Electron energy spectrometer, electron energy spectrum measuring method and electron energy spectrum measuring system

Abstract

The invention relates to the technical field of electron energy measurement, and discloses an electron spectrometer and an electron energy spectrum measurement method and system.The electron spectrometer comprises a magnetic deflection unit used for receiving an incident to-be-measured electron beam, generating a magnetic field and applying the magnetic field to all to-be-measured electrons in the to-be-measured electron beam; the scintillator fluorescent screen is arranged at the downstream of the magnetic deflection unit and used for receiving the deflected electrons to be detected, and the electrons bombard the scintillator fluorescent screen and generate light spots; the optical acquisition unit is used for acquiring a light spot image on the scintillator fluorescent screen; and the signal processing unit is used for processing the light spot image so as to identify the spatial position information of the light spot in the light spot image and convert the spatial position information into electronic energy data. The method has the beneficial effects that the unification of high resolution and high measurement efficiency is realized, and the problem of signal accumulation under a high counting rate of a traditional direct measurement method and the inherent defect of low efficiency of a scanning type magnetic spectrometer are overcome.

Description

Technical Field

[0001] This invention relates to the field of electron energy measurement technology, and in particular to an electron spectrometer, an electron energy spectrum measurement method and system. Background Technology

[0002] In nuclear science and particle physics research, electron spectrometers are key equipment for obtaining information on electron energy distribution. Traditional electron spectrometers mainly employ two principles: one is the direct measurement method based on semiconductor or scintillator detectors, which is prone to energy spectrum distortion and resolution degradation due to signal accumulation at high count rates; the other is the scanning measurement method combining magnetic deflection and single-point detectors, which can obtain high-resolution energy spectra, but requires data acquisition point by point by scanning magnetic field strength, resulting in extremely low measurement efficiency and difficulty in meeting the needs of rapid measurement or dynamic process monitoring. Therefore, existing technologies cannot simultaneously achieve high-efficiency and high-count-rate-tolerant electron spectroscopy measurements while ensuring high energy resolution. Summary of the Invention

[0003] Based on this, it is necessary to propose an electron spectrometer, an electron spectroscopy measurement method, and a system to address the existing problems with electron spectrometers.

[0004] An electron spectrometer, comprising: A magnetic deflection unit is used to receive an incident electron beam to be tested, generate a magnetic field and apply it to each electron in the electron beam to be tested, so that each electron to be tested will deflect along a different trajectory according to its own energy; wherein, the electron beam to be tested includes multiple electrons to be tested; A scintillator fluorescent screen is located downstream of the magnetic deflection unit and is used to receive the deflected electrons to be tested and generate a light spot. An optical acquisition unit is used to acquire images of light spots on the scintillator fluorescent screen; The signal processing unit is communicatively connected to the optical acquisition unit. The signal processing unit is used to process the light spot image to identify the spatial location information of the light spot in the light spot image and convert it into electronic energy data.

[0005] Furthermore, the scintillator screen is made of plastic scintillator material, which is polyvinyl toluene or styrene-based plastic scintillator.

[0006] Furthermore, the optical acquisition unit includes a charge-coupled device (CCD) sensor.

[0007] Furthermore, the magnetic deflection unit includes an adjustable electromagnet for adjusting the magnetic field strength by changing the excitation current.

[0008] Furthermore, the signal processing unit includes a deep learning-based image processing module for denoising the spot image and accurately locating the spot center.

[0009] Furthermore, the signal processing unit also includes a data statistics module, which is used to perform statistics on the converted electron energy data and generate an electron energy spectrum distribution map.

[0010] An electron spectroscopy measurement method, implemented using the electron spectrometer described above, includes: The test electron beam is received by a magnetic deflection unit, and a magnetic field strength is applied to each test electron to deflect it. The electrons to be tested are received by a scintillator fluorescent screen after being deflected, and a light spot corresponding to the spatial distribution of the electrons is generated. The optical acquisition unit acquires the light spot image on the scintillator fluorescent screen and sends it to the signal processing unit; The signal processing unit processes the light spot image to identify and extract the spatial location information of each light spot in the light spot image. Based on a predetermined location-energy mapping relationship, the spatial location information is converted into corresponding electronic energy data.

[0011] Furthermore, before the step of processing the light spot image through the signal processing unit to identify and extract the spatial location information of each light spot in the light spot image, the method further includes: The spectrometer was calibrated using a preset standard electron source to establish a position-energy mapping relationship between the spot position coordinates and the electron energy.

[0012] Furthermore, the step of calibrating the spectrometer using a preset standard electron source and establishing a position-energy mapping relationship between the spot position coordinates and electron energy includes: The magnetic deflection unit receives various monoenergetic electron beams of different energies emitted by the standard electron source. Adjust the magnetic field strength of the magnetic deflection unit so that multiple monoenergetic electron beams of different energies bombard the fixed reference position of the scintillator screen in sequence; Based on the correspondence between the magnetic field strength, electron energy, and the fixed reference position of each monoenergetic electron beam, a position-energy mapping relationship between the beam spot position coordinates and the electron energy is established.

[0013] An electron spectroscopy measurement system includes: the electron spectrometer described above; and a processing control unit configured to execute the electron spectroscopy measurement method described above.

[0014] The beneficial effects of this invention are as follows: By deflecting electrons of different energies using a magnetic deflection unit, and by using a scintillator fluorescent screen and an optical acquisition unit to perform parallel, imaging detection of the dispersed electrons, all energy spectrum information is obtained, thereby achieving a balance between high resolution and high measurement efficiency. This overcomes the signal accumulation problem of traditional direct measurement methods at high count rates, as well as the inherent defects of low efficiency in scanning magnetic spectrometers. At the same time, by combining detection and image processing technologies, signal utilization and processing speed are effectively improved. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] in: Figure 1 This is a schematic diagram of the internal structure of an electron spectrometer in one embodiment; Figure 2 This is a schematic diagram of the structure of an electron energy spectrum measurement system in one embodiment; Figure 3 This is a schematic diagram of the electron orbit in one embodiment; Figure 4 This is a schematic diagram of the geometric relationship of the electron orbitals in one embodiment; Figure 5 This is a flowchart of an electron energy spectrum measurement method in one embodiment.

[0017] Figure 1 and Figure 2 In the middle: 1. Slit; 2. Magnetic deflection unit; 3. Scintillator fluorescent screen; 4. Optical acquisition unit; 5. Signal processing unit. Detailed Implementation

[0018] Exemplary embodiments will now be described in detail, examples of which are illustrated in the accompanying drawings. When the following description relates to the drawings, unless otherwise indicated, the same numerals in different drawings denote the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with this application. Rather, they are merely examples of systems and methods consistent with those detailed in the appended claims or with some aspects of this application.

[0019] It should be noted that, in this document, the terms "comprising," "including," or any other variations thereof are intended to cover descriptions such as non-exclusive inclusion, so that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element. Furthermore, components, features, and elements with the same names in different embodiments of this application may have the same meaning or different meanings, the specific meaning of which must be determined by its interpretation in that specific embodiment or further in conjunction with the context of that specific embodiment.

[0020] It should be understood that the specific embodiments described herein are merely illustrative of this application and are not intended to limit this application.

[0021] In the following description, the use of suffixes such as "module," "part," or "unit" to denote elements is solely for the purpose of illustrative purposes and has no specific meaning in itself. Therefore, "module," "part," or "unit" may be used interchangeably.

[0022] like Figure 1 and Figure 2 As shown, in one embodiment, an electron spectrometer is provided, comprising: a magnetic deflection unit 2, used to receive an incident electron beam to be tested, generate a magnetic field and apply it to each electron in the electron beam to be tested, so that each electron to be tested deflects along a different trajectory according to its respective energy; wherein, the electron beam to be tested includes multiple electrons to be tested; a scintillator fluorescent screen 3, disposed downstream of the magnetic deflection unit 2, used to receive the deflected electrons to be tested and generate a light spot; an optical acquisition unit 4, used to acquire the light spot image on the scintillator fluorescent screen 3; and a signal processing unit 5, communicatively connected to the optical acquisition unit 4, the signal processing unit 5 used to process the light spot image to identify the spatial position information of the light spot in the light spot image and convert it into electron energy data.

[0023] In this embodiment, the electron beam to be tested is incident on the magnetic deflection unit 2 through the slit 1. The magnetic deflection unit 2 is the core component of the electron spectrometer, responsible for energy-dependent trajectory deflection of the incident electron beam to be tested. This unit is composed of a high-efficiency electromagnet, which generates a controllable magnetic field by applying current. When the electron beam to be tested enters the magnetic field region, the electrons are subjected to the Lorentz force, and their trajectory will be deflected according to the momentum and charge properties of the electrons. Electrons with higher kinetic energy will be deflected along a farther trajectory, while electrons with lower kinetic energy will be deflected closer. This spatial dispersion design allows electrons of different energies to form light spots at different positions on the scintillator screen 3, thus laying the foundation for subsequent energy spectrum reconstruction. Accurate adjustment of the excitation current of the electromagnet can control the strength of the magnetic field, thereby precisely adjusting the deflection angle, making the system highly flexible and adaptable to electron energy measurement under different experimental conditions. Compared with traditional scanning magnetic spectrometers (which use a different magnetic field strength to allow monoenergetic electrons to pass through a slit sequentially), this application uses a fixed magnetic field to separate electrons of different energies in a single spatial sequence. This completely eliminates the time delay of mechanical or electromagnetic scanning, enabling instantaneous and parallel analysis of all energy electrons. Measurement efficiency is improved by several orders of magnitude. The adjustable electromagnet design allows for optimization and calibration of the magnetic field through precise current control, ensuring that the electron deflection displacement is highly linearly related to its energy within the target energy range (0.1-5 MeV).

[0024] The scintillator phosphor screen 3 is a key component responsible for converting the energy information of deflected electrons into visible light signals. In this invention, the scintillator is typically made of high-performance plastic materials (such as polyvinyl toluene). These materials have fast response times and excellent light output characteristics. When electrons strike the scintillator, they excite the molecules within the scintillator material, resulting in the release of visible light (a light spot). The position and intensity of the light spot are directly related to the energy of the electrons and the incident angle. Through precise optical design, the position of the light spot is mapped onto other components (such as the optical acquisition unit 4) to provide necessary data for signal processing. Compared to traditional semiconductor detectors (which are prone to signal accumulation and distortion at high count rates) or slow scintillators, the key advantage of choosing a fast-decaying plastic scintillator (such as PVT) lies in its nanosecond-level emission decay time. This effectively prevents the fluorescence generated by continuous electron pulses from overlapping in time, avoiding positional ambiguity caused by light spot "tailing," thus ensuring excellent spatial resolution even at high count rates. Furthermore, plastic scintillators are easy to process into large-area, uniform thin screens and have good radiation resistance. This enables it to seamlessly receive the entire electron spectrum dispersed by magnetic deflection, completing the parallel conversion of the entire spectrum of electrons into optical signals in one go.

[0025] The optical acquisition unit 4 is responsible for collecting and imaging the light spots formed on the scintillator fluorescent screen 3. This unit typically includes a high-performance charge-coupled device (CCD) or complementary metal-oxide-semiconductor (CMOS) sensor. These sensors can capture light signals with high resolution and low noise. After the light spots are formed on the fluorescent screen, the optical acquisition unit 4 focuses and guides the light signals onto the sensor through a lens system to generate a two-dimensional image. Since the distribution of the light spot positions is directly related to the energy of the electrons being measured, accurate optical acquisition ensures the acquisition of high-quality signals, facilitating subsequent analysis. The design of this component also includes optical image processing algorithms to improve intelligent processing capabilities. As a scientific-grade area array imaging device, the CCD sensor's core advantages lie in its extremely high photosensitivity, extremely low readout noise, and excellent linear response, ensuring that it can convert the weak fluorescence images on the scintillator into digital images with extremely high signal-to-noise ratio and dynamic range, faithfully recording the precise position and relative intensity of each light spot. The high spatial resolution (megapixel level) images provided by CCDs enable signal processing systems to identify light spots that are extremely close to each other on the fluorescent screen due to tiny energy differences, which directly determines the system's limit energy resolution capability.

[0026] The signal processing unit 5 is the core component of the electron spectrometer used to process the image signal output from the optical acquisition unit 4. This unit typically integrates multiple functional modules, including data acquisition, signal enhancement, and information extraction. First, the image signal captured by the optical imaging system is amplified by a preamplifier to increase signal strength and suppress background noise. Subsequently, the signal is converted into a digital signal by a high-speed analog-to-digital converter (ADC), enabling the system to perform subsequent analysis using digital processing techniques. During signal processing, deep learning algorithms (such as convolutional neural networks, CNN) are applied to image processing to improve the accuracy of spot recognition and location information extraction. The main function of this unit is to extract the spatial location information of the spot and convert it into electron energy data, generating the final electron spectrum based on a predetermined position-energy mapping relationship.

[0027] Traditional methods rely on manually setting thresholds and parameters for spot recognition and localization, resulting in large errors, low efficiency, and poor consistency when spots overlap or the background is complex. This application introduces an image processing module based on deep learning (such as CNN). Its fundamental advantage lies in its ability to automatically learn and extract deep features of spots through training, achieving sub-pixel accuracy in spot center localization even in noisy backgrounds or with partial overlap. Its accuracy and robustness far surpass traditional algorithms. This module integrates multiple steps such as image denoising, spot recognition, location extraction, energy mapping, and spectrum generation into an automated process. It not only processes extremely fast but also eliminates the uncertainty and subjective errors caused by human intervention, realizing intelligent, one-click generation from the original image to the final energy spectrum.

[0028] The output of the magnetic deflection system (deflected electrons) directly affects the operation of the scintillator fluorescent screen 3, while the light spot image generated by the fluorescent screen is captured by the optical acquisition unit 4. Then, the image signal generated by the optical acquisition unit 4 is seamlessly transmitted to the signal processing unit 5 to complete efficient information extraction and accurate energy spectrum reconstruction.

[0029] Reference Figure 3 and Figure 4 This is a schematic diagram of the trajectory of a single electron. ;in It is the rest mass of the electron. It is the Lorentz factor. It is the ratio of speed to the speed of light.

[0030] Similar triangles: (2) make: ;but: Solving the linear equation in one variable yields... .

[0031] From part (1), we can see that L2 is related to R2, and R2 is related to... Related; (2) part is exactly known The value of L2 can be obtained by substituting it into (1).

[0032] Where R1 is the magnet radius, R2 is the electron orbit radius, L1 is the vertical distance from the emission point to the horizontal point P, L2 is the electron deflection distance, A1 is the distance from the magnet center O to point P, A2 is the distance from the magnet to the fluorescent screen, and a is the angle.

[0033] In one embodiment, the scintillator screen 3 is made of a plastic scintillator material, which is a polyvinyl toluene or styrene-based plastic scintillator.

[0034] The scintillator screen 3 is made of plastic scintillator material, such as polyvinyl toluene (PVT)-based plastic scintillator or other similar fast-response plastic scintillators. Polyvinyl toluene (PVT) is an excellent scintillator with relatively low energy loss and high light output efficiency. PVT material can effectively convert kinetic energy into light energy when colliding with high-energy electrons, and generates visible light when releasing the excited state. Its luminous intensity is proportional to the energy of the incident electron.

[0035] It should be noted that low spectral resolution, nonlinear energy response, and performance degradation at high count rates are key issues in this field. These problems are particularly pronounced in the specific energy range of 0.1 MeV to 5 MeV, because at this energy level, the interaction between electrons and matter becomes more complex, and the requirements for measurement accuracy increase accordingly. Therefore, this invention primarily targets electrons within this specific energy range of 0.1 MeV to 5 MeV, but it can also measure electrons in other energy ranges.

[0036] In one embodiment, the optical acquisition unit 4 includes a charge-coupled device (CCD) sensor.

[0037] In this embodiment, the optical acquisition unit 4 uses a charge-coupled device (CCD) sensor as its core component. CCD sensors are widely used in electron spectrometers due to their superior imaging performance and low noise characteristics, playing a crucial role. The main function of the optical acquisition unit 4 is to capture light spot images from the scintillator fluorescent screen 3 and convert these optical signals into electrical signals for subsequent processing. Specifically, this unit is responsible for compiling the visible light information generated by the scintillator fluorescent screen 3, accurately recording the light spot images formed by electrons of various energies on the screen. The CCD is an area array detector, capable of capturing all light spot images formed by electrons of different energies on the entire fluorescent screen at once. This directly replaces the step of moving the detector to scan point by point in the traditional magnetic spectrometer, thereby shortening the measurement time from minutes to milliseconds and realizing the instantaneous freezing and acquisition of the electron energy spectrum. This parallel imaging capability is the fundamental premise for the system to achieve high-efficiency dynamic measurement, providing high spatial resolution and positioning accuracy, and ensuring energy resolution: the energy resolution ultimately depends on the system's ability to distinguish the positions of two adjacent light spots. CCD has extremely high spatial resolution, with millions to tens of millions of pixels, which can clearly digitize the tiny positional differences on the fluorescent screen, enabling the signal processing unit 5 to perform sub-pixel level spot center positioning, thereby fully converting the physical dispersion accuracy of the magnetic deflection system into high energy resolution.

[0038] In one embodiment, the magnetic deflection unit 2 includes an adjustable electromagnet for adjusting the magnetic field strength by changing the excitation current.

[0039] The magnetic deflection unit 2 is an indispensable part of the electron spectrometer. It is responsible for deflecting electrons of different energies according to their respective momentum trajectories by applying a magnetic field. Specifically, when the electron beam passes through the electromagnet, the electromagnetic field influences the electron trajectory in the form of a Lorentz force, causing high-energy electrons to separate from low-energy electrons in space. This trajectory dispersion is called "energy-position dispersion," providing the necessary physical basis for subsequent optical acquisition and energy spectrum reconstruction. The advantage of the adjustable electromagnet lies in its ability to adjust the excitation current in real time and flexibly. By changing the current magnitude, the strength of the magnetic field can be precisely controlled, thus affecting the degree of electron deflection. This characteristic allows the system to adapt to different experimental conditions; for example, when measuring in the high-energy range, it can automatically adjust to ensure optimal deflection. When the electron beam enters the magnetic deflection unit 2, the electromagnet's excitation current generates a static, uniform magnetic field. According to the Lorentz force formula F=qvB, the incident electrons will be deflected after being subjected to the magnetic field. The deflection angle of an electron is directly proportional to its energy; the higher the energy, the smaller the deflection angle, and vice versa. This mapping forms an "energy-position" relationship for electrons, providing traceable energy information for the position of the light spot on the scintillator screen 3. The magnetic deflection unit 2 is directly connected to the scintillator screen 3. After deflection, the electron beam forms different light spots on the screen according to its energy. The optical acquisition unit 4 is responsible for capturing these light spots and transmitting their images to the signal processing unit 5 for further processing.

[0040] In one embodiment, the signal processing unit 5 includes a deep learning-based image processing module for denoising the spot image and accurately locating the spot center. Specifically, the deep learning-based image processing module can be implemented using deep learning models such as convolutional neural networks (CNNs). Training data can be generated using particle transport simulation tools such as Geant4 to construct an accurate geometric model of the electron spectrometer, simulating electron beams of different energies (0.1-5 MeV), intensities, and incident conditions, considering real physical effects such as electron scattering, energy discretization, scintillator emission processes, photon transport, and CCD noise models, thus generating a large-scale synthetic dataset containing precise spot location labels. The training process employs a labeled approach, resulting in a deep learning-based image processing module. In signal processing unit 5, the spot image captured by the optical acquisition system is first transmitted to the image processing module. A large-size median filter or morphological opening operation (erosion followed by dilation) is applied to the entire spot image. This operation effectively removes all bright areas (i.e., spots) smaller than the structuring element, retaining only the slowly changing background components. To further correct local inhomogeneities, the image is divided into blocks, and the background value is calculated separately for each sub-block. A smooth background surface is then generated through interpolation. The estimated background is subtracted from the original image to obtain the foreground enhancement image. Then, contrast stretching is performed to maximize the dynamic range of the effective signal, resulting in a grayscale foreground image. The grayscale foreground image is converted into a black-and-white binary image to separate potential spot regions. For each pixel, a binarization operation is performed to obtain a binary image. The binary image is then cleaned and the target is identified. An 8-connected component analysis is performed on the cleaned binary image to assign a unique label to each interconnected foreground pixel region. Based on experience, a threshold is set to filter out real "spot candidates". For each filtered connected component, the precise center of the spot is calculated on its corresponding original grayscale image region to obtain the physical coordinates of the spot center. The physical coordinates are then converted into energy values.

[0041] In one embodiment, the signal processing unit 5 further includes a data statistics module for performing statistics on the converted electron energy data and generating an electron energy spectrum distribution map.

[0042] The data statistics module aims to perform statistical analysis on the converted electron energy data and ultimately generate an electron energy spectrum distribution map. The main task of the data statistics module is to receive the processed electron energy data from the signal processing unit 5, organize and analyze it, and generate an electron energy spectrum distribution map. This module can visually display the energy distribution of the measured electrons, providing researchers with important experimental data support. First, the electron energy data received by the module is typically represented as a series of digital signals, which represent the electron energy values ​​corresponding to different light spots. The data statistics module organizes these signals into an analyzable structure, usually saved as an array or chart for convenient subsequent statistical calculations. For each energy value, the data statistics module calculates the number of electrons detected at the corresponding energy position. By statistically analyzing readings at different energy levels, the module can form the number of electrons at each specific energy, which is the basis for generating the energy spectrum. By visualizing the statistical results, the module finally generates an electron energy spectrum distribution map. In this map, the x-axis represents the electron energy value, and the y-axis represents the count rate (i.e., the number of electrons) at that energy, forming an intuitive energy distribution curve. Researchers can quickly obtain information about the physical properties and interactions of the sample or experimental environment through this graph. During signal processing, the electron energy data processed by deep learning algorithms is fed into the data statistics module. This module analyzes and summarizes this data using built-in algorithms and statistical methods. Using data statistics and spectral analysis techniques, the intensity of light spots at different electron energy positions can be effectively identified, thus reflecting the corresponding energy spectrum morphology and characteristics in the image. The data statistics module is connected to the deep learning image processing module of signal processing unit 5, directly receiving the processed electron energy data from it.

[0043] The design and calibration method for the 0.5MeV-5MeV electron spectrometer of this invention not only has profound theoretical value but also demonstrates broad application prospects and socio-economic value. In the field of fundamental physics research, it can accurately measure the energy and momentum distribution of particles, providing a powerful tool for exploring the basic structure and properties of matter. In industrial applications, it can be used for radiation processing, material modification, and radiation protection, providing important guarantees for industrial production and safety. In environmental monitoring, it can accurately measure the radiation level in the environment, providing scientific basis for environmental protection and public health. In medical diagnostics, it can be used for the formulation of radiotherapy plans and dose verification, ensuring that patients receive accurate and safe radiotherapy.

[0044] Especially in accelerator physics, radiation damage research, and materials analysis, the energy dispersive spectrometer of this invention will demonstrate its unique advantages and application value. For example, in accelerator physics, it can be used to accurately measure the energy and momentum distribution of electron beams generated by accelerators, providing crucial data for accelerator commissioning and optimization; in radiation damage research, it can be used to assess the tolerance of materials to radiation environments, providing important references for material selection in fields such as nuclear energy and aerospace; and in materials analysis, it can be used to determine the composition and structure of materials, providing strong support for materials science research and applications.

[0045] Reference Figure 5 The present invention also provides an electron energy spectrum measurement method, implemented using the electron energy spectrometer described above, comprising: S1: The test electron beam is received through the magnetic deflection unit 2, and a magnetic field strength is applied to each test electron to deflect the test electron; S2: The scintillator fluorescent screen 3 receives the deflected electrons to be tested and generates a light spot corresponding to the spatial distribution of the electrons; S3: The light spot image on the scintillator fluorescent screen 3 is acquired by the optical acquisition unit 4 and sent to the signal processing unit 5; S4: The signal processing unit 5 processes the light spot image to identify and extract the spatial location information of each light spot in the light spot image; S5: Based on the predetermined location-energy mapping relationship, the spatial location information is converted into corresponding electronic energy data.

[0046] As described in step S1 above, the function of the magnetic deflection unit 2 is to receive the incident electron beam to be tested and apply a uniform magnetic field. The strength of this magnetic field is controlled by adjusting the excitation current of the electromagnet. In this magnetic field, the electrons to be tested are deflected according to their energy and momentum due to the influence of the Lorentz force. The trajectory of high-energy electrons is deflected less, while the trajectory of lower-energy electrons is deflected more. The core purpose of this process is to achieve spatial dispersion of electrons of different energies through magnetic deflection, providing the necessary conditions for subsequent signal acquisition and ensuring that energy-corresponding light spots can be formed on the scintillator screen 3.

[0047] As described in step S2 above, the magnetically deflected electron beam strikes the scintillator fluorescent screen 3. During the impact, the electrons to be tested interact with the atoms of the scintillator material, causing the molecules in the scintillator to be excited. When the molecules return to the ground state, they release visible light and form a light spot. The position and intensity of the light spot are directly related to the energy of the deflected electrons and the incident angle, converting the kinetic energy of the electrons into light signals for subsequent optical acquisition.

[0048] As described in step S3 above, the light spot image formed on the scintillator screen 3 is captured by the optical acquisition unit 4. This unit typically includes a high-performance charge-coupled device (CCD) sensor, which can convert the received light signal into an electrical signal and generate a corresponding image. The captured image data is then sent to the signal processing unit 5 for further analysis.

[0049] As described in step S4 above, the signal processing unit 5 receives the image data sent by the optical acquisition unit 4 and processes the spot image using a certain algorithm (such as image processing technology based on deep learning). The main task of the processing is to identify the spot in the image and accurately extract the center position of the spot. This process usually involves steps such as image denoising and enhancing the contrast of the spot to improve the accuracy of position information extraction.

[0050] As described in step S2 above, the extracted spatial position information of the light spot is converted into corresponding electronic energy data according to the pre-established "position-energy mapping relationship". This mapping relationship is obtained through calibration experiments and can link the relationship between the change of light spot position and the change of electronic energy. Therefore, the signal processing unit 5 uses this mapping relationship to output the electronic energy value corresponding to each light spot, providing data support for the final generation of the energy spectrum.

[0051] In one embodiment, before step S4 of processing the light spot image by the signal processing unit 5 to identify and extract the spatial location information of each light spot in the light spot image, the method further includes: S401: Use a preset standard electron source to calibrate the spectrometer and establish a position-energy mapping relationship between the spot position coordinates and the electron energy.

[0052] As described in step S401 above, the electron spectrometer first needs to be calibrated and standardized using a preset standard electron source. A standard electron source typically refers to a monoenergetic electron beam with known energy or a stable radioactive source. Using this standard source, the experimenter can generate a set of known spot positions and corresponding electron energy values, which serve as the baseline in the experiment. Based on the known standard electron source energy and the corresponding spot position coordinates, the signal processing unit 5 generates a set of data points. These data points reflect the relationship between electron energy and spot position. By fitting these data points, a mathematical model or formula, called the position-energy mapping relationship, can be obtained, so that the corresponding electron energy can be directly calculated from the spot position during actual measurement.

[0053] In one embodiment, step S401, which involves calibrating the spectrometer using a preset standard electron source and establishing a position-energy mapping relationship between the spot position coordinates and the electron energy, includes: S4011: Receives various monoenergetic electron beams of different energies sent by the standard electron source through the magnetic deflection unit 2; S4012: Adjust the magnetic field strength of the magnetic deflection unit 2 so that multiple monoenergetic electron beams of different energies bombard the fixed reference position of the scintillator fluorescent screen 3 in sequence. S4013: Based on the correspondence between the magnetic field strength, electron energy, and the fixed reference position of each monoenergetic electron beam, establish the position-energy mapping relationship between the spot position coordinates and the electron energy.

[0054] As described in step S4011 above, the magnetic deflection unit 2 receives multiple monoenergetic electron beams of different energies emitted by the standard electron source. The standard electron source, typically a well-designed source with known energies, emits multiple monoenergetic electron beams of different energies. This standard electron source can stably generate a series of known and precise energies, such as tunable accelerators or radioactive isotopes. The magnetic deflection unit 2 is responsible for receiving these electron beams and ensuring their smooth entry into subsequent processing stages. Once the electron beams are emitted to the magnetic deflection unit 2, this unit begins receiving and deflecting them. The presence of the standard electron source ensures the accuracy and reproducibility of the calibration process, while the multiple electron beams of different energies make the subsequently generated mapping relationships more comprehensive.

[0055] As described in step S4012 above, the magnetic field strength of the magnetic deflection unit 2 is adjusted so that multiple monoenergetic electron beams of different energies sequentially bombard the fixed reference position of the scintillator screen 3. Precise adjustment of the magnetic field strength of the magnetic deflection unit 2 ensures that the received monoenergetic electron beams of different energies sequentially bombard the fixed reference position of the scintillator screen 3. By adjusting the excitation current in the electromagnet, the magnetic field strength is changed, effectively controlling the trajectory of the electron beams entering the scintillator screen 3. The known magnetic field strength and energy value of each electron beam make this adjustment process relatively simple. The purpose of adjusting the magnetic field is to ensure that all electron beams of different energies can accurately and effectively form a light spot at the same reference position, which is helpful for subsequent data collection and analysis.

[0056] As described in step S4013 above, based on the correspondence between the magnetic field strength, electron energy, and the fixed reference position corresponding to each monoenergetic electron beam, a position-energy mapping relationship between the spot position coordinates and the electron energy is established. The spot position, corresponding magnetic field strength, and electron energy formed by each monoenergetic electron beam with different energies after passing through the magnetic deflection unit 2 are recorded. Each electron's energy corresponds to a specific spot position because the degree of deflection is directly affected by the electron energy and the applied magnetic field strength. Next, using data processing and analysis software, the collected spot position coordinates are compared and matched with the known electron energy and magnetic field strength. By establishing a mathematical model (such as linear regression or curve fitting), a mapping formula describing the "relationship between spot position and electron energy" can be formed.

[0057] In one embodiment, the method further includes performing resolution verification, stability verification, and simulation-experiment comparison verification on the electron spectrometer.

[0058] Specifically, resolution calibration aims to verify whether an instrument can achieve a predetermined resolution capability for electronic signals at near-energy levels. Resolution is usually quantified by the full width at half maximum (FWHM) of the characteristic peak, which represents a key indicator of energy resolution in the energy spectrum.

[0059] The specific process for this verification step is as follows: Selecting standard samples: For resolution verification, it is usually necessary to select standard samples with obvious energy spectrum characteristics and known energies (such as specific radioactive isotopes), which have specific energy peaks and are easily identifiable in the energy spectrum.

[0060] Measurement: Place the standard sample in the detection area of ​​the electron spectrometer, ensure that the instrument is set and calibrated, and then use the electron spectrometer to measure the sample to obtain the electron spectrum data of the standard sample. This process needs to be repeated multiple times to improve the reliability of the results.

[0061] Data analysis: Characteristic peaks are identified and extracted from the obtained energy spectrum, and the resolution is evaluated by calculating the full width at half maximum (FWHM) of these characteristic peaks. If the FWHM value is less than the preset resolution standard, it indicates that the instrument's resolution meets the requirements; otherwise, the instrument's resolution needs to be improved by adjusting system parameters or performing maintenance.

[0062] Stability verification aims to assess the performance retention of an electron spectrometer during long-term continuous operation. Its importance lies in continuously monitoring potential performance changes during operation to ensure the reliability and accuracy of the data.

[0063] The specific process for this verification step is as follows: Selecting test conditions: When performing stability verification, it is necessary to select key parameters for long-term operation, such as detection time and typical measurement mode, to ensure consistency with normal operating conditions.

[0064] Perform long-term measurements: At fixed time intervals (e.g., hourly or daily), perform a series of repeated measurements using standard samples to obtain and compare the same data multiple times. This step typically lasts for hours or days to assess changes in instrument performance over long periods of operation.

[0065] Data monitoring and recording: After each measurement, key output parameters (such as characteristic peak energy, count rate, resolution, etc.) are recorded and organized. The fluctuations between measurements are evaluated through statistical analysis and trend plotting. The changing trends of various parameters over time are analyzed, with particular attention paid to peak center shift, energy stability, and count rate changes.

[0066] Analysis and evaluation: Analyze the instrument's stability performance using statistical methods (such as standard deviation, mean, maximum deviation, etc.). If significant fluctuations are found in the long-term output data, it may indicate a hardware failure or the need for calibration. Based on the analysis results, further maintenance suggestions or adjustments to the instrument's operating parameters will be proposed.

[0067] Stability verification is fundamental to ensuring that the electron spectrometer can work continuously, stably, and accurately in numerous experimental and practical applications. It can promptly identify equipment aging or malfunctions and provide operators with effective maintenance guidance.

[0068] The simulation and experimental comparison verification uses computer simulation to compare theoretical calculation results with experimental measurement results in order to verify the performance of the electron spectrometer and the rationality of its design.

[0069] The specific process for this verification step is as follows: Establishing a physical model: First, a physical model of the electron spectrometer needs to be established using physical simulation software such as Monte Carlo simulation (e.g., Geant4, MCNP, etc.). This model should simulate the interaction between electrons and matter as accurately as possible, including the energy and angle of the incident electrons, and the scattering and absorption processes of electrons in the material.

[0070] Simulation process: In the physical model, a series of electron beams with different energies are input to simulate their passage through the electron spectrometer, generating energy spectrum data under ideal conditions. This simulation should take into account the internal physical parameters of the instrument to approximate the real situation as closely as possible.

[0071] Perform experimental measurements: Use an electron spectrometer to perform experimental measurements on standard samples under the same conditions to obtain actual measured energy spectrum data. This process is usually combined with standard experimental procedures to obtain valid test data.

[0072] Results Comparison and Analysis: The simulation results are compared with the experimental measurement data to analyze the similarities and differences between the two. The focus is on parameters such as the position, intensity, and width of characteristic peaks. The performance of the instrument and the accuracy of the simulation model are evaluated by quantitative differences. If there are significant differences between the simulation and experimental results, the assumptions and parameter settings of the model can be explored to optimize and adjust the equipment design and improve the overall measurement performance.

[0073] The present invention also provides an electron spectroscopy measurement system, comprising: an electron spectrometer as described above; and a processing control unit configured to execute the electron spectroscopy measurement method described above.

[0074] The electron spectrometer and the processing control unit communicate with each other via a high-speed data interface, ensuring efficient and real-time data transmission. For example, the spot image acquired by the optical acquisition unit 4 is promptly transmitted to the signal processing unit 5 for calculation, and the result of the signal processing is then transmitted to the processing control unit for further statistical analysis and display. This efficient interaction mechanism ensures the functional integrity of the entire electron spectrometer measurement system and a smooth user experience. Furthermore, the processing control unit can also adjust the operating parameters of the electron spectrometer through an automatic feedback mechanism, such as adjusting the current of the magnetic deflection unit 2 based on real-time data to optimize future measurement conditions, thereby improving the overall performance of the instrument. In summary, the electron spectrometer measurement system provided by this invention achieves efficient and automated electron spectrometer measurement by integrating the electron spectrometer and the processing control unit.

[0075] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0076] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of this patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. An electron spectrometer, characterized in that, include: A magnetic deflection unit is used to receive an incident electron beam to be tested, generate a magnetic field and apply it to each electron in the electron beam to be tested, so that each electron to be tested will deflect along a different trajectory according to its own energy; wherein, the electron beam to be tested includes multiple electrons to be tested; A scintillator fluorescent screen is located downstream of the magnetic deflection unit and is used to receive the deflected electrons to be tested and generate a light spot. An optical acquisition unit is used to acquire images of light spots on the scintillator fluorescent screen; The signal processing unit is communicatively connected to the optical acquisition unit. The signal processing unit is used to process the light spot image to identify the spatial location information of the light spot in the light spot image and convert it into electronic energy data.

2. The electron spectrometer according to claim 1, characterized in that, The scintillator screen is made of plastic scintillator material, which is polyvinyl toluene or styrene-based plastic scintillator.

3. The electron spectrometer according to claim 1, characterized in that, The optical acquisition unit includes a charge-coupled device (CCD) sensor.

4. The electron spectrometer according to claim 1, characterized in that, The magnetic deflection unit includes an adjustable electromagnet for adjusting the magnetic field strength by changing the excitation current.

5. The electron spectrometer according to claim 1, characterized in that, The signal processing unit includes a deep learning-based image processing module for denoising the spot image and accurately locating the center of the spot.

6. The electron spectrometer according to claim 5, characterized in that, The signal processing unit also includes a data statistics module, which is used to perform statistics on the converted electron energy data and generate an electron energy spectrum distribution map.

7. A method for measuring electron energy spectrum, characterized in that, Implemented using the electron spectrometer described in any one of claims 1 to 6, comprising: The test electron beam is received by a magnetic deflection unit, and a magnetic field strength is applied to each test electron to deflect it. The electrons to be tested are received by a scintillator fluorescent screen after being deflected, and a light spot corresponding to the spatial distribution of the electrons is generated. The optical acquisition unit acquires the light spot image on the scintillator fluorescent screen and sends it to the signal processing unit; The signal processing unit processes the light spot image to identify and extract the spatial location information of each light spot in the light spot image. Based on a predetermined location-energy mapping relationship, the spatial location information is converted into corresponding electronic energy data.

8. The electron energy spectrum measurement method according to claim 7, characterized in that, Before the step of processing the light spot image through the signal processing unit to identify and extract the spatial position information of each light spot in the light spot image, the method further includes: The spectrometer was calibrated using a preset standard electron source to establish a position-energy mapping relationship between the spot position coordinates and the electron energy.

9. The electron energy spectrum measurement method according to claim 8, characterized in that, The step of calibrating the energy spectrometer using a preset standard electron source and establishing a position-energy mapping relationship between the spot position coordinates and electron energy includes: The magnetic deflection unit receives various monoenergetic electron beams of different energies emitted by the standard electron source. Adjust the magnetic field strength of the magnetic deflection unit so that multiple monoenergetic electron beams of different energies bombard the fixed reference position of the scintillator screen in sequence; Based on the correspondence between the magnetic field strength, electron energy, and the fixed reference position of each monoenergetic electron beam, a position-energy mapping relationship between the beam spot position coordinates and the electron energy is established.

10. An electron energy spectrum measurement system, characterized in that, include: The electron spectrometer as described in any one of claims 1 to 6; The processing control unit is configured to perform the electron spectroscopy measurement method according to any one of claims 7 to 9.

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