A concentration monitoring device for an aerosol deposition process

Abstract

The application discloses a concentration monitoring device for an aerosol deposition process, and relates to the technical field of aerosol detection.The concentration monitoring device comprises a casing and a speed regulation mechanism, the speed regulation mechanism comprises an aerosol inlet pipe and an aerosol outlet pipe, the aerosol outlet pipe is arranged above the aerosol inlet pipe, the axis of the aerosol inlet pipe and the aerosol outlet pipe are collinear, the cross-sectional radius of the inlet end of the aerosol outlet pipe is larger than the cross-sectional radius of the outlet end of the aerosol inlet pipe, a test area is arranged between the aerosol inlet pipe and the aerosol outlet pipe, the aerosol inlet pipe comprises a first diffusion pipe, the cross-sectional radius of the first diffusion pipe increases from bottom to top, the aerosol outlet pipe comprises a second contraction pipe, the cross-sectional radius of the second contraction pipe decreases from bottom to top, the inlet end of the aerosol inlet pipe penetrates through the bottom of the casing, and the outlet end of the aerosol outlet pipe penetrates through the upper end of the casing.The special structural design of the aerosol inlet pipe and the aerosol outlet pipe is used to realize accurate regulation of the flow speed of aerosol by arranging the speed regulation mechanism.

Description

Technical Field

[0001] This invention relates to the field of aerosol detection technology, specifically a concentration monitoring device for aerosol deposition processes. Background Technology

[0002] Aerosol deposition is an advanced materials preparation and coating technology that involves suspending micro / nano particles in a gas to form an aerosol, which is then transported to a deposition chamber. A nozzle accelerates the particles, causing them to impact a substrate at high speed and deposit a dense coating. In this process, the aerosol concentration is one of the key parameters affecting deposition efficiency, coating uniformity, microstructure, and final performance. Accurate and stable monitoring and control of the aerosol concentration are crucial for process optimization, repeatability assurance, and product quality control.

[0003] However, traditional online optical methods (such as transmission and scattering methods) are difficult to directly adapt to the special environment of aerosol deposition processes. Indirect back-calculation methods, which estimate concentration based on deposition rate, have inherent flaws. They are not only slow to respond but also fail to reflect real-time concentration fluctuations of aerosols during transport, hindering process stability and optimization. In existing monitoring devices, the aerosol flow rate generally slows down gradually as it enters the test area from the inlet pipe. A faster flow rate upon reaching the test area may lead to inaccurate test results, while a slow flow rate upon reaching the outlet may result in incomplete aerosol discharge, with some diffusing around the test area and affecting the concentration testing of subsequently entering aerosols. Summary of the Invention

[0004] The purpose of this invention is to solve the problem of how to regulate the flow rate of aerosols in the prior art, and to propose a concentration monitoring device for aerosol deposition processes.

[0005] To address the above problems, the present invention provides the following technical solution: A concentration monitoring device for aerosol deposition process, the concentration monitoring device includes a housing and a speed regulation mechanism; The speed control mechanism includes an aerosol inlet pipe and an aerosol outlet pipe. The aerosol outlet pipe is positioned above the aerosol inlet pipe. The axes of the aerosol inlet pipe and the aerosol outlet pipe are collinear. The cross-sectional radius of the inlet end of the aerosol outlet pipe is larger than the cross-sectional radius of the outlet end of the aerosol inlet pipe. A test area is provided between the aerosol inlet pipe and the aerosol outlet pipe. The aerosol inlet pipe includes a first diffuser, the cross-sectional radius of which increases from bottom to top; The aerosol outlet tube includes a second contraction tube, the cross-sectional radius of which decreases from bottom to top; The inlet end of the aerosol inlet pipe passes through the bottom of the housing, and the outlet end of the aerosol outlet pipe passes through the top of the housing. The aerosol inlet pipe and the aerosol outlet pipe are used to adjust the flow rate of the aerosol being tested.

[0006] The housing protects the internal components of the device, while the speed control mechanism regulates the flow rate of the aerosol being tested. First, the aerosol is introduced into the aerosol inlet pipe at a relatively high initial flow rate. It then enters the test area inside the housing. As it passes through the first diffuser, the flow rate gradually decreases due to the increasing cross-sectional radius of the first diffuser from bottom to top, until it reaches the detection area. This prolongs the aerosol's residence time, making the aerosol concentration test results more accurate. After passing through the detection area, the aerosol enters the aerosol outlet pipe. As it passes through the second contraction pipe, the flow rate gradually increases due to the decreasing cross-sectional radius of the second contraction pipe from bottom to top, allowing the aerosol to flow out of the outlet pipe quickly, reducing the contraction time and preventing the aerosol from remaining in the detection area. Since the outlet end of the aerosol outlet pipe passes through the upper end of the housing, the aerosol is discharged from the housing through the outlet pipe.

[0007] Furthermore, the aerosol inlet pipe is provided with an inlet pipe and a first contraction pipe from bottom to top, the inlet pipe and the first contraction pipe are connected, and the cross-sectional radius of the first contraction pipe decreases from bottom to top; The inlet pipe passes through the bottom of the casing.

[0008] The aerosol is introduced into the inlet pipe at an initial flow rate. The inlet pipe passes through the bottom of the housing to stabilize the entire inlet channel. Due to the design of the cross-sectional radius of the first contraction tube decreasing from bottom to top, the aerosol flow rate gradually increases as it passes through, preparing for the subsequent deceleration process in the first diffusion tube. This design of accelerating first and then decelerating helps to optimize the flow rate distribution of the aerosol in the test area and improve the test accuracy.

[0009] Furthermore, the aerosol inlet pipe also includes a first smoothing pipe and an outlet pipe. The first smoothing pipe is connected to the first contraction pipe and the first diffusion pipe respectively. The first diffusion pipe and the outlet pipe are arranged sequentially from bottom to top. The two ends of the first diffusion pipe are connected to the outlet pipe and the first smoothing pipe respectively. The cross-sectional radius of the outlet pipe is larger than the cross-sectional radius of the inlet pipe. The cross-sectional radius of the output tube is smaller than the cross-sectional radius of the inlet end of the aerosol outlet tube, and the outlet of the output tube faces the test area.

[0010] The first smoothing tube is connected to both the first contraction tube and the first diffuser tube, serving as a transition and buffer to ensure the aerosol remains stable during velocity changes and smoothly enters the first diffuser tube from the first contraction tube. This avoids turbulence and other instabilities caused by sudden changes in velocity and tube diameter, which could affect subsequent testing results. The first diffuser tube, with its cross-sectional radius increasing from bottom to top, further reduces the aerosol velocity, resulting in a slower aerosol speed upon reaching the testing area. This allows sufficient residence time for more accurate concentration testing. The output tube guides the decelerated aerosol to the testing area. Its cross-sectional radius design ensures smooth aerosol outflow and matches the cross-sectional radius of the aerosol outlet inlet, ensuring a smooth flow of aerosol into the outlet tube and guaranteeing the smoothness of the entire velocity adjustment process.

[0011] Furthermore, the aerosol outlet pipe is provided with an inhalation pipe, a second smoothing pipe and a second diffusion pipe from bottom to top. The cross-sectional radius of the inhalation pipe decreases from bottom to top. The inhalation pipe and the second smoothing pipe are connected. The second smoothing pipe and the second diffusion pipe are connected. The cross-sectional radius of the second diffusion pipe increases from bottom to top. The second diffusion pipe and the third smoothing pipe are connected. The inlet radius of the suction tube is larger than the outlet radius, and the inlet of the suction tube faces the test area.

[0012] Because the inlet radius of the suction pipe is larger than that of the outlet pipe, the aerosol can smoothly enter the suction pipe when flowing from the outlet pipe to the suction pipe. This allows for a slight acceleration of the aerosol as it enters the suction pipe from the test area, preventing diffusion and impacting subsequent aerosol testing. The second smoothing pipe acts as a transition and stabilizes the airflow, ensuring the aerosol remains stable during velocity changes and avoiding unstable airflow caused by pipe diameter variations. The second diffuser, with its increasing cross-sectional radius from bottom to top, first slightly increases the pressure of the incoming aerosol through expansion, creating a buffer. Then, it contracts from its maximum diameter, preventing flow separation and ensuring uniform velocity distribution within the pipe, reducing kinetic energy loss. The second diffuser isolates the aerosol from subsequent contraction within the test area. Furthermore, when the maximum diameter of the second diffuser is sufficiently large, the contraction of the second contraction pipe produces a more significant pressure drop and better acceleration effect.

[0013] Furthermore, the aerosol outlet pipe also includes a third smoothing pipe and an outlet pipe. The third smoothing pipe is connected to the second diffuser pipe and the second contraction pipe respectively. The second contraction pipe and the outlet pipe are arranged sequentially from bottom to top and are connected to each other. The cross-sectional radius of the discharge pipe is smaller than that of the output pipe, and the discharge pipe passes through the upper part of the casing.

[0014] The third smoothing tube acts as a transition and stabilizes the airflow, allowing the aerosol to smoothly enter the second converging tube from the second diffuser tube. The second converging tube, with its decreasing cross-sectional radius from bottom to top, significantly increases the aerosol flow rate, allowing the aerosol to flow out of the discharge tube quickly, reducing the convergence time within the device, and preventing the aerosol from lingering in the test area. The discharge tube then discharges the tested aerosol outside the casing, completing the entire aerosol flow rate adjustment and concentration testing process.

[0015] Furthermore, the concentration monitoring device also includes a mobile mechanism and a testing mechanism; The moving mechanism includes a slide rail, a slider, a lead screw, and a support block. There are two sets of slide rails and two support blocks. Two sliders are respectively located below the two support blocks. The sliders and slide rails are slidably connected. A motor is located at one end of the slide rail, and a lead screw is located at the output end of the motor. The slide rail and lead screw are rotatably connected. The sliders and lead screws are threadedly connected. Two sets of slide rails are symmetrically arranged inside the housing, and a motor is installed inside the housing. A testing mechanism is installed on the two support blocks.

[0016] Two support blocks are connected to a lead screw via sliders, enabling precise movement along the slide rail. When the motor starts, its output drives the lead screw to rotate. Because the lead screw has two sets of external threads in opposite directions, the two sliders move along the lead screw in opposite or opposite directions, thereby driving the support blocks and the testing mechanism on them to move synchronously. This design allows the testing mechanism to adjust its position as needed to more accurately capture changes in aerosol concentration within the testing area, achieving flexible adjustment of the testing mechanism and improving the accuracy and reliability of concentration monitoring.

[0017] Furthermore, a rotating cavity is provided inside the slide rail; The slider has internal threads; The outer ring of the lead screw has two sets of external threads, and the two sets of external threads have opposite directions. Internal and external threaded connections.

[0018] The rotating cavity inside the slide rail provides space for the lead screw to rotate, ensuring that the lead screw can rotate smoothly without obstruction. The internal thread inside the slider matches the two sets of external threads on the outer ring of the lead screw. This design allows the slider to move linearly along the lead screw when it rotates. Since the two sets of external threads have opposite directions, the two sliders will move in opposite or opposite directions, thereby driving the support block and the testing mechanism to move synchronously. This threaded connection design not only realizes the flexible adjustment of the testing mechanism, but also ensures the accuracy and stability of the adjustment, enabling the testing mechanism to accurately capture the concentration changes of aerosols in the testing area, thus improving the accuracy and reliability of concentration monitoring.

[0019] Furthermore, the testing mechanism includes a support frame, a laser emitter, and a receiver. The support frame is mounted on two support blocks, one support frame is mounted on the laser emitter, and the other support frame is mounted on the receiver.

[0020] The support frame provides a stable support platform for the laser emitter and receiver, ensuring they maintain a fixed position and angle during testing. The laser emitter emits a laser beam of a specific wavelength that passes through the aerosol in the test area. The particles in the aerosol scatter the laser beam, and the receiver receives the scattered laser signal and converts it into an electrical signal for further processing. By analyzing the changes in parameters such as the intensity and frequency of the laser signal received by the receiver, the concentration of aerosol in the test area can be accurately calculated. This testing method has the advantages of being non-contact, highly accurate, and real-time, effectively meeting the stringent requirements for concentration monitoring in aerosol deposition processes and providing strong data support for process optimization and product quality control.

[0021] Furthermore, the laser emitter and receiver are aligned on the same axis, which passes through the test area.

[0022] The laser emitter and receiver are aligned on the same axis and pass through the test area. This design ensures that the laser beam can accurately pass through the aerosol test area, allowing the particles in the aerosol to fully scatter the laser beam. The receiver can then receive the laser signal after it has been fully scattered by the aerosol, thereby obtaining more accurate and comprehensive information about the aerosol concentration. This provides a reliable basis for subsequent accurate calculation of the aerosol concentration and further improves the testing accuracy and reliability of the entire concentration monitoring device.

[0023] Compared with the prior art, the beneficial effects of the present invention are: 1. This invention achieves precise regulation of aerosol flow rate by setting up a speed regulation mechanism and utilizing the special structural design of the aerosol inlet and outlet pipes. Before the aerosol enters the test area, the process of acceleration by the first constriction pipe and deceleration by the first diffusion pipe optimizes the flow rate distribution of the aerosol in the test area and prolongs the residence time of the aerosol in the test area, thereby improving the accuracy of concentration testing. 2. In this invention, the flow rate of aerosol is greatly increased by decreasing the cross-sectional radius of the second contraction tube from bottom to top, allowing the aerosol to flow out of the discharge tube quickly, reducing the aerosol's convergence time in the device, and preventing the aerosol's retention from affecting subsequent tests. 3. The present invention enables the testing mechanism to flexibly adjust its position as needed through a moving mechanism, thereby further improving the accuracy and reliability of concentration monitoring. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic diagram of the speed regulation mechanism and testing mechanism of the present invention; Figure 3 This is a cross-sectional schematic diagram of the aerosol inlet pipe of the present invention; Figure 4 This is a schematic cross-sectional view of the aerosol outlet tube of the present invention; Figure 5 This is a schematic diagram of the structure of the moving mechanism of the present invention; Figure 6 for Figure 5 A magnified view at point C in the view; Figure 7 This is a cross-sectional schematic diagram of the moving mechanism of the present invention.

[0025] In the diagram: 1. Housing; 2. Speed ​​control mechanism; 21. Aerosol inlet pipe; 211. Inlet pipe; 212. First contraction pipe; 213. First smoothing pipe; 214. First diffuser pipe; 215. Output pipe; 22. Aerosol outlet pipe; 221. Suction pipe; 222. Second smoothing pipe; 223. Second diffuser pipe; 224. Third smoothing pipe; 225. Second contraction pipe; 226. Discharge pipe; 3. Moving mechanism; 31. Slide rail; 311. Rotating cavity; 32. Slider; 321. Internal thread; 33. Lead screw; 331. External thread; 34. Support block; 35. Motor; 4. Testing mechanism; 41. Support frame; 42. Laser emitter; 43. Receiver. Detailed Implementation

[0026] The embodiments of the present invention will now be further described in conjunction with the accompanying drawings and examples.

[0027] Example: Figures 1-7 As shown, the present invention provides a technical solution: a concentration monitoring device for aerosol deposition processes.

[0028] like Figure 1 As shown, a concentration monitoring device for aerosol deposition process is provided, comprising a housing 1 and a speed regulating mechanism 2. The speed control mechanism 2 includes an aerosol inlet pipe 21 and an aerosol outlet pipe 22. The aerosol outlet pipe 22 is positioned above the aerosol inlet pipe 21. The axis of the aerosol inlet pipe 21 and the axis of the aerosol outlet pipe 22 are collinear. The cross-sectional radius of the inlet end of the aerosol outlet pipe 22 is larger than the cross-sectional radius of the outlet end of the aerosol inlet pipe 21. A test area is provided between the aerosol inlet pipe 21 and the aerosol outlet pipe 22. The aerosol inlet pipe 21 includes a first diffuser pipe 214, the cross-sectional radius of the first diffuser pipe 214 increases from bottom to top; The aerosol outlet tube 22 includes a second contraction tube 225, the cross-sectional radius of the second contraction tube 225 decreasing from bottom to top; The inlet end of the aerosol inlet pipe 21 passes through the bottom of the housing 1, and the outlet end of the aerosol outlet pipe 22 passes through the top of the housing 1. The aerosol inlet pipe 21 and the aerosol outlet pipe 22 are used to adjust the flow rate of the aerosol being tested.

[0029] The housing 1 is used to protect the internal components of the device. The speed regulating mechanism 2 is used to adjust the flow rate of the aerosol being tested. First, the aerosol is introduced into the aerosol inlet pipe 21 at a relatively high initial flow rate. After passing through the aerosol inlet pipe 21, it enters the test area inside the housing 1. When passing through the first diffuser pipe 214, the flow rate of the aerosol gradually slows down because the cross-sectional radius of the first diffuser pipe 214 increases from bottom to top, until it reaches the detection area. This prolongs the residence time of the aerosol and makes the aerosol concentration test results more accurate. After passing through the detection area, the aerosol enters the aerosol outlet pipe 22. When passing through the second contraction pipe 225, the flow rate of the aerosol gradually increases because the cross-sectional radius of the second contraction pipe 225 decreases from bottom to top. This allows the aerosol to flow out of the aerosol outlet pipe 22 quickly, reducing the contraction time and preventing the aerosol from remaining in the detection area. Since the outlet end of the aerosol outlet pipe 22 passes through the upper end of the housing 1, the aerosol is discharged from the inside of the housing 1 through the aerosol outlet pipe 22.

[0030] like Figures 2-3 As shown, the aerosol inlet pipe 21 is provided with an inlet pipe 211 and a first contraction pipe 212 from bottom to top. The inlet pipe 211 and the first contraction pipe 212 are connected. The cross-sectional radius of the first contraction pipe 212 decreases from bottom to top. The inlet pipe 211 passes through the bottom of the casing 1.

[0031] The aerosol is introduced into the inlet pipe 211 at an initial flow rate. The inlet pipe 211 passes through the bottom of the housing 1 to stabilize the entire inlet channel. Due to the design of the cross-sectional radius of the first contraction pipe 212 decreasing from bottom to top, the aerosol gradually accelerates as it passes through, preparing for the subsequent deceleration process in the first diffusion pipe 214. This design of accelerating first and then decelerating helps to optimize the flow velocity distribution of the aerosol in the test area and improve the test accuracy.

[0032] like Figure 3 As shown, the aerosol inlet pipe 21 also includes a first smoothing pipe 213 and an outlet pipe 215. The first smoothing pipe 213 is connected to the first contraction pipe 212 and the first diffusion pipe 214 respectively. The first diffusion pipe 214 and the outlet pipe 215 are arranged sequentially from bottom to top. The two ends of the first diffusion pipe 214 are connected to the outlet pipe 215 and the first smoothing pipe 213 respectively. The cross-sectional radius of the outlet pipe 215 is larger than the cross-sectional radius of the inlet pipe 211. The cross-sectional radius of the output tube 215 is smaller than the cross-sectional radius of the inlet end of the aerosol outlet tube 22, and the outlet of the output tube 215 faces the test area.

[0033] The first smoothing pipe 213 is connected to the first contraction pipe 212 and the first diffuser pipe 214 respectively, playing a transition and buffering role. This ensures that the aerosol remains stable during the flow rate change process and smoothly enters the first diffuser pipe 214 from the first contraction pipe 212. This avoids turbulence and other unstable phenomena caused by sudden changes in flow rate and pipe diameter, which would affect the subsequent test results. The first diffuser pipe 214, through its design of increasing cross-sectional radius from bottom to top, further reduces the flow rate of the aerosol, making the speed of the aerosol slower after reaching the test area. This allows the aerosol to have sufficient residence time in the test area for more accurate concentration testing. The output pipe 215 guides the decelerated aerosol to the test area. Its cross-sectional radius design ensures that the aerosol can flow out smoothly and matches the cross-sectional radius of the inlet end of the aerosol outlet pipe 22, allowing the aerosol to flow smoothly into the inlet of the aerosol outlet pipe 22, ensuring the smoothness of the entire flow rate adjustment process.

[0034] like Figure 4 As shown, the aerosol outlet pipe 22 is provided with an inhalation pipe 221, a second smoothing pipe 222 and a second diffuser pipe 223 from bottom to top. The cross-sectional radius of the inhalation pipe 221 decreases from bottom to top. The inhalation pipe 221 and the second smoothing pipe 222 are connected. The second smoothing pipe 222 and the second diffuser pipe 223 are connected. The cross-sectional radius of the second diffuser pipe 223 increases from bottom to top. The second diffuser pipe 223 and the third smoothing pipe 224 are connected. The inlet radius of the suction tube 221 is larger than the cross-sectional radius of the output tube 215, and the inlet of the suction tube 221 faces the test area.

[0035] Because the inlet radius of the suction pipe 221 is larger than that of the outlet pipe 215, the aerosol can smoothly enter the suction pipe 221 when flowing from the outlet pipe 215 to the suction pipe 221. This allows for a slight acceleration of the aerosol as it enters the suction pipe 221 from the test area, preventing diffusion and impacting subsequent aerosol testing. The second smoothing pipe 222 acts as a transition and stabilizes the airflow, ensuring the aerosol remains stable during velocity changes and avoiding unstable airflow due to pipe diameter variations. The second diffuser 223, with its increasing cross-sectional radius from bottom to top, first slightly increases the pressure of the incoming aerosol through expansion, creating a buffer. Then, it contracts from its maximum diameter, preventing flow separation and ensuring uniform velocity distribution within the pipe, reducing kinetic energy loss. The second diffuser 223 isolates the aerosol from subsequent contraction in the test area. Furthermore, when the maximum diameter of the second diffuser 223 is sufficiently large, the contraction of the second contraction pipe 225 can produce a more significant pressure drop and better acceleration effect.

[0036] like Figure 4 As shown, the aerosol outlet pipe 22 also includes a third smoothing pipe 224 and an outlet pipe 226. The third smoothing pipe 224 is connected to the second diffuser pipe 223 and the second contraction pipe 225 respectively. The second contraction pipe 225 and the outlet pipe 226 are arranged sequentially from bottom to top and are connected to each other. The cross-sectional radius of the discharge pipe 226 is smaller than that of the output pipe 215, and the discharge pipe 226 passes through the upper part of the housing 1.

[0037] The third smoothing tube 224 serves to transition and stabilize the airflow, allowing the aerosol to smoothly enter the second contraction tube 225 from the second diffuser tube 223. The second contraction tube 225, with its cross-sectional radius decreasing from bottom to top, significantly increases the aerosol flow rate, allowing the aerosol to flow out of the discharge tube 226 quickly, reducing the convergence time within the device, and preventing the aerosol from lingering in the test area. The discharge tube 226 discharges the tested aerosol outside the casing 1, completing the entire aerosol flow rate adjustment and concentration testing process.

[0038] like Figures 5-6 As shown, the concentration monitoring device also includes a moving mechanism 3 and a testing mechanism 4; The moving mechanism 3 includes a slide rail 31, a slider 32, a lead screw 33, and a support block 34. There are two sets of slide rails 31 and two support blocks 34. Two sliders 32 are respectively provided below the two support blocks 34. The sliders 32 and the slide rail 31 are slidably connected. A motor 35 is provided at one end of the slide rail 31. A lead screw 33 is provided at the output end of the motor 35. The slide rail 31 and the lead screw 33 are rotatably connected. The sliders 32 and the lead screw 33 are threadedly connected. Two sets of slide rails 31 are symmetrically arranged inside the housing 1. A motor 35 is installed inside the housing 1, and a testing mechanism 4 is installed on the two support blocks 34.

[0039] Two support blocks 34 are threadedly connected to the lead screw 33 via sliders 32, enabling precise movement on the slide rail 31. When the motor 35 starts, its output drives the lead screw 33 to rotate. Since the lead screw 33 has two sets of external threads 331 in opposite directions, the two sliders 32 will move along the lead screw 33 in opposite or opposite directions, thereby driving the support blocks 34 and the testing mechanism 4 on them to move synchronously. This design allows the testing mechanism 4 to adjust its position as needed to more accurately capture the concentration changes of aerosols in the testing area, realizing flexible adjustment of the testing mechanism 4 and improving the accuracy and reliability of concentration monitoring.

[0040] like Figure 7 As shown, the slide rail 31 is provided with a rotating cavity 311; The slider 32 has an internal thread 321 inside; The outer ring of the lead screw 33 is provided with two sets of external threads 331, and the two sets of external threads 331 have opposite thread directions. Internal thread 321 and external thread 331 are threaded together.

[0041] The rotating cavity 311 inside the slide rail 31 provides space for the rotation of the lead screw 33, ensuring that the lead screw 33 can rotate smoothly without obstruction. The internal thread 321 inside the slider 32 matches the two sets of external threads 331 on the outer ring of the lead screw 33. This design allows the slider 32 to move linearly along the lead screw 33 when the lead screw 33 rotates. Since the thread directions of the two sets of external threads 331 are opposite, the two sliders 32 will move in opposite or opposite directions, thereby driving the support block 34 and the test mechanism 4 to move synchronously. This threaded connection design not only realizes the flexible adjustment of the test mechanism 4, but also ensures the accuracy and stability of the adjustment, enabling the test mechanism 4 to accurately capture the concentration changes of aerosols in the test area, improving the accuracy and reliability of concentration monitoring.

[0042] like Figure 2 As shown, the test mechanism 4 includes a support frame 41, a laser emitter 42 and a receiver 43. The support frame 41 is provided on two support blocks 34 respectively, the laser emitter 42 is provided on one support frame 41 and the receiver 43 is provided on the other support frame 44.

[0043] The support frame 41 provides a stable support platform for the laser emitter 42 and receiver 43, ensuring that they can maintain a fixed position and angle during the test. The laser emitter 42 can emit a laser beam of a specific wavelength, which passes through the aerosol in the test area. The particles in the aerosol will scatter the laser beam. The receiver 43 is responsible for receiving the laser signal after it has been scattered by the aerosol and converting it into an electrical signal for further processing. By analyzing the changes in parameters such as the intensity and frequency of the laser signal received by the receiver 43, the concentration of aerosol in the test area can be accurately calculated. This test method has the advantages of being non-contact, highly accurate, and real-time, and can effectively meet the strict requirements for concentration monitoring in the aerosol deposition process, providing strong data support for process optimization and product quality control.

[0044] like Figure 2 As shown, the laser emitter 42 and receiver 43 have the same axis, and the axis of the laser emitter 42 and receiver 43 passes through the test area.

[0045] The laser emitter 42 and receiver 43 are aligned on the same axis and pass through the test area. This design ensures that the laser beam can accurately pass through the aerosol test area, allowing the particles in the aerosol to fully scatter the laser beam. The receiver 43 can receive the laser signal after it has been fully scattered by the aerosol, thereby obtaining more accurate and comprehensive aerosol concentration information. This provides a reliable basis for subsequent accurate calculation of aerosol concentration and further improves the test accuracy and reliability of the entire concentration monitoring device.

[0046] Working principle of the invention: When monitoring the aerosol concentration in the aerosol deposition process is required, the position of the testing mechanism 4 is first adjusted by the moving mechanism 3. Since the lead screw 33 has two sets of oppositely oriented external threads 331, the slider 32 drives the support block 34 and the testing mechanism 4 on it to move synchronously, adjusting the testing mechanism 4 to a suitable position so that the axes of the laser emitter 42 and receiver 43 accurately pass through the testing area. Next, the aerosol is introduced into the inlet pipe 211 at an initial flow rate. When the aerosol passes through the first contraction pipe 212, the flow rate gradually increases due to the decreasing cross-sectional radius from bottom to top. It then enters the first smoothing pipe 213 for transition and buffering, ensuring stable aerosol flow rate changes. Subsequently, it enters the first diffusion pipe 214, whose cross-sectional radius decreases from bottom to top. The design of the aerosol gradually slows down the aerosol flow rate, resulting in a slower arrival at the test area and a longer residence time within the test area. This makes the aerosol concentration test results more accurate. The aerosol then flows to the suction pipe 221. Because the cross-sectional radius of the inlet end of the suction pipe 221 is larger than that of the outlet pipe 215, the aerosol enters smoothly with a slight acceleration, preventing diffusion as it flows from the test area. It then enters the second diffuser pipe 223, where the cross-sectional radius increases and decreases from bottom to top, preventing flow separation, reducing kinetic energy loss, and isolating the subsequent contraction from affecting the aerosol in the test area. Next, the aerosol enters the second contraction pipe 225, where the cross-sectional radius decreases significantly from bottom to top, greatly increasing the aerosol flow rate. Finally, the aerosol flows rapidly out of the casing 1 from the outlet pipe 226. When the aerosol flows through the test area, the laser emitter 42 emits a laser beam of a specific wavelength that passes through the aerosol in the test area. The receiver 43 receives the laser signal after it is scattered by the aerosol and converts it into an electrical signal. By analyzing and processing the electrical signal, the concentration of aerosol in the test area is accurately calculated, thereby completing the real-time monitoring of the aerosol concentration in the aerosol deposition process.

[0047] The above description is merely a preferred embodiment of the present invention. Any modifications and / or equivalent substitutions and / or improvements made within the scope of the technical solutions claimed in the claims of this application should be included within the protection scope of the present invention. The protection scope of this application is determined by the technical solutions in the claims and their equivalents, and is not limited by the specific description in the specification.

Claims

1. A concentration monitoring device for aerosol deposition processes, characterized in that: The concentration monitoring device includes a housing (1) and a speed regulating mechanism (2); The speed regulating mechanism (2) includes an aerosol inlet pipe (21) and an aerosol outlet pipe (22). The aerosol outlet pipe (22) is positioned above the aerosol inlet pipe (21). The axis of the aerosol inlet pipe (21) and the axis of the aerosol outlet pipe (22) are collinear. The cross-sectional radius of the inlet end of the aerosol outlet pipe (22) is larger than the cross-sectional radius of the outlet end of the aerosol inlet pipe (21). A test area is provided between the aerosol inlet pipe (21) and the aerosol outlet pipe (22). The aerosol inlet pipe (21) includes a first diffuser pipe (214), the cross-sectional radius of the first diffuser pipe (214) increases from bottom to top; The aerosol outlet tube (22) includes a second contraction tube (225), the cross-sectional radius of which decreases from bottom to top; The inlet end of the aerosol inlet pipe (21) passes through the bottom of the housing (1), and the outlet end of the aerosol outlet pipe (22) passes through the top of the housing (1). The aerosol inlet pipe (21) and the aerosol outlet pipe (22) are used to adjust the flow rate of the aerosol being tested.

2. The concentration monitoring device for aerosol deposition process according to claim 1, characterized in that: The aerosol inlet pipe (21) is provided with an inlet pipe (211) and a first contraction pipe (212) from bottom to top. The inlet pipe (211) and the first contraction pipe (212) are connected. The cross-sectional radius of the first contraction pipe (212) decreases from bottom to top. The inlet pipe (211) passes through the bottom of the housing (1).

3. The concentration monitoring device for aerosol deposition process according to claim 2, characterized in that: The aerosol inlet pipe (21) further includes a first smoothing pipe (213) and an outlet pipe (215). The first smoothing pipe (213) is connected to the first contraction pipe (212) and the first diffusion pipe (214) respectively. The first diffusion pipe (214) and the outlet pipe (215) are arranged sequentially from bottom to top. The two ends of the first diffusion pipe (214) are connected to the outlet pipe (215) and the first smoothing pipe (213) respectively. The cross-sectional radius of the outlet pipe (215) is larger than that of the inlet pipe (211). The cross-sectional radius of the output tube (215) is smaller than the cross-sectional radius of the inlet end of the aerosol outlet tube (22), and the outlet of the output tube (215) faces the test area.

4. The concentration monitoring device for aerosol deposition process according to claim 3, characterized in that: The aerosol outlet pipe (22) is provided with an inhalation pipe (221), a second smoothing pipe (222), and a second diffusion pipe (223) in sequence from bottom to top. The cross-sectional radius of the inhalation pipe (221) decreases from bottom to top. The inhalation pipe (221) and the second smoothing pipe (222) are connected. The second smoothing pipe (222) and the second diffusion pipe (223) are connected. The cross-sectional radius of the second diffusion pipe (223) increases from bottom to top. The inlet end of the suction tube (221) has a cross-sectional radius larger than that of the output tube (215), and the inlet end of the suction tube (221) faces the test area.

5. A concentration monitoring device for aerosol deposition process according to claim 4, characterized in that: The aerosol outlet pipe (22) also includes a third smoothing pipe (224) and an outlet pipe (226). The third smoothing pipe (224) is connected to the second diffuser pipe (223) and the second contraction pipe (225) respectively. The second contraction pipe (225) and the outlet pipe (226) are arranged from bottom to top and are connected to each other. The cross-sectional radius of the discharge pipe (226) is smaller than that of the output pipe (215), and the discharge pipe (226) passes through the upper part of the casing (1).

6. A concentration monitoring device for aerosol deposition process according to claim 5, characterized in that: The concentration monitoring device also includes a moving mechanism (3) and a testing mechanism (4). The moving mechanism (3) includes a slide rail (31), a slider (32), a lead screw (33), a support block (34), and a motor (35). There are two sets of slide rails (31) and two support blocks (34). Two sliders (32) are respectively provided below the two support blocks (34). The sliders (32) and the slide rails (31) are slidably connected. One end of the slide rail (31) is provided with a motor (35). The output end of the motor (35) is provided with a lead screw (33). The slide rail (31) and the lead screw (33) are rotatably connected. The sliders (32) and the lead screw (33) are threadedly connected. The housing (1) is symmetrically provided with two sets of slide rails (31), the housing (1) is provided with a motor (35), and the two support blocks (34) are provided with a test mechanism (4).

7. A concentration monitoring device for aerosol deposition process according to claim 6, characterized in that: The slide rail (31) is provided with a rotating cavity (311). The slider (32) is provided with an internal thread (321); The lead screw (33) has two sets of external threads (331) on its outer ring, and the two sets of external threads (331) have opposite thread directions. The internal thread (321) and the external thread (331) are threaded together.

8. A concentration monitoring device for aerosol deposition process according to claim 7, characterized in that: The testing mechanism (4) includes a support frame (41), a laser emitter (42) and a receiver (43). The two support blocks (34) are respectively provided with support frames (41), one of the support frames (41) is provided with a laser emitter (42), and the other support frame (41) is provided with a receiver (43).

9. A concentration monitoring device for aerosol deposition process according to claim 8, characterized in that: The laser emitter (42) and receiver (43) are on the same axis, and the axis of the laser emitter (42) and receiver (43) passes through the test area.

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