High-precision goniometer and application structure

Abstract

The invention discloses a high-precision goniometer and an application structure, the goniometer comprises an angle measuring seat, a driving device, a crystal disc main driving shaft, a first measuring module and a second measuring module, the first measuring module and the second measuring module are directly or indirectly installed on the angle measuring seat, the driving device is directly or indirectly installed on the first measuring module, and the crystal disc main driving shaft is installed on the second measuring module. The crystal disc main driving shaft is connected with the driving device, the driving device drives the crystal disc main driving shaft to rotate, and an O-shaped sealing ring is arranged on the face, connected with other components, of the angle measuring base. According to the invention, a motor heating body positioned in a sealing cavity is canceled, and an additional lead with a sealing penetrating plate is not needed, so that the structure is simplified, and the problem of heat dissipation in vacuum is avoided.

Description

Technical Field

[0001] This invention discloses a goniometer, particularly a high-precision goniometer and its application structure, belonging to the field of detection technology. Background Technology

[0002] A high-precision goniometer is a precision instrument used for accurate angle measurement. It is widely used in mechanical manufacturing, optical inspection, aerospace, precision machining, metrology and calibration and other fields. It can achieve high-accuracy measurement of various angle parameters such as plane angle, perpendicularity, tilt angle and rotation angle. Its measurement accuracy is far higher than that of basic angle measuring tools such as ordinary protractors and angle rulers, usually reaching the arcsecond level (1 arcsecond = 1 / 3600 degrees) or even higher.

[0003] The grating-type electronic goniometer relies on grating displacement sensing technology to convert angle measurements into electrical signals. After circuit processing, it directly outputs digital values. It features fast measurement speed, high degree of automation, and the ability to be linked with computers. It is more suitable for online inspection on industrial production lines and angle positioning of CNC equipment. Its core advantages are high resolution, low indication error, and good repeatability. It can meet the stringent requirements for angle accuracy in high-end manufacturing. For example, it is an indispensable key metrology device in scenarios such as semiconductor wafer cutting, aero-engine blade angle detection, angle deviation measurement of precision bearings, and pointing calibration of astronomical telescopes.

[0004] In a spectrometer, a high-precision goniometer is one of the core components. Its main function is to achieve the dispersion, positioning, and detection of X-rays by precisely controlling and measuring angles. It directly determines the wavelength resolution, elemental analysis accuracy, and detection sensitivity of the spectrometer, and is the fundamental guarantee for completing qualitative and quantitative elemental analysis in a spectrometer.

[0005] The moving parts driven by a goniometer during operation typically need to operate within a sealed cavity, especially when used in wavelength dispersive X-ray fluorescence spectrometers. These sealed cavities usually require vacuuming or filling with various gases, with a typical application being a vacuum state. However, heat dissipation is extremely difficult in a vacuum. Since the entire goniometer is located within a sealed cavity, the heat generated by its drive motor is difficult to dissipate, making it prone to malfunction and significantly shortening its lifespan. Furthermore, an external cable is required. Summary of the Invention

[0006] In view of the aforementioned drawbacks of existing goniometers that are easily damaged in a vacuum environment, this invention provides a high-precision goniometer and its application structure. Through a sealed structure, it can be installed externally outside the vacuum environment, effectively preventing damage caused by excessive heat.

[0007] The technical solution adopted by the present invention to solve its technical problem is: a high-precision goniometer, the goniometer includes a goniometer base, a drive device, a crystal disk main drive shaft, a first measurement module and a second measurement module, the first measurement module and the second measurement module are respectively directly or indirectly mounted on the goniometer base, the drive device is directly or indirectly mounted on the first measurement module, the crystal disk main drive shaft is connected to the drive device, the drive device drives the crystal disk main drive shaft to rotate, and an O-ring is provided on the side of the goniometer base that is connected to other components.

[0008] An application structure for a high-precision goniometer as described above includes a high-precision goniometer and a vacuum chamber. The goniometer is fixedly installed outside the vacuum chamber. The end face of the goniometer seat is attached to the vacuum chamber. The main drive shaft of the crystal disk, the inner shaft of the goniometer disk, and the outer shaft of the goniometer disk extend into the vacuum chamber. An O-ring is provided between the end face of the goniometer seat and the vacuum chamber.

[0009] The technical solution adopted by the present invention to solve its technical problem further includes: The driving device includes a stepper motor, a motor base, a drive base, a collimating aperture blocking disc, and a blocking disc photoelectric switch. The motor base is fixedly mounted on the drive base, the stepper motor is fixedly mounted on the motor base, the collimating aperture blocking disc is fixedly mounted on the motor shaft of the stepper motor, the collimating aperture blocking disc has a notch, and the blocking disc photoelectric switch is fixedly mounted at the corresponding position on the drive base.

[0010] The motor shaft of the stepper motor is connected to the main drive shaft of the crystal disk via a coupling.

[0011] The first measuring module of the stepper motor includes a first torque motor, a first stator clamping ring, a first stator base, a first circular grating, a first grating base, a first rotor base, a first rotor clamping ring, an inner shaft of a measuring disc, a first grating ruler reading head, and a first reading head mounting base. The first stator clamping ring is fixedly mounted on the first stator base. The first torque motor is mounted between the first stator base and the first stator clamping ring and is fixed by the first stator clamping ring. The first circular grating is fixedly mounted on the first grating base. The first rotor base is located inside the first torque motor. The first grating base and the first rotor base are fixedly mounted together. A drive base is fixedly mounted on the first grating base. A shaft is fitted onto the first rotor base. The bearing is located between the first rotor seat and the first torque motor. The inner shaft of the measuring disc is fixedly installed together with the first rotor seat. The first reading head mounting seat is fixedly installed on the first stator seat. The first grating ruler reading head is fixedly installed on the first reading head mounting seat and is set corresponding to the first circular grating. A first bearing seat is opened on the first brake pad support and a second bearing seat is opened on the second brake pad support. A first brake shaft bearing is fitted on the first brake shaft and is located in the first bearing seat and the second bearing seat. The first brake seat is fixedly installed on the first stator seat. The first brake support is fixedly installed on the first brake seat and the first brake shaft is inserted into the first brake support.

[0012] A first brake pad is fixedly mounted on the first grating base, and a first brake module is fixedly mounted on the first stator base. The first brake module is configured corresponding to the first brake pad. The first brake module includes a first brake seat, a first brake support, a first brake pad support, a second brake pad support, a first electromagnet sleeve, a first electromagnet suction plate, a first electromagnet, a first brake pad, a first permanent magnet, and a first brake shaft. The first brake pad support and the second brake pad support are arranged opposite to each other, and the first brake shaft is installed between the first brake pad support and the second brake pad support. The first brake pad includes upper and lower pieces, which are respectively mounted on one end of the first brake pad support and the second brake pad support. The brake pads are positioned between the two first brake pads. A first electromagnet sleeve is fixedly installed on the first brake pad holder, and the first electromagnet is fixedly installed on the first electromagnet sleeve. A first electromagnet attractor is fixedly installed on the second brake pad holder, and the first electromagnet attractor is positioned corresponding to the first electromagnet. The two first brake pads are respectively installed at one end of the first brake pad holder and the second brake pad holder. A first permanent magnet is installed at the other end of the first brake pad holder and the second brake pad holder. The first permanent magnet has two parts, upper and lower, which are respectively installed on the first brake pad holder and the second brake pad holder. The upper and lower first permanent magnets are arranged opposite each other, and the magnetic poles on the opposite sides are the same.

[0013] The second measurement module of the stepper motor includes a second torque motor, a second stator clamping ring, a second stator base, a second circular grating, a second rotor base, an outer shaft of a measuring disc, a second grating ruler reading head, and a second reading head mounting base. The second stator base is fixedly installed together with the first stator base. The second stator clamping ring is fixedly installed on the second stator base. The second torque motor is installed between the second stator base and the second stator clamping ring and is fixed by the second stator clamping ring. The second circular grating is fixedly installed on the outer shaft of the measuring disc. The second rotor base is located inside the second torque motor. The outer shaft of the measuring disc is fixedly installed together with the second rotor base. The upper part is fitted with a bearing, which is located between the second rotor seat and the second torque motor. The second reading head mounting seat is fixedly mounted on the second stator seat. The second grating ruler reading head is fixedly mounted on the second reading head mounting seat and is set corresponding to the second circular grating. The third bearing seat is provided on the third brake pad support, and the fourth bearing seat is provided on the fourth brake pad support. The second brake shaft is fitted with a second brake shaft bearing, which is located in the third and fourth bearing seats. The second brake seat is fixedly mounted on the second stator seat, and the second brake support is fixedly mounted on the second brake seat. The second brake shaft is inserted into the second brake support.

[0014] A second brake pad is fixedly mounted on the outer shaft of the measuring disc, and a second brake module is fixedly mounted on the second stator seat. The second brake module is arranged corresponding to the second brake pad. The second brake module includes a second brake seat, a second brake support, a third brake pad support, a fourth brake pad support, a second electromagnet sleeve, a second electromagnet suction plate, a second electromagnet, a second brake pad, a second permanent magnet, and a second brake shaft. The third and fourth brake pad supports are arranged opposite to each other, and the second brake shaft is installed between the third and fourth brake pad supports. The second brake pad includes upper and lower pieces, which are respectively installed on one end of the third and fourth brake pad supports. The brake pads are positioned between the two second brake pads. A second electromagnet sleeve is fixedly installed on the third brake pad support, and the second electromagnet is fixedly installed on the second electromagnet sleeve. A second electromagnet attractor is fixedly installed on the fourth brake pad support, and the second electromagnet attractor is positioned corresponding to the second electromagnet. The two second brake pads are respectively installed at one end of the third and fourth brake pad supports. A second permanent magnet is installed at the other end of the third and fourth brake pad supports. The second permanent magnet has upper and lower parts, which are respectively installed on the third and fourth brake pad supports. The upper and lower second permanent magnets are arranged opposite each other, and the magnetic poles on the opposite sides are the same.

[0015] The stepper motor has a crystal disk main drive shaft fitted with a bearing, which is located between the crystal disk main drive shaft and the inner shaft of the angle measuring disk. A first lip seal is fitted on the crystal disk main drive shaft, which is located between the crystal disk main drive shaft and the inner shaft of the angle measuring disk. The inner shaft of the angle measuring disk is inserted into the outer shaft of the angle measuring disk. A bearing and a second lip seal are fitted on the inner shaft of the angle measuring disk, which are located between the inner shaft and the outer shaft of the angle measuring disk. The bottom of the outer shaft of the angle measuring disk is inserted into the angle measuring seat. A bearing and a third lip seal are fitted on the outer shaft of the angle measuring disk, which are located between the outer shaft of the angle measuring disk and the angle measuring seat.

[0016] The first stator base and the second stator base of the stepper motor are provided with heat dissipation layers on their outer sides, and the heat dissipation layers are provided corresponding to the second torque motor. Heat dissipation channels are fixedly installed on the second stator base.

[0017] The beneficial effects of the present invention are: the present invention eliminates the motor heating element located in the sealed cavity, and does not require additional sealed through-plate wires, simplifying the structure and avoiding heat dissipation problems in a vacuum.

[0018] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. Attached Figure Description

[0019] Figure 1 This is a three-dimensional structural diagram of the present invention.

[0020] Figure 2 This is a schematic diagram of the decomposed state structure of the present invention.

[0021] Figure 3 This is a schematic diagram of the disassembled structure of the driving device in this invention.

[0022] Figure 4 This is a partial exploded view of the first measurement module in this invention.

[0023] Figure 5 This is a partial exploded view of the second measurement module in this invention.

[0024] Figure 6 This is a schematic diagram of the exploded state of the heat dissipation structure in this invention.

[0025] Figure 7 This is a partial exploded view of the first brake module in this invention.

[0026] Figure 8 This is a schematic diagram of the exploded state structure of the second brake module in this invention.

[0027] Figure 9 This is a schematic diagram of the assembly structure when the present invention is applied.

[0028] Figure 10 This is a schematic diagram of the separate structure when the present invention is applied.

[0029] Figure 11 This is a second-view schematic diagram of the assembly structure when the present invention is applied.

[0030] Figure 12 This is a schematic diagram of the second perspective of the split structure when the present invention is applied.

[0031] In the diagram, 1-Angle measuring base, 11-Heat dissipation layer, 12-Heat dissipation channel, 13-O-ring seal, 100-Angle measuring instrument, 2-Drive device, 21-Stepper motor, 211-Motor shaft, 22-Motor base, 23-Drive base, 24-Collimation aperture blocking optical disc, 241-Blocking optical disc notch, 25-Blocking optical disc photoelectric switch, 26-Coupling, 27-Crystal disk main drive shaft, 28-First bearing, 29-Second bearing, 210-First lip seal, 3-First measuring module, 31-First torque motor, 32-First stator clamping ring, 3 3-First stator base, 34-First circular grating, 35-First grating base, 36-First brake pad, 37-First rotor base, 38-Rotor clamping ring, 39-Inner shaft of measuring disc, 310-Third bearing, 311-Fourth bearing, 312-Fifth bearing, 313-Sixth bearing, 314-Second lip seal, 315-First grating ruler reading head, 316-First reading head mounting base, 4-Second measuring module, 41-Second torque motor, 42-Second stator clamping ring, 43-Second stator base, 44-Second circular grating, 4 6-Second brake pad, 47-Second rotor seat, 49-Outer shaft of measuring disc, 410-Seventh bearing, 411-Eighth bearing, 412-Ninth bearing, 413-Third lip seal, 415-Second grating ruler reading head, 416-Second reading head mounting seat, 5-First brake module, 51-First brake seat, 52-First brake support, 53-First brake pad support, 531-First bearing seat, 54-Second brake pad support, 541-Second bearing seat, 55-First electromagnet sleeve, 56-First electromagnet suction plate, 57-First electromagnet... Magnet, 58-First brake pad, 59-First permanent magnet, 510-First brake shaft, 511-First brake shaft bearing, 6-Second brake module, 61-Second brake seat, 62-Second brake support, 63-Third brake pad support, 631-Third bearing seat, 64-Fourth brake pad support, 641-Fourth bearing seat, 65-Second electromagnet sleeve, 66-Second electromagnet suction plate, 67-Second electromagnet, 68-Second brake pad, 69-Second permanent magnet, 610-Second brake shaft, 611-Second brake shaft bearing, 7-Vacuum chamber. Detailed Implementation

[0032] This embodiment is a preferred embodiment of the present invention. All other embodiments that are the same as or similar to this embodiment in principle and basic structure are within the protection scope of the present invention.

[0033] Please refer to the appendix for details. Figure 1 To be continued Figure 12 This invention primarily protects a high-precision goniometer, which mainly includes a goniometer base 1, a drive device 2, a crystal disk main drive shaft 27, a first measurement module 3, and a second measurement module 4. The first measurement module 3 and the second measurement module 4 are directly or indirectly mounted on the goniometer base 1, and the drive device 2 is directly or indirectly mounted on the first measurement module 3. The crystal disk main drive shaft 27 is connected to the drive device 2, and the drive device 2 drives the crystal disk main drive shaft 27 to rotate. The goniometer base 1 is the basic structure of this invention, serving as the main support and connecting with other components. An O-ring seal 13 is provided on the side of the goniometer base 1 that connects with other components, which can seal this end face.

[0034] In this embodiment, the driving device 2 mainly includes a stepper motor 21, a motor base 22, a drive base 23, a collimating aperture blocking disc 24, and a blocking disc photoelectric switch 25. The motor base 22 is fixedly mounted on the drive base 23, and the stepper motor 21 is fixedly mounted on the motor base 22. The collimating aperture blocking disc 24 is fixedly mounted on the motor shaft 211 of the stepper motor 21. The collimating aperture blocking disc 24 has a blocking disc notch 241. The blocking disc photoelectric switch 25 is fixedly mounted at the corresponding position on the drive base 23. When the blocking disc notch 241 on the collimating aperture blocking disc 24 rotates with the motor shaft 211 to the blocking disc photoelectric switch 25, the blocking disc photoelectric switch 25 outputs a control signal to the control device, which controls the stepper motor 21 to stop rotating.

[0035] In this embodiment, the motor shaft 211 of the stepper motor 21 is connected to the main drive shaft 27 of the crystal disk through the coupling 26, driving the main drive shaft 27 of the crystal disk to rotate.

[0036] In this embodiment, the first measuring module 3 mainly includes a first torque motor 31, a first stator clamping ring 32, a first stator base 33, a first circular grating 34, a first grating base 35, a first rotor base 37, a first rotor clamping ring 38, an inner shaft of a measuring disc 39, a first grating ruler reading head 315, and a first reading head mounting base 316. The first stator clamping ring 32 is fixedly mounted on the first stator base 33 by screws. The first torque motor 31 is mounted between the first stator base 33 and the first stator clamping ring 32 and is fixed by the first stator clamping ring 32. The first circular grating 34 is fixedly mounted on the first grating seat 35. The first rotor seat 37 is disposed inside the first torque motor 31. The first grating seat 35 is fixedly mounted to the first rotor seat 37 with screws. The drive seat 23 is fixedly mounted to the first grating seat 35 with screws. The first rotor seat 37 is fitted with a third bearing 310 and a fourth bearing 311, which are disposed between the first rotor seat 37 and the first torque motor 31. The inner shaft 39 of the angle measuring disk is fixedly mounted to the first rotor seat 37 with screws. The first reading head mounting seat 316 is fixedly mounted on the first stator seat 33. The first grating ruler reading head 315 is fixedly mounted on the first reading head mounting seat 316, and the first grating ruler reading head 315 is disposed corresponding to the first circular grating 34.

[0037] In this embodiment, a first brake pad 36 is fixedly installed on the first grating seat 35 by screws, and a first brake module 5 is fixedly installed on the first stator seat 33. The first brake module 5 is set corresponding to the first brake pad 36. The first brake module 5 can act on the first brake pad 36 to quickly stop the first grating seat 35 from rotating and maintain a fixed posture.

[0038] In this embodiment, the first brake module 5 mainly includes a first brake seat 51, a first brake support 52, a first brake pad support 53, a second brake pad support 54, a first electromagnet sleeve 55, a first electromagnet suction plate 56, a first electromagnet 57, a first brake pad 58, a first permanent magnet 59, and a first brake shaft 510. The first brake pad support 53 and the second brake pad support 54 are arranged opposite to each other. The first brake shaft 510 is installed between the first brake pad support 53 and the second brake pad support 54, allowing the first brake pad support 53 and the second brake pad support 54 to rotate freely relative to the first brake shaft 510. The first brake pad 58 includes upper and lower pieces, which are respectively installed on one end of the first brake pad support 53 and the second brake pad support 54. The first brake pad 36 is positioned in the middle of the two first brake pads 58. A first brake pad 36 is fixedly installed on the first brake pad support 53. An electromagnet sleeve 55 is provided, and a first electromagnet 57 is fixedly installed on the first electromagnet sleeve 55. A first electromagnet attracting plate 56 is fixedly installed on the second brake plate holder 54. The first electromagnet attracting plate 56 is set corresponding to the first electromagnet 57. When the first electromagnet 57 is energized, it can attract the first electromagnet attracting plate 56. The first electromagnet attracting plate 56 drives the second brake plate holder 54 to rotate along the first brake shaft 510. Two first brake plates 58 are respectively installed at one end of the first brake plate holder 53 and the second brake plate holder 54. A first permanent magnet 59 is respectively installed at the other end of the first brake plate holder 53 and the second brake plate holder 54. The first permanent magnet 59 is also provided with upper and lower parts. The upper and lower parts of the first permanent magnet 59 are respectively installed on the first brake plate holder 53 and the second brake plate holder 54. The upper and lower parts of the first permanent magnet 59 are arranged opposite each other, and the magnetic poles on the opposite side are the same.

[0039] In this embodiment, a first bearing seat 531 is provided on the first brake pad support 53, and a second bearing seat 541 is provided on the second brake pad support 54. A first brake shaft bearing 511 is fitted on the first brake shaft 510. The first brake shaft bearing 511 is disposed within the first bearing seat 531 and the second bearing seat 541, making the relative rotation between the first brake pad support 53 and the second brake pad support 54 smoother. In this embodiment, the first brake seat 51 is fixedly installed on the first stator seat 33, the first brake support 52 is fixedly installed on the first brake seat 51, and the first brake shaft 510 is inserted into the first brake support 52. The first brake support 52 is the support structure for the first brake module 5.

[0040] In use, the second brake pad holder 54 rotates along the first brake shaft 510 under the thrust of the first permanent magnet 59, and the two first brake pads 58 clamp the first brake pad 36, putting it in a braking state. When the first electromagnet 57 is activated, the first electromagnet 57 attracts the first electromagnet attracting plate 56, which overcomes the thrust between the two first permanent magnets 59, thereby releasing the two first brake pads 58 and allowing the first brake pad 36 to rotate freely.

[0041] In this embodiment, the second measuring module 4 mainly includes a second torque motor 41, a second stator clamping ring 42, a second stator base 43, a second circular grating 44, a second rotor base 47, an outer shaft of a measuring disc 49, a second grating ruler reading head 415, and a second reading head mounting base 416. The second stator base 43 is fixedly installed together with the first stator base 33 by screws. The second stator clamping ring 42 is fixedly installed on the second stator base 43 by screws. The second torque motor 41 is installed between the second stator base 43 and the second stator clamping ring 42 and is fixed by the second stator clamping ring 42. The second circular grating 44 is fixedly installed on the outer shaft of the measuring disc 49. The second rotor base 47 is located inside the second torque motor 41. The outer shaft of the measuring disc 49 is fixedly installed together with the second rotor base 47 by screws. A seventh bearing 410 is fitted on the second rotor base 47 and is located between the second rotor base 47 and the second torque motor 41. The second reading head mounting base 416 is fixedly mounted on the second stator base 43, and the second grating ruler reading head 415 is fixedly mounted on the second reading head mounting base 416. The second grating ruler reading head 415 is set corresponding to the second circular grating 44.

[0042] In this embodiment, a second brake pad 46 is fixedly installed on the outer shaft 49 of the angle measuring disk by screws, and a second brake module 6 is fixedly installed on the second stator seat 43. The second brake module 6 is set corresponding to the second brake pad 46. The second brake module 6 can act on the second brake pad 46 to quickly stop the rotation of the outer shaft 49 of the angle measuring disk and maintain a fixed posture.

[0043] In this embodiment, the second brake module 6 mainly includes a second brake seat 61, a second brake support 62, a third brake pad support 63, a fourth brake pad support 64, a second electromagnet sleeve 65, a second electromagnet suction plate 66, a second electromagnet 67, a second brake pad 68, a second permanent magnet 69, and a second brake shaft 610. The third brake pad support 63 and the fourth brake pad support 64 are arranged opposite to each other, and the second brake shaft 610 is installed between the third brake pad support 63 and the fourth brake pad support 64, allowing the third brake pad support 63 and the fourth brake pad support 64 to rotate freely relative to the second brake shaft 610. The second brake pad 68 includes upper and lower pieces, which are respectively installed on one end of the third brake pad support 63 and the fourth brake pad support 64. The second brake pad 46 is positioned in the middle of the two second brake pads 68. A second brake pad 46 is fixedly installed on the third brake pad support 63. An electromagnet sleeve 65 is provided, and a second electromagnet 67 is fixedly installed on the second electromagnet sleeve 65. A second electromagnet attracting plate 66 is fixedly installed on the fourth brake plate holder 64. The second electromagnet attracting plate 66 is set corresponding to the second electromagnet 67. When the second electromagnet 67 is energized, it can attract the second electromagnet attracting plate 66. The second electromagnet attracting plate 66 drives the fourth brake plate holder 64 to rotate along the second brake shaft 610. Two second brake plates 68 are respectively installed at one end of the third brake plate holder 63 and the fourth brake plate holder 64. A second permanent magnet 69 is respectively installed at the other end of the third brake plate holder 63 and the fourth brake plate holder 64. The second permanent magnet 69 is also provided with upper and lower pieces. The upper and lower pieces of the second permanent magnet 69 are respectively installed on the third brake plate holder 63 and the fourth brake plate holder 64. The upper and lower pieces of the second permanent magnet 69 are arranged opposite each other, and the magnetic poles on the opposite side are the same.

[0044] In this embodiment, a third bearing seat 631 is provided on the third brake pad support 63, and a fourth bearing seat 641 is provided on the fourth brake pad support 64. A second brake shaft bearing 611 is fitted on the second brake shaft 610. The second brake shaft bearing 611 is disposed within the third bearing seat 631 and the fourth bearing seat 641, making the relative rotation between the third brake pad support 63 and the fourth brake pad support 64 smoother. In this embodiment, the second brake seat 61 is fixedly installed on the second stator seat 43, the second brake support 62 is fixedly installed on the second brake seat 61, and the second brake shaft 610 is inserted into the second brake support 62. The second brake support 62 is the support structure for the second brake module 6.

[0045] In use, the fourth brake pad holder 64 rotates along the second brake shaft 610 under the thrust of the second permanent magnet 69, and the two second brake pads 68 clamp the second brake pad 46, putting it in a braking state. When the second electromagnet 67 is activated, the second electromagnet 67 attracts the second electromagnet attractor 66, which overcomes the thrust between the two second permanent magnets 69, thereby releasing the two second brake pads 68 and allowing the second brake pad 46 to rotate freely.

[0046] In this embodiment, a first bearing 28 and a second bearing 29 are mounted on the main drive shaft 27 of the crystal disk. The first bearing 28 and the second bearing 29 are respectively disposed between the main drive shaft 27 of the crystal disk and the inner shaft 39 of the measuring disk, which can make the main drive shaft 27 of the crystal disk rotate more smoothly relative to the inner shaft 39 of the measuring disk. A first lip seal 210 is mounted on the main drive shaft 27 of the crystal disk. The first lip seal 210 is disposed between the first bearing 28 and the second bearing 29, which can seal the main drive shaft 27 of the crystal disk and the inner shaft 39 of the measuring disk, preventing air from passing through the space between the main drive shaft 27 of the crystal disk and the inner shaft 39 of the measuring disk.

[0047] In this embodiment, the inner shaft 39 of the angle measuring disk is inserted inside the outer shaft 49 of the angle measuring disk. A fifth bearing 312, a sixth bearing 313, and a second lip seal 314 are fitted on the inner shaft 39. The fifth bearing 312, the sixth bearing 313, and the second lip seal 314 are disposed between the inner shaft 39 and the outer shaft 49 of the angle measuring disk. The fifth bearing 312 and the sixth bearing 313 ensure smoother relative rotation between the inner shaft 39 and the outer shaft 49 of the angle measuring disk. The second lip seal 314 is disposed between the inner shaft 39 and the outer shaft 49 of the angle measuring disk to seal between them and prevent air from passing through between them.

[0048] In this embodiment, the bottom of the outer shaft 49 of the angle measuring disk is inserted into the angle measuring seat 1. An eighth bearing 411, a ninth bearing 412, and a third lip seal 413 are fitted on the outer shaft 49. The eighth bearing 411, the ninth bearing 412, and the third lip seal 413 are arranged between the outer shaft 49 of the angle measuring disk and the angle measuring seat 1. The arrangement of the eighth bearing 411 and the ninth bearing 412 can ensure smoother relative rotation between the outer shaft 49 of the angle measuring disk and the angle measuring seat 1. The third lip seal 413 is arranged between the outer shaft 49 of the angle measuring disk and the angle measuring seat 1 to seal between the outer shaft 49 of the angle measuring disk and the angle measuring seat 1, preventing air from passing through between the outer shaft 49 of the angle measuring disk and the angle measuring seat 1.

[0049] In this invention, a first lip seal 210, a second lip seal 314, and a third lip seal 413 are cascaded together to seal the inside of the goniometer 100. Combined with the O-ring seal 13 at the end face, it can ensure absolute sealing.

[0050] In this embodiment, a heat dissipation layer 11 is provided on the outer side of the first stator base 33 and the second stator base 43. The heat dissipation layer 11 is provided corresponding to the second torque motor 41. A heat dissipation channel 12 is fixedly installed on the second stator base 43. A fan can be connected to the heat dissipation channel 12. The cold air blown by the fan passes through the heat dissipation channel 12 and is blown into the space between the heat dissipation layer 11 and the second torque motor 41, so as to perform forced air cooling of the second torque motor 41. This can ensure that the first torque motor 31 and the second torque motor 41 do not operate in a high temperature environment, and can also effectively reduce the impact of the heat generated by the first torque motor 31 and the second torque motor 41 on other components. In specific implementation, the cooling medium can also be nitrogen, water, oil, etc., but air is generally the main medium. Other cooling media can be selected in special cases.

[0051] The application of this invention will be further explained below using an X-ray fluorescence spectrometer as an example. The sample detection component of the X-ray fluorescence spectrometer is set inside the vacuum chamber 7, and the goniometer 100 is fixedly installed outside the vacuum chamber 7. The end face of the goniometer 1 is attached to the vacuum chamber 7. The crystal disk main drive shaft 27, the inner shaft 39 of the goniometer disk, and the outer shaft 49 of the goniometer disk extend into the vacuum chamber 7 and are connected to the corresponding components. An O-ring seal 13 is provided between the end face of the goniometer 1 and the vacuum chamber 7 to prevent air from entering the vacuum chamber 7 from between the end face of the goniometer 1 and the vacuum chamber 7. The goniometer 100 is provided with a cascaded first lip seal 210, a second lip seal 314, and a third lip seal 413 to prevent air from entering the vacuum chamber 7 from inside the goniometer 1. Therefore, setting the goniometer 100 outside the vacuum chamber 7 will not affect the use of the goniometer 1 or the vacuum degree inside the vacuum chamber 7, and will also avoid the influence of the heat generated by the goniometer 1 on the sample detection.

[0052] In this invention, the crystal disk main drive shaft 27, the inner shaft of the angle measuring disk 39, and the outer shaft of the angle measuring disk 49 are each driven independently and installed in a nested manner to form a system that can accurately rotate a certain angle and measure the angle.

[0053] This invention eliminates the motor heating element located inside the sealed cavity and eliminates the need for additional sealed through-plate wires, simplifying the structure and avoiding heat dissipation problems in a vacuum.

Claims

1. A high-precision angle measuring instrument, characterized in that: The goniometer includes a goniometer base (1), a drive device (2), a crystal disk main drive shaft (27), a first measurement module (3) and a second measurement module (4). The first measurement module (3) and the second measurement module (4) are directly or indirectly mounted on the goniometer base (1), the drive device (2) is directly or indirectly mounted on the first measurement module (3), the crystal disk main drive shaft (27) is connected to the drive device (2), and the drive device (2) drives the crystal disk main drive shaft (27) to rotate. An O-ring (13) is provided on the side of the goniometer base (1) that is connected to other components.

2. The high-precision angle measuring instrument according to claim 1, characterized in that: The driving device (2) includes a stepper motor (21), a motor mount (22), a drive mount (23), a collimating aperture blocking disc (24), and a blocking disc photoelectric switch (25). The motor mount (22) is fixedly mounted on the drive mount (23), the stepper motor (21) is fixedly mounted on the motor mount (22), the collimating aperture blocking disc (24) is fixedly mounted on the motor shaft (211) of the stepper motor (21), the collimating aperture blocking disc (24) has a blocking disc notch (241), and the blocking disc photoelectric switch (25) is fixedly mounted at the corresponding position on the drive mount (23).

3. The high-precision angle measuring instrument according to claim 1, characterized in that: The motor shaft (211) of the stepper motor (21) is connected to the main drive shaft (27) of the crystal disk via a coupling (26).

4. The high-precision angle measuring instrument according to claim 1, characterized in that: The first measuring module (3) of the stepper motor (21) includes a first torque motor (31), a first stator clamping ring (32), a first stator base (33), a first circular grating (34), a first grating base (35), a first rotor base (37), a first rotor clamping ring (38), an inner shaft of a measuring disc (39), a first grating ruler reading head (315), and a first reading head mounting base (316). The first stator clamping ring (32) is fixedly mounted on the first stator base (33), and the first torque motor (31) is... The motor (31) is installed between the first stator seat (33) and the first stator clamping ring (32) and is fixed by the first stator clamping ring (32). The first circular grating (34) is fixedly installed on the first grating seat (35). The first rotor seat (37) is located inside the first torque motor (31). The first grating seat (35) and the first rotor seat (37) are fixedly installed together. The drive seat (23) is fixedly installed on the first grating seat (35). The first rotor seat (37) is fitted with a bearing. The bearing is located between the first rotor seat (37) and the first torque motor (31). The inner shaft (39) of the angle measuring disk is fixedly installed together with the first rotor seat (37). The first reading head mounting seat (316) is fixedly installed on the first stator seat (33). The first grating ruler reading head (315) is fixedly installed on the first reading head mounting seat (316). The first grating ruler reading head (315) is set corresponding to the first circular grating (34). The first bearing seat (5) is opened on the first feed plate holder (53). 31) A second bearing seat (541) is provided on the second brake pad support (54), and a first brake shaft bearing (511) is fitted on the first brake shaft (510). The first brake shaft bearing (511) is located in the first bearing seat (531) and the second bearing seat (541). The first brake seat (51) is fixedly installed on the first stator seat (33), and the first brake support (52) is fixedly installed on the first brake seat (51). The first brake shaft (510) is inserted into the first brake support (52).

5. The high-precision angle measuring instrument according to claim 4, characterized in that: A first brake pad (36) is fixedly installed on the first grating seat (35), and a first brake module (5) is fixedly installed on the first stator seat (33). The first brake module (5) is arranged corresponding to the first brake pad (36). The first brake module (5) includes a first brake seat (51), a first brake support (52), a first brake pad support (53), a second brake pad support (54), a first electromagnet sleeve (55), a first electromagnet suction plate (56), a first electromagnet (57), a first brake pad (58), a first permanent magnet (59), and a first brake shaft (510). The first brake pad support (53) and the second brake pad support (54) are arranged opposite to each other. The first brake shaft (510) is installed between the first brake pad support (53) and the second brake pad support (54). The first brake pad (58) includes two pieces, an upper piece and an lower piece. The upper and lower pieces of the first brake pad (58) are respectively installed on the first brake pad support (53) and the second brake pad support (54). 54) At one end, the first brake pad (36) is positioned between the two first brake pads (58). The first electromagnet sleeve (55) is fixedly installed on the first brake pad holder (53). The first electromagnet (57) is fixedly installed on the first electromagnet sleeve (55). The first electromagnet suction plate (56) is fixedly installed on the second brake pad holder (54). The first electromagnet suction plate (56) is positioned corresponding to the first electromagnet (57). The two first brake pads (58) are respectively installed at one end of the first brake pad holder (53) and the second brake pad holder (54). The other end of the first brake pad holder (53) and the second brake pad holder (54) are respectively equipped with a first permanent magnet (59). The first permanent magnet (59) is provided with two upper and lower pieces. The upper and lower pieces of the first permanent magnet (59) are respectively installed on the first brake pad holder (53) and the second brake pad holder (54). The upper and lower pieces of the first permanent magnet (59) are arranged opposite each other, and the magnetic poles on the opposite side are the same.

6. The high-precision angle measuring instrument according to claim 1, characterized in that: The second measuring module (4) of the stepper motor (21) includes a second torque motor (41), a second stator clamping ring (42), a second stator base (43), a second circular grating (44), a second rotor base (47), an outer shaft of a measuring disc (49), a second grating ruler reading head (415), and a second reading head mounting base (416). The second stator base (43) is fixedly installed together with the first stator base (33). The second stator clamping ring (42) is fixedly installed on the second stator base (43). The second torque motor (41) is installed between the second stator base (43) and the second stator clamping ring (42) and is fixed by the second stator clamping ring (42). The second circular grating (44) is fixedly installed on the outer shaft of the measuring disc (49). The second rotor base (47) is located inside the second torque motor (41). The outer shaft of the measuring disc (49) is fixedly installed together with the second rotor base (47). The second rotor base (47) is fitted with a... The device is equipped with bearings, which are located between the second rotor seat (47) and the second torque motor (41). The second reading head mounting seat (416) is fixedly mounted on the second stator seat (43). The second grating ruler reading head (415) is fixedly mounted on the second reading head mounting seat (416) and is set corresponding to the second circular grating (44). The third bearing seat (631) is provided on the third brake pad support (63), and the fourth bearing seat (641) is provided on the fourth brake pad support (64). The second brake shaft (610) is fitted with a second brake shaft bearing (611), which is located in the third bearing seat (631) and the fourth bearing seat (641). The second brake seat (61) is fixedly mounted on the second stator seat (43), and the second brake support (62) is fixedly mounted on the second brake seat (61). The second brake shaft (610) is inserted into the second brake support (62).

7. The high-precision angle measuring instrument according to claim 6, characterized in that: A second brake pad (46) is fixedly installed on the outer shaft (49) of the measuring disc, and a second brake module (6) is fixedly installed on the second stator seat (43). The second brake module (6) is set corresponding to the second brake pad (46). The second brake module (6) includes a second brake seat (61), a second brake support (62), a third brake pad support (63), a fourth brake pad support (64), a second electromagnet sleeve (65), a second electromagnet suction plate (66), a second electromagnet (67), a second brake pad (68), a second permanent magnet (69), and a second brake shaft (610). The third brake pad support (63) and the fourth brake pad support (64) are arranged opposite to each other. The second brake shaft (610) is installed between the third brake pad support (63) and the fourth brake pad support (64). The second brake pad (68) includes upper and lower pieces. The upper and lower pieces of the second brake pad (68) are respectively installed on the third brake pad support (63) and the fourth brake pad support (64). 64) At one end, the second brake pad (46) is positioned between the two second brake pads (68). The second electromagnet sleeve (65) is fixedly installed on the third brake pad holder (63). The second electromagnet (67) is fixedly installed on the second electromagnet sleeve (65). The second electromagnet suction plate (66) is fixedly installed on the fourth brake pad holder (64). The second electromagnet suction plate (66) is positioned corresponding to the second electromagnet (67). The two second brake pads (68) are respectively installed at one end of the third brake pad holder (63) and the fourth brake pad holder (64). The other end of the third brake pad holder (63) and the fourth brake pad holder (64) is respectively equipped with a second permanent magnet (69). The second permanent magnet (69) is provided with two upper and lower pieces. The upper and lower pieces of the second permanent magnet (69) are respectively installed on the third brake pad holder (63) and the fourth brake pad holder (64). The upper and lower pieces of the second permanent magnet (69) are arranged opposite each other, and the magnetic poles on the opposite side are the same.

8. The high-precision angle measuring instrument according to claim 1, characterized in that: The stepper motor (21) has a bearing mounted on its crystal disk main drive shaft (27), which is located between the crystal disk main drive shaft (27) and the inner shaft (39) of the angle measuring disk. A first lip seal (210) is mounted on the crystal disk main drive shaft (27), which is located between the crystal disk main drive shaft (27) and the inner shaft (39) of the angle measuring disk. The inner shaft (39) of the angle measuring disk is inserted inside the outer shaft (49) of the angle measuring disk. (39) is fitted with a bearing and a second lip seal (314), which are located between the inner shaft (39) and the outer shaft (49) of the angle measuring disk. The bottom of the outer shaft (49) of the angle measuring disk is inserted into the angle measuring seat (1). The outer shaft (49) of the angle measuring disk is fitted with a bearing and a third lip seal (413), which are located between the outer shaft (49) and the angle measuring seat (1).

9. The high-precision angle measuring instrument according to claim 1, characterized in that: The first stator base (33) and the second stator base (43) of the stepper motor (21) are provided with a heat dissipation layer (11) on the outside. The heat dissipation layer (11) is provided corresponding to the second torque motor (41). A heat dissipation channel (12) is fixedly installed on the second stator base (43).

10. An application structure for a high-precision goniometer as described in any one of claims 1 to 9, characterized in that: The application structure includes a high-precision goniometer (100) and a vacuum chamber (7) as described in any one of claims 1 to 9. The goniometer (100) is fixedly installed outside the vacuum chamber (7). The end face of the goniometer seat (1) is attached to the vacuum chamber (7). The crystal disk main drive shaft (27), the inner shaft (39) of the goniometer disk, and the outer shaft (49) of the goniometer disk extend into the vacuum chamber (7) respectively. An O-ring (13) is provided between the end face of the goniometer seat (1) and the vacuum chamber (7).

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