A lifting centering clamping device for conveying silicon rods in a silicon rod grinding machine

Abstract

The application belongs to the technical field of single crystal silicon rod processing, and particularly relates to a lifting centering and clamping device for conveying silicon rods of a crystal silicon rod grinding machine, which comprises a cabinet, two opposite sliding moving panels symmetrically arranged on the upper side of the cabinet, first supports fixedly connected to the two ends of the moving panels on the upper side and close to each other, rotating discs rotatably connected in each first support, a plurality of sliding blocks slidingly connected in each rotating disc, clamping jaws fixedly connected to the end of each sliding block, a group of sliding grooves formed at the two sides of each rotating disc and each sliding block, and a sliding pin slidingly connected in each group of sliding grooves and fixedly connected to the corresponding sliding block. Each group of clamping jaws is used for clamping the end and the edge of the end of a crystal rod. A lifting component is arranged in the cabinet. The cooperation of the push piece and the convex ring enables the clamping jaw to keep a specific clamping jaw retraction to leave a grinding area when the crystal rod is clamped, so that a recess does not need to be pre-processed on the end of the crystal rod to cooperate with a ejector pin, and the material of the end of the crystal rod can also be used, thereby saving raw materials.

Description

Technical Field

[0001] The present invention belongs to the technical field of single crystal silicon rod processing, and specifically relates to a lifting centering and clamping device for transporting silicon rods on a silicon rod grinding machine. Background Art

[0002] As an important semiconductor material, single crystal silicon has good electrical properties and thermal stability. Since it was discovered and utilized in the 1960s, it has quickly replaced germanium single crystal as the main semiconductor material. Due to its good high-temperature resistance and radiation resistance, it is especially suitable for making high-power devices, and thus has become the most widely used semiconductor material. Most integrated circuit semiconductor devices are made of silicon materials.

[0003] When producing single crystal silicon products, first, a cylindrical single crystal silicon rod is formed by pulling and growing in a single crystal furnace. Subsequently, the waste at the end of the single crystal silicon rod is truncated, or the single crystal silicon rod is simultaneously sliced to shorten its length. At this time, annular imprints formed during the pulling process will remain on the surface of the single crystal silicon rod, so the surface of the single crystal silicon rod needs to be polished to make its surface regular and smooth. Then, through processes such as slicing, cleaning, chamfering, grinding, and re-cleaning, and later, processes such as texturing, diffusion, crystallization, and sintering of the silicon wafers are also required before semiconductor devices or solar cell wafers for photovoltaic power generation can be manufactured.

[0004] In the prior art, an centerless grinding machine or a centering grinding machine is usually used to grind a single crystal silicon rod. When the requirement for concentricity is relatively high during processing, a centering grinding machine is generally used for grinding. When grinding the surface of a single crystal silicon rod, the single crystal silicon rod is usually placed on a machine tool, and then one end of the single crystal silicon rod is clamped by a three-jaw chuck. A positioning groove is provided on the other end face of the single crystal silicon rod, and the rotation position of the single crystal silicon rod is restricted by inserting a positioning column into the positioning groove. That is, the three-jaw chuck provides the rotation power for the single crystal silicon rod, and the rotation axis is determined by the cooperation of the positioning column and the positioning groove. However, during actual grinding, the clamping position of the three-jaw chuck on the single crystal silicon rod is difficult to be directly ground. It is necessary to expose the position of the single crystal silicon rod originally clamped by the three-jaw chuck during secondary grinding, and then perform secondary grinding at the exposed position, which increases the grinding process flow and reduces the grinding efficiency of the single crystal silicon rod.

[0005] Chinese Patent with the publication number CN118081498B discloses a single crystal silicon rod grinding machine, which includes a workbench. A first hydraulic cylinder is installed at the top of the workbench. The output end of the first hydraulic cylinder is provided with a first bracket. A driving roller is horizontally installed on the surface of the first bracket and is made of deformable rubber; at the center of both ends of the driving roller, support shafts are vertically installed; by setting the driving roller, docking grooves are opened at both ends of the rod body, and the docking shaft is inserted into the docking groove to limit the rotation position of the single crystal silicon rod. The driving roller provides rotational power for the single crystal silicon rod, and then cooperates with the grinding tool for rolling grinding; during the entire rolling grinding process, the surface of the rod body can be rolled and ground一次性, avoiding the clamping of the rod body by a three-jaw chuck from hindering the integrity of the rolling grinding.

[0006] However, the above patent still has the following disadvantages:

[0007] 1. According to the description of the above patent, the above patent drives the single crystal silicon rod to rotate through the driving roller. However, the axial position of the driving roller cannot be changed, which limits the diameter of the clamped crystal rod and cannot drive single crystal silicon rods with different diameters to rotate.

[0008] 2. The above patent pre-opens grooves at both ends of the single crystal silicon rod to facilitate clamping the single crystal silicon rod in the way of a center drill. However, this method requires an additional process of opening grooves, and the concentricity between the opened grooves and the center drill needs to be considered, which wastes time and increases the processing difficulty, affects the continuity of processing production, and reduces the processing efficiency.

[0009] 3. According to the description of the above patent, the single crystal silicon rod needs to be grooved at both ends before it can be clamped with a center drill. Then the materials at both ends of the single crystal silicon rod cannot be used after slicing, resulting in waste of raw materials and increasing production costs. Summary of the Invention

[0010] In order to overcome the deficiencies of the prior art, the technical problem to be solved by the present invention is that by providing a slider and a clamping jaw that slide obliquely, it is possible to stably clamp wafers with different diameters. And by providing a movable panel with adjustable position, it is possible to clamp wafers with different lengths, thereby achieving stable clamping of wafers with different sizes and having a large scope of application. By providing the cooperation of a dial and a convex ring, when the clamping jaw clamps, drives and rotates the wafer, the clamping jaw corresponding to the convex ring always disengages from the surface of the wafer and避让出打磨区域, relative to the traditional method of clamping with a three-jaw chuck and a center drill, there is no need to turn and polish again after one grinding and polishing, improving the production and processing efficiency. And relative to the method of clamping with two center drills, there is no need to pre-process a groove at the end of the wafer to cooperate with the center drill, thus saving processes and improving processing efficiency. And because there is no need to process the groove, the material at the end of the wafer can also be used, saving raw materials. By providing a support base and a roller base, it is possible to connect the feeding system in the previous process of wafer processing, improving the continuity of automated production. And by using a support roller, the wafer can be lifted to the corresponding position of the clamping jaw, facilitating the clamping of the wafer by the clamping jaw. Moreover, the support roller can bear the bottom side of the wafer to provide an additional support force, ensuring the force balance on the wafer and avoiding defects such as cracks in the wafer caused by the pressure of the grinding device and uneven force.

[0011] In order to achieve the above object, the present invention provides the following technical solution: A lifting centering and clamping device for conveying silicon wafers in a silicon wafer grinding machine, comprising:

[0012] A cabinet, on the upper side of the cabinet, two oppositely sliding movable panels are symmetrically distributed. At the two ends of the upper sides of the two movable panels close to each other, a first bracket is fixedly connected. In each first bracket, a turntable is rotatably connected. In each turntable, a plurality of sliders are slidably connected in a circumferential direction. At the end of each slider, a clamping jaw is fixedly connected;

[0013] A chute, at the two sides of each slider on each turntable, a set of chutes is provided. Each set of chutes is obliquely arranged, and in each set of chutes, a slide pin is slidably connected;

[0014] Among them, each slide pin is fixedly connected to the corresponding slider. Each clamping jaw is L-shaped. Each set of clamping jaws is used to clamp the end and the end edge of the wafer. A lifting component is provided in the cabinet.

[0015] Further, at the end of each slider away from the clamping jaw, a connecting rod is slidably connected. At the two ends of the two movable panels away from each other, a second bracket is fixedly connected respectively. On the side of each second bracket away from the first bracket, a first electric cylinder is fixedly connected. The extending end of each first electric cylinder passes through the second bracket and is fixedly connected to a top plate. Each top plate can abut against the end of the corresponding connecting rod. At the top of each top plate, a fan-shaped inclined opening is provided.

[0016] Furthermore, a steel ball head is fixedly connected to the end of each connecting rod away from the slider. A steel ball is rotatably arranged in each steel ball head. A steel ball groove is formed on the surface of each top plate at the rolling area of the steel ball. An inclined opening is formed at the edge of each steel ball groove at the notch.

[0017] Furthermore, a transmission disc is rotatably connected to one side of each top plate close to the turntable. Each transmission disc is slidably connected to the corresponding connecting rod. A toothed ring is fixedly connected to the outside of each transmission disc. A gear seat is fixedly connected to each moving panel. A gear is rotatably connected between each gear seat and the corresponding second bracket. Each gear is slidably and meshingly connected to the corresponding toothed ring. A reduction box is fixedly connected to one side of each second bracket away from the turntable. The power output end of each reduction box is传动连接 with the corresponding gear. The power input end on one side of each reduction box away from the second bracket is传动连接 with a first motor.

[0018] Furthermore, a convex ring surrounding the outside of the connecting rod is arranged between each first bracket and the corresponding transmission disc. A connecting plate is fixedly connected between each convex ring and the corresponding top plate. A slope is arranged at the position corresponding to the notch on one side of each convex ring away from the turntable. A dial that can slide on the slope of the convex ring is fixedly connected to the outside of each connecting rod. A spring surrounding the outside of the connecting rod is connected between each dial and the corresponding transmission disc.

[0019] Furthermore, a set of telescopic connecting sleeves is fixedly connected at the axis center between each transmission disc and the corresponding turntable. Each set of telescopic connecting sleeves can freely telescopically slide. A set of slide bars is fixedly connected between each second bracket and the corresponding first bracket. Each set of slide bars is slidably connected to the corresponding top plate and convex ring.

[0020] Furthermore, slide rails are symmetrically distributed and fixedly connected to both sides of each moving panel on the surface of the cabinet. A set of sliding seats is slidably connected to each slide rail. Each set of sliding seats is fixedly connected to the bottom side of the corresponding moving panel.

[0021] Furthermore, a set of lead screw seats is fixedly connected to the surface of the cabinet below each moving panel in the moving direction of the moving panel. A lead screw is rotatably connected between each set of lead screw seats. A second motor is fixedly connected to the end of each set of lead screw seats. The power output end of each second motor is传动连接 with the lead screw.

[0022] It should be noted that there are some unclear expressions like "传动连接" in the original text which might need further clarification in the context to ensure more accurate translation. Here, a more general "connected" is used as a placeholder for now.Furthermore, the lifting component includes a roller seat. Two roller seats are symmetrically arranged at the middle of the cabinet. A support roller is rotatably connected to each roller seat. A third bracket is fixedly connected below the two roller seats in the cabinet. A second electric push cylinder is fixedly connected to the third bracket below each roller seat. The extending end of each second electric push cylinder passes through the third bracket and is fixedly connected to the corresponding roller seat.

[0023] Furthermore, linear drive tracks are symmetrically and fixedly connected to the surface of the cabinet at both ends of the roller seats. A set of support seats are fixedly connected to the moving ends above each linear drive track.

[0024] In summary, compared with the prior art, the beneficial effects of the present invention are as follows:

[0025] (1) By providing the inclined sliding slider and the clamping jaws, it is possible to stably clamp wafers with different diameters. By providing the movable panel with adjustable position, it is possible to clamp wafers with different lengths, thereby achieving stable clamping of wafers with different sizes and having a large application range.

[0026] (2) Through the cooperation of the dial and the convex ring, when the clamping jaws clamp and drive the wafer to rotate, the clamping jaws corresponding to the convex ring always remain separated from the surface of the wafer and avoid the grinding area. Compared with the traditional clamping method of combining a three-jaw chuck and a center pin, there is no need to turn and grind again after one grinding and polishing, which improves the production and processing efficiency.

[0027] (3) And compared with the double center pin clamping method, there is no need to pre-process a groove at the end of the wafer to cooperate with the center pin, thus saving processes and improving processing efficiency. And because there is no need to process the groove, the material at the end of the wafer can also be used, saving raw materials.

[0028] (4) By providing the support seats and the roller seats, it is possible to connect the feeding system in the previous process of wafer processing, improving the continuity of automated production. And the support roller can lift the wafer to the corresponding position of the clamping jaws, facilitating the clamping of the wafer by the clamping jaws. Moreover, the support roller can bear the bottom side of the wafer to provide an additional supporting force, ensuring the force balance on the wafer and avoiding defects such as cracks in the wafer caused by the pressure of the grinding device and uneven force. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 is a three-dimensional schematic diagram of this patent.

[0030] Figure 2 is a side view of this patent.

[0031] Figure 3 is Figure 2 a three-dimensional cross-sectional view at A-A in

[0032] Figure 4 For Figure 3 The partial enlarged view at position B in

[0033] Figure 5 This is a schematic structural diagram of the main mechanism of this patent.

[0034] Figure 6 This is a schematic structural diagram of the main mechanism from another perspective of this patent.

[0035] Figure 7 This is a schematic structural diagram of the turntable in this patent.

[0036] Figure 8 This is a schematic structural diagram of the top plate in this patent.

[0037] Explanation of reference numerals in the drawings: Cabinet 10; Moving panel 11; First bracket 12; Turntable 13; Slide block 14; Claw 15; Chute 16; Slide pin 17; Connecting rod 18; Pusher 19; Convex ring 20; Steel ball head 21; Steel ball 22; Top plate 23; Steel ball groove 24; Notch 25; Bevel 26; Driving disk 27; Spring 28; Tooth ring 29; Gear 30; Gear seat 31; Reduction box 32; First motor 33; First electric push cylinder 34; Second bracket 35; Connecting plate 36; Telescopic connecting sleeve 37; Slide bar 38; Screw slider 39; Screw seat 40; Screw 41; Second motor 42; Slide rail 43; Sliding seat 44; Linear driving track 45; Support seat 46; Roller seat 47; Support roller 48; Third bracket 49; Second electric push cylinder 50. Detailed implementation manners

[0038] In order to enable those skilled in the art to better understand the solution of this invention, the technical solutions in the embodiments of this invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of this invention.

[0039] As Figure 1-8 shown, a lifting centering and clamping device for transporting silicon rods of a silicon rod grinder includes a moving panel 11. Two moving panels 11 are arranged opposite to each other. A first bracket 12 is fixedly connected to the upper side of each moving panel 11. A turntable​By setting a sliding slider 14 and a jaw 15, it is possible to stably hold wafers of different diameters. When the jaw 15 holds the wafer and drives the wafer to rotate, the jaw 15 at a specific position can be tilted and moved to avoid the position where the grinding device grinds and polishes the wafer, so that the wafer can be comprehensively and fully ground and polished. Compared with the traditional method of clamping with a three-jaw chuck and a center drill, there is no need to turn and grind again after one grinding and polishing, which improves the production and processing efficiency. And compared with the method of clamping with two center drills, there is no need to pre-process a groove at the end of the wafer to fit the center drill, thus saving processes and improving processing efficiency. And because there is no need to process the groove, the material at the end of the wafer can also be used, saving raw materials.

[0041] As Figure 1-8 As shown, symmetrically distributed and fixedly connected with slide rails 43 are provided on both sides of each moving panel 11 on the surface of the cabinet 10. A set of sliding seats 44 are slidably connected to each slide rail 43, and each set of sliding seats 44 is fixedly connected to the bottom side of the corresponding moving panel 11. A set of lead screw seats 40 are fixedly connected to the surface of the cabinet 10 below each moving panel 11 in the moving direction of the moving panel 11. A lead screw 41 is rotatably connected between each set of lead screw seats 40. A second motor 42 is fixedly connected to the end of each set of lead screw seats 40, and the power output end of each second motor 42 is drivingly connected to the lead screw 41.

[0042] By setting the lead screw 41 and the lead screw slider 39, the distance between the two moving panels 11 can be stably adjusted. In cooperation with the adjustment of the jaw 15 for different diameters of the wafer, the adaptability adjustment can be carried out for wafers of different lengths to further meet the stable clamping of wafers of different sizes.

[0043] As Figure 1-8 As shown, a connecting rod 18 is slidably connected to one end of each slider 14 away from the jaw 15. A second bracket 35 is fixedly connected to one end of the upper side of each moving panel 11 away from the first bracket 12. A first electric push cylinder 34 is fixedly connected to one side of each second bracket 35 away from the first bracket 12. The extending end of each first electric push cylinder 34 passes through the second bracket 35 and is fixedly connected to a top plate 23. A set of connecting plates 36 are fixedly connected to each edge. One end of each set of connecting plates 36 away from the second bracket 35 is fixedly connected to a convex ring 20 surrounding the outside of the connecting rod 18. A fan-shaped notch 25 is opened at the top of each top plate 23 within the moving range of the connecting rod 18. A uniformly transitioning slope is provided at the position corresponding to the notch 25 on one side of each convex ring 20 close to the top plate 23. A dial 19 capable of sliding on the surface of the convex ring 20 is fixedly connected to each connecting rod 18.

[0044] By setting the top plate 23 and the connecting rod 18, the top plate 23 can exert a thrust on the connecting rod 18 to control the slider 14 to slide along the direction of the chute 16 in the turntable 13, so as to realize the function of adjusting the clamping diameter of the clamping jaw 15. By setting the convex ring 20 to cooperate with the拨片19 (it seems there is a missing translation for "拨片19" here, assuming it's a misspelling and should be something like "paddle 19"), the connecting rod 18 automatically retracts above the ingot, causing the clamping jaw 15 to move obliquely to avoid the grinding position. By setting the notch 25, a moving space for the retracted connecting rod 18 can be left.

[0045] One end of each connecting rod 18 away from the slider 14 is fixedly connected with a steel ball head 21, and a steel ball 22 is rollingly connected in each steel ball head 21. Figure 1-8 As shown, each top plate 23 is provided with a steel ball groove 24 at the position where the steel ball 22 moves. The top plate 23 and the steel ball groove 24 are surface hardened. Each steel ball 22 rolls on the surface of the corresponding steel ball groove 24. Each steel ball groove 24 is provided with an inclined opening 26 at the edge of the notch 25. A set of slide rods 38 are fixedly connected between each second bracket 35 and the corresponding first bracket 12. Each set of slide rods 38 is slidably connected with the corresponding top plate 23 and the convex ring 20.

[0046] Since the top plate 需对连杆18施加推力 (it seems there is a missing translation for this part, assuming it should be something like "needs to exert a thrust on the connecting rod 18"), the end of the connecting rod 18 needs to abut against the surface of the top plate 23 and make a circular motion. By setting the steel ball 22, the steel ball 22 can be used to roll on the steel ball groove 24 to reduce the friction between the connecting rod 18 and the surface of the top plate 23 when the connecting rod 18 makes a circular motion, thereby reducing wear and increasing the service life. By setting the inclined opening 26, it is convenient for the steel ball 22 to slide back into the steel ball groove 24.

[0047] By setting the slide rods 38, it plays a guiding role for the top plate 23 and the convex ring 20, thereby improving the stability when the top plate 23 exerts a thrust on the connecting rod 18 and ensuring the stability of the convex ring 20 to ensure that the connecting rod 18 can retract stably at a specific position.

[0048] 如 Figure 1-8 As shown, one end of each top plate 23 close to the turntable 13 is rotatably connected with a transmission disk 27. Each transmission disk 27 is slidably connected with the corresponding connecting rod 18. A spring 28 surrounding the outside of the connecting rod 18 is connected between the transmission disk 27 and the corresponding paddle 19 (again, assuming the correct translation for "拨片19"). Each transmission disk 2, it seems there is a missing translation for this part, assuming it should be something like "transmission disk 27" here) is fixedly connected with a telescopic connecting sleeve 37 that can slide freely at the center of the corresponding turntable 13. A toothed ring 29 is fixedly connected to the outside of each transmission disk 27. A gear seat 31 is fixedly connected to the upper side of each moving panel 11. A gear 30 is rotatably connected between each gear seat 31 and the corresponding second bracket 35. Each gear 30 is slidably and meshingly connected with the corresponding toothed ring 29. A reduction box 32 is fixedly connected to the side of each second bracket 35 away from the turntable 13. The power output end of each reduction box 32 is传动连接 with the corresponding gear 30 (it seems there is a missing translation for this part, assuming it should be something like "drivably connected"). The power input end on the side of each reduction box 32 away from the second bracket 35 is drivably connected with a first motor 33. It should be noted that there are some parts in the original text that seem to have incomplete or incorrect expressions, which may affect the accuracy of the translation. Please check and correct the original text for a more accurate translation.

[0049] By setting the driving disk 27 and the telescopic connecting sleeve 37, the turntable 13 and the connecting rod 18 can be stably and synchronously driven to rotate, thereby driving the ingot clamped by the clamping jaws 15 to rotate, so as to realize the grinding and polishing of the ingot. By setting the spring 28, a reset thrust can be provided after the dial 19 passes through the convex ring 20, so that the clamping jaws 15 clamp the ingot again. By using the sliding and meshing transmission of the gear ring 29 and the gear 30, even if the driving disk 27 moves axially, the gear ring 29 and the gear 30 always remain in a meshing transmission state, ensuring the continuity and stability of power output.

[0050] As Figure 1-8 shown, the lifting component includes roller seats 47. Two roller seats 47 are symmetrically arranged at the middle of the cabinet 10. A support roller 48 is rotatably connected to each roller seat 47. A third bracket 49 is fixedly connected to the cabinet 10 below the two roller seats 47. A second electric push cylinder 50 is fixedly connected to the third bracket 49 below each roller seat 47. The extending end of each second electric push cylinder 50 passes through the third bracket 49 and is fixedly connected to the corresponding roller seat 47. Linear drive rails 45 are symmetrically and fixedly connected to the surface of the cabinet 10 at both ends of the roller seats 47. A set of support seats 46 are fixedly connected to the moving ends above each linear drive rail 45.

[0051] By setting the support seats 46 and the roller seats 47, the feeding system in the previous process of ingot processing can be connected, the ingot can be translated as a whole to the position of the support roller 48, and then the support roller 48 can lift the ingot to the corresponding position of the clamping jaws 15, which is convenient for the clamping jaws 15 to clamp the ingot. Moreover, during the grinding of the ingot, the support roller 48 can bear the bottom side of the ingot to provide additional support force, ensure the force balance on the ingot, and avoid defects such as cracks in the ingot caused by the pressure of the grinding device and uneven force.

[0052] In this embodiment, initially, the operator connects the power supply and the control system of the device. At this time, the support roller 48 is at the lowest position, and the support seat 46 is on the outside. The first electric push cylinder 34 is in a contracted state. At this time, the distance between the clamping jaws 15 in the same group is the largest. A conveying device is arranged on the side close to the support seat 46, and a grinding roller of the grinding and polishing device is arranged above the device.

[0053] During operation, the conveying device feeds the ingot to be processed onto the two groups of support seats 46, and the support seats 46 bear the ingot. Then, the linear drive rail 45 is driven to make the support seat 46 move the ingot to the corresponding position of the support roller 48. Then, the support roller 48 lifts, bears the lower side of the ingot and lifts the ingot upward until the ingot脱离 the support seat 46 and moves to the position coaxial with the turntable 13. Then, the support seat 46 resets.

[0054] Then, synchronously drive and control the second motor 42 and the first electric push cylinder 34. The second motor 42 drives the rotation of the lead screw 41, and then drives the lead screw slider 39 to slide and adjust the position of the moving panel 11 in the linear direction of the slide rail 43. The first electric push cylinder 34 extends to push the top plate 23 and extrudes and pushes the connecting rod 18. Since the end of the connecting rod 18 is slidably connected to the slider 14, when the connecting rod 18 is pushed, the slider 14 slides obliquely along the direction of the chute 16, causing the distance between the jaws 15 in the same group to gradually decrease until the L-shaped jaws 15 clamp the circular edge of the ingot and abut against both end faces of the ingot. Moreover, since the distance between the two moving panels 11 and the distance between the jaws 15 in the same group are adjustable, the ingots with different lengths and diameters can be stably clamped.

[0055] After the clamping operation is completed, the support roller 48 still supports the bottom side of the ingot. At this time, the connecting rod 18 located on the slope of the convex ring 20 retracts due to the abutment of the拨片19 against the slope of the convex ring 20. Then, the jaw 15 corresponding to this connecting rod 18 disengages from the surface of the ingot to give way to the grinding position, and the end of this connecting rod 18 far from the jaw 15 extends out from the notch 25 and is not affected by the thrust of the top plate 23.

[0056] Subsequently, start the first motor 33 to drive the rotation of the gear 30 through the transmission of the reduction gearbox 32. The meshing transmission between the gear 30 and the gear ring 29 drives the transmission disk 27 to rotate. The transmission disk 27 drives the turntable 13 to rotate synchronously through the telescopic connecting sleeve 37, causing the jaws 15 to clamp the ingot and drive the ingot to rotate. At the same time, all the connecting rods 18 rotate together. However, the positions of the convex ring 20 and the top plate 23 remain unchanged, causing the steel balls 22 at the ends of the connecting rods 18 to roll in the circumferential direction on the surface of the steel ball groove 24, and each拨片19 slides on the surface of the convex ring 20. At this time, the grinding device performs the grinding and polishing work on the surface of the ingot.

[0057] As the connecting rod 18 rotates, the拨片19 located on the slope of the convex ring move out of the range of the slope of the convex ring 20, and the corresponding spring 28 releases its elasticity to push the connecting rod 18 to extend out again, causing the corresponding jaw 15 to contact and clamp the ingot again. The steel ball 22 abuts against the steel ball groove 24 again through the inclined opening 26 and rolls. Subsequently, the拨片19 slides along the slope of the convex ring 20, and the steel ball 22 enters the range of the notch 25 and disengages from the surface of the steel ball groove 24. The corresponding拨片19 compresses the spring 28 and pulls the jaw 15 away from the surface of the ingot. This cycle ensures that during the rotation process, except for the jaws 15 that move to the position corresponding to the slope of the convex ring 20 and disengage from the ingot, the remaining jaws 15 stably clamp the ingot and drive the ingot to rotate, thereby ensuring that there are no jaws 15 blocking the grinding device above the ingot at all times, and thus ensuring that the ingot can be comprehensively and efficiently ground and processed.

[0058] During the polishing process, the support roller 48 always supports the bottom side of the crystal rod, so that the bottom of the crystal rod is supported by the roller during polishing to maintain the balance of the crystal rod and avoid defects such as cracks in the brittle crystal rod during polishing.

[0059] After the grinding process is completed, the first motor 33 is turned off and no longer drives the crystal rod to rotate. The linear drive track 45 drives the support base 46 to move again under the crystal rod. The first electric push cylinder 34 retracts, causing the connecting rod 18 to move horizontally towards the second bracket 35 under the pull of the spring 28. The distance between the grippers 15 increases again, and the two moving panels 11 are controlled to move away from each other, thereby completely releasing the clamping of the crystal rod. Then the support roller 48 carries the crystal rod down until the crystal rod falls into the two sets of support bases 46 and the support roller 48 is completely detached from the crystal rod. Then the support base 46 moves the ground crystal rod horizontally as a whole out of the processing area, making it convenient to transfer the crystal rod to the subsequent processing area.

[0060] The first motor 33, the first electric push cylinder 34, the second motor 42, the linear drive rail 45, and the second electric push cylinder 50 mentioned above are mature existing technologies. The structures in the attached drawings are only for illustration and will not be described in detail here.

[0061] The specification and claims use certain terms to refer to specific components. Those skilled in the art will understand that hardware manufacturers may use different names to refer to the same component. This specification and claims do not distinguish components based on differences in name, but rather on differences in function. The term "comprising" throughout the specification and claims is an open-ended term and should be interpreted as "comprising but not limited to." "Approximately" means that within an acceptable margin of error, those skilled in the art can solve the technical problem and substantially achieve the technical effect within a certain margin of error.

[0062] It should be noted that the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a product or system comprising a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a product or system. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the product or system that includes said element.

[0063] The foregoing description illustrates and describes several preferred embodiments of this application. However, as previously stated, it should be understood that this application is not limited to the forms disclosed herein and should not be construed as excluding other embodiments. It can be used in various other combinations, modifications, and environments, and can be altered within the scope of the application concept described herein through the foregoing teachings or techniques or knowledge in related fields. Any modifications and variations made by those skilled in the art that do not depart from the spirit and scope of this application should be within the protection scope of the appended claims.

Claims

1. A lifting, centering, and clamping device for conveying silicon rods in a silicon rod grinding machine, characterized in that, The lifting, centering, and clamping device for conveying silicon rods in the silicon rod grinding machine includes: The cabinet (10) has two opposing sliding movable panels (11) symmetrically distributed on its upper side. The two movable panels (11) are fixedly connected to the two ends close to each other on their upper sides. Each first support (12) is rotatably connected to a turntable (13). Each turntable (13) is evenly distributed and slidably connected to multiple sliders (14) in the circumferential direction. Each slider (14) is fixedly connected to a gripper (15) at its end. Slide groove (16), each of the turntables (13) is provided with a set of slide grooves (16) on both sides of each slider (14), each set of slide grooves (16) is inclined, and a sliding pin (17) is slidably connected in each set of slide grooves (16); Each of the sliding pins (17) is fixedly connected to the corresponding slider (14), each of the grippers (15) is L-shaped, and each set of grippers (15) is used to hold the end and end edge of the crystal rod. The cabinet (10) is provided with lifting components. Each slider (14) is slidably connected to a connecting rod (18) at one end away from the gripper (15). The two movable panels (11) are respectively fixedly connected to second brackets (35) at their ends away from each other. Each second bracket (35) is fixedly connected to a first electric cylinder (34) on one side away from the first bracket (12). The extended end of each first electric cylinder (34) passes through the second bracket (35) and is fixedly connected to a top plate (23). Each top plate (23) can abut against the end of the corresponding connecting rod (18). Each top plate (23) has a fan-shaped oblique opening (26) at the top. Each of the top plates (23) is rotatably connected to a transmission disc (27) on the side near the turntable (13). Each of the transmission discs (27) is slidably connected to a corresponding connecting rod (18). A gear ring (29) is fixedly connected to the outside of each of the transmission discs (27). A gear seat (31) is fixedly connected to each of the movable panels (11). A gear (30) is rotatably connected between each of the gear seats (31) and the corresponding second bracket (35). Each of the gears (30) is slidably and meshingly connected to the corresponding gear ring (29). A reduction gearbox (32) is fixedly connected to the side of each second bracket (35) away from the turntable (13). The power output end of each reduction gearbox (32) is connected to the corresponding gear (30). A first motor (33) is connected to the power input end of each reduction gearbox (32) away from the second bracket (35). Each of the first brackets (12) and the corresponding transmission disc (27) is provided with a convex ring (20) surrounding the outside of the connecting rod (18). Each convex ring (20) is fixedly connected to the corresponding top plate (23) with a connecting plate (36). Each convex ring (20) has a slope at the position corresponding to the notch (25) on the side away from the turntable (13). Each connecting rod (18) is fixedly connected to the outside of a paddle (19) that can slide on the slope of the convex ring (20). Each paddle (19) and the corresponding transmission disc (27) are connected with a spring (28) surrounding the outside of the connecting rod (18).

2. The lifting, centering, and clamping device for conveying silicon rods in a silicon rod grinding machine according to claim 1, characterized in that, Each of the connecting rods (18) is fixedly connected to a steel ball head (21) at the end away from the slider (14), and a steel ball (22) is rolled inside each steel ball head (21). A steel ball groove (24) is opened on the surface of each top plate (23) at the rolling area of ​​the steel ball (22), and a bevel (26) is opened at the edge of the notch (25) of each steel ball groove (24).

3. The lifting, centering, and clamping device for conveying silicon rods in a silicon rod grinding machine according to claim 1, characterized in that, Each of the transmission discs (27) is fixedly connected to a set of telescopic connecting sleeves (37) at the axis between the corresponding turntable (13). Each set of telescopic connecting sleeves (37) can slide freely. Each of the second brackets (35) is fixedly connected to a set of slide rods (38) between the corresponding first bracket (12). Each set of slide rods (38) is slidably connected to the corresponding top plate (23) and the convex ring (20).

4. The lifting, centering, and clamping device for conveying silicon rods in a silicon rod grinding machine according to claim 1, characterized in that, The cabinet (10) has slide rails (43) symmetrically distributed and fixedly connected on both sides of each movable panel (11). Each slide rail (43) has a set of sliding seats (44) slidably connected to it. Each set of sliding seats (44) is fixedly connected to the bottom side of the corresponding movable panel (11).

5. The lifting, centering, and clamping device for conveying silicon rods in a silicon rod grinding machine according to claim 4, characterized in that, A set of lead screw seats (40) is fixedly connected to the surface of the cabinet (10) below each movable panel (11) in the direction of movement of the movable panel (11). A lead screw (41) is rotatably connected between each set of lead screw seats (40). A second motor (42) is fixedly connected to the end of each set of lead screw seats (40). The power output end of each second motor (42) is connected to the lead screw (41) for transmission.

6. The lifting, centering, and clamping device for conveying silicon rods in a silicon rod grinding machine according to claim 1, characterized in that, The lifting component includes roller seats (47). Two roller seats (47) are symmetrically distributed in the middle of the cabinet (10). A support roller (48) is rotatably connected to each roller seat (47). A third bracket (49) is fixedly connected inside the cabinet (10) below the two roller seats (47). A second electric push cylinder (50) is fixedly connected to the third bracket (49) below each roller seat (47). The extended end of each second electric push cylinder (50) passes through the third bracket (49) and is fixedly connected to the corresponding roller seat (47).

7. The lifting, centering, and clamping device for conveying silicon rods in a silicon rod grinding machine according to claim 6, characterized in that, The surface of the cabinet (10) is symmetrically and fixedly connected with linear drive rails (45) at both ends of the roller seat (47), and a set of support seats (46) is fixedly connected to the moving end above each linear drive rail (45).

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