A charged particle beam telescope device and its usage method

Abstract

This invention relates to a charged particle beam telescope device and its usage method. The device includes a triggering unit, a position detection unit, a trigger processing unit, a signal acquisition and readout unit, and a data processing unit. The position detection unit includes several silicon pixel detectors. Two triggering units are respectively positioned upstream and downstream of the charged particle beam. Several silicon pixel detectors are arranged in a straight line between the two triggering units, with a station for placing the detector under test between each group of silicon pixel detectors. The trigger processing unit receives signals from the triggering units and generates trigger signals according to preset thresholds or logic. The signal acquisition and readout unit obtains the processed spatial position data of the charged particle beam. The data processing unit determines the positioning accuracy parameters of the detector under test. This invention can be widely applied in the fields of particle physics and high-energy physics experimental technology.

Description

Technical Field

[0001] This invention relates to the field of particle physics and high-energy physics experimental technology, and in particular to a charged particle beam telescope device and its method of use. Background Technology

[0002] In the field of particle physics and nuclear physics experiments, position detectors, as core detection devices, are used to accurately track and measure particle trajectories. Their performance directly determines the accuracy of particle trajectory reconstruction and the reliability of experimental data. With the increasing demands for detector resolution in high-energy physics experiments and the widespread application of new detectors (such as silicon pixel detectors and microstructured gas detectors), achieving high-precision calibration of position detectors has become a critical technical problem that urgently needs to be solved.

[0003] Currently, mainstream particle position detectors include silicon microstrip detectors, gas drift chambers, and scintillator detectors, which differ significantly in their technical principles and structural characteristics. For example, silicon microstrip detectors rely on the ionization effect in semiconductor materials to locate particle trajectories, while gas detectors calculate position information by measuring the drift time of ionized electrons in an electric field. This fundamental difference in principle leads to complex and difficult-to-uniformly evaluate inherent position resolution error characteristics in different detectors. Furthermore, minute deviations in detector manufacturing processes (such as silicon wafer etching precision and gas chamber uniformity) and performance degradation during long-term operation (such as radiation damage and material aging) further exacerbate the uncertainty in position measurement accuracy.

[0004] Existing position detector calibration methods suffer from the following technical bottlenecks: 1) They rely on simulation technology to establish error models, but the simplification of factors such as detector noise, environmental interference, and nonlinearity of signal readout electronics during simulation leads to significant deviations between calibration results and actual performance; 2) Manual calibration relies on operator experience, resulting in subjective judgment errors, especially lacking intelligent diagnostic capabilities for abnormal data from new detectors or under complex operating conditions. Therefore, a device is needed that can efficiently and accurately characterize position detectors, significantly improving the accuracy and reliability of particle detectors, and possessing significant scientific research and application value. Summary of the Invention

[0005] To address the aforementioned problems, the purpose of this invention is to provide a charged particle beam telescope device and its usage method, which can significantly improve the accuracy and reliability of particle detectors and ensure the stability and high accuracy of position detectors under different experimental environments.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: On the one hand, it provides a charged particle beam telescope device, including a triggering unit, a position detection unit, a trigger processing unit, a signal acquisition and readout unit, and a data processing unit, wherein the position detection unit includes a plurality of silicon pixel detectors;

[0007] The two triggering units are respectively located upstream and downstream of the charged particle beam. The two triggering units are used to generate a signal related to particle energy loss when the charged particle beam passes through. A plurality of silicon pixel detectors are arranged in a straight line between the two triggering units, and a station for placing the detector of the measured position is set between each plurality of silicon pixel detectors. The silicon pixel detectors are used to acquire the spatial position signal when the charged particle beam passes through.

[0008] The trigger processing unit is used to receive signals from the trigger unit and generate trigger signals according to preset thresholds or logic;

[0009] The signal acquisition and readout unit is used to process the spatial position signals of the charged particle beams of each silicon pixel detector and the measured position detector based on the trigger signal of the trigger processing unit, so as to obtain the spatial position data of the charged particle beams after processing.

[0010] The data processing unit is used to analyze the spatial position data of the processed charged particle beam, calculate the predicted position value of the charged particle beam when it passes through the detector at the measured position, and then determine the positioning accuracy parameters of the detector at the measured position.

[0011] Furthermore, the charged particle beam telescope device also includes a support platform, on which the triggering unit, the position detection unit, and the detector of the measured position are all mounted.

[0012] Furthermore, the charged particle beam telescope device also includes a precision alignment and calibration unit;

[0013] The support platform is provided with a plurality of precision alignment and calibration units at intervals. Each precision alignment and calibration unit is provided with a silicon pixel detector or a position detector under test. The precision alignment and calibration unit is used to perform precise alignment and calibration on the position detection unit.

[0014] Furthermore, each of the precision alignment and calibration units includes, from bottom to top, a fine-tuning base, a fixed mounting base, and a rotary adjustment stage;

[0015] The fine-tuning base is mounted on the support platform and is used to provide micron-level linear position adjustment along the X, Y, and Z directions to ensure the precise displacement of the detector in the straight line direction in space.

[0016] The rotary adjustment stage is used to achieve fine-tuning of the detector's attitude around the X, Y, and Z axes;

[0017] The mounting bracket is used to fix the silicon pixel detector or the position detector under test.

[0018] Furthermore, the charged particle beam telescope device also includes a device control and monitoring platform, which includes:

[0019] The operation control module is used to control the working mode and triggering conditions of the signal acquisition and readout unit;

[0020] The parameter configuration module is used to set the calibration parameters of the precision alignment and calibration unit;

[0021] The status monitoring module is used to monitor the key parameters of each silicon pixel detector in real time.

[0022] Furthermore, the signal acquisition and readout unit includes:

[0023] The preliminary processing module is used to perform preliminary processing on the analog signals from each of the silicon pixel detectors and the position detector under test;

[0024] The filtering and calibration module is used to filter and calibrate the pre-processed analog signal;

[0025] An analog-to-digital converter is used to convert filtered and calibrated analog signals into digital signals.

[0026] Furthermore, the data processing unit includes:

[0027] The trajectory calculation module is used to calculate the precise trajectory of the charged particle beam in space based on the spatial position data of the charged particle beam corresponding to each silicon pixel detector using a trajectory reconstruction algorithm.

[0028] The position prediction module is used to perform data fusion on the spatial position data of charged particle beams from different silicon pixel detectors and calculate the predicted position value of the charged particle beams when passing through each detector at the measured position.

[0029] The accuracy characterization module is used to determine the positioning accuracy parameters of the detector under test based on the calculated predicted position value and the actual position measurement value of the detector under test.

[0030] On the other hand, a method of using a charged particle beam telescope device is provided, including:

[0031] Set up a charged particle beam telescope device and place the detector at the position to be measured at the corresponding work station;

[0032] When a beam of charged particles passes through, the two triggering units generate signals related to the energy loss of the particles and send them to the triggering processing unit.

[0033] The trigger processing unit receives signals from the trigger unit, generates trigger signals according to preset thresholds or logic, and sends them to the signal acquisition and readout unit.

[0034] Each silicon pixel detector and the detector under test acquires the spatial position signal when the charged particle beam passes through, and sends it to the signal acquisition and readout unit.

[0035] The signal acquisition and readout unit processes the spatial position signal of the received charged particle beam based on the trigger signal of the trigger processing unit, obtains the processed spatial position data of the charged particle beam, and sends it to the data processing unit.

[0036] The data processing unit analyzes the spatial position data of the charged particle beam, calculates the predicted position of the charged particle beam when it passes through the detector at the measured position, and then determines the positioning accuracy parameters of the detector at the measured position.

[0037] Furthermore, prior to testing, the following also includes:

[0038] The device control and monitoring platform controls the precision alignment and calibration unit to perform precise alignment and calibration of the position detection unit.

[0039] Furthermore, the data processing unit analyzes the spatial position data of the charged particle beam, calculates the predicted position of the charged particle beam when it passes through the detector at the measured position, and then determines the positioning accuracy parameters of the detector at the measured position, including:

[0040] A trajectory reconstruction algorithm is used to calculate the precise trajectory of the charged particle beam in space based on the spatial position data of the charged particle beam corresponding to each silicon pixel detector.

[0041] The spatial position data of charged particle beams from different silicon pixel detectors are fused to calculate the predicted position of the charged particle beams as they pass through the detectors at each measured position.

[0042] Based on the calculated predicted position value and the actual measured position value of the corresponding detector, the positioning accuracy parameter of the detector is determined.

[0043] The present invention has the following advantages due to the adoption of the above technical solutions:

[0044] 1. High precision: This invention uses a high-resolution silicon pixel detector, which can accurately record the position data of charged particles. Combined with an advanced trajectory reconstruction algorithm, it ensures high precision of the measurement results.

[0045] 2. Flexible arrangement: This invention supports flexible adjustment of the number of detectors at the tested position to adapt to different experimental needs, and can perform comprehensive and detailed accuracy characterization of various types of position detectors, thereby ensuring comprehensive characterization of different types of position detectors.

[0046] 3. High efficiency: Each silicon pixel detector's data acquisition and processing unit in this invention can work independently. Combined with optimized data transmission and processing flow, it ensures efficient signal processing and data analysis, significantly shortening the experimental cycle.

[0047] 4. Real-time calibration: The present invention is equipped with a complete precision alignment and calibration unit, which can periodically or as needed during use to calibrate each silicon pixel detector, eliminate potential system errors in a timely manner, and maintain the high-precision measurement capability of the device over a long period of time.

[0048] 5. This invention is mainly used to calibrate and characterize the position accuracy of various types of position detectors (such as silicon microstrip detectors, silicon pixel detectors, etc.) in experiments.

[0049] In summary, this invention can be widely applied in fields such as particle physics experiments, accelerator physics, and medical imaging. Attached Figure Description

[0050] Various other advantages and benefits will become apparent to those skilled in the art upon reading the following detailed description of preferred embodiments. The accompanying drawings are for illustrative purposes only and are not intended to limit the invention. Throughout the drawings, the same reference numerals denote the same parts. In the drawings:

[0051] Figure 1 This is a schematic diagram of the device structure provided in an embodiment of the present invention;

[0052] Figure 2 This is a schematic diagram of the support platform structure provided in an embodiment of the present invention. Detailed Implementation

[0053] Exemplary embodiments of the invention will now be described in more detail with reference to the accompanying drawings. While exemplary embodiments of the invention are shown in the drawings, it should be understood that the invention can be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided to enable a more thorough understanding of the invention and to fully convey the scope of the invention to those skilled in the art.

[0054] It should be understood that the terminology used herein is for the purpose of describing particular exemplary embodiments only and is not intended to be limiting. Unless the context clearly indicates otherwise, the singular forms “a,” “an,” and “described” as used herein may also include the plural forms. The terms “comprising,” “including,” “containing,” and “having” are inclusive and therefore indicate the presence of the stated features, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, steps, operations, elements, components, and / or combinations thereof. The method steps, processes, and operations described herein are not construed as requiring them to be performed in a particular order described or illustrated unless the order of performance is explicitly indicated. It should also be understood that additional or alternative steps may be used.

[0055] Although terms such as first, second, third, etc., may be used in this document to describe multiple elements, components, regions, layers, and / or segments, these elements, components, regions, layers, and / or segments should not be limited by these terms. These terms may be used only to distinguish one element, component, region, layer, or segment from another. Unless the context clearly indicates otherwise, terms such as "first," "second," and other numerical terms used herein do not imply order or sequence. Therefore, the first element, component, region, layer, or segment discussed below may be referred to as the second element, component, region, layer, or segment without departing from the teachings of the exemplary embodiments.

[0056] Currently, existing position detector calibration methods suffer from the following technical bottlenecks: 1) They rely on simulation technology to establish error models, but the simplification of factors such as detector noise, environmental interference, and nonlinearity of signal readout electronics during simulation leads to significant deviations between calibration results and actual performance; 2) Manual calibration relies on operator experience, resulting in subjective judgment errors, especially lacking intelligent diagnostic capabilities for abnormal data from new detectors or complex operating conditions. Therefore, a device is needed that can efficiently and accurately characterize position detectors, significantly improving the accuracy and reliability of particle detectors, and possessing significant scientific research and application value. This invention provides a charged particle beam telescope device, comprising a triggering unit, a position detection unit, a trigger processing unit, a signal acquisition and readout unit, and a data processing unit. The position detection unit includes a plurality of silicon pixel detectors. Two triggering units are respectively positioned upstream and downstream of the charged particle beam, generating signals related to particle energy loss when the charged particle beam passes through. A plurality of silicon pixel detectors are arranged in a straight line between the two triggering units, with a station for placing a measured position detector between each plurality of silicon pixel detectors. The silicon pixel detectors acquire spatial position signals when the charged particle beam passes through. The trigger processing unit receives signals from the triggering units and generates trigger signals according to preset thresholds or logic. The signal acquisition and readout unit processes the spatial position signals of the charged particle beam from each silicon pixel detector and the measured position detector based on the trigger signals from the trigger processing unit, obtaining processed spatial position data of the charged particle beam. The data processing unit analyzes the processed spatial position data of the charged particle beam, calculates the predicted position value of the charged particle beam when passing through the measured position detector, and thus determines the positioning accuracy parameters of the measured position detector. This invention achieves quantitative evaluation and calibration of the positional accuracy of detectors by accurately reconstructing the trajectory of a charged particle beam and comparing it with the response of the detector under test. It is suitable for accurately characterizing the positional accuracy of various position detectors (such as silicon microstrip and silicon pixel detectors). Furthermore, this invention features high precision, flexible deployment, high efficiency, real-time calibration, and trigger-based precise data acquisition, making it widely applicable to the performance evaluation and optimization of position detectors in particle physics experiments, accelerator physics, and medical imaging.

[0057] Example 1

[0058] like Figure 1 As shown, this embodiment provides a charged particle beam telescope device, including a triggering unit 1, a position detection unit 2, a trigger processing unit 3, a signal acquisition and readout unit 4, and a data processing unit 5. The position detection unit 2 includes a plurality of silicon pixel detectors 21, which can provide high-resolution position measurement of the charged particle beam.

[0059] Two trigger units 1 are respectively positioned upstream and downstream of the charged particle beam. These two trigger units 1 generate signals related to particle energy loss when the charged particle beam passes through, detecting the arrival of the charged particle beam. Several silicon pixel detectors 21 are arranged in a straight line between the two trigger units 1, with a station 22 positioned between every three silicon pixel detectors 21 to hold the measured position detector 23. This arrangement allows for the simultaneous measurement and characterization of multiple position detectors. The silicon pixel detectors 21 are used to acquire the spatial position signal of the charged particle beam as it passes through, as well as the energy loss as it passes through the silicon pixel detector 21, thus providing data for subsequent accuracy analysis.

[0060] The trigger processing unit 3 is used to receive signals from the trigger unit 1, generate trigger signals according to preset thresholds or logic, and send them to the signal acquisition and reading unit 4 to control the synchronous reading of data.

[0061] The signal acquisition and readout unit 4 is used to receive the spatial position signals of the charged particle beams from each silicon pixel detector 21 and the measured position detector 23, and to process the received signals based on the trigger signal of the trigger processing unit 3 to obtain the processed spatial position data of the charged particle beams.

[0062] The data processing unit 5 is used to analyze the spatial position data of the charged particle beam from the signal acquisition and readout unit 4, calculate the predicted position value of the charged particle beam when it passes through the measured position detector 23, and compare it with the actual position measurement value of the measured position detector 23 to determine the positioning accuracy parameter of the measured position detector 23.

[0063] In a preferred embodiment, the charged particle beam telescope device further includes a support platform 6, on which the triggering unit 1, the position detection unit 2, and the measured position detector 23 are all mounted. The support platform 6 can provide stable physical support for the entire charged particle beam telescope device.

[0064] Specifically, such as Figure 2 As shown, the support platform 6 includes a Y-axis platform 61, an X-axis platform 62, guide rails 63, and a motor drive mechanism to adjust the measurement area and adapt to different experimental needs. The two Y-axis platforms 61 are arranged in parallel, and guide rails 63 are respectively provided on the top of each Y-axis platform 61. The X-axis platform 62 is slidably mounted on the two guide rails 63, and the motor drive mechanism is used to drive the X-axis platform 62 to slide on the guide rails 63. The support platform 6 uses precision guide rails 63 and a motor drive mechanism to ensure smooth movement and reduce the impact of vibration on the measurement.

[0065] In a preferred embodiment, the charged particle beam telescope device further includes a precision alignment and calibration unit 7, which is mounted on the support platform 6. This unit 7 is used to precisely align and calibrate the position detection unit 2, ensuring that the positional relationships of each silicon pixel detector 21 in the position detection unit 2 are known and accurate in the spatial coordinate system. During use, potential systematic errors can be eliminated by periodically calibrating each silicon pixel detector 21 in the position detection unit 2, ensuring the measurement accuracy of the device.

[0066] Specifically, such as Figure 2 As shown, several precision alignment and calibration units 7 are arranged at intervals on the X-axis platform 62. Each precision alignment and calibration unit 7 is equipped with a silicon pixel detector 21 or a measured position detector 23.

[0067] More specifically, each precision alignment and calibration unit 7 includes a fine-tuning base, a fixed mounting base, and a rotary adjustment stage arranged sequentially from bottom to top, forming a layered structure. The fine-tuning base is mounted on the support platform 6 and is used to provide micron-level linear position adjustment along the X, Y, and Z directions, ensuring precise displacement of the detector in the linear direction of space. The rotary adjustment stage is used to achieve fine-tuning of the detector's attitude around the X, Y, and Z axes (i.e., θx, θy, θz) to meet the high-precision adjustment requirements for the detector's mounting angle. The fixed mounting base is used to fix the silicon pixel detector 21 or the detector under test position 23.

[0068] More specifically, the precision alignment and calibration unit 7 can be adjusted manually or electrically. Furthermore, it can be combined with position feedback devices such as laser interferometers and photoelectric encoders to form a closed-loop control, thereby achieving precise alignment and position calibration of the detector.

[0069] More specifically, the fine-tuning base can be implemented using a spiral fine-tuning structure, a sliding rail displacement mechanism, or a piezoelectric drive device. The rotary adjustment stage can be constructed using a flexible hinge structure, a precision angle adjuster, or a universal adjustment platform. The fixed mounting base can be made of a high-rigidity metal structure with precision-machined mounting surfaces and positioning holes to ensure the stability and repeatability of the detector during adjustment.

[0070] In a preferred embodiment, the charged particle beam telescope further includes a device control and monitoring platform 8, wherein the device control and monitoring platform 8 includes an operation control module, a parameter configuration module, and a status monitoring module.

[0071] The operation control module is used to control the working mode and triggering conditions of the signal acquisition and readout unit 4.

[0072] The parameter configuration module is used to set the calibration parameters of the precision alignment and calibration unit 7, including the detector initial alignment position, position compensation factor and error correction coefficient. The configured calibration parameters are used to control the precision alignment and calibration unit 7 to perform precise position adjustment and calibration operations.

[0073] The status monitoring module is used to monitor key parameters such as temperature, voltage and position 22 of each silicon pixel detector 21 in the position detection unit 2 in real time.

[0074] In a preferred embodiment, the signal acquisition and readout unit 4 includes a preliminary processing module, a filtering and calibration module, and an analog-to-digital converter. The preliminary processing module amplifies and shapes the analog signals from each silicon pixel detector 21 and the measured position detector 23. The filtering and calibration module filters and calibrates the pre-processed analog signals to ensure data accuracy and consistency. The analog-to-digital converter converts the filtered and calibrated analog signals into digital signals for subsequent data analysis.

[0075] In a preferred embodiment, the data processing unit 5 includes a trajectory calculation module, a position prediction module, and an accuracy characterization module.

[0076] The trajectory calculation module is used to calculate the precise trajectory of the charged particle beam in space based on the spatial position data of the charged particle beam corresponding to each silicon pixel detector 21 using a trajectory reconstruction algorithm.

[0077] The position prediction module is used to perform data fusion on the spatial position data of charged particle beams from different silicon pixel detectors 21, and calculate the predicted position value of the charged particle beams when they pass through each measured position detector 23.

[0078] The accuracy characterization module is used to determine the positioning accuracy parameters of the measured position detector 23 based on the calculated predicted position value and the corresponding actual measured position value. These parameters include, for example, calculating position resolution and positioning error. This module can characterize the positioning error and position resolution of the measured position detector 23 by using the mean and standard deviation of the statistical residuals, respectively. Furthermore, the accuracy characterization module can output accuracy evaluation indicators such as residual distribution curves and outlier ratios to comprehensively reflect the positioning performance of the measured position detector 23. The above statistical analysis can be implemented using histogram statistics, Gaussian fitting, or other statistical methods.

[0079] Example 2

[0080] This embodiment provides a method for using a charged particle beam telescope device, including the following steps:

[0081] 1) Set up the charged particle beam telescope device of Example 1 and place the detector 23 of the measured position at the corresponding work station 22.

[0082] 2) The device control and monitoring platform 8 controls the precision alignment and calibration unit 7 to perform precise alignment and calibration of the position detection unit 2, so as to ensure that the positional relationship of each silicon pixel detector 21 of the position detection unit 2 in the spatial coordinate system is known and accurate.

[0083] 3) When the charged particle beam passes through, the two triggering units 1 on the support platform 6 generate signals related to the particle energy loss and send them to the triggering processing unit 3.

[0084] 4) The trigger processing unit 3 receives the signal from the trigger unit 1, generates a trigger signal according to the preset threshold or logic, and sends it to the signal acquisition and reading unit 4.

[0085] 5) Each silicon pixel detector 21 and the measured position detector 23 acquires the spatial position signal when the charged particle beam passes through, and sends it to the signal acquisition and readout unit 4.

[0086] 6) The signal acquisition and readout unit 4 processes the spatial position signal of the received charged particle beam based on the trigger signal of the trigger processing unit 3, obtains the spatial position data of the processed charged particle beam, and sends it to the data processing unit 5.

[0087] 7) The data processing unit 5 analyzes the spatial position data of the charged particle beam, calculates the predicted position value of the charged particle beam when it passes through the measured position detector 23, and compares it with the actual measured position value of the measured position detector 23 to determine the positioning accuracy parameters of the measured position detector 23, specifically:

[0088] 7.1) The trajectory calculation module adopts a trajectory reconstruction algorithm to calculate the precise trajectory of the charged particle beam in space based on the spatial position data of the charged particle beam corresponding to each silicon pixel detector 21.

[0089] 7.2) The position prediction module performs data fusion on the spatial position data of charged particle beams from different silicon pixel detectors 21, and calculates the predicted position value of the charged particle beams when passing through each measured position detector 23:

[0090] 7.2.1) The position prediction module performs data fusion on the spatial position data of charged particle beams from different silicon pixel detectors 21.

[0091] 7.2.2) The position prediction module uses a trajectory fitting algorithm (such as least squares fitting, Kalman filtering or other trajectory reconstruction methods) to estimate the trajectory of the charged particle beam based on the fused data.

[0092] 7.2.3) The position prediction module calculates the predicted position of the charged particle beam as it passes through each measured position detector 23 based on the estimated motion trajectory. The predicted position can be used to compare with the actual measured position for device position calibration, detection deviation, or accuracy characterization.

[0093] 7.3) The accuracy characterization module determines the positioning accuracy parameters of the measured position detector 23 based on the calculated predicted position value and the actual measured position value of the corresponding measured position detector 23:

[0094] 7.3.1) The accuracy characterization module compares the predicted position value calculated by the position prediction module with the actual position value measured by the corresponding measured position detector 23, and calculates the difference (residual) between the two.

[0095] 7.3.2) The accuracy characterization module performs statistical analysis on the calculated residuals to obtain the positioning accuracy parameters of the measured position detector 23.

[0096] The above embodiments are only used to illustrate the present invention. The structure, connection method and manufacturing process of each component can be varied. All equivalent transformations and improvements made on the basis of the technical solution of the present invention should not be excluded from the protection scope of the present invention.

Claims

1. A charged particle beam telescope device, characterized in that, It includes a triggering unit, a position detection unit, a trigger processing unit, a signal acquisition and readout unit, and a data processing unit, wherein the position detection unit includes a plurality of silicon pixel detectors; The two triggering units are respectively located upstream and downstream of the charged particle beam. The two triggering units are used to generate a signal related to particle energy loss when the charged particle beam passes through. A plurality of silicon pixel detectors are arranged in a straight line between the two triggering units, and a station for placing the detector of the measured position is set between each plurality of silicon pixel detectors. The silicon pixel detectors are used to acquire the spatial position signal when the charged particle beam passes through. The trigger processing unit is used to receive signals from the trigger unit and generate trigger signals according to preset thresholds or logic; The signal acquisition and readout unit is used to process the spatial position signals of the charged particle beams of each silicon pixel detector and the measured position detector based on the trigger signal of the trigger processing unit, so as to obtain the spatial position data of the charged particle beams after processing. The data processing unit is used to analyze the spatial position data of the processed charged particle beam, calculate the predicted position value of the charged particle beam when it passes through the detector at the measured position, and then determine the positioning accuracy parameters of the detector at the measured position.

2. The charged particle beam telescope device as described in claim 1, characterized in that, The charged particle beam telescope device also includes a support platform, on which the triggering unit, the position detection unit, and the detector of the measured position are all mounted.

3. The charged particle beam telescope device as described in claim 2, characterized in that, The charged particle beam telescope also includes a precision alignment and calibration unit; The support platform is provided with a plurality of precision alignment and calibration units at intervals. Each precision alignment and calibration unit is provided with a silicon pixel detector or a position detector under test. The precision alignment and calibration unit is used to perform precise alignment and calibration on the position detection unit.

4. The charged particle beam telescope device as described in claim 3, characterized in that, Each of the precision alignment and calibration units includes, from bottom to top, a fine-tuning base, a fixed mounting base, and a rotary adjustment stage; The fine-tuning base is mounted on the support platform and is used to provide micron-level linear position adjustment along the X, Y, and Z directions to ensure the precise displacement of the detector in the straight line direction in space. The rotary adjustment stage is used to achieve fine-tuning of the detector's attitude around the X, Y, and Z axes; The mounting bracket is used to fix the silicon pixel detector or the position detector under test.

5. A charged particle beam telescope device as described in claim 3, characterized in that, The charged particle beam telescope also includes a device control and monitoring platform, which includes: The operation control module is used to control the working mode and triggering conditions of the signal acquisition and readout unit; The parameter configuration module is used to set the calibration parameters of the precision alignment and calibration unit; The status monitoring module is used to monitor the key parameters of each silicon pixel detector in real time.

6. The charged particle beam telescope device as described in claim 1, characterized in that, The signal acquisition and readout unit includes: The preliminary processing module is used to perform preliminary processing on the analog signals from each of the silicon pixel detectors and the position detector under test; The filtering and calibration module is used to filter and calibrate the pre-processed analog signal; An analog-to-digital converter is used to convert filtered and calibrated analog signals into digital signals.

7. A charged particle beam telescope device as described in claim 1, characterized in that, The data processing unit includes: The trajectory calculation module is used to calculate the precise trajectory of the charged particle beam in space based on the spatial position data of the charged particle beam corresponding to each silicon pixel detector using a trajectory reconstruction algorithm. The position prediction module is used to perform data fusion on the spatial position data of charged particle beams from different silicon pixel detectors and calculate the predicted position value of the charged particle beams when passing through each detector at the measured position. The accuracy characterization module is used to determine the positioning accuracy parameters of the detector under test based on the calculated predicted position value and the actual position measurement value of the detector under test.

8. A method of using a charged particle beam telescope device, characterized in that, include: Set up the charged particle beam telescope device as described in any one of claims 1 to 7, and place the detector at the position to be measured at the corresponding work station; When a beam of charged particles passes through, the two triggering units generate signals related to the energy loss of the particles and send them to the triggering processing unit. The trigger processing unit receives signals from the trigger unit, generates trigger signals according to preset thresholds or logic, and sends them to the signal acquisition and readout unit. Each silicon pixel detector and the detector under test acquires the spatial position signal when the charged particle beam passes through, and sends it to the signal acquisition and readout unit. The signal acquisition and readout unit processes the spatial position signal of the received charged particle beam based on the trigger signal of the trigger processing unit, obtains the processed spatial position data of the charged particle beam, and sends it to the data processing unit. The data processing unit analyzes the spatial position data of the charged particle beam, calculates the predicted position of the charged particle beam when it passes through the detector at the measured position, and then determines the positioning accuracy parameters of the detector at the measured position.

9. The method of using a charged particle beam telescope device as described in claim 8, characterized in that, Before conducting the test, the following is also included: The device control and monitoring platform controls the precision alignment and calibration unit to perform precise alignment and calibration of the position detection unit.

10. The method of using a charged particle beam telescope device as described in claim 8, characterized in that, The data processing unit analyzes the spatial position data of the charged particle beam, calculates the predicted position of the charged particle beam when it passes through the detector under test, and then determines the positioning accuracy parameters of the detector under test, including: A trajectory reconstruction algorithm is used to calculate the precise trajectory of the charged particle beam in space based on the spatial position data of the charged particle beam corresponding to each silicon pixel detector. The spatial position data of charged particle beams from different silicon pixel detectors are fused to calculate the predicted position of the charged particle beams as they pass through the detectors at each measured position. Based on the calculated predicted position value and the actual measured position value of the corresponding detector, the positioning accuracy parameter of the detector is determined.

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