Film tearing machine

Abstract

A film tearing machine comprises a substrate supporting piece and a film tearing device. The film tearing device can move relative to the substrate supporting piece and comprises a base, an adhesive tape feeding mechanism and a rotating power source. The base is arranged corresponding to the substrate supporting piece. The adhesive tape feeding mechanism comprises an adhesive tape feeding piece, an adhesive tape supply piece and an adhesive tape winding piece which are rotatably arranged on the base. The rotary power source is connected with the adhesive tape feeding piece.

Description

Technical Field

[0001] This invention relates to a film peeling machine, and more particularly to a film peeling machine that uses adhesive tape to peel off film material attached to a substrate. Background Technology

[0002] In the semiconductor or electronic component industry, some processes require the application of multiple layers of film onto a substrate. The outermost release film serves to prevent dust adhesion, provide electrostatic protection, or isolate the substrate from air. The film application process typically includes the application of the film and the removal of the film. Because some products have very thin and highly adhesive films, directly removing them can leave residue or even damage the electronic components on the substrate surface. Therefore, for products with these characteristics, the edges of the film are first lifted before the entire film is removed.

[0003] Currently, the industry is developing automated film-peeling machines. One type of film-peeling machine uses adhesive tape to peel off and remove the film material. However, as the number of operations of the film-peeling machine increases, the tension of the adhesive tape may change, leading to problems such as film-peeling failure and film breakage, thereby affecting the process yield. Summary of the Invention

[0004] In view of the above problems, the present invention provides a film-peeling machine, which helps to solve the problem of the change in the tension of the adhesive tape in the film-peeling machine affecting the process yield.

[0005] The film-tearing machine disclosed in this invention includes a substrate support and a film-tearing device. The film-tearing device is movable relative to the substrate support and includes a base, a tape feeding mechanism, and a rotary power source. The base is disposed corresponding to the substrate support. The tape feeding mechanism includes a tape feeding member, a tape supply member, and a tape winding member rotatably disposed on the base. The rotary power source is connected to the tape feeding member.

[0006] According to the film-tearing machine disclosed in this invention, the film-tearing device includes a rotary power source connected to a tape feeder. The tape feeder is used to feed tape for tearing off the film material. Therefore, compared to film-tearing machines that feed tape by driving a tape supply member or a tape reel to rotate, the film-tearing machine of this invention, which drives the tape feeder to rotate, is advantageous in ensuring that the tape feeding speed does not change with the radial dimension of the tape roll disposed on the tape supply member or tape reel, thereby maintaining a uniform tension distribution of the entire tape.

[0007] The above description of the content of this invention and the following description of the embodiments are used to demonstrate and explain the principles of this invention, and to provide a further explanation of the scope of the patent application of this invention. Attached Figure Description

[0008] Figure 1 This is a schematic diagram of a film-peeling machine according to an embodiment of the present invention.

[0009] Figures 2 to 8 For use Figure 1 A schematic diagram of a film-tearing machine performing a film-tearing method according to an embodiment of the present invention. Detailed Implementation

[0010] The following embodiments describe in detail the features and advantages of the present invention, the content of which is sufficient to enable anyone skilled in the art to understand the technical content of the present invention and implement it accordingly. Furthermore, based on the disclosure, patent claims, and drawings in this specification, anyone skilled in the art can easily understand the present invention. The following embodiments further illustrate the points of the present invention in detail, but are not intended to limit the scope of the present invention in any way.

[0011] Please refer to Figure 1 This is a schematic diagram of a film-peeling machine according to an embodiment of the present invention. In this embodiment, the film-peeling machine 1 includes a substrate support 10 and a film-peeling device 20.

[0012] The substrate support 10 is used to support a substrate (not shown) to which the film material is attached. Furthermore, the substrate support 10 can be rotatable, thereby adjusting the substrate to a standing or lying position. Even further, the substrate support 10 can also adjust the tilt of the substrate.

[0013] The film-peeling device 20 is movable relative to the substrate support 10. More specifically, the film-peeling device 20 includes a base 210, a tape feeding mechanism 220, and a rotational power source 230.

[0014] The base 210 is disposed corresponding to the substrate support 10. Further, the base 210 may be a stamped part adjacent to the substrate support 10, used to house the tape feeding mechanism 220 and the rotary power source 230. Additionally, the base 210 can be driven to move relative to the substrate support 10.

[0015] The tape feeding mechanism 220 includes a tape feeder 221, a tape supply member 222, and a tape take-up member 223, all rotatably mounted on a base 210. The tape feeder 221 may be a roller mounted on the base 210 for feeding tape. The tape supply member 222 may be another roller mounted on the base 210 for feeding tape rolls. The tape take-up member 223 may be yet another roller mounted on the base 210 for taking up used tape. The tape feeder 221 can feed tape from the tape supply member 222 to the tape take-up member 223.

[0016] The rotary power source 230 is connected to the tape feeder 221. More specifically, the rotary power source 230 can be a stepper motor, which is connected to the tape feeder 221. The rotary power source 230 can drive the tape feeder 221 to rotate around its own center, thereby feeding the tape.

[0017] In this embodiment, the film-tearing device 20 may further include a first tension control structure 240 and a second tension control structure 250. The first tension control structure 240 is disposed on the tape supply member 222. More specifically, the first tension control structure 240 may include a first tape roll diameter detector 241 and a first torque motor 242. The first tape roll diameter detector 241 is communicatively connected to the first torque motor 242, and the first torque motor 242 is connected to the tape supply member 222. The second tension control structure 250 is disposed on the tape take-up member 223. More specifically, the second tension control structure 250 includes a second tape roll diameter detector 251 and a second torque motor 252. The second tape roll diameter detector 251 is communicatively connected to the second torque motor 252, and the second torque motor 252 is connected to the tape take-up member 223. Both the first tape roll diameter detector 241 and the second tape roll diameter detector 251 may include a non-contact distance sensor, such as a laser distance sensor. The first tension control structure 240 and the second tension control structure 250 together maintain the tape tension, which will be described in further detail later.

[0018] In this embodiment, the tape feeder 221 may include a tape pickup unit 221a and a tape feeding unit 221b. The tape pickup unit 221a is fixed to the base 210. The tape feeding unit 221b is rotatably disposed on the base 210, and the rotational power source 230 is connected to the tape feeding unit 221b. The tape pickup unit 221a may include a driven roller, which can adhere film material. The tape feeding unit 221b may be the aforementioned roller for feeding tape.

[0019] In this embodiment, the film-peeling device 20 may further include a film material detector 260. The film material detector 260 is communicatively connected to the power source 270 of the base 210. More specifically, the power source 270 drives the base 210 to move relative to the substrate support 10, and the film material detector 260 can control the start and stop of the power source 270 based on the detection result of the presence or absence of film material.

[0020] The following describes the method of using a film peeling machine 1 to peel the film material off the substrate. Figures 2 to 8 For use Figure 1 A schematic diagram of a film-tearing machine performing a film-tearing method according to an embodiment of the present invention.

[0021] Please refer to Figure 2 and Figure 3 A roll of adhesive tape 30 is disposed on the tape supply unit 222, a tape take-up unit 223 takes up the used tape, and a tape feeder 221 feeds the tape from the tape supply unit 222 to the tape take-up unit 223. A rotary power source 230 drives the tape feeder 221 to rotate (e.g., counterclockwise) to tension the tape.

[0022] Because the radial dimensions of the tape roll 30 and the take-up film roll 40 are different, the tension T1 between the tape feeder 221 and the tape supply member 222 will be different from the tension T2 between the tape feeder 221 and the tape take-up member 223. More specifically, since the radial dimension R1 of the tape roll 30 is larger than the radial dimension R2 of the take-up film roll 40, the tension T1 is smaller than the tension T2. ​​As the usage time increases, the radial dimension R1 of the tape roll 30 will gradually become smaller than the radial dimension R2 of the take-up film roll 40, causing the tension T1 to become larger than the tension T2.

[0023] Inconsistencies between tensions T1 and T2 can cause uneven tape tension distribution. To avoid this, the first tape roll diameter detector 241 of the first tension control structure 240 of the film-tearing machine 1 detects the roll diameter of the tape roll 30, and the first torque motor 242 adjusts its torque according to this roll diameter value. Furthermore, the second tape roll diameter detector 251 of the second tension control structure 250 detects the roll diameter of the winding film roll 40, and the second torque motor 252 adjusts its torque according to this roll diameter value. In this way, by controlling the torque in real time through the first tension control structure 240 and the second tension control structure 250, tensions T1 and T2 do not increase or decrease due to changes in radial dimensions, thus maintaining uniform tape tension. The first tape roll diameter detector 241 can measure the distance between itself and the outermost surface of the tape roll 30 to obtain the roll diameter value of the tape roll 30. The second tape roll diameter detector 251 can measure the distance between itself and the outermost surface of the take-up film roll 40 to obtain the roll diameter value of the take-up film roll 40.

[0024] Continue to refer to Figure 2 and Figure 3 The substrate support 10 can rotate 90 degrees to position the substrate 100 in a standing position. A film 101 is attached to the surface of the substrate 100. The substrate 100 can be a circuit board, a silicon wafer, or a glass plate. The film 101 can be a dry film, an ABF film, or a Mylar film. The tape pickup unit 221a of the tape feeder 221 approaches the substrate 100 to adhere the film 101. Furthermore, the base 210 is driven by a power source 270 to approach the substrate 100, causing the tape pickup unit 221a to adhere the film 101.

[0025] Reference Figure 4The tape feeding unit 221b of the tape feeder 221 rotates while the base 210 descends by the same feeding distance to wind up a small portion of the film material 101. The tape pickup unit 221a of the tape feeder 221 tears the edge of the film material 101 away from the surface of the substrate 100. Furthermore, the tape pickup unit 221a, in conjunction with the adjacent chuck 50, can tear the edge of the film material 101 away from the surface of the substrate 100 and hold it. Variations in tape feeding speed caused by the aforementioned inconsistency between tensions T1 and T2 can also prevent the tape feeder 221 from successfully picking up the film material 101. For example, a change in the tape feed speed may cause the tape pickup unit 221a and the chuck 50 to fail to hold the edge of the film material 101, or the tape to slip between the tape and the film material 101 and fail to adhere to the film material 101. However, the rotational power source 230 makes the rotational tangential speed of the tape feed unit 221b of the tape feeder 221 consistent with the vertical lifting speed of the base 210.

[0026] Reference Figure 5 The power source 270 drives the base 210 to rise and fall vertically along direction D1, or drives the substrate support 10 to rise and fall vertically along the opposite direction of direction D1 to complete the operation of completely peeling the film 101 off the surface of the substrate 100. Figure 5 An example is drawn showing the drive base 210 descending vertically to complete the operation of completely tearing off the film material 101.

[0027] Reference Figure 5 and Figure 6 The drive clamp 60 moves relative to the base 210 to clamp the torn film 101. In addition, the drive chuck 50 moves away from the tape pickup unit 221a of the tape feeder 221 so that the tape pickup unit 221a can be disengaged from the film 101.

[0028] Reference Figure 7 The tape feeder 221 loosens the film material 101. Furthermore, the rotary power source 230 drives the tape feeder 221 to rotate in the opposite direction (e.g., clockwise) to loosen the tape, thereby facilitating the separation of the film material 101 from the tape.

[0029] Reference Figure 8 Power source 270 drives base 210 back to its original position. Figure 2 The initial position is shown, and the rotational power source 230 drives the tape feeder 221 to rotate again (e.g., counterclockwise) to tension the tape.

[0030] exist Figure 8In this process, the film material detector 260 determines whether the film material 101 has been successfully detached from the tape pickup unit 221a based on the detection result of the presence or absence of the film material 101. This allows it to decide whether to stop the next film-tearing operation, such as stopping the operation of tearing film material off another substrate. Furthermore, the film material detector 260 can capture an image of the area in front of it. If the film material detector 260 is an optical camera, the area in front refers to the field of view of the optical camera; if the film material detector 260 is a laser rangefinder, the area in front refers to the area through which the laser beam passes. When the film material detector 260 determines whether there is any torn film material in the image, the film material detector 260 itself or a control unit (e.g., the central controller of the film-tearing machine 1) connected to the film material detector 260 will output a command to the power source 270 connected to the base 210, thereby keeping the base 210 running and continuing to move, or turning off the power source 270 and stopping the base 210 from rising or falling. For example, when the membrane material detector 260 determines that there is torn membrane material, the membrane material detector 260 generates... Figure 7 The detection result of whether the membrane material 101 in the middle has successfully fallen off from the tape pickup unit 221a will shut off the power source 270 and stop the base 210 from lifting.

[0031] It is worth mentioning that, due to Figure 2 The portion of the tape located in the tape feeder 221 is in Figures 3 to 6 The tape has already been used to adhere the film material 101 in the process. This used portion of the tape needs to be treated as waste. Therefore, the rotary power source 230 needs to rotate significantly so that this used portion of the tape can be wound up by the tape retractor 223. In this case, Figure 8 The radial dimension R2” of the 40-inch roll of film will be greater than Figure 2 The radial dimension R2 of the winding film roll 40, and Figure 8 The radial dimension R1 of the 30 roll of tape will be smaller than Figure 2 The radial dimension of the tape roll 30 is R1. At this time, as the radial dimension of the tape roll 30 decreases (from R1 to R1”), the first tape roll diameter detector 241 detects the new roll diameter value, and the first torque motor 242 increases its own torque according to this roll diameter value. Therefore, as the number of times the film tearing machine 1 tears off the film increases, the radial dimension of the tape roll 30 gradually decreases, and the torque of the first torque motor 242 gradually increases to maintain tape tension. Additionally, as the radial dimension of the film roll 40 increases (from R2 to R2”), the second tape roll diameter detector 251 detects the new roll diameter value, and the second torque motor 252 decreases its own torque according to this roll diameter value. Therefore, as the number of times the film tearing machine 1 tears off the film increases, the radial dimension of the film roll 40 gradually increases, and the torque of the second torque motor 252 gradually decreases to maintain tape tension.

[0032] In summary, according to the film-tearing machine disclosed in this invention, the film-tearing device includes a rotary power source connected to a tape feeder. The tape feeder is used to feed tape for tearing off the film material. Therefore, compared to film-tearing machines that feed tape by driving a tape supply member or a tape reel to rotate, the film-tearing machine of this invention, which drives the tape feeder to rotate, is advantageous in ensuring that the tape feeding speed does not change with the radial dimension of the tape roll disposed on the tape supply member or tape reel, thereby maintaining a uniform tension distribution of the entire tape.

[0033] Symbol explanation:

[0034] 100:Substrate

[0035] 101: Membrane Material

[0036] 1: Film peeling machine

[0037] 10: Substrate support

[0038] 20: Film tearing device

[0039] 210: Base

[0040] 220: Belt feeding mechanism

[0041] 221: Tape feeder

[0042] 221a: Tape pickup unit

[0043] 221b: Tape feeder unit

[0044] 222: Tape supply component

[0045] 223: Tape roll collection

[0046] 230: Rotary power source

[0047] 240: First tension control structure

[0048] 241: First tape roll diameter detector

[0049] 242: First Torque Motor

[0050] 250: Second tension control structure

[0051] 251: Second tape roll diameter detector

[0052] 252: Second Torque Motor

[0053] 260: Membrane Material Detector

[0054] 270: Power Source

[0055] 30: Adhesive tape rolls

[0056] 40: Rewinding film roll

[0057] 50: Clamp

[0058] 60: Clamping component

[0059] D1: Direction

[0060] T1, T2: Tension

[0061] R1, R1”, R2, R2”: Radial dimensions

Claims

1. A film-peeling machine, comprising: Substrate support; and A film-removing device, movable relative to the substrate support, comprising: The base is provided corresponding to the substrate support member; A tape feeding mechanism includes a tape feeding component, a tape supply component, and a tape rewind component rotatably disposed on the base; and A rotary power source is connected to the tape feeder.

2. The film-tearing machine as described in claim 1, wherein the rotational power source is a stepper motor.

3. The film-tearing machine as claimed in claim 1, wherein the film-tearing device further includes a first tension control structure and a second tension control structure, the first tension control structure being disposed on the tape supply member, the second tension control structure being disposed on the tape take-up member, and the first tension control structure and the second tension control structure jointly maintaining the tape tension.

4. The film-tearing machine as claimed in claim 3, wherein the first tension control structure includes a first tape roll diameter detector and a first torque motor, the first tape roll diameter detector being communicatively connected to the first torque motor, the first torque motor being connected to the tape supply member, and the torque of the first torque motor gradually increasing according to the roll diameter value obtained by the first tape roll diameter detector; the second tension control structure includes a second tape roll diameter detector and a second torque motor, the second tape roll diameter detector being communicatively connected to the second torque motor, the second torque motor being connected to the tape take-up member, and the torque of the second torque motor gradually decreasing according to the roll diameter value obtained by the second tape roll diameter detector.

5. The film-tearing machine as claimed in claim 4, wherein the first tape roll diameter detector and the second tape roll diameter detector each comprise a non-contact distance sensor.

6. The film-tearing machine as claimed in claim 1, wherein the tape feeding component includes a tape picking unit and a tape feeding unit, the tape picking unit is fixed to the base, the tape feeding unit is rotatably disposed on the base, and the rotational power source is connected to the tape feeding unit.

7. The film-peeling machine as claimed in claim 1, wherein the substrate support is allowed to be in a standing position, and the film-peeling device is vertically movable relative to the substrate support in the standing position.

8. The film-tearing machine as claimed in claim 1, wherein the film-tearing device further includes a film material detector, the film material detector being communicatively connected to the power source of the base, and the film material detector controlling the start and stop of the power source based on the detection result of the presence or absence of film material.

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