A data screening method and device in SPC system
By providing a graphical user interface in the SPC system, users can create and combine new target filtering dimensions and conditions, solving the problem of single data filtering function in the existing technology, and achieving flexible and efficient data screening and improving data analysis efficiency.
Patent Information
- Application Number
- CN202411836711.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-13
- Publication Date
- 2025-04-08
AI Technical Summary
The data filtering function of the existing SPC system is simple to design and only supports basic screening from a single dimension pre-fixed in the system, which cannot meet the user's personalized and diversified complex screening needs.
By providing a graphical user interface in the SPC system, users can create and combine new target filtering dimensions and corresponding target filtering conditions to filter out data that meets the needs from the semiconductor production database.
It realizes flexible and efficient screening of data, enriches the dimensions of data analysis, and improves data analysis efficiency.
Smart Images
Figure CN119781855A_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of data processing, and in particular to a method and device for data screening in an SPC system. Background Art
[0002] In the current application cases of the existing SPC system, the design of the data screening function is relatively simple and the functions are relatively single. It only supports basic screening from a single dimension pre-fixed in the system, and cannot meet the personalized and diversified complex screening needs of users. Summary of the invention
[0003] In view of this, the purpose of the present application is to provide a data screening method and device in an SPC system, which can flexibly and efficiently combine new target screening dimensions and corresponding target screening conditions through simple operations on the original screening dimensions already existing in the SPC system when there is a need for data screening, and screen out semiconductor production data that meets the needs from the semiconductor production database, thereby enriching the dimensions of data analysis and improving data analysis efficiency.
[0004] The present application embodiment provides a data screening method in an SPC system, wherein the SPC system provides a graphical user interface through a terminal device; a screening condition configuration interface is displayed in the graphical user interface; the data screening method includes:
[0005] In response to a dimension creation operation for a filtering dimension item in the filtering condition configuration interface, creating a target filtering dimension;
[0006] For the target screening dimension, in response to a dimension selection operation for the screening dimension item, multiple original screening dimensions are selected from a screening dimension library preset in the SPC system, and an association relationship between the target screening dimension and the multiple original screening dimensions is established;
[0007] In response to a condition configuration operation on a screening condition item in the screening condition configuration interface, configuring a target screening condition corresponding to the target screening dimension;
[0008] Using the screening condition corresponding to the target screening dimension, semiconductor production data that meets the target screening condition is screened out from the semiconductor production database.
[0009] Furthermore, the data screening method also includes:
[0010] The target screening dimension is saved in the screening dimension library as an original screening dimension for subsequent selection.
[0011] Further, in response to a condition configuration operation for a screening condition item in the screening condition configuration interface, configuring a target screening condition corresponding to the target screening dimension includes:
[0012] In response to a first condition configuration operation on a filter condition item in the filter condition configuration interface, configuring a sub-filter condition corresponding to each original filter dimension;
[0013] In response to a second condition configuration operation for the screening condition item, configuring a logical operation relationship between sub-screening conditions corresponding to each original screening dimension;
[0014] The sub-screening conditions corresponding to each original screening dimension and the logical operation relationship between the sub-screening conditions corresponding to each original screening dimension are combined to obtain the target screening condition corresponding to the target screening dimension.
[0015] Further, in response to the first condition configuration operation for the filtering condition item in the filtering condition configuration interface, configuring the sub-filtering condition corresponding to each original filtering dimension includes:
[0016] For each original screening dimension, in response to the first condition configuration operation, displaying candidate data collection items of semiconductor production data associated with the original screening dimension;
[0017] Select a target data collection item from the candidate data collection items, and determine a conditional operator and a data value range corresponding to the target data collection item;
[0018] According to the target data collection item, the corresponding conditional operator and the data value range, a sub-screening condition corresponding to the original screening dimension is generated.
[0019] Furthermore, the data screening method also includes:
[0020] For the target screening dimension, in response to a dimension selection operation for the screening dimension item, displaying selectable data collection items in the semiconductor production database that are not associated with any screening dimension;
[0021] A target data collection item is selected from the optional data collection items and associated with the target screening dimension.
[0022] Furthermore, the graphical user interface also displays a data preview interface; the data screening method also includes:
[0023] In the process of configuring the target screening condition corresponding to the target screening dimension, the real-time screening effect of the screening condition in the configuration process is displayed through the data preview interface.
[0024] Furthermore, the data screening method is encapsulated as an independent screening component in the SPC system; the SPC system calls the screening component to execute the data screening method in response to a user's data screening request.
[0025] The embodiment of the present application further provides a data screening device in an SPC system, wherein the SPC system provides a graphical user interface through a terminal device; a screening condition configuration interface is displayed in the graphical user interface; the data screening device comprises:
[0026] A creation module, configured to create a target filtering dimension in response to a dimension creation operation on a filtering dimension item in the filtering condition configuration interface;
[0027] a selection module, configured to select, for the target screening dimension, a plurality of original screening dimensions from a screening dimension library preset in the SPC system in response to a dimension selection operation for the screening dimension item, and establish an association relationship between the target screening dimension and the plurality of original screening dimensions;
[0028] A configuration module, configured to configure a target screening condition corresponding to the target screening dimension in response to a condition configuration operation on a screening condition item in the screening condition configuration interface;
[0029] The screening module is used to use the screening conditions corresponding to the target screening dimension to screen out semiconductor production data that meets the target screening conditions from the semiconductor production database.
[0030] An embodiment of the present application also provides an electronic device, including: a processor, a memory and a bus, wherein the memory stores machine-readable instructions executable by the processor, and when the electronic device is running, the processor and the memory communicate through the bus, and when the machine-readable instructions are executed by the processor, the steps of the data screening method in the SPC system as described above are performed.
[0031] An embodiment of the present application further provides a computer-readable storage medium having a computer program stored thereon. When the computer program is executed by a processor, the steps of the data screening method in the SPC system described above are executed.
[0032] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, preferred embodiments are specifically cited below and described in detail with reference to the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS
[0033] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.
[0034] Figure 1 A flow chart showing a method for data screening in an SPC system provided by an embodiment of the present application is shown;
[0035] Figure 2 A schematic diagram of the structure of a data screening device in an SPC system provided by an embodiment of the present application is shown;
[0036] Figure 3 A schematic structural diagram of an electronic device provided in an embodiment of the present application is shown. DETAILED DESCRIPTION
[0037] To make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all of the embodiments. The components of the embodiments of the present application usually described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the application claimed for protection, but merely represents the selected embodiments of the present application. Based on the embodiments of the present application, each other embodiment obtained by those skilled in the art without making creative work belongs to the scope of protection of the present application.
[0038] Research has found that in the current application cases of SPC systems, the data screening function is relatively simple in design and has relatively single functions. It only supports basic screening from a single dimension pre-fixed in the system, and cannot meet users' personalized and diversified complex screening needs.
[0039] Based on this, an embodiment of the present application provides a data screening method in an SPC system to enrich the dimensions of data analysis and improve data analysis efficiency.
[0040] First of all, the application scenarios to which this application can be applied are introduced. This application can be applied to the scenario of semiconductor production and manufacturing. In semiconductor production and manufacturing, the SPC (Statistical Process Control) system plays an important role, such as by collecting, analyzing and monitoring production data in the wafer production process, helping to identify and control variations in the production process, thereby improving product quality, reducing production costs and improving production efficiency. Because the semiconductor production process is very complex, involving multiple process steps and a large number of equipment, the amount of data that needs to be collected is also very large. When performing data analysis, the existing SPC system can only provide a single fixed dimension for basic screening.
[0041] See also Figure 1 , Figure 1 A flowchart of a data screening method in an SPC system provided in an embodiment of the present application. The SPC system provides a graphical user interface through a terminal device; a screening condition configuration interface is displayed in the graphical user interface. The data screening method in the embodiment of the present application is encapsulated as an independent screening component in the SPC system; the SPC system can call the screening component to execute the data screening method in response to a data screening request triggered by a user. In this way, the SPC system adopts a modular design and designs the screening function separately, which is convenient for flexibly increasing or decreasing screening conditions and adjusting logic according to needs, thereby reducing the intrusiveness to the entire system.
[0042] like Figure 1 As shown in , the data screening method provided in the embodiment of the present application includes:
[0043] S101. In response to a dimension creation operation for a filtering dimension item in the filtering condition configuration interface, create a target filtering dimension.
[0044] Here, the screening dimension refers to the aspect or angle of screening semiconductor production data. The required production data can be accurately located through the screening dimension.
[0045] In this step, by triggering the dimension creation operation for the filter dimension item in the filter condition configuration interface, a new target filter dimension can be created. Specifically, a target filter dimension can be created by setting the dimension name, dimension number, and dimension storage location, but the target filter dimension does not contain specific data content at this time.
[0046] S102: For the target screening dimension, in response to a dimension selection operation for the screening dimension item, select a plurality of original screening dimensions from a screening dimension library preset in the SPC system, and establish an association relationship between the target screening dimension and the plurality of original screening dimensions.
[0047] Here, the SPC system is preset with a screening dimension library, which stores multiple configured original screening dimensions. In this step, by triggering the dimension selection operation for the screening dimension item in the screening condition configuration interface, multiple original screening dimensions can be selected from the screening dimension library, and an association relationship between the target screening dimension and the selected multiple original screening dimensions can be established, so that in the subsequent steps, the specific data content of the target screening dimension can be derived through the combination of multiple original screening dimensions.
[0048] S103: In response to a condition configuration operation on a filter condition item in the filter condition configuration interface, configure a target filter condition corresponding to the target filter dimension.
[0049] In this step, by triggering the condition configuration operation for the filter condition item in the filter condition configuration interface, each original filter dimension associated with the target filter dimension can be displayed based on the association relationship; the filter condition corresponding to each original filter dimension is called or configured, and then the target filter condition corresponding to the target filter dimension is obtained by combining.
[0050] In a possible implementation, step S103 may include:
[0051] S1031. In response to a first condition configuration operation on a filter condition item in the filter condition configuration interface, configure a sub-filter condition corresponding to each original filter dimension.
[0052] In a specific implementation, for each original screening dimension, first, in response to the first condition configuration operation, candidate data collection items of semiconductor production data associated with the original screening dimension are displayed.
[0053] Among them, each original screening dimension can be associated with at least one candidate data collection item. Data collection items refer to the original data items actually collected at the semiconductor production site. For example, the size information of a batch of wafers is measured by the measurement station on the production line. The SPC system collects the size information of the batch of wafers from the measurement station and saves it as the production data of the batch of wafers. At this time, the size information is a data collection item, and the corresponding original screening dimension can be the product quality dimension; this original screening dimension can also be associated with data collection items such as resistivity and defect rate. In specific implementation, the data collection items in the semiconductor production database can be clustered into multiple original screening dimensions through a clustering algorithm to form a screening dimension library.
[0054] Secondly, a target data collection item is selected from the candidate data collection items, and a conditional operator and a data value range corresponding to the target data collection item are determined.
[0055] Exemplarily, the conditional operators include equal to, not equal to, contain, not contain, greater than, less than, less than or equal to, interval, with value, no value, etc. The data value range can be a specific value interval, a single value, or a string, etc.
[0056] In specific implementation, a selection operation may be triggered to select a required target data collection item from candidate data collection items, and a conditional operator and a data value range corresponding to the target data collection item may be determined through selection operations, input operations, and the like.
[0057] Finally, according to the target data collection item, the corresponding conditional operator and the data value range, the sub-screening condition corresponding to the original screening dimension is generated.
[0058] Here, the target data collection item, the corresponding conditional operator and the data value range are combined to generate a sub-filtering condition corresponding to each original filter dimension.
[0059] S1032: In response to the second condition configuration operation for the filtering condition item, configure a logical operation relationship between sub-filtering conditions corresponding to each original filtering dimension.
[0060] In this step, by triggering the second condition configuration operation for the screening condition item, the basic logical operation relationship between the sub-screening conditions is configured. The basic logical operation includes "and" operation, "or" operation and "not" operation.
[0061] S1033. Combine the sub-screening conditions corresponding to each original screening dimension and the logical operation relationship between the sub-screening conditions corresponding to each original screening dimension to obtain the target screening condition corresponding to the target screening dimension.
[0062] In this step, complex target screening conditions can be generated by combining the sub-screening conditions according to logical operation relationships. For example, the combined target screening conditions can be that some of the sub-screening conditions are first subjected to an "AND" operation, and then subjected to an "OR" operation with another part of the sub-screening conditions in sequence.
[0063] In this way, the data screening method provided in the embodiment of the present application allows the user to freely customize the screening dimensions, and can combine multiple conditions to create new screening conditions, thereby improving the complexity and flexibility of the screening conditions.
[0064] S104: Use the screening condition corresponding to the target screening dimension to screen out semiconductor production data that meets the target screening condition from the semiconductor production database.
[0065] In this step, the screening conditions corresponding to the target screening dimension are applied to the semiconductor production database, so that semiconductor production data that meets the target screening conditions can be screened out from the database, that is, the data screening results under the target screening dimension that meet the requirements are obtained.
[0066] In this way, the required information can be accurately captured and the perspective of data analysis can be deepened; data can be viewed from multiple dimensions, thereby analyzing the data more comprehensively and accelerating the decision-making process.
[0067] Furthermore, the data screening method also includes:
[0068] For the target filtering dimension, in response to a dimension selection operation for the filtering dimension item, optional data collection items in the semiconductor production database that are not associated with any filtering dimension are displayed; a target data collection item is selected from the optional data collection items and associated with the target filtering dimension.
[0069] Here, considering that the data collection items actually collected at the semiconductor production site are numerous and prone to change, the SPC system will not correspond all data collection items to the original screening dimensions in the screening dimension library. Therefore, in the embodiment of the present application, in addition to the above-mentioned method of deriving the target screening dimension from the original screening dimension, the target screening dimension can also be generated directly from the data collection item.
[0070] Specifically, first, by triggering the dimension selection operation for the filter dimension item, the optional data collection items in the semiconductor production database that are not associated with any filter dimension are displayed in the interface. This is because if a data collection item required by the user is already associated with any original filter dimension, the target filter dimension can be derived from the original filter dimension using the aforementioned method, thereby ensuring the reuse rate of the original filter dimension and avoiding setting duplicate filter dimensions to increase redundant data in the system.
[0071] Afterwards, you can directly select the target data collection item from the optional data collection items and establish an association with the target filtering dimension; then, you can configure the conditional operator and data value range corresponding to the target data collection item, and then combine them to obtain the filtering condition corresponding to the target filtering dimension.
[0072] Furthermore, the data screening method also includes:
[0073] The target screening dimension is saved in the screening dimension library as an original screening dimension for subsequent selection.
[0074] In this way, the target filter dimension generated in the above way is saved to the filter dimension library, that is, as a new original filter dimension; when the user has a new data filtering requirement, the new original filter dimension can be used directly, or a new target filter dimension can be derived based on the new original filter dimension. In this way, as the SPC system runs, the filter dimension library is continuously enriched to meet more data analysis needs.
[0075] Furthermore, the graphical user interface also displays a data preview interface; the data screening method also includes:
[0076] In the process of configuring the target screening condition corresponding to the target screening dimension, the real-time screening effect of the screening condition in the configuration process is displayed through the data preview interface.
[0077] In this way, while users configure the filtering conditions, they can also receive instant feedback on the filtering effect. For example, a portion of exemplary data on semiconductor production can be provided, and the filtering conditions in the configuration can be run to display the preview data after filtering, thereby helping users to intuitively understand the filtering results and adjust the filtering conditions in a timely manner.
[0078] An embodiment of the present application provides a data screening method in an SPC system, wherein the SPC system provides a graphical user interface through a terminal device; a screening condition configuration interface is displayed in the graphical user interface; the data screening method comprises: in response to a dimension creation operation for a screening dimension item in the screening condition configuration interface, creating a target screening dimension; for the target screening dimension, in response to a dimension selection operation for the screening dimension item, selecting a plurality of original screening dimensions from a screening dimension library preset in the SPC system, and establishing an association relationship between the target screening dimension and the plurality of original screening dimensions; in response to a condition configuration operation for the screening condition item in the screening condition configuration interface, configuring a target screening condition corresponding to the target screening dimension; and using the screening condition corresponding to the target screening dimension, screening out semiconductor production data that meets the target screening condition from a semiconductor production database.
[0079] In this way, when there is a need for data screening, new target screening dimensions and corresponding target screening conditions can be flexibly and efficiently combined through simple operations on the original screening dimensions already existing in the SPC system, and semiconductor production data that meets the needs can be screened out from the semiconductor production database, thereby enriching the dimensions of data analysis and improving data analysis efficiency.
[0080] See also Figure 2 , Figure 2The schematic diagram of the structure of a data screening device in an SPC system provided in an embodiment of the present application. The SPC system provides a graphical user interface through a terminal device; the graphical user interface displays a screening condition configuration interface; Figure 2 As shown in , the data screening device 200 includes:
[0081] A creation module 210, configured to create a target filtering dimension in response to a dimension creation operation for a filtering dimension item in the filtering condition configuration interface;
[0082] A selection module 220 is configured to select, for the target screening dimension, a plurality of original screening dimensions from a screening dimension library preset in the SPC system in response to a dimension selection operation for the screening dimension item, and establish an association relationship between the target screening dimension and the plurality of original screening dimensions;
[0083] A configuration module 230, configured to configure a target screening condition corresponding to the target screening dimension in response to a condition configuration operation on a screening condition item in the screening condition configuration interface;
[0084] The screening module 240 is used to use the screening condition corresponding to the target screening dimension to screen out semiconductor production data that meets the target screening condition from the semiconductor production database.
[0085] Furthermore, the data screening device 200 further includes: a storage module; the storage module is used to:
[0086] The target screening dimension is saved in the screening dimension library as an original screening dimension for subsequent selection.
[0087] Further, when the configuration module 230 is used to configure the target filtering condition corresponding to the target filtering dimension in response to the condition configuration operation for the filtering condition item in the filtering condition configuration interface, the configuration module 230 is used to:
[0088] In response to a first condition configuration operation on a filter condition item in the filter condition configuration interface, configuring a sub-filter condition corresponding to each original filter dimension;
[0089] In response to a second condition configuration operation for the screening condition item, configuring a logical operation relationship between sub-screening conditions corresponding to each original screening dimension;
[0090] The sub-screening conditions corresponding to each original screening dimension and the logical operation relationship between the sub-screening conditions corresponding to each original screening dimension are combined to obtain the target screening condition corresponding to the target screening dimension.
[0091] Further, when the configuration module 230 is used to configure the sub-filtering condition corresponding to each original filtering dimension in response to the first condition configuration operation for the filtering condition item in the filtering condition configuration interface, the configuration module 230 is used to:
[0092] For each original screening dimension, in response to the first condition configuration operation, displaying candidate data collection items of semiconductor production data associated with the original screening dimension;
[0093] Select a target data collection item from the candidate data collection items, and determine a conditional operator and a data value range corresponding to the target data collection item;
[0094] According to the target data collection item, the corresponding conditional operator and the data value range, a sub-screening condition corresponding to the original screening dimension is generated.
[0095] Furthermore, the selection module 220 is also used for:
[0096] For the target screening dimension, in response to a dimension selection operation for the screening dimension item, displaying selectable data collection items in the semiconductor production database that are not associated with any screening dimension;
[0097] A target data collection item is selected from the optional data collection items and associated with the target screening dimension.
[0098] Furthermore, the graphical user interface also displays a data preview interface; the data screening device 200 also includes: a preview module; the preview module is used to:
[0099] In the process of configuring the target screening condition corresponding to the target screening dimension, the real-time screening effect of the screening condition in the configuration process is displayed through the data preview interface.
[0100] Furthermore, the data screening method is encapsulated as an independent screening component in the SPC system; the SPC system calls the screening component to execute the data screening method in response to a user's data screening request.
[0101] See also Figure 3 , Figure 3 This is a schematic diagram of the structure of an electronic device provided in an embodiment of the present application. Figure 3 As shown in , the electronic device 300 includes a processor 310 , a memory 320 and a bus 330 .
[0102] The memory 320 stores machine-readable instructions executable by the processor 310. When the electronic device 300 is running, the processor 310 communicates with the memory 320 via the bus 330. When the machine-readable instructions are executed by the processor 310, the above-mentioned Figure 1 The steps of the data screening method in the SPC system in the method embodiment shown in the figure, and the specific implementation manner can be found in the method embodiment, which will not be repeated here.
[0103] The present application also provides a computer-readable storage medium on which a computer program is stored. When the computer program is executed by a processor, the computer program can execute the above-mentioned Figure 1 The steps of the data screening method in the SPC system in the method embodiment shown in the figure, and the specific implementation manner can be found in the method embodiment, which will not be repeated here.
[0104] Those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working processes of the systems, devices and units described above can refer to the corresponding processes in the aforementioned method embodiments and will not be repeated here.
[0105] In the several embodiments provided in the present application, it should be understood that the disclosed systems, devices and methods can be implemented in other ways. The device embodiments described above are merely schematic. For example, the division of the units is only a logical function division. There may be other division methods in actual implementation. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some communication interfaces, and the indirect coupling or communication connection of devices or units can be electrical, mechanical or other forms.
[0106] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.
[0107] In addition, each functional unit in each embodiment of the present application may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit.
[0108] If the functions are implemented in the form of software functional units and sold or used as independent products, they can be stored in a non-volatile computer-readable storage medium that is executable by a processor. Based on this understanding, the technical solution of the present application can essentially be embodied in the form of a software product, or in other words, the part that contributes to the prior art or the part of the technical solution. The computer software product is stored in a storage medium, including several instructions for a computer device (which can be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the method described in each embodiment of the present application. The aforementioned storage medium includes: various media that can store program codes, such as a USB flash drive, a mobile hard disk, a read-only memory (ROM), a random access memory (RAM), a magnetic disk or an optical disk.
[0109] Finally, it should be noted that the above-described embodiments are only specific implementation methods of the present application, which are used to illustrate the technical solutions of the present application, rather than to limit them. The protection scope of the present application is not limited thereto. Although the present application is described in detail with reference to the above-mentioned embodiments, ordinary technicians in the field should understand that any technician familiar with the technical field can still modify the technical solutions recorded in the above-mentioned embodiments within the technical scope disclosed in the present application, or can easily think of changes, or make equivalent replacements for some of the technical features therein; and these modifications, changes or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application, and should be included in the protection scope of the present application. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.
Claims
1. A data screening method in an SPC system, characterized in that: The SPC system provides a graphical user interface through a terminal device; The graphical user interface displays a screening condition configuration interface; The data screening method comprises: In response to a dimension creation operation for a filtering dimension item in the filtering condition configuration interface, creating a target filtering dimension; For the target screening dimension, in response to a dimension selection operation for the screening dimension item, multiple original screening dimensions are selected from a screening dimension library preset in the SPC system, and an association relationship between the target screening dimension and the multiple original screening dimensions is established; In response to a condition configuration operation on a screening condition item in the screening condition configuration interface, configuring a target screening condition corresponding to the target screening dimension; Using the screening condition corresponding to the target screening dimension, semiconductor production data that meets the target screening condition is screened out from the semiconductor production database.
2. The data screening method according to claim 1, characterized in that: The data screening method further comprises: The target screening dimension is saved in the screening dimension library as an original screening dimension for subsequent selection.
3. The data screening method according to claim 1, characterized in that: In response to a condition configuration operation on a screening condition item in the screening condition configuration interface, configuring a target screening condition corresponding to the target screening dimension includes: In response to a first condition configuration operation on a filter condition item in the filter condition configuration interface, configuring a sub-filter condition corresponding to each original filter dimension; In response to a second condition configuration operation for the screening condition item, configuring a logical operation relationship between sub-screening conditions corresponding to each original screening dimension; The sub-screening conditions corresponding to each original screening dimension and the logical operation relationship between the sub-screening conditions corresponding to each original screening dimension are combined to obtain the target screening condition corresponding to the target screening dimension.
4. The data screening method according to claim 3, characterized in that: In response to a first condition configuration operation on a filter condition item in the filter condition configuration interface, configuring a sub-filter condition corresponding to each original filter dimension includes: For each original screening dimension, in response to the first condition configuration operation, displaying candidate data collection items of semiconductor production data associated with the original screening dimension; Select a target data collection item from the candidate data collection items, and determine a conditional operator and a data value range corresponding to the target data collection item; According to the target data collection item, the corresponding conditional operator and the data value range, a sub-screening condition corresponding to the original screening dimension is generated.
5. The method according to claim 1, characterized in that The data screening method further comprises: For the target screening dimension, in response to a dimension selection operation for the screening dimension item, displaying selectable data collection items in the semiconductor production database that are not associated with any screening dimension; A target data collection item is selected from the optional data collection items and associated with the target screening dimension.
6. The data screening method according to claim 1, characterized in that: The graphical user interface also displays a data preview interface; the data screening method also includes: In the process of configuring the target screening condition corresponding to the target screening dimension, the real-time screening effect of the screening condition in the configuration process is displayed through the data preview interface.
7. The data screening method according to claim 1, characterized in that: The data screening method is encapsulated as an independent screening component in the SPC system; the SPC system calls the screening component to execute the data screening method in response to a user's data screening request.
8. A data screening device in an SPC system, characterized in that: The SPC system provides a graphical user interface through a terminal device; The graphical user interface displays a screening condition configuration interface; The data screening device comprises: A creation module, configured to create a target filtering dimension in response to a dimension creation operation on a filtering dimension item in the filtering condition configuration interface; a selection module, configured to select, for the target screening dimension, a plurality of original screening dimensions from a screening dimension library preset in the SPC system in response to a dimension selection operation for the screening dimension item, and establish an association relationship between the target screening dimension and the plurality of original screening dimensions; A configuration module, configured to configure a target screening condition corresponding to the target screening dimension in response to a condition configuration operation on a screening condition item in the screening condition configuration interface; The screening module is used to use the screening conditions corresponding to the target screening dimension to screen out semiconductor production data that meets the target screening conditions from the semiconductor production database.
9. An electronic device, characterized in that: include: A processor, a memory and a bus, wherein the memory stores machine-readable instructions executable by the processor, and when the electronic device is running, the processor and the memory communicate through the bus, and the machine-readable instructions are executed by the processor to execute the steps of the data screening method as described in any one of claims 1 to 7.
10. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores a computer program, and when the computer program is executed by a processor, the steps of the data screening method according to any one of claims 1 to 7 are executed.