Six-axis force sensor for robots
By using a graded vibration reduction mechanism and a hydraulic damper to open and close in stages, the problem of balancing sensitivity and stability of a six-axis force sensor under different working conditions is solved, and the sensor achieves efficient vibration reduction under multiple working conditions.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- CHANGZHOU LINGDU MEASUREMENT & CONTROL TECH CO LTD
- Filing Date
- 2026-04-09
- Publication Date
- 2026-06-12
AI Technical Summary
The vibration reduction structure of existing six-axis force sensors cannot adaptively adjust according to the actual vibration level, making it difficult to balance sensitivity and stability requirements under different working conditions. When the stiffness is too low, the sensitivity decreases, and when the stiffness is too high, the suppression effect is insufficient, or even damage may occur.
A graded vibration reduction mechanism was designed, including primary, secondary and tertiary vibration reduction mechanisms. The vibration reduction intensity is adaptively adjusted according to the vibration amplitude through the graded opening and closing of the central trigger column and hydraulic damper. The balance between sensitivity and stability is achieved by using a preload spring, hydraulic damper and lever transmission mechanism.
The sensor achieves high sensitivity and stability under different operating conditions, ensuring measurement accuracy during precision operation and effectively suppressing vibration interference during violent movement to protect the sensor from damage.
Smart Images

Figure CN122185265A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of intelligent sensor technology, specifically a six-axis force sensor for robots. Background Technology
[0002] A six-axis force sensor is a core component for realizing force perception in robots. It is typically fixedly installed between the robot's end flange and the actuator to detect forces and torques in three directions in real time. In scenarios such as precision assembly, grinding and polishing, and human-robot collaboration, the sensor's measurement accuracy directly affects the robot's work quality. Therefore, it is necessary to effectively isolate vibration interference generated during robot movement.
[0003] Currently, the conventional approach for vibration damping installation of six-axis force sensors is to place damping pads, rubber isolators, or spring-damping elements between the sensor and the robot flange, using flexible connections to absorb some of the vibration energy. This type of passive vibration damping solution is simple in structure, low in cost, and can reduce the impact of high-frequency vibrations on the sensor to a certain extent.
[0004] However, existing vibration reduction solutions have the following shortcomings: their vibration reduction characteristics are usually fixed and cannot be adaptively adjusted according to the actual vibration level. When the robot switches between different working conditions, such as from precision assembly (small amplitude interference) to rapid handling (large amplitude impact), a single-stiffness vibration reduction structure cannot meet both sensitivity and stability requirements. If the vibration reduction stiffness is too low, the sensor sensitivity will decrease when measuring small signals; if the vibration reduction stiffness is too high, the suppression effect will be insufficient during large vibrations, and the sensor may even be damaged due to impact overload. Summary of the Invention
[0005] This invention provides a six-axis force sensor for robots, which has the beneficial effects of graded opening and closing based on vibration amplitude and adaptive adjustment of vibration reduction intensity, thus solving the problems mentioned in the background art.
[0006] The present invention provides the following technical solution: a six-axis force sensor for a robot, comprising a sensor body, the sensor body being fixedly mounted on a robot flange by bolts, and a primary vibration damping mechanism being provided on the sensor body, the primary vibration damping mechanism comprising a top cover fixedly mounted on the top of the sensor body; A cylinder is fixedly installed on the top cover, and a central trigger post is slidably installed on the cylinder. One end of the central trigger post is fixedly connected to the robot flange, and the other end of the central trigger post is elastically connected to the sensor body through a preload spring. Two secondary vibration damping mechanisms are symmetrically arranged on the upper cover along the left and right directions. Each secondary vibration damping mechanism includes a housing fixedly installed on the cylinder. An adjusting stud is threadedly connected to the housing, and a hydraulic damper is rotatably installed on the adjusting stud. When the amplitude of the central trigger column does not reach the threshold set by the secondary vibration damping mechanism, the two hydraulic dampers located in the left and right directions are disconnected from the central trigger column.
[0007] As an optional embodiment of the six-axis force sensor for robots described in this invention, the hydraulic damper is slidably connected within the housing, and the secondary vibration damping mechanism further includes a screw. One end of the screw is connected to the central trigger post via a first transmission assembly, and the other end of the screw is connected to the hydraulic damper via a second transmission assembly.
[0008] As an optional embodiment of the six-axis force sensor for robots described in this invention, the first transmission component includes a sliding connecting seat slidably mounted on the housing, a fixed connecting seat fixedly mounted on the central trigger post, a first rotating rod rotatably mounted on the housing, and a first connecting rod fixedly mounted on the first rotating rod.
[0009] As an optional embodiment of the six-axis force sensor for robots described in this invention, a second rotating rod is rotatably mounted on the fixed connecting seat, a second connecting rod is fixedly mounted on the second rotating rod, and a third rotating rod is rotatably mounted on the sliding connecting seat.
[0010] As an optional embodiment of the six-axis force sensor for robots described in this invention, the first connecting rod has a groove, the third rotating rod is slidably connected in the groove, and the first connecting rod and the second connecting rod are connected by a universal joint.
[0011] As an optional embodiment of the six-axis force sensor for robots described in this invention, a slider is fixedly installed on the sliding connecting seat, a nut is rotatably installed on the slider, the nut is threadedly connected to the screw, a first retaining tooth is fixedly installed on the nut, and a second retaining tooth is fixedly installed inside the housing.
[0012] As an optional solution for a six-axis force sensor for a robot according to the present invention, wherein: when the first locking tooth engages with the second locking tooth, the screw is connected to the hydraulic damper in a transmission connection; When the first locking tooth and the second locking tooth are not engaged, the screw is disconnected from the hydraulic damper.
[0013] As an optional embodiment of the six-axis force sensor for robots described in this invention, the second transmission component includes a connecting block fixedly mounted on the hydraulic damper, a limit groove being formed on the connecting block, a limit block being fixedly mounted on the screw, and the screw and the limit block being rotatably connected within the limit groove.
[0014] As an optional solution for a six-axis force sensor for a robot according to the present invention, two three-stage vibration damping mechanisms are symmetrically arranged along the front-back direction on the upper cover, and the structure of the three-stage vibration damping mechanism is consistent with the structure of the two-stage vibration damping mechanism.
[0015] As an optional embodiment of the six-axis force sensor for robots described in this invention, the length of the two second teeth located in the left-right direction is greater than that of the two second teeth located in the front-back direction; When the amplitude of the central trigger column does not reach the threshold set by the three-stage vibration reduction mechanism, the two hydraulic dampers located in the front-rear direction are disconnected from the central trigger column.
[0016] The present invention has the following beneficial effects: 1. The robot uses a six-axis force sensor and a primary vibration damping mechanism consisting of a central trigger post and a preload spring. Secondary and tertiary vibration damping mechanisms with different trigger thresholds are set around the central trigger post. When the vibration amplitude of the central trigger post is small, only the preload spring provides basic vibration damping, and the sensor maintains a high sensitivity.
[0017] 2. This robot uses a six-axis force sensor. When the vibration amplitude increases to the second-level threshold, the two hydraulic dampers located in the left and right directions engage through the meshing of the first and second locking teeth. When the vibration amplitude further increases to the third-level threshold, the two hydraulic dampers located in the front and rear directions also engage. This graded and progressive vibration reduction achieved through a purely mechanical structure allows the sensor to obtain suitable damping characteristics under different working conditions. This ensures measurement sensitivity during precision operation while effectively suppressing interference during violent movements, solving the technical problem that existing fixed vibration reduction structures cannot meet the needs of multiple working conditions.
[0018] 3. This robot uses a six-axis force sensor. A lever amplification mechanism, consisting of a first rotating rod, a first connecting rod, a second rotating rod, a second connecting rod, a universal joint, and a sliding groove, is incorporated into the first transmission assembly. This mechanism converts the minute axial displacement of the central trigger pin into the radial displacement of the sliding connecting seat, achieving mechanical amplification of minute vibrations and improving the sensitivity of the vibration damping mechanism. Simultaneously, the universal joint can adapt to the directional offset of the central trigger pin based on vertical vibrations, ensuring the transmission mechanism can still operate reliably when the sensor is subjected to multidimensional forces, thus guaranteeing the stability of the vibration damping function under complex stress conditions. Attached Figure Description
[0019] Figure 1 This is a schematic diagram of the overall structure of the present invention.
[0020] Figure 2 This is a first cross-sectional view of the overall structure of the present invention.
[0021] Figure 3 For the present invention Figure 2 A magnified schematic diagram of the structure at point A in the middle.
[0022] Figure 4 This is a second cross-sectional view of the overall structure of the present invention.
[0023] Figure 5 For the present invention Figure 4 A magnified schematic diagram of the structure at point B in the middle.
[0024] Figure 6 This is a third cross-sectional view of the overall structure of the present invention.
[0025] Figure 7 This is a cross-sectional view of the connecting block in this invention.
[0026] Figure 8 This is a schematic diagram of the overall exploded structure of the present invention.
[0027] Figure 9 This is a schematic diagram of the first exploded structure of the secondary vibration damping mechanism in this invention.
[0028] Figure 10 This is a schematic diagram of the second explosive structure of the secondary vibration damping mechanism in this invention.
[0029] In the diagram: 1. Sensor body; 2. Robot flange; 3. Primary vibration damping mechanism; 301. Top cover; 302. Cylinder; 303. Central trigger post; 304. Preload spring; 4. Secondary vibration damping mechanism; 401. Housing; 402. Adjusting stud; 403. Hydraulic damper; 404. Screw; 5. First transmission assembly; 501. Sliding connecting seat; 502. Fixed connecting seat; 503. First rotating rod; 504. First connecting rod; 505. Second rotating rod; 506. Second connecting rod; 507. Third rotating rod; 508. Slide groove; 509. Universal shaft; 510. Slider; 511. Nut; 512. First locking tooth; 513. Second locking tooth; 6. Second transmission assembly; 601. Connecting block; 602. Limiting groove; 603. Limiting block; 7. Tertiary vibration damping mechanism. Detailed Implementation
[0030] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.
[0031] Example 1, please refer to Figures 1-10A six-axis force sensor for a robot includes a sensor body 1, which is fixedly mounted on a robot flange 2 by bolts. A primary vibration damping mechanism 3 is provided on the sensor body 1, and the primary vibration damping mechanism 3 includes an upper cover 301 fixedly mounted on the top of the sensor body 1.
[0032] A cylinder 302 is fixedly installed on the top cover 301, and a central trigger post 303 is slidably installed on the cylinder 302. One end of the central trigger post 303 is fixedly connected to the robot flange 2, and the other end of the central trigger post 303 is elastically connected to the sensor body 1 through a preload spring 304.
[0033] Two secondary vibration damping mechanisms 4 are symmetrically arranged on the upper cover 301 in the left and right directions. The secondary vibration damping mechanism 4 includes a housing 401 fixedly installed on the cylinder 302. An adjusting stud 402 is threadedly connected to the housing 401. A hydraulic damper 403 is rotatably installed on the adjusting stud 402.
[0034] When the amplitude of the central trigger column 303 does not reach the threshold set by the secondary damping mechanism 4, the two hydraulic dampers 403 located in the left and right directions are disconnected from the central trigger column 303.
[0035] In this embodiment: the sensor body 1 can be selected from different models of six-axis force sensors according to specific circumstances. The sensor body 1 is bolted to the robot flange 2 at the end of the robot. In order to filter out the impact and vibration caused by the robot's movement and ensure measurement accuracy, a segmented vibration reduction technology is adopted. When the robot performs small-amplitude precision operations, soft damping is used to ensure sensor sensitivity. When the robot moves rapidly or is subjected to impact, hard damping is intervened to ensure stability.
[0036] Specifically, when the robot performs various actions, since the central trigger post 303 is rigidly connected to the robot, the central trigger post 303 will vibrate relative to the sensor body 1. Taking the figure as an example, the vibration direction of the central trigger post 303 may be offset at other angles in addition to the vertical displacement.
[0037] When the amplitude of the central trigger post 303 is small, only the preload spring 304 provides basic stiffness, and all dampers are inactive. The sensor is in a high-sensitivity, low-damping state, suitable for precision assembly, measurement, and other tasks.
[0038] When the amplitude of the central trigger column 303 increases to a certain extent, the secondary damping mechanism 4 connects to the central trigger column 303, and its hydraulic damper 403 begins to work, absorbing energy. The system enters the "primary damping" mode, suppressing mid-frequency vibration while maintaining a certain degree of flexibility.
[0039] The hydraulic damper 403 works by converting the kinetic energy of motion into heat energy through friction or viscous force, thereby consuming excess energy. The hydraulic damper 403 typically consists of a closed system of liquid or gas, a piston, and other components. When vibration occurs, the liquid or gas inside the hydraulic damper 403 is forced to flow, generating resistance and reducing the amplitude of the vibration.
[0040] Furthermore, taking the set of two-stage vibration damping mechanisms 4 located on the left as an example, the adjusting stud 402 is threaded onto the housing 401, the left end of the hydraulic damper 403 is rotatably mounted on the adjusting stud 402, and the right end of the hydraulic damper 403 is connected to the screw 404. By turning the adjusting stud 402, the initial position of the hydraulic damper 403 can be adjusted, thereby increasing or decreasing the resistance of the hydraulic damper 403.
[0041] Example 2, please refer to Figures 1-10 The hydraulic damper 403 is slidably connected inside the housing 401. The secondary vibration damping mechanism 4 also includes a screw 404. One end of the screw 404 is connected to the central trigger column 303 through the first transmission assembly 5, and the other end of the screw 404 is connected to the hydraulic damper 403 through the second transmission assembly 6.
[0042] The first transmission assembly 5 includes a sliding connecting seat 501 slidably mounted on the housing 401, a fixed connecting seat 502 fixedly mounted on the central trigger post 303, a first rotating rod 503 rotatably mounted on the housing 401, and a first connecting rod 504 fixedly mounted on the first rotating rod 503.
[0043] A second rotating rod 505 is rotatably mounted on the fixed connecting seat 502, a second connecting rod 506 is fixedly mounted on the second rotating rod 505, and a third rotating rod 507 is rotatably mounted on the sliding connecting seat 501.
[0044] The first connecting rod 504 has a groove 508, and the third rotating rod 507 is slidably connected in the groove 508. The first connecting rod 504 and the second connecting rod 506 are connected by a universal joint 509.
[0045] A slider 510 is fixedly installed on the sliding connecting seat 501. A nut 511 is rotatably installed on the slider 510. The nut 511 is threadedly connected to the screw 404. A first retaining tooth 512 is fixedly installed on the nut 511. A second retaining tooth 513 is fixedly installed inside the housing 401.
[0046] When the first locking tooth 512 engages with the second locking tooth 513, the screw 404 is connected to the hydraulic damper 403.
[0047] When the first locking tooth 512 and the second locking tooth 513 are not engaged, the screw 404 is disconnected from the hydraulic damper 403.
[0048] The second transmission assembly 6 includes a connecting block 601 fixedly installed on the hydraulic damper 403, a limiting groove 602 is formed on the connecting block 601, a limiting block 603 is fixedly installed on the screw 404, and the screw 404 and the limiting block 603 are rotatably connected in the limiting groove 602.
[0049] In this embodiment, two secondary vibration damping mechanisms 4 are set up and installed symmetrically on the left and right sides, so that the force transmission between the sensor body 1 and the robot flange 2 is more balanced and stable.
[0050] Taking the secondary vibration damping mechanism 4 located on the left as an example, a lever transmission device is set up to amplify the small displacement of the central trigger column 303. When the central trigger column 303 drives the fixed connecting seat 502, the second rotating rod 505, and the second connecting rod 506 to move upward, the second connecting rod 506, through the transmission of the universal joint 509, causes the first connecting rod 504 to rotate counterclockwise based on the first rotating rod 503. At this time, the third rotating rod 507 slides to the right in the slide groove 508, and the third rotating rod 507 drives the sliding connecting seat 501 and the slider 510 to move to the left. Similarly, when the central trigger column 303 moves downward, the sliding connecting seat 501 and the slider 510 move to the right.
[0051] It should be further explained that, since the first connecting rod 504 is a lever based on the rotation of the first rotating rod 503 at a fixed position, while the second rotating rod 505 and the second connecting rod 506 move vertically with the central trigger post 303, and the central trigger post 303 may have a slight offset on top of its vertical movement, such as moving along the upper left-lower right direction, the universal joint 509 is set to be composed of two telescopic rods. The two ends of the two telescopic rods are fixed to the first connecting rod 504 and the second connecting rod 506 respectively through freely rotatable universal joints. In this way, when the second rotating rod 505 and the second connecting rod 506 move to the upper left with the central trigger post 303, the second rotating rod 505 and the second connecting rod 506 rotate counterclockwise, and the two telescopic rods of the universal joint 509 shorten relatively, causing the first rotating rod 503 and the first connecting rod 504 to also rotate counterclockwise.
[0052] When the amplitude of the central trigger post 303 does not reach the threshold for triggering the secondary damping mechanism 4, the central trigger post 303 drives the sliding connecting seat 501 to move to the left, away from the upper cover 301, through a series of transmissions. At this time, the first locking tooth 512 is not in contact with the second locking tooth 513. The screw 404 remains stationary under the elastic support of the hydraulic damper 403. At this time, the slider 510 and the nut 511 move to the left with the sliding connecting seat 501, and the nut 511 will rotate relative to the slider 510, that is, the nut 511 moves to the left in a spiral motion. At this time, the vibration of the central trigger post 303 will not drive the screw 404 to move.
[0053] When the amplitude of the central trigger column 303 reaches the threshold for triggering the secondary damping mechanism 4, the first locking tooth 512 in the secondary damping mechanism 4 begins to contact the second locking tooth 513. Multiple teeth of the first locking tooth 512 and the second locking tooth 513 interlock and engage, preventing the nut 511 from rotating. At this time, the sliding connecting seat 501 and the slider 510 moving to the left will drive the screw 404 to move to the left, thereby causing the right end of the hydraulic damper 403 to move closer to the left end. At this point, the secondary damping mechanism 4 and the central trigger column 303 are in a transmission connection state, and the secondary damping mechanism 4 activates its damping function.
[0054] Furthermore, considering that the position of the second locking tooth 513 is fixed, while the first locking tooth 512 rotates with the nut 511, in order to ensure that several teeth of the first locking tooth 512 are always aligned with the gaps between the teeth of the second locking tooth 513, the left and right ends of each tooth of the first locking tooth 512 and the second locking tooth 513 are set as pointed teeth. When the first locking tooth 512 moves to the left and contacts the second locking tooth 513, due to the guidance of the pointed teeth, the first locking tooth 512 and the nut 511 will also rotate a certain angle to complete the alignment. At this time, the nut 511 will drive the screw 404 to rotate a certain angle together.
[0055] Based on this, the limiting groove 602 is designed as a groove with a circular center and fan-shaped extensions on both sides. Two fan-shaped blocks, namely limiting blocks 603, extend from the screw 404, but the fan-shaped area of the limiting blocks 603 is smaller than the fan-shaped area of the limiting groove 602. The limiting groove 602 and the limiting blocks 603 limit the screw 404, causing it to lock against the inner wall of the limiting groove 602 after rotating a small angle. The screw 404 can no longer rotate. Thus, when the first locking tooth 512 is not in contact with the second locking tooth 513, the screw 404 can remain stationary, allowing the nut 511 to move helically on the screw 404.
[0056] Example 3, please refer to Figures 6-8 Two three-stage vibration damping mechanisms 7 are symmetrically arranged along the front and rear directions of the upper cover 301. The structure of the three-stage vibration damping mechanism 7 is the same as that of the two-stage vibration damping mechanism 4.
[0057] The lengths of the two second locking teeth 513 located in the left-right direction are greater than those of the two second locking teeth 513 located in the front-back direction.
[0058] When the amplitude of the central trigger column 303 does not reach the threshold set by the three-stage vibration damping mechanism 7, the two hydraulic dampers 403 located in the front-rear direction are disconnected from the central trigger column 303.
[0059] In this embodiment: To further improve vibration reduction performance, a set of three-stage vibration damping mechanisms 7 is also provided. Two three-stage vibration damping mechanisms 7 are symmetrically installed along the front-to-back direction. The structure of the three-stage vibration damping mechanism 7 is the same as that of the two-stage vibration damping mechanism 4, except that the part corresponding to the second locking tooth 513 in the three-stage vibration damping mechanism 7 is shorter. The distance between the second locking tooth 513 of the three-stage vibration damping mechanism 7 and the center of the upper cover 301 is longer, as is the distance between the second locking tooth 513 of the two-stage vibration damping mechanism 4 and the center of the upper cover 301.
[0060] When the amplitude of the central trigger column 303 just reaches the threshold of the secondary vibration damping mechanism 4, the first locking tooth 512 and the second locking tooth 513 of the tertiary vibration damping mechanism 7 are not in contact. When the amplitude of the central trigger column 303 increases further, the first locking tooth 512 and the second locking tooth 513 of the tertiary vibration damping mechanism 7 engage. At this time, the primary vibration damping mechanism 3, the two sets of secondary vibration damping mechanisms 4, and the two sets of tertiary vibration damping mechanisms 7 jointly provide vibration damping and buffering functions for the device.
[0061] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.
[0062] The above description is only a preferred embodiment of the present invention. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.
Claims
1. A six-axis force sensor for robots, comprising a sensor body (1), characterized in that: The sensor body (1) is fixedly mounted on the robot flange (2) by bolts. The sensor body (1) is provided with a primary vibration damping mechanism (3). The primary vibration damping mechanism (3) includes an upper cover (301) fixedly mounted on the top of the sensor body (1). A cylinder (302) is fixedly installed on the top cover (301), and a central trigger post (303) is slidably installed on the cylinder (302). One end of the central trigger post (303) is fixedly connected to the robot flange (2), and the other end of the central trigger post (303) is elastically connected to the sensor body (1) through a preload spring (304). Two secondary vibration damping mechanisms (4) are symmetrically arranged on the upper cover (301) along the left and right directions. The secondary vibration damping mechanism (4) includes a housing (401) fixedly installed on the cylinder (302). An adjusting stud (402) is threadedly connected to the housing (401). A hydraulic damper (403) is rotatably installed on the adjusting stud (402). When the amplitude of the central trigger column (303) does not reach the threshold set by the secondary damping mechanism (4), the two hydraulic dampers (403) located in the left and right directions are disconnected from the central trigger column (303).
2. A six-axis force sensor for robots according to claim 1, characterized in that: The hydraulic damper (403) is slidably connected inside the housing (401). The secondary vibration damping mechanism (4) also includes a screw (404). One end of the screw (404) is connected to the central trigger column (303) through the first transmission assembly (5), and the other end of the screw (404) is connected to the hydraulic damper (403) through the second transmission assembly (6).
3. A six-axis force sensor for robots according to claim 2, characterized in that: The first transmission assembly (5) includes a sliding connecting seat (501) slidably mounted on the housing (401), a fixed connecting seat (502) fixedly mounted on the central trigger post (303), a first rotating rod (503) rotatably mounted on the housing (401), and a first connecting rod (504) fixedly mounted on the first rotating rod (503).
4. A six-axis force sensor for robots according to claim 3, characterized in that: A second rotating rod (505) is rotatably mounted on the fixed connecting seat (502), a second connecting rod (506) is fixedly mounted on the second rotating rod (505), and a third rotating rod (507) is rotatably mounted on the sliding connecting seat (501).
5. A six-axis force sensor for robots according to claim 4, characterized in that: The first connecting rod (504) has a groove (508) and the third rotating rod (507) is slidably connected in the groove (508). The first connecting rod (504) and the second connecting rod (506) are connected by a universal joint (509).
6. A six-axis force sensor for robots according to claim 5, characterized in that: A slider (510) is fixedly installed on the sliding connecting seat (501), a nut (511) is rotatably installed on the slider (510), the nut (511) is threadedly connected to the screw (404), a first retaining tooth (512) is fixedly installed on the nut (511), and a second retaining tooth (513) is fixedly installed inside the housing (401).
7. A six-axis force sensor for robots according to claim 6, characterized in that: When the first locking tooth (512) engages with the second locking tooth (513), the screw (404) is connected to the hydraulic damper (403) in a transmission connection; When the first locking tooth (512) and the second locking tooth (513) are not engaged, the screw (404) is disconnected from the hydraulic damper (403).
8. A six-axis force sensor for a robot according to claim 7, characterized in that: The second transmission assembly (6) includes a connecting block (601) fixedly installed on the hydraulic damper (403), a limiting groove (602) is formed on the connecting block (601), a limiting block (603) is fixedly installed on the screw (404), and the screw (404) and the limiting block (603) are rotatably connected in the limiting groove (602).
9. A six-axis force sensor for a robot according to claim 6, characterized in that: The upper cover (301) is symmetrically provided with two three-stage vibration damping mechanisms (7) along the front-back direction. The structure of the three-stage vibration damping mechanism (7) is the same as that of the two-stage vibration damping mechanism (4).
10. A six-axis force sensor for a robot according to claim 9, characterized in that: The length of the two second locking teeth (513) located in the left-right direction is greater than that of the two second locking teeth (513) located in the front-back direction; When the amplitude of the central trigger column (303) does not reach the threshold set by the three-stage vibration damping mechanism (7), the two hydraulic dampers (403) located in the front-rear direction are disconnected from the central trigger column (303).