Scanning tube transverse driving piezoelectric motor, control method thereof and scanning probe microscope

Abstract

The invention provides a scanning tube transverse driving piezoelectric motor and a control method thereof.The scanning tube transverse driving piezoelectric motor comprises a base, an elastic piece and a sliding rod, and is characterized by further comprising an XZ two-dimensional deformation piezoelectric tube, one end of the XZ two-dimensional deformation piezoelectric tube is fixed to the base and becomes a fixed end, the other end of the XZ two-dimensional deformation piezoelectric tube is a free end, the elastic piece is fixed to the free end, the sliding rod is arranged between the base and the elastic piece, and the XZ two-dimensional deformation piezoelectric tube is connected with the sliding rod. And the elastic sheet elastically presses the sliding rod on the surface of the base to form a structure that transverse deformation, namely X-direction deformation, of the XZ two-dimensional deformation piezoelectric tube drives the sliding rod to move on the base in the X direction. Compared with the prior art, the piezoelectric motor has the following excellent performance: 1) since the piezoelectric tube is transversally deformed and is stepped by the sliding rod, the piezoelectric tube does not need to be very long, so that the length size of the motor does not need to be very large, and the problem that the piezoelectric motor is difficult to rotate in a rolling manner in a narrow aperture of a strong magnet due to large length in the prior art is solved; and 2) the piezoelectric motor is small in size and does not bring large thermal load, so that the piezoelectric motor is very suitable for extremely low temperature conditions.

Description

Technical Field

[0001] This invention relates to a piezoelectric stepper and its control method, and particularly to a transverse drive piezoelectric motor for scanning tubes and its control method, and a scanning probe microscope (SPM), belonging to the field of piezoelectric positioner technology. Background Technology

[0002] A piezoelectric motor is a type of positioning motor that achieves extremely high precision positioning by accumulating many small, micro-scale (micro- and nano-scale) steps, ultimately reaching macro-scale (millimeter-scale) stepping. However, its development still faces a significant challenge: piezoelectric motors typically have a large axial length. Otherwise, the limited axial expansion and contraction of the piezoelectric material would hinder movement, especially under low- and extremely low-temperature conditions. Thus, if the axial length of the piezoelectric motor is too large, it becomes difficult to perform tumbling rotational motion within the narrow, aperture-constrained space of a high-field magnet to achieve magnetic anisotropy measurement of samples moving from out-of-plane to in-plane.

[0003] To address the challenge of existing piezoelectric motors having large axial dimensions, making radial rotation difficult in strong magnetic fields and narrow apertures (i.e., difficulty in achieving tumbling rotation), this invention proposes a piezoelectric motor with transverse drive for the scanning tube, its control method, and a scanning probe microscope (SPM). The principle applied is that when the diameter (Φ) of the piezoelectric scanning tube (hereinafter referred to as the piezoelectric tube or scanning tube) is smaller than its axial length (L), under the same driving voltage, the transverse deformation (ΔX) of the piezoelectric scanning tube is greater than its axial deformation (ΔL). That is, the transverse driving capability is greater than the axial driving capability, especially when the aspect ratio (L / Φ) of the piezoelectric scanning tube is much greater than 1. Summary of the Invention

[0004] This invention addresses the problem that existing piezoelectric motors have large axial dimensions, making it difficult to rotate radially around a pivot in a strong magnetic field and narrow aperture, i.e., it is difficult to achieve tumbling rotation. The invention proposes a piezoelectric motor with transverse drive of a scanning tube, its control method, and a scanning probe microscope (SPM).

[0005] The structural solution of the present invention to achieve the above objectives is as follows: A transversely driven piezoelectric motor for scanning tubes includes a base, an elastic sheet, and a slide rod. It is characterized by further comprising an XZ two-dimensional deformation piezoelectric tube, one end of which is fixed to the base as its fixed end, and the other end as its free end. The elastic sheet is fixed to the free end, and the slide rod is disposed between the base and the elastic sheet. The elastic sheet elastically presses the slide rod against the surface of the base, forming a transverse deformation of the XZ two-dimensional deformation piezoelectric tube, i.e., deformation in the X direction, which drives the slide rod to displace along the X direction on the base.

[0006] The scanning tube laterally drives the piezoelectric motor, characterized in that an X-direction guiding rail is added between the slide rod and the base.

[0007] The control method for the transverse drive piezoelectric motor of the scanning tube is characterized by controlling the deformation of the XZ two-dimensional deformation piezoelectric tube with control signals in the following timing sequence, driving the slide bar to move forward one step along the X direction on the base, that is, one step along the +X direction: a. The XZ piezoelectric tube deforms along the +X direction at a rate so low that the resulting inertial force acting on the slide rod is insufficient to overcome the frictional force acting on the slide rod. b. The XZ piezoelectric tube deforms along the -X direction at a rate so high that the resulting inertial force acting on the slide rod can overcome the frictional force acting on the slide rod.

[0008] A scanning probe microscope made of a transversely driven piezoelectric motor is characterized by further including a probe, a sample, and an XYZ piezoelectric tube. One end of the XYZ piezoelectric tube is fixed to a base, becoming its fixed end, and the other end is its free end. The axial direction of the XYZ piezoelectric tube, i.e., its Z direction, is consistent with the X direction of the XZ piezoelectric tube. The probe is fixed to the front end of a slide rod and points to the sample fixed to the free end of the XYZ piezoelectric tube. Here, the positions of the probe and the sample can be interchanged.

[0009] A scanning probe microscope made of a transversely driven piezoelectric motor is characterized by further including a probe, a sample, and an XYZ piezoelectric tube. One end of the XYZ piezoelectric tube is its fixed end, which is fixed to the front end of a slide rod, and the other end is its free end. The axial direction of the XYZ piezoelectric tube, i.e., its Z direction, is consistent with the X direction of the XZ piezoelectric tube. The probe is fixed to a base and points to the sample fixed to the free end of the XYZ piezoelectric tube. Here, the positions of the probe and the sample can be interchanged.

[0010] The working principle of the transverse drive piezoelectric motor and its control method of the present invention is as follows: when the diameter (Φ) of the piezoelectric scanning tube is smaller than its axial length (L), under the same driving voltage, the transverse deformation (ΔX) of the piezoelectric scanning tube is greater than its axial deformation (ΔL). That is, the transverse driving capability is greater than the axial driving capability, especially when the aspect ratio (L / Φ) of the piezoelectric scanning tube is much greater than 1.

[0011] Based on the above principles, the present invention has the following excellent properties: (1) Since the piezoelectric tube is a transverse deformation sliding rod stepper, the piezoelectric tube does not need to be very long, which means that the length of the motor does not need to be very large, thus solving the problem that the piezoelectric motor is too long to make tumbling rotation in the narrow aperture of a strong magnet.

[0012] (2) Such piezoelectric motors are very suitable for extremely low temperature conditions because they are small in size and do not bring a large heat load. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the basic scanning tube transverse drive piezoelectric motor structure of the present invention.

[0014] Figure 2 This is a schematic diagram of a scanning probe microscope structure made by a transversely driven piezoelectric motor based on the basic scanning tube of this invention.

[0015] Figure 3 This is a schematic diagram of the scanning probe microscope structure made by the transverse driving piezoelectric motor of the scanning tube on the base of the present invention.

[0016] Figure 4 This is a schematic diagram of the scanning probe microscope structure made by laterally driving a piezoelectric motor on a base-mounted scanning tube, as described in this invention.

[0017] The following are the labels in the figure: 1. Base, 2. XZ two-dimensional deformation piezoelectric tube, 3. Elastic sheet, 4. Slide rod, 5. Probe, 6. XYZ piezoelectric tube, 7. Sample.

[0018] The present invention will be further described below with reference to specific embodiments and structural drawings. Detailed Implementation

[0019] Example 1: Basic scanning tube lateral drive piezoelectric motor See appendix Figure 1 The scanning tube laterally drives a piezoelectric motor, including a base 1, an elastic sheet 3, and a slide rod 4. Its characteristic is that it further includes an XZ two-dimensional deformation piezoelectric tube 2, one end of which is fixed to the base 1, becoming its fixed end, and the other end is its free end. The elastic sheet 3 is fixed to the free end, and the slide rod 4 is disposed between the base 1 and the elastic sheet 3. The elastic sheet 3 elastically presses the slide rod 4 onto the surface of the base 1, forming a lateral deformation of the XZ two-dimensional deformation piezoelectric tube 2, i.e., deformation in the X direction, which drives the slide rod 4 to displace along the X direction on the base 1.

[0020] Working principle: When the diameter (Φ) of the XZ two-dimensional deformation piezoelectric tube 2 is smaller than its axial length (L), under the same driving voltage, the lateral deformation (ΔX) of the XZ two-dimensional deformation piezoelectric tube 2 is greater than its axial deformation (ΔL). That is, the lateral driving capability is greater than the axial driving capability, especially when the aspect ratio (L / Φ) of the piezoelectric scanning tube is much greater than 1.

[0021] Example 2: Scanning probe microscope made of a basic scanning tube transversely driven piezoelectric motor See appendix Figure 2A scanning probe microscope made of a transversely driven piezoelectric motor is characterized by further including a probe 5, a sample 7, and an XYZ piezoelectric tube 6. One end of the XYZ piezoelectric tube 6 is fixed to the base 1, becoming its fixed end, and the other end is its free end. The axial direction of the XYZ piezoelectric tube 6, i.e. its Z direction, is consistent with the X direction of the XZ piezoelectric tube 2. The probe 5 is fixed to the front end of the slide rod 4 and points to the sample 7 fixed to the free end of the XYZ piezoelectric tube 6. Here, the positions of the probe 5 and the sample 7 can be interchanged.

[0022] Example 3: A scanning probe microscope made by laterally driving a piezoelectric motor on a base-mounted scanning tube. See appendix Figure 3 A scanning probe microscope made of a transversely driven piezoelectric motor is characterized by further including a probe 5, a sample 7, and an XYZ piezoelectric tube 6. One end of the XYZ piezoelectric tube 6 is its fixed end, which is fixed to the front end of the slide rod 4, and the other end is its free end. The axial direction of the XYZ piezoelectric tube 6, that is, its Z direction, is consistent with the X direction of the XZ piezoelectric tube 2. The probe 5 is fixed to the base 1 and points to the sample 7 fixed to the free end of the XYZ piezoelectric tube 6. Here, the positions of the probe 5 and the sample 7 can be interchanged.

[0023] Example 4: A scanning probe microscope made by laterally driving a piezoelectric motor on a base-mounted scanning tube, as shown in Example 4. Figure 4 .

[0024] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims. Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A transversely driven piezoelectric motor for scanning tubes, comprising a base, an elastic sheet, and a slide bar, characterized in that: It also includes an XZ two-dimensional deformation piezoelectric tube, one end of which is fixed to the base as its fixed end, and the other end as its free end. The elastic sheet is fixed to the free end, and the sliding rod is disposed between the base and the elastic sheet. The elastic sheet elastically presses the sliding rod against the surface of the base, forming a transverse deformation of the XZ two-dimensional deformation piezoelectric tube, that is, deformation in the X direction, which drives the sliding rod to move along the X direction on the base.

2. The transverse drive piezoelectric motor for the scanning tube according to claim 1, characterized in that: An X-direction guiding rail is added between the slide rod and the base.

3. A control method for a transversely driven piezoelectric motor of a scanning tube as described in claim 1, characterized in that... The following timing control signals control the deformation of the XZ two-dimensional deformation piezoelectric tube, driving the slide bar to move forward one step along the X direction on the base, that is, one step along the +X direction: The XZ piezoelectric tube deforms along the +X direction at a rate so low that the resulting inertial force acting on the slide bar is insufficient to overcome the frictional force acting on the slide bar. The XZ piezoelectric tube deforms along the -X direction at a rate so high that the resulting inertial force acting on the slide rod can overcome the frictional force acting on the slide rod.

4. A scanning probe microscope made of a transversely driven piezoelectric motor as described in claim 1, characterized in that... It also includes a probe, a sample, and an XYZ piezoelectric tube. One end of the XYZ piezoelectric tube is fixed to the base, becoming its fixed end, and the other end is its free end. The axial direction of the XYZ piezoelectric tube, i.e. its Z direction, is consistent with the X direction of the XZ piezoelectric tube. The probe is fixed to the front end of the slide rod and points to the sample fixed to the free end of the XYZ piezoelectric tube. The positions of the probe and the sample can be interchanged.

5. A scanning probe microscope made of a transversely driven piezoelectric motor as described in claim 1, characterized in that... It also includes a probe, a sample, and an XYZ piezoelectric tube. One end of the XYZ piezoelectric tube is its fixed end, which is fixed to the front end of the slide rod, and the other end is its free end. The axial direction of the XYZ piezoelectric tube, i.e. its Z direction, is consistent with the X direction of the XZ piezoelectric tube. The probe is fixed to the base and points to the sample fixed to the free end of the XYZ piezoelectric tube. The positions of the probe and the sample can be interchanged.

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