Surface acoustic wave filter device and method for adjusting the frequency of the surface acoustic wave filter device
By forming an interfinger transducer on the piezoelectric layer of the surface acoustic wave filter device and covering the multi-layer dielectric layer, the problem of inaccurate frequency adjustment in the prior art is solved, and a high-performance and high-reliability surface acoustic wave filter device is realized.
CN119766194APending Publication Date: 2025-04-04CHANGZHOU CHEMSEMI CO LTD
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Patent Information
- Application Number
- CN202411596080.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-08
- Publication Date
- 2025-04-04
AI Technical Summary
Technical Problem
Existing surface acoustic wave filtering devices are difficult to accurately adjust the frequency, which affects device performance.
Method used
By forming a plurality of interdigit transducers on the piezoelectric layer and covering the first and second dielectric layers, the thickness of the dielectric layer is adjusted to adjust the frequency of the surface acoustic wave filtering device.
Benefits of technology
Accurate control of the frequency of the surface acoustic wave filter device is achieved, and the performance and reliability of the device are improved.
✦ Generated by Eureka AI based on patent content.
Abstract
A method for adjusting the frequency of a surface acoustic wave filter device and a surface acoustic wave filter device, the method comprising: providing a piezoelectric layer; forming a first interdigital transducer and a second interdigital transducer on the piezoelectric layer; forming a first dielectric layer on the piezoelectric layer, the first dielectric layer covering the first interdigital transducer and the second interdigital transducer, adjusting the thickness of the first dielectric layer to adjust the frequency of the surface acoustic wave filter device to a transition frequency; forming a second dielectric layer on the first dielectric layer, and adjusting the thickness of the second dielectric layer based on the transition frequency to adjust the frequency of the surface acoustic wave filter device to a target frequency, the transition frequency being greater than the target frequency. The method adjusts the frequency of the surface acoustic wave filter device through two dielectric layers, thereby accurately controlling the frequency of the surface acoustic wave filter device and improving the performance and reliability of the surface acoustic wave filter device.
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