Two-way intelligent filtering system

Abstract

According to the two-way intelligent filtering system, a two-stage purification filtering structure and an intelligent control system work cooperatively; the intelligent control system monitors the change of internal pressure in real time through pressure detection, and automatically switches a primary filtering path and a secondary filtering path, so that efficient and stable operation is realized; a first-stage filtering path is a physical filtering channel: when the process pressure is relatively high, boron oxide solid large-particle dust in the tail gas is intensively intercepted and adsorbed by utilizing an efficient filter element, so that primary purification is completed; the second-stage filtering path is a filler adsorption filtering channel and comprises a water tank, a special adsorption filler and a molecular sieve; the water vapor and the dust are mixed and enter the special filler to further intercept residual fine particles, and then the molecular sieve adsorbs moisture and trace gaseous impurities in the gas, so that deep adsorption of the dust and removal of the moisture are completed, and fine filtration is realized.

Description

Technical Field

[0001] This invention relates to the fabrication technology of P-type and N-type semiconductor regions on semiconductor silicon wafers, and particularly to boron diffusion technology and its application equipment, specifically a dual-path intelligent filtration system. Background Technology

[0002] Boron diffusion refers to the process of introducing boron atoms into the silicon lattice through a high-temperature process on the surface of a pure silicon wafer. Boron has three valence electrons and acts as an acceptor impurity in silicon. After accepting an electron, it leaves a hole, thus forming a P-type semiconductor region where holes are the main charge carriers.

[0003] The majority carriers in a P-type semiconductor are holes, which have a high concentration and are conducive to the formation of the depletion region boundary, thus forming a PN junction when in contact with an N-type region.

[0004] In the boron diffusion process, a diaphragm pump is used to provide a clean gas environment for the molecular sieve. Therefore, ensuring a clean gas supply to the diaphragm pump is indispensable for the boron diffusion process.

[0005] Therefore, it is necessary to provide a dual-path intelligent filtration system to solve the above problems. Summary of the Invention

[0006] The purpose of this invention is to provide a dual-path intelligent filtration system.

[0007] The technical solution is as follows: A dual-path intelligent filtration system is characterized by: employing a dual-stage purification filtration structure in conjunction with an intelligent control system; the intelligent control system monitors internal pressure changes in real time through pressure detection and automatically switches between the primary and secondary filtration paths to achieve efficient and stable operation; the primary filtration path is a physical filtration channel: utilizing a high-efficiency filter element, when the process pressure is high, it centrally intercepts and adsorbs large particles of boron oxide solid dust in the exhaust gas, completing preliminary purification; the secondary filtration path is a packing adsorption filtration channel: including a water tank, dedicated adsorption packing, and molecular sieve; water vapor and dust mix and enter the dedicated packing for further interception of residual fine particles, and then the molecular sieve adsorbs moisture and trace gaseous impurities in the gas, completing deep adsorption of dust and removal of moisture, achieving fine filtration; Specifically, it includes an intake module, which is equipped with a pressure detection device. The intake module includes three connection channels, one of which is connected to an external gas supply device, the second of which is connected to a physical filtration channel, and the third of which is connected to a packing adsorption filtration channel. The physical filtration channel and the packing adsorption filtration channel are respectively equipped with trigger-type on / off valve A and trigger-type on / off valve B; The pressure detection element is used as a trigger opening part for physical filtration channels and packing adsorption filtration channels to detect incoming air pressure, forming a dual-path intelligent filtration switching structure: Preset pressure value A, incoming gas pressure > preset pressure value A: the packing adsorption filter channel is closed, the physical filter channel is in operation, coarse filtration is performed, and then the coarsely filtered gas is supplied. When the incoming gas pressure is less than the preset pressure value A: the physical filtration channel is closed, the packing adsorption filtration channel is activated, the gas enters the packing adsorption filtration channel for fine filtration, and then the gas is supplied after fine filtration.

[0008] Furthermore, the preset pressure value A is 100mbar-170mbar.

[0009] Furthermore, both trigger-operated valve A and trigger-operated valve B are solenoid valves.

[0010] Furthermore, a filter box is provided corresponding to the physical filtration channel and the packing adsorption filtration channel. The filter box has a physical filtration chamber and a packing filtration chamber. The physical filtration chamber is equipped with physical filter elements, and the packing filtration chamber is equipped with filter packing. The physical filter elements and filter packing are used as the physical filtration actuator of the physical filtration channel and the packing adsorption filtration actuator of the packing adsorption filtration channel, respectively.

[0011] Furthermore, the physical filtration actuator is formed by a filter element or a combination of several filter sheets.

[0012] Furthermore, the filter box includes a box body, and a partition plate is installed inside the box body. Through the partition plate, the inner cavity of the box body forms a physical filter chamber and a packing filter chamber.

[0013] Furthermore, the box is square and has a lid.

[0014] Furthermore, a sealing element is provided at the connection between the lid and the body of the box.

[0015] Furthermore, the box also features a portable handle.

[0016] Furthermore, the pressure detection component is a pressure sensor, and the intake module is a three-way valve.

[0017] Compared with existing technologies, the present invention can provide clean gas for diaphragm pumps, ensuring that the boron diffusion process of diaphragm pumps is carried out efficiently and with high quality. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of the present invention.

[0019] Figure 2 This is a schematic diagram illustrating the principle of the present invention. Detailed Implementation

[0020] Example 1:

[0021] In this embodiment, a preset incoming gas pressure value A is used as the standard for channel opening to realize the switching of gas processing channels. The preset pressure value A is 100mbar.

[0022] Please see Figure 1-2 This embodiment demonstrates a dual-path intelligent filtration system that employs a two-stage purification filtration structure in conjunction with an intelligent control system. The intelligent control system monitors internal pressure changes in real time through pressure detection and automatically switches between the primary and secondary filtration paths to achieve efficient and stable operation. The primary filtration path is the physical filtration channel 3: utilizing a high-efficiency filter element, it intercepts and adsorbs large particles of boron oxide solid dust in the exhaust gas when the process pressure is high, completing preliminary purification. The secondary filtration path is the packing adsorption filtration channel 4: including a water tank, dedicated adsorption packing, and a molecular sieve. Water vapor and dust mix and enter the dedicated packing to further intercept residual fine particles, while the molecular sieve adsorbs moisture and trace gaseous impurities in the gas, completing deep adsorption of dust and removal of moisture, achieving fine filtration. Specifically, it includes an intake module 1, which is equipped with a pressure detection element 2. The intake module 1 includes three connection channels, one of which is connected to an external gas supply equipment, the second of which is connected to a physical filtration channel 3, and the third of which is connected to a packing adsorption filtration channel 4. A trigger-type on / off valve A31 and a trigger-type on / off valve B41 are respectively installed on the physical filtration channel 3 and the packing adsorption filtration channel 4. Pressure detection element 2 is used as the trigger opening part of physical filtration channel 3 and packing adsorption filtration channel 4 to detect the incoming air pressure and form a dual-path intelligent filtration switching structure. Preset pressure value A, incoming gas pressure > preset pressure value A: packing adsorption filter channel 4 is closed, physical filter channel 3 is in operation, coarse filtration is performed, and then the coarsely filtered gas is supplied. When the incoming gas pressure is less than the preset pressure value A: the physical filter channel 3 is closed, the packing adsorption filter channel 4 is activated, the gas enters the packing adsorption filter channel 4 for fine filtration, and then the gas is supplied after fine filtration.

[0023] Both trigger-operated on / off valve A31 and trigger-operated on / off valve B41 are solenoid valves.

[0024] A filter box 5 is provided corresponding to the physical filtration channel 3 and the packing adsorption filtration channel 4. The filter box 5 has a physical filtration chamber 51 and a packing filtration chamber 52. The physical filtration chamber 51 is provided with physical filter elements, and the packing filtration chamber 52 is provided with filter packing. The physical filter elements and the filter packing are used as the physical filtration actuator of the physical filtration channel and the packing adsorption filtration actuator of the packing adsorption filtration channel, respectively.

[0025] Physical filtration actuators are formed by filter elements or combinations of several filter sheets.

[0026] The filter box 5 includes a box body 53, and a partition plate 54 is provided inside the box body 53. Through the partition plate 54, the inner cavity of the box body forms a physical filter chamber 51 and a packing filter chamber 52.

[0027] The box 53 is a square box, and the box is also connected to a lid 55.

[0028] A sealing element is provided at the connection between the lid 53 and the body 55.

[0029] The box 53 also has a portable handle 56.

[0030] Pressure detection component 2 is a pressure sensor, and air intake module 1 is a three-way valve.

[0031] Example 2:

[0032] In this embodiment, a preset incoming gas pressure value A is used as the standard for channel opening to realize the switching of gas processing channels. The preset pressure value A is 170 mbar.

[0033] Please see Figure 1-2 This embodiment demonstrates a dual-path intelligent filtration system that employs a two-stage purification filtration structure in conjunction with an intelligent control system. The intelligent control system monitors internal pressure changes in real time through pressure detection and automatically switches between the primary and secondary filtration paths to achieve efficient and stable operation. The primary filtration path is the physical filtration channel 3: utilizing a high-efficiency filter element, it intercepts and adsorbs large particles of boron oxide solid dust in the exhaust gas when the process pressure is high, completing preliminary purification. The secondary filtration path is the packing adsorption filtration channel 4: including a water tank, dedicated adsorption packing, and a molecular sieve. Water vapor and dust mix and enter the dedicated packing to further intercept residual fine particles, while the molecular sieve adsorbs moisture and trace gaseous impurities in the gas, completing deep adsorption of dust and removal of moisture, achieving fine filtration. Specifically, it includes an intake module 1, which is equipped with a pressure detection element 2. The intake module 1 includes three connection channels, one of which is connected to an external gas supply equipment, the second of which is connected to a physical filtration channel 3, and the third of which is connected to a packing adsorption filtration channel 4. A trigger-type on / off valve A31 and a trigger-type on / off valve B41 are respectively installed on the physical filtration channel 3 and the packing adsorption filtration channel 4. Pressure detection element 2 is used as the trigger opening part of physical filtration channel 3 and packing adsorption filtration channel 4 to detect the incoming air pressure and form a dual-path intelligent filtration switching structure. Preset pressure value A, incoming gas pressure > preset pressure value A: packing adsorption filter channel 4 is closed, physical filter channel 3 is in operation, coarse filtration is performed, and then the coarsely filtered gas is supplied. When the incoming gas pressure is less than the preset pressure value A: the physical filter channel 3 is closed, the packing adsorption filter channel 4 is activated, the gas enters the packing adsorption filter channel 4 for fine filtration, and then the gas is supplied after fine filtration.

[0034] Both trigger-operated on / off valve A31 and trigger-operated on / off valve B41 are solenoid valves.

[0035] A filter box 5 is provided corresponding to the physical filtration channel 3 and the packing adsorption filtration channel 4. The filter box 5 has a physical filtration chamber 51 and a packing filtration chamber 52. The physical filtration chamber 51 is provided with physical filter elements, and the packing filtration chamber 52 is provided with filter packing. The physical filter elements and the filter packing are used as the physical filtration actuator of the physical filtration channel and the packing adsorption filtration actuator of the packing adsorption filtration channel, respectively.

[0036] Physical filtration actuators are formed by filter elements or combinations of several filter sheets.

[0037] The filter box 5 includes a box body 53, and a partition plate 54 is provided inside the box body 53. Through the partition plate 54, the inner cavity of the box body forms a physical filter chamber 51 and a packing filter chamber 52.

[0038] The box 53 is a square box, and the box is also connected to a lid 55.

[0039] A sealing element is provided at the connection between the lid 53 and the body 55.

[0040] The box 53 also has a portable handle 56.

[0041] Pressure detection component 2 is a pressure sensor, and air intake module 1 is a three-way valve.

[0042] Example 3:

[0043] In this embodiment, a preset incoming gas pressure value A is used as the standard for channel opening to realize the switching of gas processing channels. The preset pressure value A is 135 mbar.

[0044] Please see Figure 1-2 This embodiment demonstrates a dual-path intelligent filtration system that employs a two-stage purification filtration structure in conjunction with an intelligent control system. The intelligent control system monitors internal pressure changes in real time through pressure detection and automatically switches between the primary and secondary filtration paths to achieve efficient and stable operation. The primary filtration path is the physical filtration channel 3: utilizing a high-efficiency filter element, it intercepts and adsorbs large particles of boron oxide solid dust in the exhaust gas when the process pressure is high, completing preliminary purification. The secondary filtration path is the packing adsorption filtration channel 4: including a water tank, dedicated adsorption packing, and a molecular sieve. Water vapor and dust mix and enter the dedicated packing to further intercept residual fine particles, while the molecular sieve adsorbs moisture and trace gaseous impurities in the gas, completing deep adsorption of dust and removal of moisture, achieving fine filtration. Specifically, it includes an intake module 1, which is equipped with a pressure detection element 2. The intake module 1 includes three connection channels, one of which is connected to an external gas supply equipment, the second of which is connected to a physical filtration channel 3, and the third of which is connected to a packing adsorption filtration channel 4. A trigger-type on / off valve A31 and a trigger-type on / off valve B41 are respectively installed on the physical filtration channel 3 and the packing adsorption filtration channel 4. Pressure detection element 2 is used as the trigger opening part of physical filtration channel 3 and packing adsorption filtration channel 4 to detect the incoming air pressure and form a dual-path intelligent filtration switching structure. Preset pressure value A, incoming gas pressure > preset pressure value A: packing adsorption filter channel 4 is closed, physical filter channel 3 is in operation, coarse filtration is performed, and then the coarsely filtered gas is supplied. When the incoming gas pressure is less than the preset pressure value A: the physical filter channel 3 is closed, the packing adsorption filter channel 4 is activated, the gas enters the packing adsorption filter channel 4 for fine filtration, and then the gas is supplied after fine filtration.

[0045] Both trigger-operated on / off valve A31 and trigger-operated on / off valve B41 are solenoid valves.

[0046] A filter box 5 is provided corresponding to the physical filtration channel 3 and the packing adsorption filtration channel 4. The filter box 5 has a physical filtration chamber 51 and a packing filtration chamber 52. The physical filtration chamber 51 is provided with physical filter elements, and the packing filtration chamber 52 is provided with filter packing. The physical filter elements and the filter packing are used as the physical filtration actuator of the physical filtration channel and the packing adsorption filtration actuator of the packing adsorption filtration channel, respectively.

[0047] Physical filtration actuators are formed by filter elements or combinations of several filter sheets.

[0048] The filter box 5 includes a box body 53, and a partition plate 54 is provided inside the box body 53. Through the partition plate 54, the inner cavity of the box body forms a physical filter chamber 51 and a packing filter chamber 52.

[0049] The box 53 is a square box, and the box is also connected to a lid 55.

[0050] A sealing element is provided at the connection between the lid 53 and the body 55.

[0051] The box 53 also has a portable handle 56.

[0052] Pressure detection component 2 is a pressure sensor, and air intake module 1 is a three-way valve.

[0053] Compared with existing technologies, the present invention can provide clean gas for diaphragm pumps, ensuring that the boron diffusion process of diaphragm pumps is carried out efficiently and with high quality.

[0054] For those skilled in the art, various modifications and improvements can be made without departing from the inventive concept of this invention, and these all fall within the protection scope of this invention.

Claims

1. A dual-path intelligent filtration system, characterized in that: It adopts a dual-stage purification filtration structure and works in conjunction with an intelligent control system. The intelligent control system monitors internal pressure changes in real time through pressure detection and automatically switches between the primary and secondary filtration paths to achieve efficient and stable operation. The primary filtration path is a physical filtration channel: using a high-efficiency filter element, it intercepts and adsorbs large particles of boron oxide solid dust in the exhaust gas when the process pressure is high, completing the initial purification. The secondary filtration path is a packed adsorption filtration channel: including a water tank, special adsorption packing, and molecular sieves. Water vapor and dust mix and enter the special packing to further intercept residual fine particles, and then the molecular sieve adsorbs moisture and trace gaseous impurities in the gas, completing the deep adsorption of dust and the removal of moisture, achieving fine filtration. Specifically, it includes an intake module, which is equipped with a pressure detection device. The intake module includes three connection channels, one of which is connected to an external gas supply device, the second of which is connected to a physical filtration channel, and the third of which is connected to a packing adsorption filtration channel. The physical filtration channel and the packing adsorption filtration channel are respectively equipped with trigger-type on / off valve A and trigger-type on / off valve B; The pressure detection element is used as a trigger opening part for physical filtration channels and packing adsorption filtration channels to detect incoming air pressure, forming a dual-path intelligent filtration switching structure: Preset pressure value A, incoming gas pressure > preset pressure value A: the packing adsorption filter channel is closed, the physical filter channel is in operation, coarse filtration is performed, and then the coarsely filtered gas is supplied. When the incoming gas pressure is less than the preset pressure value A: the physical filtration channel is closed, the packing adsorption filtration channel is activated, the gas enters the packing adsorption filtration channel for fine filtration, and then the gas is supplied after fine filtration.

2. The dual-path intelligent filtration system according to claim 1, characterized in that: The preset pressure value A is 100mbar-170mbar.

3. The dual-path intelligent filtration system according to claim 2, characterized in that: Both trigger-operated valve A and trigger-operated valve B are solenoid valves.

4. The dual-path intelligent filtration system according to claim 3, characterized in that: A filter box is provided for the physical filtration channel and the packing adsorption filtration channel. The filter box has a physical filtration chamber and a packing filtration chamber. The physical filtration chamber is equipped with physical filter elements, and the packing filtration chamber is equipped with filter packing. The physical filter elements and filter packing are used as the physical filtration actuator of the physical filtration channel and the packing adsorption filtration actuator of the packing adsorption filtration channel, respectively.

5. A dual-path intelligent filtration system according to claim 4, characterized in that: Physical filtration actuators are formed by filter elements or combinations of several filter sheets.

6. The dual-path intelligent filtration system according to claim 5, characterized in that: The filter box includes a box body, and a partition plate is installed inside the box body. Through the partition plate, the internal cavity of the box body forms a physical filter chamber and a packing filter chamber.

7. A dual-path intelligent filtration system according to claim 6, characterized in that: The box is square and has a lid.

8. A dual-path intelligent filtration system according to claim 7, characterized in that: A sealing element is installed at the connection between the lid and the body of the box.

9. A dual-path intelligent filtration system according to claim 8, characterized in that: The box also features a portable handle.

10. A dual-path intelligent filtration system according to claim 9, characterized in that: The pressure detection component is a pressure sensor, and the air intake module is a three-way valve.

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