Control system and method for polycrystalline silicon production environment

By integrating multimodal perception, edge computing and cloud-based digital twin systems, the problems of monitoring lag and inaccurate control in polysilicon production have been solved, comprehensive perception and efficient control of the polysilicon production environment have been achieved, and product quality and production efficiency have been improved.

CN120746385APending Publication Date: 2025-10-03XINTE ENERGY CO LTD +1
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Patent Information

Application Number
CN202510891720.X
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-06-27
Publication Date
2025-10-03

AI Technical Summary

Technical Problem

The existing polysilicon production process lacks comprehensive and accurate monitoring of the reaction status, making it difficult to grasp the distribution of doping elements and microscopic defects in real time, resulting in unstable electrical performance of the product and reduced processing yield. Traditional temperature measurement methods have strong lag and are difficult to achieve effective control.

Method used

It adopts a multimodal perception subsystem, an intelligent edge computing subsystem and a cloud-based digital twin subsystem, integrates quantum dot hyperspectral imaging, polarized infrared thermal imaging and laser scattering dust sensing, and combines a distributed heterogeneous computing architecture with a field programmable gate array and an image processing accelerator card to achieve multi-dimensional data fusion and autonomous decision-making control.

Benefits of technology

It has achieved comprehensive, real-time, and high-precision perception and analysis of the polysilicon production environment, improved the automation level of the production process, improved product quality and production efficiency, and enhanced the system's flexibility and autonomous adaptability.

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Abstract

The embodiment of the invention discloses a control system and method for a polycrystalline silicon production environment. The system comprises an autonomous decision control subsystem, a cloud digital twin subsystem, a plurality of intelligent edge computing subsystems and a plurality of multi-modal sensing subsystems. The multi-modal sensing subsystem sends multi-dimensional sensing data to the intelligent edge computing subsystem; the intelligent edge computing subsystem carries out vector fusion on the multi-dimensional sensing data; and the state determining module is used for determining the current process state of the polycrystalline silicon production environment according to the data obtained by the fusion vector, the cloud digital twin subsystem is used for predicting the future process state of the polycrystalline silicon production environment according to the current process state; the autonomous decision control subsystem is used for formulating a corresponding polycrystalline silicon production parameter control strategy according to the current process state and the future process state; and the control module is also used for controlling the polycrystalline silicon production environment according to the polycrystalline silicon production parameter control strategy. The system can meet the comprehensive and synchronous monitoring requirements of the polycrystalline silicon production environment.
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