A DC ultra-high voltage measurement sensor

Abstract

This invention discloses a DC ultra-high voltage measurement sensor. The sensor includes a detection electrode, a shielding shell, an insulating layer, an ion current guiding electrode, and a core sensitive element. An installation space is provided inside the shielding shell, and the core sensitive element is disposed within the installation space. A sensing space is provided outside the shielding shell, and the detection electrode, insulating layer, and ion current guiding electrode are disposed within the sensing space. A pair of detection electrodes are correspondingly disposed on both sides of the sensing space. One end of the detection electrode is connected to the shielding shell through the insulating layer, and the other end of the detection electrode is connected to the ion current guiding electrode through the insulating layer. The ion current guiding electrode and the pair of detection electrodes semi-enclose the sensing space, with the ion current guiding electrode directly corresponding to and receiving the ion current. The core sensitive element is connected to the detection electrode via a wire. This sensor ensures the stability and reliability of the sensor during long-term operation in ultra-high voltage / ultra-high voltage DC environments.

Description

Technical Field

[0001] This invention relates to the technical field of sensors, and more particularly to a DC ultra-high voltage measurement sensor. Background Technology

[0002] Reliable voltage measurement is crucial for ensuring the safe and stable operation of smart grids, aerospace, and industrial production. Traditional electromagnetic voltage transformers in power systems have inherent drawbacks such as bulky size, high cost, and poor high-frequency response. Especially in the field of DC ultra-high voltage / extra-high voltage, their large size and cost severely restrict the development of smart grids towards digitalization and informatization, and they can no longer meet the needs of wide-area sensor deployment. When sensors are applied to ultra-high voltage DC scenarios, the DC voltage, which can reach megavolts, ionizes the surrounding air and generates directional migrating ion streams. These ion streams continuously bombard and adhere to the surface of the sensor's sensing electrodes, forming a charge accumulation that is difficult to dissipate, thereby introducing severe drift and destroying the long-term stability of the sensor output, making it unable to meet the requirements of practical engineering applications. Summary of the Invention

[0003] This invention provides a DC ultra-high voltage measurement sensor, which aims to solve the problem of poor stability in the use of ultra-high voltage DC voltage transformers in existing technologies.

[0004] This invention discloses a DC ultra-high voltage measurement sensor. The sensor includes a detection electrode, a shielding shell, an insulating layer, an ion flow guiding electrode, and a core sensitive element. An installation space is provided inside the shielding shell, and the core sensitive element is disposed within the installation space. A sensing space is provided outside the shielding shell, and the detection electrode, insulating layer, and ion flow guiding electrode are disposed within the sensing space. A pair of detection electrodes are correspondingly disposed on both sides of the sensing space. One end of the detection electrode is connected to the shielding shell through the insulating layer, and the other end of the detection electrode is connected to the ion flow guiding electrode through the insulating layer. The ion flow guiding electrode and the pair of detection electrodes semi-enclose the sensing space, and the ion flow guiding electrode is directly aligned with the ion flow direction and receives the ion flow. The core sensitive element is connected to the detection electrode through a wire.

[0005] Furthermore, the insulating layer includes a voltage-resistant insulating layer and a general insulating layer. One end of the detection electrode is connected to the shielding shell through the voltage-resistant insulating layer, and the other end of the detection electrode is connected to the ion flow guiding electrode through the general insulating layer.

[0006] Furthermore, the voltage measurement sensor also includes a high-voltage wire, which is disposed on the outside of the shielding housing and is electrically connected to the shielding housing.

[0007] Furthermore, the ion flow guiding electrode is electrically connected to the shielding shell via a wire.

[0008] Furthermore, the shielding shell is provided with a shell opening, which is configured as a movable opening and closing port.

[0009] Furthermore, the core sensitive element includes a sensitive probe and a receiving port. The sensitive probe is connected to the detection electrode via a wire, and the core sensitive element communicates remotely with the ground control power supply via the receiving port.

[0010] Furthermore, the core sensitive element includes several shielding electrodes and several sensing electrodes, with the sensing electrodes and the shielding electrodes arranged in pairs.

[0011] Furthermore, the core sensitive element includes a metal encapsulation housing, which is connected to the sensitive probe through an insulating material layer.

[0012] Furthermore, the shielding electrode is configured as a movable electrode.

[0013] Furthermore, the sensing electrode outputs a sensor signal through an operational amplifier.

[0014] The aforementioned sensor, by setting an ion flow guiding electrode that is at the same potential as the high-voltage end, physically captures and guides the ion flow to the high-voltage end before it reaches the core sensing electrode. This avoids the continuous accumulation of ion charge on the key sensing surface of the sensor, eliminates the main factors that cause sensor output drift and accuracy degradation, and thus ensures the stability and reliability of the sensor in long-term operation under ultra-high voltage / extra-high voltage DC environments. Attached Figure Description

[0015] To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the following description of the embodiments will be briefly introduced. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of the overall structure of the DC ultra-high voltage measurement sensor provided in an embodiment of the present invention;

[0017] Figure 2 This is another overall structural schematic diagram of the DC ultra-high voltage measurement sensor provided in an embodiment of the present invention;

[0018] Figure 3 This is a partial structural schematic diagram of the DC ultra-high voltage measurement sensor provided in an embodiment of the present invention;

[0019] Figure 4This is another structural schematic diagram of the DC ultra-high voltage measurement sensor provided in an embodiment of the present invention.

[0020] Icon labels:

[0021] 1. Core sensitive element; 2. Wire; 3. Detection electrode; 4. Shielding shell; 5. Withstand voltage insulation layer; 6. Ordinary insulation layer; 8. Ion flow guiding electrode; 9. High voltage wire; 10. Receiver port; 11. Sensitive probe; 12. Shielding electrode; 13. Sensing electrode; 14. Operational amplifier; 16. Wireless transceiver module; 17. Ground receiving device; 1301. First sensing electrode; 1302. Second sensing electrode. Detailed Implementation

[0022] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0023] It should be understood that, when used in this specification and the appended claims, the terms "comprising" and "including" indicate the presence of the described features, integrals, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, integrals, steps, operations, elements, components and / or collections thereof.

[0024] It should also be understood that the terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to limit the invention. As used in this specification and the appended claims, the singular forms “a,” “an,” and “the” are intended to include the plural forms unless the context clearly indicates otherwise.

[0025] It should also be further understood that the term "and / or" as used in this specification and the appended claims refers to any combination of one or more of the associated listed items and all possible combinations, and includes such combinations.

[0026] like Figures 1 to 4As shown, this embodiment provides a DC ultra-high voltage measurement sensor for measuring ultra-high voltage electric fields. The sensor includes a detection electrode 3, a shielding shell 4, an insulating layer, an ion flow guiding electrode 8, and a core sensitive element 1. An installation space is provided inside the shielding shell 4, and the core sensitive element 1 is disposed within the installation space. A sensing space is provided outside the shielding shell 4, and the detection electrode 3, the insulating layer, and the ion flow guiding electrode 8 are disposed within the sensing space. A pair of detection electrodes 3 are disposed on both sides of the sensing space. One end of the detection electrode 3 is connected to the shielding shell 4 through the insulating layer, and the other end of the detection electrode 3 is connected to the ion flow guiding electrode 8 through the insulating layer. The ion flow guiding electrode 8 and the pair of detection electrodes 3 semi-enclose the sensing space, and the ion flow guiding electrode 8 is directly aligned with the ion flow direction and receives the ion flow. The core sensitive element 1 is connected to the detection electrode 3 through a wire 2.

[0027] In practical applications, voltage sensors used in DC ultra-high voltage and extra-high voltage environments integrate an internal protection unit and an external sensing unit. This unit consists of a conductive shielded housing 4. The shielded housing 4 defines an installation space to house the core sensing element 1. This core sensing element 1 is the functional component that performs the final electrical signal conversion. The unit, located outside the shielded housing 4, forms an open sensing space. This space integrates a detection electrode 3, an insulating layer, and an ion flow guiding electrode 8. A pair of detection electrodes 3 are symmetrically arranged on both sides of the sensing space. An ion flow guiding electrode 8 and the pair of detection electrodes 3 together form a semi-enclosed structure, defining the boundary of the sensing space. The detection electrode 3 is physically positioned between the shielded housing 4 and the ion flow guiding electrode 8. Specifically, one side of the detection electrode 3 is electrically isolated from the shielded housing 4 through an insulating layer, and the other side is electrically isolated from the ion flow guiding electrode 8 through another insulating layer. The core sensing element 1 is electrically connected to the external detection electrode 3 via a wire 2 to receive the induced signal from the detection electrode 3. The ion flow guiding electrode 8 is spatially positioned opposite to the direction of ion flow movement. Its function is to physically receive the ion flow generated from the high-voltage conductor 9. Since the ion flow guiding electrode 8 is electrically connected to the shielding shell 4, and the shielding shell 4 is at the same potential as the high-voltage conductor 9, the captured ion charges can be guided to the high-voltage end, thereby preventing charge accumulation on the electrode surface. An external electric field can penetrate the sensing space and act on the detection electrode 3. Under the action of the electric field, induced charges are generated on the surface of the detection electrode 3. This change in induced charges on the pair of detection electrodes 3 is transmitted to the core sensitive element 1 through the conductor 2, where it is further processed for signal processing and voltage calculation. In this embodiment, by placing the core sensitive element 1 inside the equipotential shielding shell 4 for protection, and simultaneously constructing an external sensing structure consisting of the detection electrode 3 and the ion flow guiding electrode 8, which is strictly isolated by an insulating layer, the separation of ion flow and electric field in the high-voltage DC environment is achieved. The ion flow guiding electrode 8 is responsible for receiving and guiding the ion flow, while the detection electrode 3 is responsible for sensing the useful electric field signal. The two work together to provide a relatively clean measurement signal source for the internal core sensitive element 1.

[0028] In summary, by setting an ion flow guiding electrode 8 that is at the same potential as the high-voltage end, the ion flow is physically captured and guided to the high-voltage end before it reaches the core sensing electrode 13. This avoids the continuous accumulation of ion charge on the key sensing surface of the sensor, eliminating the main factors that cause sensor output drift and accuracy degradation, thus ensuring the stability and reliability of the sensor during long-term operation in ultra-high voltage / extra-high voltage DC environments. This assurance of measurement stability makes a non-invasive voltage measurement scheme based on MEMS (Micro-Electro-Mechanical Systems) technology feasible in the ultra-high voltage / extra-high voltage field. The inherent advantages of MEMS technology—small size, low cost, and low power consumption—are fully utilized, allowing sensors to break free from the constraints of bulky and expensive traditional electromagnetic transformers. This makes them suitable for wide-area and dense deployment in scenarios such as power poles, providing key technical support for achieving comprehensive state perception of smart grids. Through innovative physical structure design, harmful ion flows are successfully separated and differentiated from useful electric field signals, both "shielding" interference and "conducting" signals. Ultimately, this enables miniature, low-cost MEMS voltage sensors to operate stably and accurately in harsh ultra-high voltage DC environments.

[0029] Furthermore, the insulating layer includes a pressure-resistant insulating layer 5 and a general insulating layer 6. One end of the detection electrode 3 is connected to the shielding shell 4 through the pressure-resistant insulating layer 5, and the other end of the detection electrode 3 is connected to the ion flow guiding electrode 8 through the general insulating layer 6.

[0030] Specifically, the insulation layer is clearly divided into a "voltage-resistant insulation layer 5" and a "general insulation layer 6" to address electrical and environmental challenges of different locations and natures. The voltage-resistant insulation layer 5 is positioned between the detection electrode 3, which withstands the maximum potential difference, and the shielding shell 4. Its core function is to provide sufficient insulation strength to prevent dielectric breakdown under extreme voltage gradients, serving as a crucial barrier to ensure the electrical safety and structural integrity of the entire sensor. In contrast, the general insulation layer 6 is positioned between the detection electrode 3 and the ion flow guiding electrode 8, which is also at a high potential. It withstands a relatively smaller potential difference, and its main function is to achieve electrical isolation, ensuring that the sensing signal from the detection electrode 3 does not leak. It also acts as a physical barrier, effectively blocking any residual ion flow from directly bombarding the detection electrode 3, thus ensuring measurement accuracy. To achieve stable operation of the sensor in harsh ultra-high voltage DC environments, its structural design employs a dual protection strategy. First, a crucial withstand voltage insulating layer 5 is placed between the detection electrode 3 and the shielding shell 4. As the main barrier to ensure electrical safety, this layer must withstand a huge potential difference in the megavolt range. Therefore, its material must be alumina ceramic or polytetrafluoroethylene with extremely high dielectric strength. Furthermore, its thickness is not a fixed value, but is precisely calculated based on the rated voltage and supplemented with several times the safety margin, thereby completely eliminating the risk of insulation breakdown. This is a prerequisite for the physical existence of the sensor. Based on this, to solve the measurement accuracy problem, an ion flow guiding electrode 8 is placed outside the detection electrode 3. Its technical effectiveness is reflected in its ingenious structural design: this electrode is designed as a mesh or porous plate, with an area significantly larger than the detection electrode to form sufficient shielding. This shape allows it to effectively intercept and guide the directional migration of ion flow while allowing the external electric field to penetrate with almost no attenuation. Through this design, the ion flow is introduced into the high-voltage end, avoiding the accumulation of charge that is difficult to dissipate on the surface of the detection electrode 3. This fundamentally ensures the long-term stability and accuracy of the sensor's output signal. These two designs each play their respective roles: the former ensures "survival" and the latter guarantees "precision." Together, they constitute the core technology for the sensor to work reliably under extreme conditions.

[0031] Furthermore, the core sensitive element includes a sensitive probe 11 and a receiving port 10. The sensitive probe 11 is connected to the detection electrode 3 via a wire 2, and the core sensitive element communicates remotely with the ground control power supply via the receiving port 10.

[0032] Furthermore, the voltage measurement sensor also includes a high-voltage wire 9, which is disposed on the outside of the shielding housing 4 and is electrically connected to the shielding housing 4.

[0033] Specifically, in actual deployment, the high-voltage conductor 9, the object of measurement for this voltage measurement sensor, is located outside its shielding shell 4 and is directly connected by a potential connection, ensuring that the shielding shell 4 and the high-voltage conductor 9 maintain a strictly equipotential state. The entire external structure of the sensor provides a stable high-potential reference, integrating the shielding shell 4, ion flow guiding electrode 8, and other external components into a unified whole with the conductor 2 being measured, thus avoiding unwanted potential differences and partial discharges between them. In such a high-potential environment, the weak electric field signal sensed by the detection electrode 3 is precisely introduced into the core sensitive element, located in a safe environment, through a specially designed wire 2 passing through the shielding shell 4. The signal input terminal of this core element is its sensitive probe 11, which directly receives and processes the raw sensed signal from the detection electrode 3. Simultaneously, to achieve non-contact remote monitoring, the core element also integrates a multifunctional receiving port 10. This port not only obtains the necessary operating energy from the ground wirelessly (e.g., via microwave or laser), but also acts as a data uplink, transmitting the processed and calculated voltage measurement results back in real time to the control power supply and data receiving unit located in a safe area on the ground. This forms a complete closed loop from high-voltage signal sensing, high-potential isolation transmission, internal safety processing, to long-distance data transmission, truly realizing non-intrusive online monitoring of ultra-high voltage equipment.

[0034] Furthermore, the core sensitive element includes several shielding electrodes 12 and several sensing electrodes 13, with the sensing electrodes 13 and the shielding electrodes 12 arranged in pairs.

[0035] Furthermore, the core sensitive element includes a metal package housing, which is connected to the sensitive probe 11 through an insulating material layer.

[0036] Furthermore, the ion flow guiding electrode 8 is electrically connected to the shielding shell 4 via the wire 2.

[0037] Specifically, to further enhance the integrity of the external structure and ensure its functionality, the ion flow guiding electrode 8 is reliably potential-connected to the shielding shell 4 via the wire 2, forming a unified equipotential shield that efficiently captures and guides the ion flow. Once the signal enters the shield, it is processed by a highly integrated core sensing element. This core element itself also possesses sophisticated electromagnetic protection, encased in a metal shell. The sensing probe 11, used to receive the signal, is connected to this metal shell via an insulating layer. This design ensures that the probe can sense the signal normally while the metal shell shields it from external electromagnetic interference. Inside the metal shell, the sensing mechanism consists of several pairs of shielding electrodes 12 and sensing electrodes 13. This differential or quasi-differential structure improves the measurement sensitivity and anti-interference capability, ensuring the accuracy and stability of the final output signal.

[0038] Furthermore, the shielding housing 4 is provided with a housing opening 15, which is configured as a movable opening and closing port.

[0039] Furthermore, the shielding electrode 12 is configured as a movable electrode.

[0040] Furthermore, the sensing electrode 13 outputs a sensor signal through the operational amplifier 14.

[0041] Specifically, the shielding shell 4 is equipotentially connected to the high-voltage conductor 9, and the non-invasive voltage sensor is placed inside the shielding shell to avoid interference from strong electric fields and ion flows. The material of the shielding shell 4 includes, but is not limited to, highly conductive metals such as aluminum, copper, and aluminum alloys. The detection electrode 3 is isolated from the shielding shell 4 by a voltage-resistant insulating layer 5, the type of which includes, but is not limited to, polytetrafluoroethylene, insulating alumina ceramic, and sapphire. The detection electrode 3 is connected to the sensitive probe 11 of the non-invasive voltage sensor via the conductor 2. When the high-voltage conductor 9 has ultra-high or extra-high voltage, the potential difference between it and the ground will generate a strong electric field outside the shielding shell. Part of the electric field is received by the ion flow guide plate, and part is received by the detection electrode 3, thereby generating an induced charge Q on the surface of the detection electrode 3, which is conducted to the surface of the sensor probe through the conductor 2. The ion current guiding electrode 8 and the detection electrode 3 are isolated by an insulating layer. The insulating layer material includes, but is not limited to, polytetrafluoroethylene, insulating alumina ceramic, and sapphire. The ion current guiding electrode 8 is made of a conductive metal material, including, but not limited to, aluminum, copper, and aluminum alloys, which have good conductivity. The ion current guiding electrode 8 is directly aligned with the ion current direction and is used to receive the ion current entering the shell from outside. Because the ion current is composed of ions, it moves towards the ion current guiding plate at extremely high speed under high voltage, and is less likely to be deflected inside the shell like electric field lines, thus avoiding collision with the detection electrode 3. The ion current guiding electrode 8 and the shielding shell 4 are connected at the same potential via a wire 2 to prevent charge accumulation on the surface of the ion current guiding electrode 8. The core sensing element 1 of the non-invasive voltage sensor is fabricated using an SOI wafer. Electrode fabrication, sensitive structure etching, and sensitive structure release are sequentially performed to form a shielding electrode 12, several sensing electrodes 13, and the shielding electrodes 12 appearing in pairs. Electrical isolation between the electrode leads is achieved through isolation trenches and an insulating layer between the substrate and the device layer. The sensing electrodes 13 consist of two parts, operating differentially during detection. The sensing electrodes 13 are alternately exposed to the electric field generated by the induced charge sensed by the sensitive probe 11. When the shielding electrode 12 moves horizontally to the left, the charge induced on the surface of the sensing electrode 13 decreases as it is gradually shielded. At the same time, the charge induced on the surface of the other sensing electrode 13 gradually increases as it is gradually exposed to the electric field. The difference in induced charge between the two electrodes, ΔQ = Q2 - Q1, is used to achieve differential detection and sensor signal output through a low-noise, high-precision operational amplifier 14. This amplifier also suppresses common-mode noise in the output signal. The sensor output communicates wirelessly with the ground receiving device 17 via the wireless transceiver module 16, enabling non-invasive measurement of UHV / EHV voltage signals. By flexibly adjusting the height of the sensing electrode 13 and the size of the opening in the shielding shell 4, the influence of the ion flow on the detection electrode 3 can be minimized.

[0042] This invention discloses a DC ultra-high voltage measurement sensor for measuring ultra-high voltage electric fields. It includes a detection electrode 3, a shielding shell 4, an insulating layer, an ion flow guiding electrode 8, and a core sensing element 1. An installation space is provided inside the shielding shell 4, and the core sensing element 1 is disposed within this installation space. A sensing space is provided outside the shielding shell 4, within which the detection electrode 3, the insulating layer, and the ion flow guiding electrode 8 are disposed. A pair of detection electrodes 3 are correspondingly disposed on both sides of the sensing space. One end of the detection electrode 3 is connected to the shielding shell 4 through the insulating layer, and the other end of the detection electrode 3 is connected to the ion flow guiding electrode 8 through the insulating layer. The ion flow guiding electrode 8 and the pair of detection electrodes 3 semi-enclose the sensing space, with the ion flow guiding electrode 8 directly corresponding to the ion flow direction and receiving the ion flow. The core sensing element 1 is connected to the detection electrode 3 via a wire 2. By setting an ion flow guiding electrode 8 that is at the same potential as the high-voltage end, the ion flow is physically captured and guided to the high-voltage end before it reaches the core sensing electrode 13. This avoids the continuous accumulation of ion charge on the key sensing surface of the sensor, eliminating the main factors that cause sensor output drift and accuracy degradation, thus ensuring the stability and reliability of the sensor in long-term operation under ultra-high voltage / extra-high voltage DC environments. Ensuring measurement stability makes a non-invasive voltage measurement scheme based on MEMS technology feasible in the ultra-high voltage / extra-high voltage field. The inherent advantages of MEMS technology—small size, low cost, and low power consumption—are fully utilized, allowing the sensor to break free from the bulky and expensive constraints of traditional electromagnetic transformers. It is suitable for wide-area, dense deployment in scenarios such as power poles, providing key technical support for achieving comprehensive state awareness of smart grids. Through innovative physical structure design, harmful ion flow is successfully separated and differentiated from useful electric field signals, both "shielding" interference and "conducting" the signal. Ultimately, this enables the miniature, low-cost MEMS voltage sensor to operate stably and accurately in harsh ultra-high voltage DC environments.

[0043] The above are merely specific embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in the present invention, and these modifications or substitutions should all be covered within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A DC ultra-high voltage measurement sensor, characterized in that, include: Detection electrodes, shielding shell, insulating layer, ion flow guiding electrode, and core sensitive element; An installation space is provided inside the shielding shell, and the core sensitive element is disposed within the installation space; A sensing space is provided on the outside of the shielding shell. The sensing space contains the detection electrode, the insulating layer, and the ion flow guiding electrode. A pair of detection electrodes are provided on both sides of the sensing space. One end of the detection electrode is connected to the shielding shell through the insulating layer, and the other end of the detection electrode is connected to the ion flow guiding electrode through the insulating layer. The ion flow guiding electrode and a pair of detection electrodes semi-enclose the sensing space. The ion flow guiding electrode is directly aligned with the ion flow direction and receives the ion flow. The core sensing element is connected to the detection electrode via a wire; The voltage measurement sensor also includes a high-voltage wire, which is disposed on the outside of the shielding shell and is connected to the shielding shell at the same potential; the ion flow guiding electrode is connected to the shielding shell at the same potential through the wire, and the area of ​​the ion flow guiding electrode is significantly larger than that of the detection electrode to form sufficient shielding; The insulating layer includes a voltage-resistant insulating layer and a general insulating layer. One end of the detection electrode is connected to the shielding shell through the voltage-resistant insulating layer, and the other end of the detection electrode is connected to the ion flow guiding electrode through the general insulating layer.

2. The DC ultra-high voltage measurement sensor according to claim 1, characterized in that, The shielding shell is provided with an opening, which is configured as a movable opening and closing port.

3. The DC ultra-high voltage measurement sensor according to claim 1, characterized in that, The core sensitive element includes a sensitive probe and a receiving port. The sensitive probe is connected to the detection electrode via a wire, and the core sensitive element communicates remotely with the ground control power supply via the receiving port.

4. The DC ultra-high voltage measurement sensor according to claim 3, characterized in that, The core sensitive element includes several shielding electrodes and several sensing electrodes, with the sensing electrodes and the shielding electrodes arranged in pairs.

5. The DC ultra-high voltage measurement sensor according to claim 3, characterized in that, The core sensitive element includes a metal encapsulation shell, which is connected to the sensitive probe through an insulating material layer.

6. The DC ultra-high voltage measurement sensor according to claim 4, characterized in that, The shielding electrode is configured as a movable electrode.

7. The DC ultra-high voltage measurement sensor according to claim 6, characterized in that, The sensing electrode outputs a sensor signal through an operational amplifier.

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