Preparation method of adsorbent for producing high-purity silane and adsorbent

By preparing an adsorbent with a CuO/AC core and a molecular sieve shell, the problem of insufficient silane purification capacity in existing technologies was solved, achieving efficient adsorption of B2H6 and PH3 in silanes, improving the purity of silanes, and meeting the application requirements of electronic-grade silanes.

CN121003974APending Publication Date: 2025-11-25SHAANXI SAINENG RUIKE TECH CO LTD
0 Cites 0 Cited by

Patent Information

Application Number
CN202511150229.8
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-08-18
Publication Date
2025-11-25

AI Technical Summary

Technical Problem

Existing technologies are insufficient to effectively adsorb trace amounts of B2H6 and PH3 impurities in silanes, resulting in insufficient silane purity and affecting the performance of semiconductor and photovoltaic industries.

Method used

An adsorbent consisting of a CuO/AC core and a molecular sieve shell is formed by mixing oxidized activated carbon with a copper salt precursor, followed by calcination and hydrothermal reaction with sodium aluminosilicate sol and a template agent. This process utilizes the chemical activity of CuO and the confinement effect of the molecular sieve to achieve deep purification of impurities in silanes.

Benefits of technology

It increases the adsorption capacity of B2H6 and PH3 in silanes, meets the purity requirements of electronic-grade silanes, and improves the performance of semiconductor and photovoltaic industries.

✦ Generated by Eureka AI based on patent content.
Patent Text Reader

Abstract

The invention discloses a preparation method of an adsorbent for producing high-purity silane and the adsorbent. The method comprises the following steps: step 1, carrying out oxidation treatment on activated carbon; 2, uniformly mixing the sample obtained in the step 1 with a copper salt precursor; 3, calcining the sample obtained in the step 2 in an inert atmosphere to obtain a CuO / AC inner core; step 4, dispersing the CuO / AC inner core into the sodium aluminosilicate sol, and then adding a template agent to carry out hydrothermal reaction, so that sodium aluminosilicate is crystallized to obtain an adsorbent precursor; and step 5, roasting the adsorbent precursor to obtain the adsorbent. The adsorbent is provided with a CuO / AC inner core and a molecular sieve shell, when impurities are adsorbed, the molecular sieve shell preliminarily adsorbs borane and phosphorane in silane, and deep purification is achieved through Cu ions in the CuO / AC inner core; meanwhile, the high conductivity of the activated carbon promotes electron transfer, and the reaction between Cu ions and phosphorane / borane is accelerated.
Need to check novelty before this filing date? Find Prior Art