Laser chamber apparatus, gas laser apparatus, and method for manufacturing electronic device

By introducing the first exhaust port, the second exhaust port and the air intake port into the magnetic coupling mechanism, the problem of poor heat dissipation of the shield is solved, the stability of the laser chamber and the directional stability of the laser output are improved, and more efficient heat dissipation and rotational stability are achieved.

CN120457606APending Publication Date: 2025-08-08AURORA ADVANCED LASER CO LTD
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Patent Information

Application Number
CN202380090329.9
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2023-02-03
Publication Date
2025-08-08

AI Technical Summary

Technical Problem

In the existing laser chamber device, the shield of the magnetic coupling mechanism has poor heat dissipation, resulting in uneven temperature, affecting the stability of the laser chamber and the reduction of magnetic force, and thus affecting the rotation stability of the fan and the directional stability of the laser output.

Method used

The first exhaust port, the second exhaust port and the air intake port are introduced into the magnetic coupling mechanism. Through the design of these exhaust ports and air intake ports, the heat dissipation of the shield is improved, the temperature of the shield is reduced, and the heat dissipation efficiency and rotational stability of the magnetic coupling mechanism are improved.

Benefits of technology

By improving the heat dissipation of the shield, the temperature uneven phenomenon is reduced, the stability of the laser chamber and the directional stability of the laser output are improved, and the risk of fan vibration and magnetic force reduction is reduced.

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Abstract

A laser chamber device according to one aspect of the present disclosure is provided with a magnetic coupling mechanism (28A) that transmits a driving force to a rotating shaft (26a) of a fan (26) that circulates a laser gas, the magnetic coupling mechanism (28A) is provided with an inner rotor (42), a metal shield (43) that houses the inner rotor (42), an outer rotor (43), and a bracket (46), a first exhaust port (51) is formed in the outer rotor (43), and a second exhaust port (52) and an air inlet (53) are formed in the bracket (46).
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