Enclosed CO2 laser employing diffusion cooling and longitudinal DC discharge

Abstract

The application discloses a closed CO2 laser adopting diffusion cooling and longitudinal direct-current discharge, belongs to the technical field of laser beam beam combining, and comprises a vibration suppression component, the vibration suppression component comprising a beam combining assembly, a laser for emitting laser beams is arranged in the beam combining assembly, a folding mirror for reflecting the laser beams is arranged in the beam combining assembly, and optical elements for transmitting and reflecting different laser beams are arranged in the beam combining assembly. Through accurate light distribution of the folding mirror and the optical elements, reflection and transmission of four different polarization and different waveband laser beams are realized, and the four different polarization and different waveband laser beams are finally combined into one laser output. On the premise of maintaining the original beam quality of the single laser, the power of the combined beam is improved by several times. The beam combining path is accurately matched with the laser light path, there is no additional optical loss, the spot uniformity, coaxiality and polarization characteristics of the laser beams after beam combining are ensured, and the strict requirements of industrial precision machining on the quality of the laser beams are met.

Description

Technical Field

[0001] This invention relates to the field of laser beam combining technology, and more specifically, to a closed CO2 laser employing diffusion cooling and longitudinal DC discharge. Background Technology

[0002] Enclosed diffusion-cooled longitudinal DC discharge CO2 lasers are widely used in industrial precision processing scenarios such as laser marking, fine cutting, and microelectronic packaging due to their core advantages such as maintenance-free operation, no gas replenishment required, compact structure, and stable operation. These lasers typically output mid-infrared lasers in the 10.6μm or 9.6μm band, and can achieve multi-path laser power superposition based on polarization incoherent beam combining technology, which is a key direction for improving laser output power and expanding processing application scenarios.

[0003] The rated power of closed-type diffusion-cooled longitudinal DC discharge CO2 lasers is usually no more than 300-400W. This limitation is due to the fact that the output power per unit length of the activation medium is limited to 100W / m. Therefore, the output power of a single laser is difficult to meet the requirements of high power and high efficiency processing, and multi-channel laser beam combining technology is needed to achieve a power increase of several times.

[0004] Existing laser beam combining devices often use a structure of folding mirrors connecting multiple discharge tubes to increase the power of enclosed diffusion-cooled longitudinal DC discharge CO2 lasers, which significantly increases the complexity of the laser resonator design. Furthermore, due to the necessity of folding mirrors, this design also leads to an increase in the number of folding mirrors, limiting the scalability of the solution and causing a decrease in laser transmission efficiency.

[0005] In view of this, we propose a closed CO2 laser with diffusion cooling and longitudinal DC discharge. Summary of the Invention

[0006] Technical problem to be solved: The purpose of this invention is to provide a closed CO laser that employs diffusion cooling and longitudinal DC discharge, thereby solving the technical problems mentioned in the background art.

[0007] Technical Solution: The present invention provides a closed CO laser employing diffusion cooling and longitudinal DC discharge, including a vibration suppression component, which includes a beam combining assembly. The beam combining assembly contains a laser for emitting a laser beam, a folding mirror for reflecting the laser beam, and optical elements for transmitting and reflecting different laser beams. The bottom of the beam combining assembly contains an elastic vibration isolation pad for isolating the laser. The beam combining assembly also contains a vibration isolation component for suppressing vibrations in the folding mirror and optical elements.

[0008] The adjustment component includes an adjustment assembly disposed within the beam combiner for adjusting the tension of the folding mirror and optical elements, wherein the beam combiner is internally provided with a trigger assembly for driving the adjustment assembly to adjust.

[0009] As an optional solution to the technical solution of this invention, the beam combining assembly includes a beam combining base, a composite shock-absorbing pad at the bottom of the beam combining base, a sealing ring at the top of the beam combining base, a beam combining top cover above the beam combining base, a light-emitting port on the side of the beam combining base, a high-transmittance protective window sheet snapped into the interior of the light-emitting port, and several first mounting slots and second mounting slots on the top of the beam combining base and the bottom of the beam combining top cover.

[0010] As an optional solution to the technical solution of this invention, four elastic vibration isolation pads are provided on the top of the beam combining base and the bottom of the beam combining top cover. A laser is installed inside the elastic vibration isolation pads. The folding mirror and the optical element are located on the side of the laser near the high-transparency protective window. The size of the folding mirror is smaller than the size of the optical element. The folding mirror is located inside the first mounting groove, and the optical element is located inside the second mounting groove. The beam combining base and the beam combining top cover are detachably connected.

[0011] By adopting the above technical solution, the vibration isolation pad can reduce the impact of external and laser-induced vibrations on the device.

[0012] As an optional solution to the technical solution of this invention, the vibration isolation component includes bottom vibration isolation pads disposed on the inner walls of the second mounting groove and the first mounting groove, and bottom elastic sheets disposed on the bottom vibration isolation pads. The first mounting groove and the second mounting groove are provided with a first sliding groove and a second sliding groove inside the first mounting groove and the inner walls of the first mounting groove and the second mounting groove are provided with side vibration isolation pads on both sides. The side vibration isolation pads are provided with elastic buckles, and the elastic buckles are engaged with side elastic sheets.

[0013] As an optional solution of the technical solution in this invention document, the second slide groove is located above the first slide groove, both ends of the elastic buckle are located inside the second slide groove, the elastic buckle is slidably connected to the second slide groove, both ends of the bottom elastic sheet are located inside the first slide groove, the bottom elastic sheet is slidably connected to the first slide groove, the side elastic sheet and the side vibration isolation pad are both located above the bottom elastic sheet, and the elastic buckle is located at the center of the side elastic sheet.

[0014] As an optional solution to the technical solution of this invention, the bottom of the folding reflector abuts against the top of the bottom elastic sheet, and the sides of the folding reflector abut against two side elastic sheets respectively. The bottom elastic sheet and the side elastic sheets are both corrugated in shape, and the bottom elastic sheet and the side elastic sheets are both made of titanium-nickel-based superelastic shape memory alloy.

[0015] By adopting the above technical solution, the elastic sheet can be used to flexibly fix the folding mirror and optical components in an elevated position.

[0016] As an optional solution to the technical solution of this invention, the adjustment component includes several third sliding grooves opened on the top of the bundling base, a trigger rod is slidably connected inside the third sliding groove, and a first push plate is fixedly connected to the side of the trigger rod.

[0017] As an optional solution to the technical solution of this invention, the trigger rod is L-shaped, with the top of the trigger rod extending through the inner wall of the third sliding groove to the top of the bundling base. The first and second mounting grooves are provided with third sliding grooves on both sides. The other end of the trigger rod extends through the inner wall of the third sliding groove to the inside of the mounting groove. The first push plate is slidably connected to the inner wall of the mounting groove. The side of the first push plate away from the trigger rod is detachably connected to the side elastic plate. The top of the trigger rod is provided with an inclined surface.

[0018] As an optional solution to the technical solution of this invention, the triggering component includes several fourth sliding grooves opened at the bottom of the bundled top cover, an abutment rod is slidably connected inside the fourth sliding groove, an elastic element is provided inside the fourth sliding groove, a fifth sliding groove is opened inside the bundled top cover, a sliding rod is slidably connected inside the fifth sliding groove, and a second push plate is fixedly connected to the side of the sliding rod.

[0019] As an optional solution to the technical solution of this invention, the fourth sliding groove is located on both sides of the mounting groove at the bottom of the bundled top cover. The bottom of the abutment rod extends through the inner wall of the fourth sliding groove to the top of the trigger rod. The side of the abutment rod is elastically connected to the inner wall of the fourth sliding groove through an elastic element. The fifth sliding groove is located between the fourth sliding groove and the mounting groove. The side of the fifth sliding groove near the abutment rod is provided with an inclined surface. The top of the abutment rod extends through the inner wall of the fourth sliding groove to the interior of the fifth sliding groove. The side of the abutment rod away from the elastic element abuts against the side of the sliding rod. The end of the sliding rod away from the abutment rod extends through the inner wall of the fifth sliding groove to the interior of the mounting groove. The second push plate is slidably connected to the inner wall of the mounting groove. The side of the second push plate away from the fifth sliding groove is detachably connected to the side vibration isolation pad.

[0020] By adopting the above technical solution, the triggering component and the adjustment component can be set to adjust the elastic sheet, and the folding mirror and optical components can be pre-tightened before operation.

[0021] Beneficial effects: One or more technical solutions provided in this invention have at least the following technical effects or advantages:

[0022] 1. Compared with the traditional CO2 laser method of achieving laser beam combining through multiple reflections by multiple mirrors, the present invention effectively reduces the number of mirrors used by using folding mirrors and optical components, while also reducing the number of laser beam reflections, reducing the cumulative optical loss in the optical path, and ensuring a high degree of matching between the combined optical path and the laser output path, thereby further improving the transmission efficiency of the combined laser.

[0023] 2. By precisely distributing light through folding mirrors and optical elements, the reflection and transmission of four laser beams with different polarizations and wavelengths are combined into a single laser output. While maintaining the original beam quality of each individual laser, the power of the combined beam is increased several times. Furthermore, the beam combining optical path is precisely matched with the laser output path, with no additional optical loss, ensuring the uniformity, coaxiality, and polarization characteristics of the combined laser beam, thus meeting the stringent requirements of industrial precision machining for laser beam quality.

[0024] 3. By cooperating with the beam combining top cover and beam combining base, the upper and lower ends of the folding mirror and optical element abut against the bottom elastic plate, and the sides abut against the side elastic plate, forming an omnidirectional elastic suspension and fixing structure that is both vertical and horizontal. This achieves precise positioning of the folding mirror and optical element, and avoids the installation stress caused by traditional rigid fixing. At the same time, the suspension structure can adapt to the slight attitude adjustment of the folding mirror and optical element, ensuring the long-term accuracy of the beam combining optical path, and pre-tightening it to improve the stability of the fixation.

[0025] 4. Through a multi-level vibration isolation structure consisting of elastic vibration isolation pads, composite vibration damping pads, bottom vibration isolation pads, and side vibration isolation pads, the self-excited vibration during laser operation and the environmental vibration outside the device are absorbed respectively, blocking the vibration transmission path from the source of vibration. At the same time, in conjunction with the elastic deformation characteristics of the bottom elastic sheet and the side elastic sheet, the residual vibration energy is further consumed through elastic deformation, avoiding the transmission of vibration to the folding mirror and optical components, which could cause problems such as optical component deflection, beam jitter, and decreased beam combining accuracy, thus ensuring the stability of the beam combining optical path under industrial vibration conditions.

[0026] 5. The heat generated by the folding mirror and optical elements during the reflection and transmission of the laser beam is transferred to the opposing bottom and side elastic plates, causing the elastic plates to deform under heat and extend to both sides. This automatically creates space for the thermal deformation of the optical elements, effectively avoiding the compressive stress between the optical elements and the fixed components during thermal expansion and warping. This prevents problems such as optical surface distortion and effective refraction angle shift caused by thermal stress, ensuring the accuracy of the beam combining optical path under continuous laser operation and temperature variation conditions. At the same time, it avoids failure problems such as microcracks and coating peeling of optical elements caused by thermal stress. Attached Figure Description

[0027] To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the following description of the embodiments will be briefly introduced. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0028] Figure 1 This is a three-dimensional structural diagram of a closed CO2 laser that employs diffusion cooling and longitudinal DC discharge.

[0029] Figure 2 This is a schematic diagram showing the structural relationship between the high-transmittance protective window and the light outlet in a closed CO2 laser that employs diffusion cooling and longitudinal DC discharge.

[0030] Figure 3 This is a cross-sectional schematic diagram of the beam combining component in a closed CO2 laser that employs diffusion cooling and longitudinal DC discharge.

[0031] Figure 4 This is a schematic diagram showing the structural relationship between the side isolation pad and the first push plate in a closed CO2 laser that employs diffusion cooling and longitudinal DC discharge.

[0032] Figure 5 This is a cross-sectional schematic diagram of the vibration isolation component in a closed CO2 laser that employs diffusion cooling and longitudinal DC discharge.

[0033] Figure 6 This is a cross-sectional schematic diagram of the triggering component in a closed CO2 laser that employs diffusion cooling and longitudinal DC discharge.

[0034] Figure 7 This is a schematic diagram showing the structural relationship between the bottom elastic plate and the folding mirror in a closed CO2 laser that employs diffusion cooling and longitudinal DC discharge.

[0035] Figure 8 This is a schematic diagram of the internal structure of a closed CO2 laser beam combiner assembly that employs diffusion cooling and longitudinal DC discharge.

[0036] Figure 9 This is a schematic diagram of the beam combining process in a closed CO2 laser that employs diffusion cooling and longitudinal DC discharge.

[0037] Figure 10 This is a three-dimensional structural diagram of the triggering component in a closed CO2 laser that employs diffusion cooling and longitudinal DC discharge.

[0038] Explanation of the numbers in the diagram: 10. Laser; 11. Beam combining assembly; 111. Beam combining base; 112. Composite vibration damping pad; 113. Sealing ring; 114. Beam combining top cover; 115. Light exit port; 116. High-transparency protective window; 117. First mounting slot; 118. Second mounting slot; 12. Folding mirror; 13. Optical element; 14. Elastic vibration damping pad; 15. Vibration damping assembly; 151. Bottom vibration damping pad; 15 2. Bottom elastic plate; 153. First slide groove; 154. Side vibration isolation pad; 155. Side elastic plate; 156. Second slide groove; 157. Elastic buckle; 20. Adjustment component; 201. Trigger rod; 202. Third slide groove; 203. First push plate; 21. Trigger component; 211. Abutment rod; 212. Fourth slide groove; 213. Elastic element; 214. Fifth slide groove; 215. Slide rod; 216. Second push plate. Detailed Implementation

[0039] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0040] In the description of this invention, it should be understood that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0041] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or a link; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal communication between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0042] Reference Figures 1 to 10This invention provides a closed CO2 laser employing diffusion cooling and longitudinal DC discharge, including a vibration damping component. The component includes a beam combining assembly 11, a laser 10 for emitting a laser beam is disposed inside the beam combining assembly 11, a folding mirror 12 for reflecting the laser beam is disposed inside the beam combining assembly 11, an optical element 13 for transmitting and reflecting different laser beams is disposed inside the beam combining assembly 11, an elastic vibration isolation pad 14 for isolating the laser 10 is disposed at the bottom of the beam combining assembly 11, and a vibration isolation assembly 15 for damping the folding mirror 12 and the optical element 13 is disposed inside the beam combining assembly 11.

[0043] The adjustment component includes an adjustment component 20 disposed within the beam combining assembly 11 for adjusting the fixed tension of the folding mirror 12 and the optical element 13, and a trigger component 21 disposed inside the beam combining assembly 11 for driving the adjustment component 20 to adjust.

[0044] The surface of the folding mirror 12 is coated with multiple layers of film, and the laser 10 is a closed CO2 laser that uses diffusion cooling and longitudinal DC discharge.

[0045] Compared to the traditional method of combining laser beams by multiple reflections from multiple mirrors in a CO2 laser, this invention effectively reduces the number of mirrors 12 used by combining the folding mirror 12 and optical elements 13. This reduces the number of reflections of the laser beam, lowers the cumulative optical loss in the optical path, and ensures a high degree of matching between the combined optical path and the output path of the laser 10, thereby further improving the transmission efficiency of the combined laser.

[0046] Reference Figures 1 to 9 This invention provides a closed CO2 laser employing diffusion cooling and longitudinal DC discharge. The beam combining assembly 11 includes a beam combining base 111, a composite shock-absorbing pad 112 at the bottom of the beam combining base 111, a sealing ring 113 at the top of the beam combining base 111, a beam combining top cover 114 above the beam combining base 111, a light outlet 115 on the side of the beam combining base 111, a high-transmittance protective window 116 snapped into the inside of the light outlet 115, and several first mounting grooves 117 and second mounting grooves 118 are provided on the top of the beam combining base 111 and the bottom of the beam combining top cover 114.

[0047] Four elastic vibration isolation pads 14 are provided on the top of the beam combining base 111 and the bottom of the beam combining top cover 114. The laser 10 is installed inside the elastic vibration isolation pad 14. The folding mirror 12 and the optical element 13 are located on the side of the laser 10 near the high-transparency protective window 116. The size of the folding mirror 12 is smaller than the size of the optical element 13. The folding mirror 12 is located inside the first mounting groove 117, and the optical element 13 is located inside the second mounting groove 118. The beam combining base 111 and the beam combining top cover 114 are detachably connected.

[0048] The preferred method for connecting the bundled base 111 and the bundled top cover 114 is to install the bundled base 111 and the bundled top cover 114 using bolts.

[0049] Reference Figures 4 to 10 This invention provides a closed CO2 laser employing diffusion cooling and longitudinal DC discharge. The vibration isolation assembly 15 includes bottom vibration isolation pads 151 disposed on the inner walls of the second mounting groove 118 and the first mounting groove 117, and bottom elastic sheets 152 disposed on the bottom vibration isolation pads 151. The first mounting groove 117 and the second mounting groove 118 are both provided with first sliding grooves 153 and second sliding grooves 156. Side vibration isolation pads 154 are disposed on both sides of the inner walls of the first mounting groove 117 and the second mounting groove 118. Elastic buckles 157 are disposed on the side vibration isolation pads 154, and side elastic sheets 155 are snapped onto the elastic buckles 157.

[0050] The second slide groove 156 is located above the first slide groove 153. Both ends of the elastic buckle 157 are located inside the second slide groove 156, and the elastic buckle 157 is slidably connected to the second slide groove 156. Both ends of the bottom elastic sheet 152 are located inside the first slide groove 153, and the bottom elastic sheet 152 is slidably connected to the first slide groove 153. The side elastic sheet 155 and the side vibration isolation pad 154 are both located above the bottom elastic sheet 152, and the elastic buckle 157 is located at the center of the side elastic sheet 155.

[0051] The bottom of the folding mirror 12 abuts against the top of the bottom elastic sheet 152, and the sides of the folding mirror 12 abut against the two side elastic sheets 155 respectively. The bottom elastic sheet 152 and the side elastic sheets 155 are both corrugated in shape. The bottom elastic sheet 152 and the side elastic sheets 155 are both made of titanium-nickel-based superelastic shape memory alloy.

[0052] Through a multi-level vibration isolation structure consisting of elastic vibration isolation pad 14, composite vibration damping pad 112, bottom vibration isolation pad 151, and side vibration isolation pad 154, the self-excited vibration of the laser 10 during operation and the environmental vibration outside the device are absorbed respectively, blocking the vibration transmission path from the source of vibration. At the same time, in conjunction with the elastic deformation characteristics of the bottom elastic sheet 152 and the side elastic sheet 155, the residual vibration energy is further consumed through elastic deformation, avoiding the transmission of vibration to the folding mirror 12 and optical element 13, which could cause problems such as optical element deflection, spot jitter, and decreased beam combining accuracy, thus ensuring the stability of the beam combining optical path under industrial vibration conditions.

[0053] Reference Figures 6 to 10 The present invention provides a closed CO2 laser that employs diffusion cooling and longitudinal DC discharge. The adjustment component 20 includes a plurality of third slide grooves 202 opened on the top of the beam combining base 111. A trigger rod 201 is slidably connected inside the third slide groove 202, and a first push plate 203 is fixedly connected to the side of the trigger rod 201.

[0054] The trigger rod 201 is L-shaped. The top of the trigger rod 201 extends through the inner wall of the third slide groove 202 to the top of the bundling base 111. The first mounting groove 117 and the second mounting groove 118 are provided with the third slide groove 202 on both sides. The other end of the trigger rod 201 extends through the inner wall of the third slide groove 202 to the inside of the mounting groove. The first push plate 203 is slidably connected to the inner wall of the mounting groove. The side of the first push plate 203 away from the trigger rod 201 is detachably connected to the side elastic piece 155. The top of the trigger rod 201 is provided with a slope.

[0055] Reference Figures 6 to 10 The present invention provides a closed CO2 laser employing diffusion cooling and longitudinal DC discharge. The triggering component 21 includes several fourth sliding grooves 212 opened at the bottom of the beam combining top cover 114. A contact rod 211 is slidably connected inside the fourth sliding groove 212. An elastic element 213 is provided inside the fourth sliding groove 212. A fifth sliding groove 214 is opened inside the beam combining top cover 114. A sliding rod 215 is slidably connected inside the fifth sliding groove 214. A second push plate 216 is fixedly connected to the side of the sliding rod 215.

[0056] The fourth slide groove 212 is located on both sides of the bottom mounting groove of the bundle top cover 114. The bottom of the abutment rod 211 extends through the inner wall of the fourth slide groove 212 to the top of the trigger rod 201. The side of the abutment rod 211 is elastically connected to the inner wall of the fourth slide groove 212 through the elastic element 213. The fifth slide groove 214 is located between the fourth slide groove 212 and the mounting groove. The side of the fifth slide groove 214 near the abutment rod 211 is provided with a slope. The top of the abutment rod 211 extends through the inner wall of the fourth slide groove 212 to the interior of the fifth slide groove 214. The side of the abutment rod 211 away from the elastic element 213 abuts against the side of the slide rod 215. The end of the slide rod 215 away from the abutment rod 211 extends through the inner wall of the fifth slide groove 214 to the interior of the mounting groove. The second push plate 216 is slidably connected to the inner wall of the mounting groove. The side of the second push plate 216 away from the fifth slide groove 214 is detachably connected to the side vibration isolation pad 154.

[0057] The connection between the push plate and the side vibration isolation pad 154 is preferably bonded. Through the cooperation of the beam combining top cover 114 and the beam combining base 111, the upper and lower ends of the folding mirror 12 and the optical element 13 abut against the bottom elastic plate 152, and the sides abut against the side elastic plate 155, forming an omnidirectional elastic suspension and fixing structure that achieves precise positioning of the folding mirror 12 and the optical element 13, and avoids the installation stress caused by traditional rigid fixing. At the same time, the suspension structure can adapt to the slight attitude adjustment of the folding mirror 12 and the optical element 13, ensuring the long-term accuracy of the beam combining optical path, and pre-tightening it to improve the stability of the fixation.

[0058] This invention provides a closed-type CO2 laser employing diffusion cooling and longitudinal DC discharge. Its working principle and usage process are as follows:

[0059] First, install the folding mirror 12 and optical element 13 as follows: Figure 9 Insert the cable into the first mounting slot 117 and the second mounting slot 118 as shown, so that it moves between the two side elastic pieces 155. Then place the cable-binding top cover 114 above the cable-binding base 111 and align it with the top of the cable-binding base 111.

[0060] Then the beam combining top cover 114 is lowered. When the bottom of the contact rod 211 abuts against the top of the trigger rod 201, the tops of the folding mirror 12 and the optical element 13 both enter the fixing groove at the bottom of the beam combining top cover 114 and are located between the two side elastic plates 155. At the same time, the tops abut against the bottom elastic plate 152 inside the beam combining top cover 114, suspending and fixing the folding mirror 12 to form an elastic suspension and vibration stabilization system for the entire optical path.

[0061] At this time, as the beam-combining top cover 114 continues to descend, the upper and lower ends of the folding mirror 12 and the optical element 13 will compress the bottom elastic sheet 152 respectively, causing the bottom elastic sheet 152 to extend to both sides within the first slide groove 153 and enhancing the clamping force between the two bottom elastic sheets 152. Simultaneously, the downward movement of the beam-combining top cover 114 will drive the abutment rod 211 to descend, pressing down the inclined surface of the trigger rod 201, causing the trigger rod 201 to drive the first push plate 203 to slide within the third slide groove 202. During the process of the abutment rod 211 pressing the trigger rod 201... This will simultaneously cause the abutment rod 211 to move upward in the fourth slide groove 212, and the squeezing slide rod 215 to drive the second push plate 216 to slide in the fifth slide groove 214, thereby causing the side elastic plates 155 on the upper and lower ends of the folding mirror 12 and the optical element 13 to move towards each other, so that the side elastic plates 155 slide in the second slide groove 156. Since the side elastic plates 155 abut against the folding mirror 12 and the optical element 13, the side elastic plates 155 will be compressed and extend outward in the second slide groove 156.

[0062] When the bottom of the beam combining top cover 114 abuts against the top of the beam combining base 111, the beam combining top cover 114 and the beam combining base 111 are fixed together by bolts. At this time, the laser 10 inside the starter emits a laser beam, such as... Figure 9 As shown, from top to bottom, the first laser 10 emits a 10.6-micrometer p-polarized laser beam, the second laser 10 emits a 10.6-micrometer s-polarized laser beam, the third laser 10 emits a 9.6-micrometer p-polarized laser beam, and the fourth laser 10 emits a 9.6-micrometer s-polarized laser beam. After being reflected and transmitted by the folding mirror 12 and the optical element 13, these beams are combined into a single laser beam, which passes through the high-transparency protective window 116 and exits from the light outlet 115. Under the condition of maintaining the beam quality, the power of the combined beam is increased several times.

[0063] The elastic vibration isolation pad 14 can absorb the vibration generated when the laser 10 is working, the composite vibration damping pad 112 can absorb the vibration outside the device, and the bottom vibration isolation pad 151 and the side vibration isolation pad 154 set in the mounting groove can absorb the vibration received by the device and prevent the vibration from being transmitted to the folding mirror 12 and the optical element 13. The bottom elastic sheet 152 and the side elastic sheet 155 can further dissipate the vibration energy through elasticity.

[0064] During the process of reflecting and transmitting laser beams, the surfaces of the folding mirror 12 and optical element 13 will generate heat. Some of this heat will be conducted to the bottom elastic sheet 152 and the side elastic sheet 155 that are in contact with it, causing the bottom elastic sheet 152 and the side elastic sheet 155 to deform due to heat and extend to both sides, thus creating space for the thermal deformation of the folding mirror 12 and optical element 13 and avoiding the occurrence of large stress on the elastic sheet during the thermal deformation process.

[0065] Among them, such as Figure 9 As shown, if only two laser beams need to be combined, the bottom two layers of elastic vibration isolation pads 14, folding reflectors 12 and optical elements 13 can be removed from top to bottom, and the rightmost optical element 13 of the first layer can be removed. The remaining structure can then be used to combine the two laser beams, thereby allowing adjustment of the laser intensity and the complexity of the device after combining.

[0066] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A closed-type CO2 laser employing diffusion cooling and longitudinal DC discharge, characterized in that: include The vibration damping component includes a beam combining assembly (11), which has a laser (10) for emitting a laser beam inside, a folding mirror (12) for reflecting the laser beam inside, an optical element (13) for transmitting and reflecting different laser beams inside, an elastic vibration isolation pad (14) for isolating the laser (10) at the bottom of the beam combining assembly (11), and a vibration isolation assembly (15) for damping the folding mirror (12) and the optical element (13). The adjustment component includes an adjustment component (20) disposed within the beam combiner assembly (11) for adjusting the fixed tension of the folding mirror (12) and the optical element (13), and the beam combiner assembly (11) is provided with a trigger component (21) for driving the adjustment component (20) to adjust. The adjustment assembly (20) includes several third slide grooves (202) opened on the top of the bundle base (111), and a trigger rod (201) is slidably connected inside the third slide groove (202), and a first push plate (203) is fixedly connected to the side of the trigger rod (201). The trigger rod (201) is L-shaped. The top of the trigger rod (201) extends through the inner wall of the third slide groove (202) to the top of the bundle base (111). The other end of the trigger rod (201) extends through the inner wall of the third slide groove (202) to the inside of the mounting groove. The first push plate (203) is slidably connected to the inner wall of the mounting groove. The side of the first push plate (203) away from the trigger rod (201) is detachably connected to the side elastic plate (155). The top of the trigger rod (201) is provided with a slope.

2. The enclosed CO2 laser employing diffusion cooling and longitudinal DC discharge as described in claim 1, characterized in that: The beam combining assembly (11) includes a beam combining base (111), a composite shock-absorbing pad (112) is provided at the bottom of the beam combining base (111), a sealing ring (113) is provided at the top of the beam combining base (111), a beam combining top cover (114) is provided above the beam combining base (111), a light outlet (115) is provided on the side of the beam combining base (111), a high-transparency protective window (116) is snapped into the inside of the light outlet (115), and several first mounting grooves (117) and second mounting grooves (118) are provided at the top of the beam combining base (111) and the bottom of the beam combining top cover (114).

3. The enclosed CO2 laser employing diffusion cooling and longitudinal DC discharge according to claim 2, characterized in that: Four elastic vibration isolation pads (14) are provided on the top of the beam combining base (111) and the bottom of the beam combining top cover (114). A laser (10) is provided inside the elastic vibration isolation pads (14). The folding mirror (12) and the optical element (13) are located on the side of the laser (10) near the high-transparency protective window (116). The size of the folding mirror (12) is smaller than the size of the optical element (13). The folding mirror (12) is located inside the first mounting groove (117). The optical element (13) is located inside the second mounting groove (118). The beam combining base (111) and the beam combining top cover (114) are detachably connected. A third sliding groove (202) is provided on both sides of the first mounting groove (117) and the second mounting groove (118).

4. The enclosed CO2 laser employing diffusion cooling and longitudinal DC discharge according to claim 2, characterized in that: The vibration isolation assembly (15) includes a bottom vibration isolation pad (151) provided on the inner wall of the second mounting groove (118) and the first mounting groove (117). The bottom vibration isolation pad (151) is provided with a bottom elastic sheet (152). The first mounting groove (117) and the second mounting groove (118) are provided with a first sliding groove (153) and a second sliding groove (156). The inner walls of the first mounting groove (117) and the second mounting groove (118) are provided with side vibration isolation pads (154) on both sides. The side vibration isolation pads (154) are provided with elastic buckles (157), and the elastic buckles (157) are engaged with side elastic sheets (155).

5. The enclosed CO2 laser employing diffusion cooling and longitudinal DC discharge according to claim 4, characterized in that: The second slide groove (156) is located above the first slide groove (153). Both ends of the elastic buckle (157) are located inside the second slide groove (156). The elastic buckle (157) is slidably connected to the second slide groove (156). Both ends of the bottom elastic plate (152) are located inside the first slide groove (153). The bottom elastic plate (152) is slidably connected to the first slide groove (153). The side elastic plate (155) and the side vibration isolation pad (154) are both located above the bottom elastic plate (152). The elastic buckle (157) is located at the center of the side elastic plate (155).

6. The enclosed CO2 laser employing diffusion cooling and longitudinal DC discharge according to claim 4, characterized in that: The bottom of the folding mirror (12) abuts against the top of the bottom elastic sheet (152), and the sides of the folding mirror (12) abut against the two side elastic sheets (155) respectively. The bottom elastic sheet (152) and the side elastic sheet (155) are both corrugated in shape. The bottom elastic sheet (152) and the side elastic sheet (155) are both made of titanium-nickel-based superelastic shape memory alloy.

7. The enclosed CO2 laser employing diffusion cooling and longitudinal DC discharge according to claim 4, characterized in that: The triggering component (21) includes several fourth slide grooves (212) opened at the bottom of the bundled top cover (114). An abutment rod (211) is slidably connected inside the fourth slide groove (212). An elastic element (213) is provided inside the fourth slide groove (212). A fifth slide groove (214) is opened inside the bundled top cover (114). A slide rod (215) is slidably connected inside the fifth slide groove (214). A second push plate (216) is fixedly connected to the side of the slide rod (215).

8. The enclosed CO2 laser employing diffusion cooling and longitudinal DC discharge according to claim 7, characterized in that: The fourth slide groove (212) is located on both sides of the bottom mounting groove of the bundled top cover (114). The bottom of the abutment rod (211) extends through the inner wall of the fourth slide groove (212) to the top of the trigger rod (201). The side of the abutment rod (211) is elastically connected to the inner wall of the fourth slide groove (212) through an elastic element (213). The fifth slide groove (214) is located between the fourth slide groove (212) and the mounting groove. The fifth slide groove (214) has a slope on the side near the abutment rod (211). 1) The top of the slide bar extends through the inner wall of the fourth slide bar (212) to the interior of the fifth slide bar (214). The side of the abutment rod (211) away from the elastic member (213) abuts against the side of the slide bar (215). The end of the slide bar (215) away from the abutment rod (211) extends through the inner wall of the fifth slide bar (214) to the interior of the mounting groove. The second push plate (216) is slidably connected to the inner wall of the mounting groove. The side of the second push plate (216) away from the fifth slide bar (214) is detachably connected to the side vibration isolation pad (154).

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