A method for measuring center-to-center spacing of aspherical microlens array

Abstract

The present application relates to microlens array measurement technical field, especially in a kind of measuring aspherical microlens array center spacing method, comprising the following steps: step one, using UA3P Recipe Creator software to write automatic measurement matrix probe running path;Step two, through UA3P atomic force probe contact type measurement aspherical microlens array biaxial surface type, fitting output each small lens actual center deviation coordinate;Step three, the actual center deviation coordinate of each small lens and the automatic measurement lower needle spacing coordinate are input in the preset Excel template table, and the center spacing of each array lens is output by the built-in calculation logic of table.The present application relates to a kind of measuring aspherical microlens array center spacing method, and measurement precision is high, and repeatability error is controllable at 0.06um, after 16 times of repeated measurement, P / T Ratio<30%, can realize quantitative standardization control, adapt to different specifications aspherical microlens array, suitable for optoelectronic device production quality detection scene.

Description

Technical Field

[0001] This invention relates to the field of microlens array measurement technology, and in particular to a method for measuring the center spacing of an aspherical microlens array. Background Technology

[0002] Identical lenses arranged in a certain period on a plane form a lens array. Microlens arrays have become key optical components in fields such as optical sensing, optical computing, and optical fiber communication due to their advantages of small size, light weight, and easy integration. With the development of technology, their size has reached the millimeter, micrometer, or even nanometer scale.

[0003] However, existing methods for measuring the center spacing of microlens arrays have significant bottlenecks: 1. Image-based measurements have a repeatability accuracy of only 0.3 μm, which is too large an error compared to the ±0.25 μm center spacing tolerance of ultra-precision aspherical microlens arrays, rendering the data unreliable; 2. Image-based measurement systems cannot fit the lens center to irregularly structured aspherical microlens arrays by capturing and fitting the feature contours; 3. Image-based measurements fit the theoretical mechanical center position and cannot evaluate the center offset caused by shrinkage, delamination, and other issues in the actual lens surface contour. Therefore, we propose a method for measuring the center spacing of aspherical microlens arrays. Summary of the Invention

[0004] The main objective of this invention is to provide a method for measuring the center spacing of an aspherical microlens array, which can effectively solve the problems in the background art.

[0005] To achieve the above objectives, the technical solution adopted by the present invention is as follows:

[0006] A method for measuring the center-to-center spacing of an aspherical microlens array includes the following steps:

[0007] Step 1: Use UA3PRecipeCreator software to write the automatic measurement matrix probe running path; plan the probe movement trajectory according to the specifications such as the arrangement period and number of lenses of the aspherical microlens array to ensure coverage of all microlenses to be measured.

[0008] Step 2: The biaxial surface profile of the aspherical microlens array is measured by contact using a UA3P atomic force probe, and the actual center deviation coordinates of each microlens are fitted and output. By utilizing the contact measurement characteristics of the atomic force probe, biaxial surface profile data is obtained and fitted to obtain the deviation between the actual surface profile center and the theoretical center.

[0009] Step 3: Input the actual center deviation coordinates and automatically measured needle spacing coordinates of each small lens into a preset Excel template table. The table's built-in calculation logic outputs the center spacing of each array lens. With the help of the table's preset calculation logic, the coordinate calculation and center spacing output are automatically completed.

[0010] Preferably, when writing the automatic measurement matrix probe running path in step one, the path parameters need to be determined based on the arrangement period and the number of lenses of the aspherical microlens array.

[0011] By adopting the above technical solutions, we can ensure that the probe path and array specifications are accurately matched, avoid missed or repeated measurements, and guarantee measurement efficiency.

[0012] Preferably, the biaxial surface shape measurement in step two specifically involves acquiring surface shape data of the aspherical microlens array in the X and Y axes, and then fitting the actual center deviation coordinates based on the data.

[0013] By adopting the above technical solution, comprehensive surface information is obtained, providing complete data support for the accurate fitting of the center deviation coordinates and reducing measurement deviation.

[0014] Preferably, the actual center deviation coordinates in step two reflect the offset value between the actual surface contour center and the theoretical center of the aspherical microlens.

[0015] By adopting the above technical solution, the actual center position can be accurately captured, solving the problem that traditional measurements cannot evaluate center offset.

[0016] Preferably, the Excel template table in step three is pre-set with logic for calculating coordinate differences and distance formulas.

[0017] By adopting the above technical solutions, the calculation process is simplified, human calculation errors are avoided, and the consistency and accuracy of measurement results are guaranteed.

[0018] Preferably, the measurement process in step three needs to be repeated at least 16 times, and the acceptable variation of the measurement system is verified by calculating P / TRatio.

[0019] By adopting the above technical solution, the measurement system is ensured to be stable and reliable, and an acceptable standard of P / TRatio <30% can be achieved for arrays with a tolerance of ±0.25um.

[0020] Preferably, the automatic measurement matrix probe running path written in step one can be adapted to aspherical microlens arrays with different arrangement specifications.

[0021] By adopting the above technical solution, the versatility of the method is improved, eliminating the need to redevelop programs for different specifications and reducing usage costs.

[0022] Compared with the prior art, the present invention has the following beneficial effects:

[0023] This invention plans the probe path using UA3PRecipeCreator software, combines it with the contact-type biaxial surface profile measurement of the UA3P atomic force probe, fits the actual surface profile center, and then automatically calculates the center distance using an Excel template. It has high measurement accuracy, and the repeatability measurement error can be controlled within 0.06µm. It effectively solves the problems of insufficient accuracy, poor adaptability, and inability to evaluate center offset in image-based measurements. It can realize quantitative and standardized control of the center distance of aspherical microlens arrays and has high promotional value. Attached Figure Description

[0024] Figure 1 This is a flowchart of a method for measuring the center spacing of an aspherical microlens array according to the present invention;

[0025] Figure 2 This is a schematic diagram of the probe measurement path for an aspherical microlens array, which is a method for measuring the center spacing of an aspherical microlens array according to the present invention.

[0026] Figure 3 This is a schematic diagram of the biaxial surface profile measurement and center deviation fitting of an aspherical microlens array, which is a method for measuring the center spacing of an aspherical microlens array according to the present invention.

[0027] Figure 4 The figure shows the center spacing measurement data and repeatability test results of the method for measuring the center spacing of an aspherical microlens array according to the present invention. Detailed Implementation

[0028] To make the technical means, creative features, objectives and effects of this invention easier to understand, the invention will be further described below in conjunction with specific embodiments.

[0029] A method for measuring the center-to-center spacing of an aspherical microlens array includes the following steps:

[0030] Step 1: Use UA3PRecipeCreator software to write the automatic measurement matrix probe running path;

[0031] Based on the arrangement period (e.g., 2.5 mm) and number of lenses of the aspherical microlens array to be measured, the probe's starting position and movement step size are set in the software to generate a running path covering all lenses. A schematic diagram of the path is shown below. Figure 2 As shown;

[0032] Step 2: The biaxial surface profile of the aspherical microlens array is measured using a UA3P atomic force probe, and the actual center deviation coordinates of each microlens are fitted and output. The UA3P device is activated, and the atomic force probe contacts the lens surface along a preset path, collecting X-axis and Y-axis surface profile data. After fitting, the center deviation coordinates are output, as shown in the diagram below. Figure 3 As shown;

[0033] Step 3: Input the actual center deviation coordinates and automatically measured pin spacing coordinates of each small lens into a preset Excel template table. The table's built-in calculation logic outputs the center spacing of each array lens. Input the center deviation coordinates obtained in Step 2 (e.g., lens 1 offset -0.052300um, -0.019200um) and pin spacing coordinates (e.g., 2500.000000um) into the table. The table automatically calculates the center spacing, and the data and calculation results are as follows: Figure 4 As shown;

[0034] Repeat the above measurement steps 16 times and calculate the P / T (Precision-to-Tolerance) Ratio. For an aspherical microlens array with a tolerance of ±0.25µm, if P / TRatio = 24.79% < 30%, the variation in the measurement system is acceptable and the measurement results are valid.

[0035] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of this invention is defined by the appended claims and their equivalents.

Claims

1. A method for measuring the center spacing of an aspherical microlens array, characterized in that, Includes the following steps: Step 1: Use UA3P Recipe Creator software to write the automatic measurement matrix probe operation path; Step 2: The biaxial surface profile of the aspherical microlens array is measured by contact with the UA3P atomic force probe, and the actual center deviation coordinates of each microlens are fitted and output. Step 3: Input the actual center deviation coordinates and automatically measured pin spacing coordinates of each small lens into a preset Excel template table, and output the center spacing of each array lens through the built-in calculation logic of the table.

2. The method for measuring the center spacing of an aspherical microlens array according to claim 1, characterized in that, When writing the automatic measurement matrix probe running path in step one, the path parameters need to be determined based on the arrangement period and number of lenses of the aspherical microlens array.

3. The method for measuring the center spacing of an aspherical microlens array according to claim 1, characterized in that, The biaxial surface shape measurement in step two specifically involves acquiring surface shape data of the aspherical microlens array in the X and Y axes, and then fitting the actual center deviation coordinates based on this data.

4. The method for measuring the center spacing of an aspherical microlens array according to claim 1, characterized in that, The actual center deviation coordinates in step two reflect the offset between the actual surface profile center and the theoretical center of the aspherical microlens.

5. The method for measuring the center spacing of an aspherical microlens array according to claim 1, characterized in that, The Excel template table in step three is pre-set with logic for calculating coordinate differences and distance formulas.

6. The method for measuring the center spacing of an aspherical microlens array according to claim 1, characterized in that, The measurement process in step three needs to be repeated at least 16 times, and the variability of the measurement system should be verified by calculating the P / T Ratio.

7. The method for measuring the center spacing of an aspherical microlens array according to claim 1, characterized in that, The automatic measurement matrix probe running path written in step one can be adapted to aspherical microlens arrays with different arrangement specifications.

Images