship between the removal amount and the detection frequency change amount when the elastic beam to be adjusted is the Y detection axis in the three-axis gyroscope. The horizontal axis represents the elastic beam removal amount, and the vertical axis represents the detection frequency of the Y detection axis.

[0063] When the size of the elastic beam to be adjusted on the Y detection axis is adjusted, the detection frequencies of the other two axes and the driving frequency of the gyroscope to be detected remain unchanged. As the removal amount increases, when it reaches 1.2ng, the detection frequency of the Y detection axis is the same as its corresponding detection frequency design value. Therefore, through simulation, the relationship between the removal amount and the change in detection frequency is established, so that the specific value of the target removal amount can be determined.

[0064] In this embodiment, after determining the target removal amount corresponding to the elastic beam to be adjusted, the inter-axis consistency of the three-axis gyroscope to be adjusted can be adjusted in the following manner.

[0065] The target removal amount is sent to the laser adjustment device 3, so that the laser adjustment device 3 focuses the focus of the target array laser on the elastic beam to be adjusted, and adjusts the size of the elastic beam to be adjusted based on the target removal amount.

[0066] In this embodiment, the process of determining the target removal amount corresponding to the elastic beam to be adjusted can be performed by the terminal device. After the terminal device obtains the target removal amount corresponding to the elastic beam to be adjusted, it can send it to the laser adjustment device 3.

[0067] After receiving the target removal amount corresponding to the elastic beam to be adjusted, the laser adjustment device 3 controls the target array laser therein to focus its focus on the elastic beam to be adjusted, and adjusts the size of the elastic beam to be adjusted based on the target removal amount. In order to avoid damaging the elastic beam, the laser power should be less than 100mW, and the light gate opening time should be set within 100-1000ms.

[0068] In this embodiment, the three-axis gyroscope is adjusted by array laser, which has the advantages of controllable processing area, high processing accuracy and small residual stress after processing.

[0069] In an optional embodiment, the target array laser is obtained by:

[0070] A shaping signal is sent to the spatial light modulator 33 so that the spatial light modulator 33 shapes the light beam of the single pulse laser to obtain a target array laser.

[0071] In this embodiment, the prior art generally uses a single pulse laser to adjust the size of the gyro structure, and each adjustment can only be made for one gyro, resulting in low adjustment efficiency. In addition, the gyro structure requires high symmetry, and the size of the elastic beams in the symmetrical position needs to be adjusted during adjustment. When a single pulse laser is used for adjustment, multiple processing is required, which is prone to asymmetric processing and thus causes asymmetric errors.

[0072] To solve the above problem, this embodiment adopts a spatial light modulator 33 to shape a single pulse laser into a target array laser according to the position of each detection axis in the three-axis gyroscope to be adjusted, so that the position of each laser beam in the target array laser corresponds one-to-one with the detection axis to achieve symmetrical processing.

[0073] In this embodiment, the target laser array can adjust multiple three-axis gyroscopes to be detected at the same time, thereby improving the adjustment efficiency. Moreover, after a single pulse laser is shaped into a target array laser, symmetrical positions can be processed simultaneously, thereby avoiding asymmetric errors caused by multiple processing of a single laser beam.

[0074] In summary, the embodiment of the present invention uses a spatial light modulator 33 to shape a single beam of pulsed laser and modulates the single beam of pulsed laser into a laser array, which can achieve parallel adjustment of the size of the elastic beams at the symmetrical position of the gyroscope, ensure the symmetry of the gyroscope structure after adjustment, and effectively improve the adjustment efficiency.

[0075] In addition, in this embodiment, the target array laser may be a 2×1 array laser.

[0076] In an optional embodiment, after sending the target removal amount to the laser adjustment device 3 so that the laser adjustment device 3 focuses the focus of the target array laser on the elastic beam to be adjusted, and adjusts the size of the elastic beam to be adjusted based on the target removal amount, it also includes:

[0077] Determine whether the inter-axis consistency of the adjusted three-axis gyroscope meets the design value.

[0078] If not, return to the step of obtaining the gyro driving frequency of the to-be-adjusted three-axis gyroscope and the detection frequency of each detection axis until the inter-axis consistency of the adjusted three-axis gyroscope meets the design value.

[0079] In this embodiment, in order to ensure the inter-axis consistency of the three-axis gyroscope, after each adjustment of the elastic beam is completed, it is necessary to calculate whether the inter-axis consistency of the adjusted three-axis gyroscope to be adjusted meets the design value. If not, it is necessary to retest and re-adjust so that the inter-axis consistency of the three-axis gyroscope to be adjusted meets the design value.

[0080] Figure 4 FIG. 1 is a flow chart of a method for adjusting the inter-axis consistency of a three-axis gyroscope provided by another embodiment of the present invention; Figure 4 As shown, the method may include:

[0081] S1. Place the three-axis MEMS gyroscope on the probe table, set the sweep frequency range to 15-30kHz, and test the driving frequency of the three-axis MEMS gyroscope and the detection frequency of the three detection axes;

[0082] S2. Calculate the detection frequency difference and detection sensitivity of the three detection axes of the three-axis MEMS gyroscope, compare them with the corresponding design values, and determine whether the inter-axis consistency of the three-axis MEMS gyroscope meets the design expectations;

[0083] S3, if it meets the requirements, the adjustment is terminated; if it does not meet the requirements, the adjustment position and adjustment amount (removal amount) of the elastic beam are determined by simulation according to the calculation result in S2;

[0084] S4, according to the elastic beam adjustment position determined in S3, a spatial light modulator is used to shape the light beam, and a single pulse laser is modulated into a 2×1 array laser;

[0085] S5, focusing the laser array on the upper surface of the elastic beam adjustment position determined in S3, controlling the optical gate switch, and adjusting the size of the elastic beam, wherein the laser power is less than 100 mW, and the optical gate opening time is 100 to 1000 ms;

[0086] S6. Repeat the above steps S1 to S5 until the inter-axis consistency of the three-axis MEMS gyroscope meets the design value, and the inter-axis consistency adjustment is completed.

[0087] In summary, the embodiment of the present invention takes into account that the sensitivity corresponding to each detection axis of the three-axis gyroscope is inversely proportional to the detection frequency difference. Therefore, the present embodiment uses the detection frequency difference between each detection axis of the three-axis gyroscope as a reference for determining whether the three-axis gyroscope has achieved inter-axis consistency. Since the frequency of the three-axis gyroscope is extremely sensitive to the stiffness of the elastic beam, if the detection frequency difference between each detection axis of the three-axis gyroscope is inconsistent, the error amount is reduced by adjusting the size of the corresponding elastic beam in the detection axis, thereby realizing rapid adjustment of the inter-axis consistency of the three-axis gyroscope.

[0088] It should be understood that the order of execution of the steps in the above embodiment does not necessarily mean the order of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiment of the present invention.

[0089] Figure 5 is a schematic diagram of a terminal provided by an embodiment of the present invention. Figure 5 As shown, the terminal 50 of this embodiment includes: a processor 500, a memory 510, and a computer program 520 stored in the memory 510 and executable on the processor 500. When the processor 500 executes the computer program 520, the steps in the above-mentioned embodiments of the method for adjusting the consistency between axes of the three-axis gyroscope are implemented, for example Figure 2 Steps 110 to 130 are shown.

[0090] Exemplarily, the computer program 520 may be divided into one or more modules / units, which are stored in the memory 510 and executed by the processor 500 to implement the present invention. The one or more modules / units may be a series of computer program instruction segments capable of implementing specific functions, which are used to describe the execution process of the computer program 520 in the terminal 50.

[0091] The terminal 50 may be a computing device such as a desktop computer, a notebook, a PDA, or a cloud server. The terminal 50 may include, but is not limited to, a processor 500 and a memory 510. Those skilled in the art will appreciate that Figure 5 It is only an example of terminal 50 and does not constitute a limitation of terminal 50. It may include more or fewer components than shown in the figure, or a combination of certain components, or different components. For example, the terminal may also include input and output devices, network access devices, buses, etc.

[0092] The processor 500 may be a central processing unit (CPU), or other general-purpose processors, digital signal processors (DSP), application-specific integrated circuits (ASIC), field-programmable gate arrays (FPGA) or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc. A general-purpose processor may be a microprocessor or any conventional processor, etc.

[0093] The memory 510 may be an internal storage unit of the terminal 50, such as a hard disk or memory of the terminal 50. The memory 510 may also be an external storage device of the terminal 50, such as a plug-in hard disk, a smart media card (SMC), a secure digital (SD) card, a flash card (FlashCard), etc. equipped on the terminal 50. Further, the memory 510 may also include both an internal storage unit of the terminal 50 and an external storage device. The memory 510 is used to store the computer program and other programs and data required by the terminal. The memory 510 may also be used to temporarily store data that has been output or is to be output.

[0094] The technicians in the relevant field can clearly understand that for the convenience and simplicity of description, only the division of the above-mentioned functional units and modules is used as an example for illustration. In practical applications, the above-mentioned function allocation can be completed by different functional units and modules as needed, that is, the internal structure of the device can be divided into different functional units or modules to complete all or part of the functions described above. The functional units and modules in the embodiment can be integrated in a processing unit, or each unit can exist physically separately, or two or more units can be integrated in one unit. The above-mentioned integrated unit can be implemented in the form of hardware or in the form of software functional units. In addition, the specific names of the functional units and modules are only for the convenience of distinguishing each other, and are not used to limit the scope of protection of this application. The specific working process of the units and modules in the above-mentioned system can refer to the corresponding process in the aforementioned method embodiment, which will not be repeated here.

[0095] In the above embodiments, the description of each embodiment has its own emphasis. For parts that are not described or recorded in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0096] Those skilled in the art will appreciate that the units and algorithm steps of each example described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, or a combination of computer software and electronic hardware. Whether these functions are performed in hardware or software depends on the specific application and design constraints of the technical solution. Professional and technical personnel can use different methods to implement the described functions for each specific application, but such implementation should not be considered to be beyond the scope of the present invention.

[0097] In the embodiments provided by the present invention, it should be understood that the disclosed devices / terminals and methods can be implemented in other ways. For example, the device / terminal embodiments described above are only schematic. For example, the division of the modules or units is only a logical function division. There may be other division methods in actual implementation, such as multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some interfaces, indirect coupling or communication connection of devices or units, which can be electrical, mechanical or other forms.

[0098] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0099] In addition, each functional unit in each embodiment of the present invention may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit. The above-mentioned integrated unit may be implemented in the form of hardware or in the form of software functional units.

[0100] If the integrated module / unit is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the present invention implements all or part of the processes in the above-mentioned embodiment method, and can also be completed by instructing the relevant hardware through a computer program. The computer program can be stored in a computer-readable storage medium. When the computer program is executed by the processor, the steps of the above-mentioned three-axis gyroscope axis consistency adjustment method embodiments can be implemented. Among them, the computer program includes computer program code, and the computer program code can be in source code form, object code form, executable file or some intermediate form. The computer-readable medium may include: any entity or device that can carry the computer program code, recording medium, U disk, mobile hard disk, disk, optical disk, computer memory, read-only memory (ROM), random access memory (RAM), electrical carrier signal, telecommunication signal and software distribution medium.

[0101] The embodiments described above are only used to illustrate the technical solutions of the present invention, rather than to limit the same. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features may be replaced by equivalents. Such modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention, and should all be included in the protection scope of the present invention.

Claims

1. A method for adjusting the inter-axis consistency of a three-axis gyroscope, characterized in that: include: Obtaining the gyro driving frequency of the three-axis gyroscope to be adjusted and the detection frequency of each detection axis; Calculating the detection frequency difference of each detection axis according to the gyro driving frequency and the detection frequency corresponding to each detection axis; According to the detection frequency difference of each detection axis, a target removal amount corresponding to the elastic beam to be adjusted is determined; wherein the target removal amount is used to characterize the size adjustment amount of the elastic beam to be adjusted, so as to achieve inter-axis consistency adjustment of the three-axis gyroscope to be adjusted.

2. The method for adjusting the inter-axis consistency of a three-axis gyroscope according to claim 1, characterized in that: After determining the target removal amount corresponding to the elastic beam to be adjusted according to the detection frequency difference of each detection axis, the method further includes: The target removal amount is sent to a laser adjustment device, so that the laser adjustment device focuses the focus of the target array laser on the elastic beam to be adjusted, and adjusts the size of the elastic beam to be adjusted based on the target removal amount.

3. The method for adjusting the inter-axis consistency of a three-axis gyroscope according to claim 2, characterized in that: The target array laser is obtained by the following method: A shaping signal is sent to the spatial light modulator, so that the spatial light modulator shapes the light beam of the single pulse laser to obtain the target array laser.

4. The method for adjusting the inter-axis consistency of a three-axis gyroscope according to claim 2, characterized in that: After sending the target removal amount to the laser adjustment device so that the laser adjustment device focuses the focus of the target array laser on the elastic beam to be adjusted, and adjusting the size of the elastic beam to be adjusted based on the target removal amount, the method further includes: Determine whether the inter-axis consistency of the adjusted three-axis gyroscope meets the design value; If not, return to the step of obtaining the gyro driving frequency of the to-be-adjusted three-axis gyroscope and the detection frequency of each detection axis until the inter-axis consistency of the adjusted three-axis gyroscope to be adjusted meets the design value.

5. The method for adjusting the inter-axis consistency of a three-axis gyroscope according to claim 1, characterized in that: The step of determining the target removal amount corresponding to the elastic beam to be adjusted according to the detection frequency difference of each detection axis includes: According to the detection frequency difference of each detection axis and the detection frequency difference design value, the detection frequency difference error value of each detection axis is obtained; According to the detection frequency difference error value of each detection axis, the target removal amount corresponding to the elastic beam to be adjusted is determined.

6. The method for adjusting the inter-axis consistency of a three-axis gyroscope according to claim 5, characterized in that: The step of determining the target removal amount corresponding to the elastic beam to be adjusted according to the detection frequency difference error value of each detection axis includes: The elastic beam in the detection axis with the largest detection frequency difference error value is used as the elastic beam to be adjusted; Based on the correspondence between the removal amount and the detection frequency change amount, the target removal amount is determined.

7. The method for adjusting the inter-axis consistency of a three-axis gyroscope according to claim 1, characterized in that: The step of calculating the detection frequency difference of each detection axis according to the gyro driving frequency and the detection frequency corresponding to each detection axis includes: For any detection axis, the difference between the detection frequency corresponding to the detection axis and the gyro driving frequency is used as the detection frequency difference of the detection axis.

8. A terminal comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, characterized in that: When the processor executes the computer program, the steps of the method according to any one of claims 1 to 7 are implemented.

9. A three-axis gyroscope inter-axis consistency adjustment system, characterized in that: comprising a detection device, a terminal as claimed in claim 8 and a laser adjustment device; The detection device is used to detect the three-axis gyroscope to be adjusted, and send the detected gyroscope driving frequency and the detection frequency of each detection axis to the terminal; The laser adjustment device is used to receive the target removal amount corresponding to the elastic beam to be adjusted sent by the terminal, and adjust the size of the elastic beam to be adjusted based on the target removal amount corresponding to the elastic beam to be adjusted, so as to adjust the inter-axis consistency of the three-axis gyroscope to be adjusted.

10. A computer-readable storage medium storing a computer program, characterized in that: When the computer program is executed by a processor, the steps of the method as claimed in any one of claims 1 to 7 are implemented.

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