Electron energy spectrometer, electron energy spectrum measuring method and electron energy spectrum measuring system

By combining a magnetic deflection unit and a scintillator fluorescent screen with deep learning signal processing, high-resolution and high-efficiency electron spectroscopy measurements were achieved, solving the problems of signal accumulation and low efficiency in traditional methods.

CN121978740APending Publication Date: 2026-05-05SHENZHEN TECH UNIV
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Patent Information

Application Number
CN202511929773.2
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-12-18
Publication Date
2026-05-05

AI Technical Summary

Technical Problem

Existing electron spectrometers struggle to achieve high resolution and high efficiency in electron spectroscopy measurements at high count rates, and traditional methods suffer from signal accumulation or low measurement efficiency.

Method used

A magnetic deflection unit is used to deflect the electron beam under test in an energy-dependent manner. Parallel imaging is performed by combining a scintillator fluorescent screen and an optical acquisition unit. Image processing is performed using a deep learning signal processing unit, achieving a balance between high resolution and high measurement efficiency.

Benefits of technology

It achieves a balance between high resolution and high measurement efficiency, overcomes the shortcomings of signal accumulation and low measurement efficiency in traditional methods, and improves signal utilization and processing speed.

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Abstract

The invention relates to the technical field of electron energy measurement, and discloses an electron spectrometer and an electron energy spectrum measurement method and system.The electron spectrometer comprises a magnetic deflection unit used for receiving an incident to-be-measured electron beam, generating a magnetic field and applying the magnetic field to all to-be-measured electrons in the to-be-measured electron beam; the scintillator fluorescent screen is arranged at the downstream of the magnetic deflection unit and used for receiving the deflected electrons to be detected, and the electrons bombard the scintillator fluorescent screen and generate light spots; the optical acquisition unit is used for acquiring a light spot image on the scintillator fluorescent screen; and the signal processing unit is used for processing the light spot image so as to identify the spatial position information of the light spot in the light spot image and convert the spatial position information into electronic energy data. The method has the beneficial effects that the unification of high resolution and high measurement efficiency is realized, and the problem of signal accumulation under a high counting rate of a traditional direct measurement method and the inherent defect of low efficiency of a scanning type magnetic spectrometer are overcome.
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