Gas dissociation cavity discharge structure and ignition control method

By employing a multi-layered metal mesh structure and ignition control method, the problem of ignition failure in remote plasma source cavities under gas changes was solved, achieving efficient ignition and process stability, simplifying the assembly process, and reducing metal particle contamination.

CN120957302AActive Publication Date: 2025-11-14江苏神州半导体科技股份有限公司
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Patent Information

Application Number
CN202511467774.X
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-10-15
Publication Date
2025-11-14
Estimated Expiration
2045-10-15

AI Technical Summary

Technical Problem

Existing remote plasma source cavity structures are prone to ignition failure when the gas type or pressure changes, and they also suffer from metal particle contamination and assembly complexity, which affect production yield and process stability.

Method used

By employing a multi-layer metal mesh structure and ignition control method, the range of pd values ​​is broadened, the breakdown voltage is reduced, and the ignition success rate is improved by adjusting the gas pressure and electrode distance. The sealing ring ensures the cavity's airtightness.

Benefits of technology

It achieves efficient ignition under different gas conditions, reduces breakdown voltage, improves the ignition success rate and process stability of remote plasma sources, reduces metal particle contamination, and simplifies the assembly process.

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Abstract

The invention belongs to the technical field of remote plasma sources, and provides a gas dissociation cavity discharge structure and an ignition control method. The discharge structure comprises: a cavity for dissociating a process gas; the metal nets are arranged at intervals and embedded in the cavity, and the metal nets are communicated through conductive pieces; the shell is arranged on the outer side of the cavity in a sleeving manner; the ports are formed in the two ends of the cavity; the baffle is arranged between the port and the shell; the sealing ring A is arranged among the baffle plate, the port and the cavity; and the electrode lead penetrates through the shell and the cavity to be conducted with the metal net and is used for high-voltage ignition. According to the remote plasma source, the value range of pd can be widened by arranging the multiple layers of metal nets, discharging is conducted along the metal net approaching the electrode distance d corresponding to the lowest breakdown voltage during ignition, and therefore the breakdown voltage of the remote plasma source during ignition is reduced, and the ignition success rate of the remote plasma source is increased.
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