A cooling runner system for a crucible rotation mechanism

Abstract

The application provides a cooling flow channel system of a crucible rotating mechanism, which comprises a water inlet, a water inlet flow channel, a water uniformizing device, a water outlet flow channel and a water outlet. The water inlet flow channel penetrates through the rotating shaft and is located on the axis of the rotating shaft. The water inlet is arranged on the side of the water inlet flow channel close to the lower side, and the output end of the water inlet is connected with the input end of the water inlet flow channel. The water uniformizing device is arranged in the crucible body. The top of the water inlet flow channel penetrates through the bottom center of the crucible body and the water uniformizing device to the upper part of the water uniformizing device. The water uniformizing device comprises a water uniformizing disc and guide pieces. The upper and lower surfaces of the water uniformizing disc are both provided with a plurality of guide pieces which are distributed to the periphery. The guide pieces on each side are circumferentially arranged around the center of the water uniformizing disc. The water outlet flow channel is arranged on the outer ring of the water inlet flow channel, so that the inner wall of the water outlet flow channel and the outer wall of the water inlet flow channel form a water flow channel. The input end of the water flow channel is connected with the output end of the water uniformizing device, and the output end of the water flow channel is connected with the water outlet.

Description

Technical Field

[0001] This invention relates to the field of vacuum evaporation equipment technology, and more specifically, to a cooling channel system for a crucible rotation mechanism. Background Technology

[0002] Evaporation machines are mainly used to deposit thin films on substrates. The material is evaporated by heating the evaporation source (usually a crucible), and then condensed onto the substrate surface in a vacuum environment. The crucible rotation mechanism is used to make the crucible rotate evenly to ensure that the evaporated material is evenly distributed. The cooling system is used to control the crucible temperature and prevent overheating. Traditional cooling structures are not efficient enough, resulting in unstable temperature control, which affects the coating quality. In addition, unreasonable cooling channel design leads to thermal stress concentration, which affects the life of the equipment.

[0003] The prior art CN219385299U discloses a crucible with a water-cooling structure, which is provided with a flow channel wall. Although it can extend the water flow path, the cross-section of the flow channel is fixed and gradually increases from the inside to the outside, which may lead to uneven distribution of water flow velocity. The flow velocity is fast in the area near the water inlet, while the flow velocity is reduced on the outside, which can easily form turbulent dead zones and reduce the overall heat exchange efficiency. The water inlet cavity achieves radial cooling through the spiral flow channel wall, but the cooling water flows unidirectionally from the inside to the outside, which may lead to a large temperature gradient in different areas of the crucible body.

[0004] Therefore, a cooling channel system for a crucible rotation mechanism is needed to solve the problems of heat exchange efficiency and temperature uniformity. Summary of the Invention

[0005] In view of this, in order to solve the problems of the above-mentioned technology where the cross-section of the water inlet channel is fixed and gradually increases from the inside to the outside, which may lead to uneven water flow velocity distribution, with a fast flow velocity near the water inlet and a slower flow velocity on the outside, easily forming turbulent dead zones and reducing the overall heat exchange efficiency, and the cooling water flowing unidirectionally from the inside to the outside, which may lead to a large temperature gradient in different areas of the crucible body, this invention proposes a cooling channel system for a crucible rotation mechanism. By setting a water equalization device, using guide plates and flow dividers, the cooling area is increased. The inner and outer channels are set to separate the inlet and outlet water, and a top positioning guide groove is set to further make the water flow distribution uniform and improve the cooling effect.

[0006] A cooling channel system for a crucible rotation mechanism is disclosed. The crucible rotation mechanism is mounted on the bottom plate 1 of a vacuum evaporation machine. The crucible rotation mechanism includes an electron gun device 2, a crucible body 3, and a rotation mechanism 4. The crucible body 3 is located on top of the rotation mechanism 4, and the electron gun device 2 is located on one side of the crucible body 3. The rotation mechanism 4 drives the crucible body 3 to rotate. The electron gun device 2 emits an electron beam after being redirected by a magnetic field to heat the film material inside the crucible. The rotation mechanism 4 includes a rotating shaft 42. The system is characterized in that a cooling channel system is provided inside the rotation mechanism 4 and the crucible body 3. The cooling channel system includes a water inlet 43, a water inlet channel 45, a water distribution device 5, a water outlet channel 46, and a water outlet 44. The water inlet channel 45 passes through the rotating shaft 42 and is located on the axis of the rotating shaft 42. The water inlet 43 is located on the lower side of the water inlet channel 45, and the output end of the water inlet 43 is connected to the water outlet channel 45. The water inlet channel 45 is located at the input end; a water equalization device 5 is provided inside the crucible body 3. The top of the water inlet channel 45 passes through the bottom center of the crucible body 3 and the water equalization device 5 to the upper part of the water equalization device 5. The water equalization device 5 includes a water equalization plate 51 and guide plates 55. Multiple guide plates 55 radiating outwards are provided on both the upper and lower surfaces of the water equalization plate 51. The guide plates 55 on each side are arranged circumferentially around the center of the water equalization plate 51. The water outlet channel 46 is located at the water inlet channel 45. The outer ring of channel 45 forms a water flow channel 47 with the inner wall of the outlet channel 46 and the outer wall of the inlet channel 45. The input end of the water flow channel 47 is connected to the output end of the water distribution device 5, and the output end of the water flow channel 47 is connected to the outlet 44. After the cooling water enters the inlet channel 45 from the inlet 43, it flows upward to the water distribution device 5 due to the force. After cooling, the water flows downward from the water distribution device 5 into the water flow channel 47, and is then drawn out from the outlet 44.

[0007] Furthermore, the outer wall of the rotating shaft 42 is provided with an inlet connector 422 and an outlet connector 423. The output end of the inlet connector 422 is connected to the input end of the inlet port 43, and the output end of the outlet port 44 is connected to the input end of the outlet connector 423.

[0008] Furthermore, a partition 48 is provided between the inlet 43 and the outlet 44, so that the inlet 43 and the outlet 44 are separated for water inlet and outlet.

[0009] Furthermore, the water inlet 43 includes a first water inlet 431 and a second water inlet 432. The first water inlet 431 is located at the same position on the outer ring of the second water inlet 432. A water storage chamber 49 is provided between the first water inlet 431, the second water inlet 432, and the partition 48. The water inlet channel 45 rotates synchronously with the rotating shaft 42. When cooling water is introduced, if the water inlet connector 422 is aligned with the first water inlet 431, the water will directly enter the water inlet channel 45 due to the force. If the water inlet connector 422 is not aligned with the first water inlet 431, the cooling water will enter the water storage chamber 49 for temporary storage. When the water storage chamber 49 is filled with water to the point that it overflows the second water inlet 432, the cooling water will directly enter the second water inlet 432 and then the water inlet channel 45 from the water storage chamber 49.

[0010] In some embodiments, two inlets 431 and two inlets 432 can be provided, with the central axis of the inlet channel 45 as the axis of symmetry, to increase the inlet flow rate.

[0011] Furthermore, the crucible body 3 includes a crucible top plate 32 and a bottom sealing plate 33, which are snapped together with a sealing ring at the snap-together. The water distribution device 5 is disposed between the crucible top plate 32 and the bottom sealing plate 33. The bottom center of the crucible top plate 32 has a groove 321. The top of the water inlet channel 45 passes through the bottom center of the bottom sealing plate 33 and the water distribution device 5 into the groove 321. Through fluid simulation analysis, a water flow with a constant initial pressure flows upward. When passing through the groove 321, the density of the liquid in the groove 321 area is basically the same, so that the fluid distribution is uniform. After the water flow rushes upward from the water inlet channel 45 and reaches the top of the groove 321, it flows downward to the water distribution plate 51 due to gravity.

[0012] Furthermore, the groove 321 has a trapezoidal cross-section that is narrower at the top and wider at the bottom, which guides the water flow that rushes out to the top of the groove 321. The water inlet channel 45 rotates synchronously with the rotating shaft 42, so that after the water flows out, it can be divided into multiple branches along the side wall of the groove 321 and flow to the upper surface of the water distribution plate 51. The water flows down more evenly, and the cooling effect is uniform.

[0013] Furthermore, the center of the water distribution plate 51 is provided with a first opening 52, so that the water flow from the water inlet channel 45 through the first opening 52 reaches the groove 321 and flows to the water distribution device 5. After passing through multiple guide plates 55, the water is evenly distributed to the periphery of the water distribution plate 51, increasing the cooling area and improving the cooling effect.

[0014] Furthermore, the edge of the water distribution plate 51 is densely covered with a ring of diversion holes 54. The diversion holes 54 are evenly spaced, so that the water flow is diverted through the diversion holes 54, thereby increasing the cooling area and improving the cooling effect.

[0015] Furthermore, the guide plate 55 is L-shaped, with a long side and a short side. One side of the short side of the guide plate 55 is perpendicular to the water distribution plate 51, and one side of the long side of the guide plate 55 is connected to the water distribution plate 51. The short sides of the guide plates 55 are all located on the same side along the ring direction, so that the water flow direction is the same when the water flows through each guide plate 55. One side of the short side of the guide plate 55 is aligned with the center of the first opening 52.

[0016] Furthermore, the top of the rotating shaft 42 is provided with a plurality of slots 421, and the middle part of the crucible body 3 is provided with a plurality of connecting bolts 31. The connecting bolts 31 engage with the slots 421 at the top of the rotating shaft 42 from the top of the crucible body 3 downwards. The periphery of the first opening 52 is provided with a plurality of second openings 53 surrounding the opening. Each second opening 53 is spaced apart from the guide plate 55 and is used to pass through the connecting bolts 31.

[0017] The beneficial effects of this invention are as follows: This invention proposes a cooling channel system for a crucible rotation mechanism. The cooling channel system includes an inlet 43, an inlet channel 45, a water distribution device 5, an outlet channel 46, and an outlet 44. The inlet channel 45 passes through a rotation shaft 42 and is located on the axis of the rotation shaft 42. The inlet 43 is located on the lower side of the inlet channel 45, and the output end of the inlet 43 is connected to the input end of the inlet channel 45. The crucible body 3 is provided with a water distribution device 5. The top of the inlet channel 45 passes through the bottom center of the crucible body 3 and the water distribution device 5 to the upper part of the water distribution device 5. The water distribution device 5 includes a water distribution plate 51 and a guide plate 55. The upper and lower surfaces of the water distribution plate 51 are provided with multiple guide plates 55 radiating outwards. The guide plates 55 on each side are arranged circumferentially around the center of the water distribution plate 51. The water outlet channel 46 is located on the outer ring of the water inlet channel 45, so that the inner wall of the water outlet channel 46 and the outer wall of the water inlet channel 45 form a water flow channel 47 for water outlet. The input end of the water flow channel 47 is connected to the output end of the water distribution device 5, and the output end of the water flow channel 47 is connected to the water outlet 44. After the cooling water enters the water inlet channel 45 from the water inlet 43, it flows upward to the water distribution device 5 due to the force. After cooling, the water flows downward from the water distribution device 5 into the water flow channel 47, and then is drawn out from the water outlet 44. Attached Figure Description

[0018] Figure 1 This is an overall structural diagram of the crucible rotation mechanism of the present invention.

[0019] Figure 2 This is an external overall structural diagram of the cooling channel system of the crucible rotation mechanism of the present invention.

[0020] Figure 3 This is a cross-sectional view of the cooling channel system of the crucible rotation mechanism of the present invention.

[0021] Figure 4 This is a partial cross-sectional view of the cooling channel system of the crucible rotation mechanism of the present invention.

[0022] Figure 5 This is an enlarged structural diagram of the inlet and outlet of the cooling channel system of the crucible rotation mechanism of the present invention.

[0023] Figure 6 This is a structural diagram showing the connection between the water distribution device and the bottom sealing plate of the cooling channel system of the crucible rotation mechanism of the present invention.

[0024] Figure 7 This is a top enlarged view of the rotating shaft of the cooling channel system of the crucible rotation mechanism of the present invention.

[0025] Explanation of main component symbols

[0026] 1. Base plate; 2. Electron gun device; 3. Crucible body; 3. Connecting bolt; 31. Crucible top plate; 32. Groove; 321. Bottom sealing plate; 33. Rotation mechanism; 4. Connecting plate; 41. Rotating shaft; 42. Slot; 421. Water inlet connector; 422. Water outlet connector; 423. Water inlet; 43. First water inlet; 431. Second water inlet; 432. Water outlet; 44. Water inlet channel; 45. Water outlet channel; 46. Water flow channel; 47. Partition; 48. Water storage chamber; 49. Water distribution device; 5. Water distribution plate; 51. First opening; 52. Second opening; 53. Diverting hole; 54. Guide plate; 55.

[0027] The following detailed description, in conjunction with the accompanying drawings, will further illustrate the present invention. Detailed Implementation Example 1:

[0028] A cooling channel system for a crucible rotation mechanism is disclosed. The crucible rotation mechanism is mounted on the bottom plate 1 of a vacuum evaporation machine. The crucible rotation mechanism includes an electron gun device 2, a crucible body 3, and a rotation mechanism 4. The crucible body 3 is located on top of the rotation mechanism 4, and the electron gun device 2 is located on one side of the crucible body 3. The rotation mechanism 4 drives the crucible body 3 to rotate. The electron gun device 2 emits an electron beam after being redirected by a magnetic field to heat the film material inside the crucible. The rotation mechanism 4 includes a rotating shaft 42. The system is characterized in that a cooling channel system is provided inside the rotation mechanism 4 and the crucible body 3. The cooling channel system includes a water inlet 43, a water inlet channel 45, a water distribution device 5, a water outlet channel 46, and a water outlet 44. The water inlet channel 45 passes through the rotating shaft 42 and is located on the axis of the rotating shaft 42. The water inlet 43 is located on the lower side of the water inlet channel 45, and the output end of the water inlet 43 is connected to the water outlet channel 45. The water inlet channel 45 is located at the input end; a water equalization device 5 is provided inside the crucible body 3. The top of the water inlet channel 45 passes through the bottom center of the crucible body 3 and the water equalization device 5 to the upper part of the water equalization device 5. The water equalization device 5 includes a water equalization plate 51 and guide plates 55. Multiple guide plates 55 radiating outwards are provided on both the upper and lower surfaces of the water equalization plate 51. The guide plates 55 on each side are arranged circumferentially around the center of the water equalization plate 51. The water outlet channel 46 is located at the water inlet channel 45. The outer ring of channel 45 forms a water flow channel 47 with the inner wall of the outlet channel 46 and the outer wall of the inlet channel 45. The input end of the water flow channel 47 is connected to the output end of the water distribution device 5, and the output end of the water flow channel 47 is connected to the outlet 44. After the cooling water enters the inlet channel 45 from the inlet 43, it flows upward to the water distribution device 5 due to the force. After cooling, the water flows downward from the water distribution device 5 into the water flow channel 47, and is then drawn out from the outlet 44.

[0029] The outer wall of the rotating shaft 42 is provided with an inlet connector 422 and an outlet connector 423. The output end of the inlet connector 422 is connected to the input end of the inlet port 43, and the output end of the outlet port 44 is connected to the input end of the outlet connector 423.

[0030] A partition 48 is provided between the water inlet 43 and the water outlet 44, so that the water inlet 43 and the water outlet 44 are separated for water inlet and outlet.

[0031] The water inlet 43 includes a first water inlet 431 and a second water inlet 432. The first water inlet 431 is located at the same position on the outer ring of the second water inlet 432. A water storage chamber 49 is provided between the first water inlet 431, the second water inlet 432, and the partition 48. The water inlet channel 45 rotates synchronously with the rotating shaft 42. When cooling water is introduced, if the water inlet connector 422 is aligned with the first water inlet 431, the water will directly enter the water inlet channel 45 due to the force. If the water inlet connector 422 is not aligned with the first water inlet 431, the cooling water will enter the water storage chamber 49 for temporary storage. When the water storage chamber 49 is filled with water to the point that it overflows the second water inlet 432, the cooling water will directly enter the second water inlet 432 and then the water inlet channel 45 from the water storage chamber 49.

[0032] Two inlets can be provided for both the first inlet 431 and the second inlet 432, with the central axis of the inlet channel 45 as the axis of symmetry, to increase the inlet flow rate.

[0033] The crucible body 3 includes a crucible top plate 32 and a bottom sealing plate 33. The crucible top plate 32 and the bottom sealing plate 33 are snapped together, and a sealing ring is provided at the snapping point. The water distribution device 5 is disposed between the crucible top plate 32 and the bottom sealing plate 33. The bottom center of the crucible top plate 32 is provided with a groove 321. The top of the water inlet channel 45 passes through the bottom center of the bottom sealing plate 33 and the water distribution device 5 into the groove 321. Through fluid simulation analysis, a water flow with a constant initial pressure flows upward. When passing through the groove 321, the density of the liquid in the groove 321 area is basically the same, so that the fluid distribution is uniform. After the water flow rushes upward from the water inlet channel 45 and reaches the top of the groove 321, it flows downward to the water distribution plate 51 due to gravity.

[0034] The groove 321 has a trapezoidal cross-section that is narrower at the top and wider at the bottom, which guides the water flow that rushes out to the top of the groove 321. The water inlet channel 45 rotates synchronously with the rotating shaft 42, so that after the water flows out, it can be divided into multiple branches along the side wall of the groove 321 and flow to the upper surface of the water distribution plate 51. The water flows down more evenly, and the cooling effect is uniform.

[0035] The center of the water distribution plate 51 is provided with a first opening 52, so that the water flow from the water inlet channel 45 through the first opening 52 reaches the groove 321 and flows to the water distribution device 5. After passing through multiple guide plates 55, the water is evenly distributed to the periphery of the water distribution plate 51, increasing the cooling area and improving the cooling effect.

[0036] The edge of the water distribution plate 51 is densely covered with a ring of diversion holes 54. The diversion holes 54 are evenly spaced, so that the water flow is divided through the diversion holes 54, increasing the cooling area and improving the cooling effect.

[0037] The guide plate 55 is L-shaped, with a long side and a short side. One side of the short side of the guide plate 55 is perpendicular to the water distribution plate 51, and one side of the long side of the guide plate 55 is connected to the water distribution plate 51. The short side of the guide plate 55 is located on the same side along the ring direction, so that the water flow direction is the same when the water flows through each guide plate 55. One side of the short side of the guide plate 55 is aligned with the center of the first opening 52.

[0038] The top of the rotating shaft 42 is provided with multiple slots 421, and the middle part of the crucible body 3 is provided with multiple connecting bolts 31. The connecting bolts 31 engage with the slots 421 on the top of the rotating shaft 42 from the top of the crucible body 3 downwards. The periphery of the first opening 52 is provided with multiple second openings 53 surrounding the opening. Each second opening 53 is spaced apart from the guide plate 55 and is used to pass through the connecting bolts 31.

[0039] The beneficial effects of this invention are as follows: This invention proposes a cooling channel system for a crucible rotation mechanism. The cooling channel system includes an inlet 43, an inlet channel 45, a water distribution device 5, an outlet channel 46, and an outlet 44. The inlet channel 45 passes through a rotation shaft 42 and is located on the axis of the rotation shaft 42. The inlet 43 is located on the lower side of the inlet channel 45, and the output end of the inlet 43 is connected to the input end of the inlet channel 45. The crucible body 3 is provided with a water distribution device 5. The top of the inlet channel 45 passes through the bottom center of the crucible body 3 and the water distribution device 5 to the upper part of the water distribution device 5. The water distribution device 5 includes a water distribution plate 51 and a guide plate 55. The upper and lower surfaces of the water distribution plate 51 are provided with multiple guide plates 55 radiating outwards. The guide plates 55 on each side are arranged circumferentially around the center of the water distribution plate 51. The water outlet channel 46 is located on the outer ring of the water inlet channel 45, so that the inner wall of the water outlet channel 46 and the outer wall of the water inlet channel 45 form a water flow channel 47 for water outlet. The input end of the water flow channel 47 is connected to the output end of the water distribution device 5, and the output end of the water flow channel 47 is connected to the water outlet 44. After the cooling water enters the water inlet channel 45 from the water inlet 43, it flows upward to the water distribution device 5 due to the force. After cooling, the water flows downward from the water distribution device 5 into the water flow channel 47, and then is drawn out from the water outlet 44.

[0040] The embodiments described above are merely illustrative of several implementations of the present invention, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these modifications and improvements all fall within the scope of protection of the present invention. Therefore, the scope of protection of this patent should be determined by the appended claims.

Claims

1. A cooling channel system for a crucible rotation mechanism, wherein the crucible rotation mechanism is disposed on the bottom plate (1) of the cavity of a vacuum evaporation machine, the crucible rotation mechanism includes an electron gun device (2), a crucible body (3), and a rotation mechanism (4), the crucible body (3) is disposed on the top of the rotation mechanism (4), the electron gun device (2) is disposed on one side of the crucible body (3), the crucible body (3) is rotated by the rotation mechanism (4), and the electron gun device (2) emits an electron beam to bombard and heat the film material in the crucible after being redirected by a magnetic field, the rotation mechanism (4) includes a rotating shaft (42), characterized in that: The rotary mechanism (4) and the crucible body (3) are equipped with a cooling channel system. The cooling channel system includes an inlet (43), an inlet channel (45), a water distribution device (5), an outlet channel (46), and an outlet (44). The inlet channel (45) passes through the rotating shaft (42) and is located on the axis of the rotating shaft (42). The inlet (43) is located on the side of the inlet channel (45) near the bottom. The output end of the inlet (43) is connected to the input end of the inlet channel (45). The crucible body (3) is equipped with a water distribution device (5). The top of the inlet channel (45) passes through the bottom center of the crucible body (3) and the water distribution device. (5) Up to the water distribution device (5), the water distribution device (5) includes a water distribution plate (51) and guide plates (55). The upper and lower surfaces of the water distribution plate (51) are provided with multiple guide plates (55) that radiate outwards. The guide plates (55) on each side are arranged circumferentially around the center of the water distribution plate (51). The water outlet channel (46) is located on the outer ring of the water inlet channel (45), so that the inner wall of the water outlet channel (46) and the outer wall of the water inlet channel (45) form a water flow channel (47) for water outlet. The input end of the water flow channel (47) is connected to the output end of the water distribution device (5), and the output end of the water flow channel (47) is connected to the water outlet (44).Cooling water enters the inlet channel (45) from the inlet (43) and flows upward to the water distribution device (5) due to the force. After cooling, the water flows downward from the water distribution device (5) into the water flow channel (47) and is then drawn out from the outlet (44). A partition (48) is provided between the inlet (43) and the outlet (44) to separate the inlet (43) and outlet (44) for water entry and exit. The crucible body (3) includes a crucible top plate (32) and a bottom sealing plate (33). The crucible top plate (32) and bottom sealing plate (33) are snapped together, and a sealing ring is provided at the snapping point. The water distribution device (5) is set between the crucible top plate (32) and the bottom sealing plate (33). The bottom center of the crucible top plate (32) is provided with a groove (321). The top of the water inlet channel (45) passes through the bottom center of the bottom sealing plate (33) and the water distribution device (5) into the groove (321). Through fluid simulation analysis, a water flow with an initial pressure of a constant value flows upward. When passing through the groove (321), the density of the liquid in the groove (321) area is basically the same, so the fluid distribution is uniform. After the water flows upward from the inlet channel (45) and reaches the top of the groove (321), it flows downward to the water distribution plate (51) due to gravity. The groove (321) has a trapezoidal cross-section that is narrow at the top and wide at the bottom, which guides the water flow that flows out to the top of the groove (321). The inlet channel (45) rotates synchronously with the rotating shaft (42), so that after the water flows out, The water can be divided into multiple branches along the sidewall of the groove (321) and flow to the upper surface of the water distribution plate (51). The water flows down more evenly, resulting in a uniform cooling effect. The center of the water distribution plate (51) is provided with a first opening (52), so that the water flows from the water inlet channel (45) through the first opening (52) to the groove (321) and then to the water distribution device (5). After passing through multiple guide plates (55), the water is evenly distributed to the periphery of the water distribution plate (51), increasing the cooling area and improving the cooling effect.

2. The cooling channel system of the crucible rotation mechanism as described in claim 1, characterized in that: The outer wall of the rotating shaft (42) is provided with an inlet connector (422) and an outlet connector (423). The output end of the inlet connector (422) is connected to the input end of the inlet (43), and the output end of the outlet (44) is connected to the input end of the outlet connector (423).

3. The cooling channel system of the crucible rotation mechanism as described in claim 2, characterized in that: The water inlet (43) includes a first water inlet (431) and a second water inlet (432). The first water inlet (431) is located at the same position on the outer ring of the second water inlet (432). A water storage chamber (49) is provided between the first water inlet (431), the second water inlet (432), and the partition (48). The water inlet channel (45) rotates synchronously with the rotating shaft (42). When cooling water is introduced, if the water inlet connector (422) is aligned with the first water inlet (431), the water will directly enter the water inlet channel (45) due to the force. If the water inlet connector (422) is not aligned with the first water inlet (431), the cooling water will enter the water storage chamber (49) for temporary storage. When the water storage chamber (49) is filled with water to the point that it overflows the second water inlet (432), the cooling water will directly enter the second water inlet (432) from the water storage chamber (49) to the water inlet channel (45).

4. The cooling channel system of the crucible rotation mechanism as described in claim 1, characterized in that: The edge of the water distribution plate (51) is densely covered with a ring of diversion holes (54). The diversion holes (54) are evenly spaced so that the water flow is diverted through the diversion holes (54), thereby increasing the cooling area and improving the cooling effect.

5. The cooling channel system of the crucible rotation mechanism as described in claim 1, characterized in that: The guide plate (55) is L-shaped, with a long side and a short side. One side of the short side of the guide plate (55) is perpendicular to the water distribution plate (51), and one side of the long side of the guide plate (55) is connected to the water distribution plate (51). The short side of the guide plate (55) is located on the same side along the ring direction, so that the water flow direction is the same when the water flows through each guide plate (55). One side of the short side of the guide plate (55) is aligned with the center of the first opening (52).

6. The cooling channel system of the crucible rotation mechanism as described in claim 1, characterized in that: The top of the rotating shaft (42) is provided with multiple slots (421), and the middle part of the crucible body (3) is provided with multiple connecting bolts (31). The connecting bolts (31) are engaged with the slots (421) at the top of the rotating shaft (42) from the top of the crucible body (3) downwards. The periphery of the first opening (52) is provided with multiple second openings (53) surrounding the opening. Each second opening (53) is spaced apart from the guide plate (55) and is used to pass through the connecting bolts (31).

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