A MEMS resonant accelerometer based on coupled synchronization

By using a coupled and synchronized MEMS resonant accelerometer, dynamic matching of frequency and sensitivity is achieved through tuning bias voltage and mutual injection synchronization circuit. This solves the problems of frequency mismatch and limited synchronization bandwidth in traditional MEMS resonant accelerometers, and improves the noise performance and measurement range of the sensor.

CN120629636BActive Publication Date: 2026-06-09XI AN JIAOTONG UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
XI AN JIAOTONG UNIV
Filing Date
2025-06-30
Publication Date
2026-06-09

AI Technical Summary

Technical Problem

Traditional MEMS resonant accelerometers suffer from frequency mismatch and limited synchronization bandwidth due to manufacturing errors, which affects synchronization performance and reduces sensitivity, making it difficult to further improve performance.

Method used

A MEMS resonant accelerometer based on coupling synchronization is adopted. Through two resonant sensing units with identical structures, independent oscillation circuits and mutual injection synchronization circuits, the inherent frequency and sensitivity are matched by the tuning bias voltage to achieve 1:1 bidirectional electrical signal mutual injection coupling synchronization. Combined with lever mechanism and tuning module, frequency deviation is dynamically compensated.

Benefits of technology

It significantly reduces noise power spectral density, improves signal-to-noise ratio, broadens synchronization bandwidth, ensures frequency consistency and sensitivity, expands measurement range, and solves the problems of frequency mismatch and limited synchronization bandwidth in traditional accelerometers.

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Abstract

The application discloses a MEMS resonant accelerometer based on coupled synchronization, a tuning module is arranged around a mass block, frequency and sensitivity of two accelerometers are matched through a bias voltage, so that the frequency difference remains consistent under different measurement inputs. In the state of mutual coupling and electric synchronization, the device using the method of the application can maintain the synchronization state to a greater extent and has no sensitivity attenuation phenomenon. The application effectively solves the problem of narrow synchronization bandwidth of the coupled synchronization accelerometer, and significantly widens the measurement range of the whole machine. In addition, the noise in the oscillation loop in the synchronization state is significantly suppressed, so that the noise floor of the sensor is further reduced, and the zero bias instability is further improved.
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