Third-generation semiconductor isostatic pressing graphite baking furnace protection device

Abstract

The application relates to the technical field of graphite roasting, and discloses a three-generation semiconductor isostatic pressing graphite roasting furnace protection device, which comprises an open hearth furnace and a furnace cover; a vacuum pump is fixedly connected to the right side of the open hearth furnace; an air charging pump is fixedly connected to the right side of the open hearth furnace; and a fan blade shaft is rotatably connected to the top of the furnace cover. The three baffles are arranged, and the pitch paste is firstly dropped onto the uppermost baffle; when the fan blade shaft rotates, the three fixed rods are driven to rotate, and the inclined blocks on the fixed rods are driven to rotate; when the inclined blocks scrape off the pitch paste above the baffle, the accumulated pitch paste is pushed to the fixed ring, so that the pitch paste enters the fixed ring through the collecting groove, the semi-solid pitch paste above the hearth is effectively prevented from falling due to the self gravity and the vibration generated when the fan blade shaft rotates, the pitch paste falls into the crucible, adheres to the surface of the isostatic pressing graphite, and the graphite roasting is prevented from being internally mixed with impurities, so that the product quality is affected.

Description

Technical Field

[0001] This invention relates to the field of graphite calcination technology, specifically to a protection device for a third-generation semiconductor isostatic pressing graphite calcination furnace. Background Technology

[0002] Isostatic graphite is made by pressing high-purity graphite. It is an irreplaceable material for manufacturing single crystal furnaces, graphite crystallizers for continuous metal casting, and graphite electrodes for electrical discharge machining. It is also an excellent material for manufacturing rocket nozzles, deceleration materials for graphite reactors, and reflective materials. The calcination furnaces used in the production of isostatic graphite for third-generation semiconductors are mainly pit furnaces and ring furnaces. The entire process is carried out in a closed environment protected by nitrogen and argon at medium temperature. Relying on precise temperature control and uniform temperature field inside the furnace, the binder of the graphite blank is removed and the carbon structure is solidified and shaped.

[0003] During the calcination of isostatic graphite, the presence of asphalt binder in the isostatic graphite green body causes the asphalt to decompose at high temperatures, producing a large amount of gaseous volatiles. These volatiles flow upwards with the circulating airflow within the furnace, eventually reaching the fan area at the top of the furnace. During the vacuuming and argon filling processes, the graphite is impacted by the airflow, causing graphite powder to drift into the well-type furnace chamber. After combining with the gaseous volatiles, this powder forms a semi-solid asphalt paste at the top of the furnace. This semi-solid asphalt paste, due to its own gravity and the vibration of the fan blade shaft, falls into the crucible and adheres to the surface of the isostatic graphite, resulting in internal inclusions and impurities during graphite calcination, thus affecting product quality. Summary of the Invention

[0004] To solve the above-mentioned technical problems, the present invention provides a protection device for a third-generation semiconductor isostatic pressing graphite calcination furnace, including a pit furnace and a furnace cover. A vacuum pump is fixedly connected to the right side of the pit furnace, an air filling pump is fixedly connected to the right side of the pit furnace, and a fan blade shaft is rotatably connected to the top of the furnace cover. The device also includes: The blocking mechanism is fixedly installed on the bottom outer wall of the furnace cover. The blocking mechanism includes several connecting rods fixedly connected to the bottom of the furnace cover. The bottom of the several connecting rods is fixedly connected to a fixing ring, and the inner wall of the fixing ring is fixedly connected to several baffles. The scraping mechanism is fixedly installed at the bottom of the outer wall of the fan blade shaft. The scraping mechanism includes several fixed rods fixedly connected to the bottom of the outer wall of the fan blade shaft. An elastic mechanism is fixedly installed on the outer wall of the fixed rod. The elastic mechanism includes several bent spring pieces fixedly connected to the outer wall of the fixed rod. The system includes three baffles arranged in a linear array and staggered, four fixing rods of varying thicknesses, and six bending springs. Bending springs are fixedly connected to the sides of two fixing rods that are close to each other, forming a sealed space between the bending springs and the fixing rods, preventing asphalt paste from seeping into the internal space between the bending springs and the fixing rods.

[0005] Preferably, the blocking mechanism further includes: The fixing component is installed on the inner wall of the fixing ring; A baffle assembly is installed on the outer wall of the baffle. The fixing component provides basic support for fixing the baffle assembly.

[0006] Preferably, the scraping mechanism further includes: The scraping assembly is fixedly installed on the outer wall of the fixing rod; The material collection assembly is fixedly installed on the outer wall of the fixing rod. The material collection assembly is located on the outer wall of the lowest fixing rod. The fan blade shaft rotates under the drive of the motor, which in turn causes the fixing rod to rotate.

[0007] Preferably, the elastic mechanism further includes: Spring plate assembly, which is fixedly installed on the outer wall of the curved spring plate; The fan blade shaft rotates under the drive of the motor, which in turn drives the fixed rod to rotate, causing the spring plate assembly to come into contact with the baffle, and the spring plate assembly is squeezed and deformed.

[0008] Preferably, the fixing component includes a material collection trough formed in the inner wall of the fixing ring; The asphalt paste scraped off by the fixing rod will be discharged into the aggregate trough; After the roasting is completed, the operators clean the asphalt paste in the aggregate trough while cleaning the pit furnace.

[0009] Preferably, the baffle assembly includes a plurality of flow holes formed on the outer wall of the baffle, and the outer wall of the baffle is provided with a plurality of material discharge grooves; The flow holes allow airflow to pass through, enabling the airflow inside the well furnace to circulate under the drive of the fan blades on the fan shaft.

[0010] Preferably, the scraping assembly includes an inclined block fixedly connected to the outer wall of the fixed rod; The side of the inclined block closer to the fan blade shaft is thicker than the side of the inclined block farther from the fan blade shaft.

[0011] Preferably, the material collection assembly includes a receiving block fixedly connected to the outer wall of the inclined block, and the outer wall of the receiving block is provided with a mud collection groove; The receiving block is located on the outer wall of the lowest inclined block. The side of the receiving block away from the fixed rod does not contact the baffle. The side of the mud collection trough away from the fixed rod is inclined inward.

[0012] Preferably, the spring plate assembly includes a plurality of protruding blocks fixedly connected to the outer wall of the curved spring plate; Among them, several protruding blocks are arranged in a linear array; The protrusions on two adjacent curved spring pieces are staggered.

[0013] The present invention has the following beneficial effects: (1) By setting three baffles, the asphalt paste will fall onto the uppermost baffle first. When the fan blade shaft rotates, it will drive the three fixed rods to rotate and drive the inclined blocks on the fixed rods to rotate. When the inclined blocks scrape the asphalt paste above the baffles, they will push the accumulated asphalt paste towards the fixed ring, and then enter the fixed ring through the collection trough. Through the application of the above components, the semi-solid asphalt paste above the furnace is effectively prevented from falling into the crucible due to its own weight and the vibration generated when the fan blade shaft rotates. It will fall onto the surface of the isostatic graphite, causing internal impurities to appear during graphite calcination, which will affect the product quality.

[0014] (2) This invention utilizes the feature of the fixed rod of the above-mentioned equipment to scrape the asphalt paste on the surface of the baffle. When the fixed rod contacts the surface of the baffle, the bent spring is squeezed and also sticks tightly to the baffle. The protruding block is squeezed by the baffle and will move closer to the fixed rod, thereby driving the bent spring near the protruding block to move closer to the fixed rod. When the fixed rod sweeps past the flow hole above the baffle, the protruding block is not restricted by the baffle. When the bent spring releases its elastic potential energy, the protruding block extends into the flow hole. As a result, when the inclined block passes through the flow hole, the asphalt paste formed has a break, making it difficult to form a complete layer of asphalt paste in the flow hole. Through the application of the above components, the problem of asphalt paste forming a complete layer of asphalt paste in the flow hole, micro-curing and blocking the flow hole, affecting the normal circulation of hot air is effectively alleviated.

[0015] (3) This invention utilizes the characteristic of the bending spring tightly adhering to the baffle in the above-mentioned device. During the rotation of the fixed rod following the fan blade shaft, the position of the bending spring relative to the baffle also changes continuously. As a result, some asphalt paste will enter the gap between the bending spring and the baffle, thereby solidifying and making it difficult for the bending spring to bend. By setting the bending spring to be wavy, when the protruding block repeatedly enters and exits the flow hole, the bending distance of the bending spring will continuously expand and contract. As a result, when the asphalt paste is micro-solidified on the surface of the bending spring, it is difficult to adhere to the surface of the bending spring, so that the bending spring can still deform normally. Through the application of the above-mentioned components, the problem of micro-solidification of asphalt paste in the gap between the bending spring and the baffle, which makes it difficult for the bending spring to deform normally, is effectively prevented.

[0016] (4) This invention utilizes the characteristic of airflow flowing through the flow hole of the above-mentioned equipment. By staggering the three baffles, the flow holes on the three baffles are not on the same axis. When the airflow flows smoothly in the flow hole, it prevents the asphalt paste falling from above from directly passing through the uppermost baffle. Furthermore, the three-layer staggered structure forces the heat flow to change direction multiple times between layers for thorough mixing. Through the application of the above components, the problem of asphalt paste falling directly through the flow hole into the crucible is effectively prevented. At the same time, it alleviates the problem that when using a single-layer baffle, the heat flow is prone to form a low-speed dead zone, resulting in uneven temperature in the furnace. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic cross-sectional view of the overall structure of the present invention; Figure 3 This is a schematic cross-sectional view of a partial structure of the present invention; Figure 4 This is a cross-sectional schematic diagram of the blocking mechanism of the present invention; Figure 5 This is a schematic diagram of the scraping mechanism of the present invention; Figure 6 For the present invention Figure 5 A magnified structural diagram of A in the middle; Figure 7 This is a cross-sectional schematic diagram of the blocking mechanism of the present invention; Figure 8 For the present invention Figure 7 A magnified structural diagram of B in the diagram; Figure 9 This is a schematic diagram of the scraping mechanism of the present invention; Figure 10 This is a schematic diagram of the scraping mechanism of the present invention.

[0019] The attached diagram lists the components represented by each number as follows: In the diagram: 1. Blocking mechanism; 11. Fixing component; 12. Baffle assembly; 13. Pit furnace; 14. Furnace cover; 15. Vacuum pump; 16. Air pump; 17. Fan blade shaft; 111. Connecting rod; 112. Fixing ring; 113. Material collection trough; 121. Baffle; 122. Flow hole; 123. Material drop trough; 2. Scraping mechanism; 21. Scraping component; 22. Material collection component; 211. Fixing rod; 212. Inclined block; 221. Receiving block; 222. Mud collection trough; 3. Elastic mechanism; 31. Spring plate assembly; 311. Bending spring; 312. Protruding block. Detailed Implementation

[0020] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0021] Example 1, please refer to Figures 1-9 This invention relates to a protective device for a third-generation semiconductor isostatic pressing graphite calcination furnace, comprising a pit furnace 13 and a furnace cover 14. A vacuum pump 15 is fixedly connected to the right side of the pit furnace 13, and an air filling pump 16 is fixedly connected to the right side of the pit furnace 13. A fan blade shaft 17 is rotatably connected to the top of the furnace cover 14. The invention also includes: The blocking mechanism 1 is fixedly installed on the bottom outer wall of the furnace cover 14. The blocking mechanism 1 includes several connecting rods 111 fixedly connected to the bottom of the furnace cover 14. The bottom of the several connecting rods 111 is fixedly connected to a fixing ring 112. The inner wall of the fixing ring 112 is fixedly connected to several baffles 121. Scraping mechanism 2 is fixedly installed at the bottom of the outer wall of the fan blade shaft 17. The scraping mechanism 2 includes several fixed rods 211 fixedly connected to the bottom of the outer wall of the fan blade shaft 17. The elastic mechanism 3 is fixedly installed on the outer wall of the fixed rod 211. The elastic mechanism 3 includes a plurality of curved spring pieces 311 fixedly connected to the outer wall of the fixed rod 211. The system includes three baffles 121 arranged in a linear array and staggered. There are four fixing rods 211 of varying thicknesses. There are six bending springs 311, with bending springs 311 fixedly connected to the sides of two fixing rods 211 that are close to each other. The bending springs 311 and the fixing rods 211 form a sealed space, preventing asphalt paste from seeping into the internal space of the bending springs 311 and the fixing rods 211.

[0022] The blocking mechanism 1 also includes: Fixing component 11 is installed on the inner wall of fixing ring 112; Baffle assembly 12 is installed on the outer wall of baffle 121; The fixing component 11 provides basic support for fixing the baffle assembly 12.

[0023] The scraping mechanism 2 also includes: Scraping component 21 is fixedly installed on the outer wall of the fixing rod 211; The material collection assembly 22 is fixedly installed on the outer wall of the fixing rod 211; The material collection assembly 22 is located on the outer wall of the lowest fixing rod 211. The fan blade shaft 17 rotates under the drive of the motor, which in turn drives the fixing rod 211 to rotate.

[0024] The flexible mechanism 3 also includes: Spring plate assembly 31 is fixedly installed on the outer wall of the curved spring piece 311; The fan blade shaft 17 rotates under the drive of the motor, which in turn drives the fixed rod 211 to rotate, causing the spring plate assembly 31 to contact the baffle 121, and the spring plate assembly 31 to be squeezed and deformed.

[0025] Example 2, please refer to Figures 2-10 The present invention is a protective device for a third-generation semiconductor isostatic pressing graphite calcination furnace. Based on Example 1, the fixing component 11 includes a material collection trough 113 opened on the inner wall of the fixing ring 112. The asphalt paste scraped off by the fixing rod 211 will be discharged into the aggregate trough 113; After the roasting is completed, the operator cleans the asphalt paste in the aggregate bin 113 while cleaning the pit furnace 13.

[0026] The baffle assembly 12 includes a plurality of flow holes 122 formed on the outer wall of the baffle 121, and a plurality of material discharge grooves 123 formed on the outer wall of the baffle 121. The flow hole 122 allows airflow to pass through, so that the airflow inside the well furnace 13 circulates under the drive of the fan blades on the fan blade shaft 17.

[0027] The scraping assembly 21 includes an inclined block 212 that is fixedly connected to the outer wall of the fixed rod 211; The side of the inclined block 212 closer to the fan blade shaft 17 is thicker than the side of the inclined block 212 farther from the fan blade shaft 17.

[0028] The material collection assembly 22 includes a receiving block 221 fixedly connected to the outer wall of the inclined block 212, and a mud collection groove 222 is provided on the outer wall of the receiving block 221; Among them, the receiving block 221 is located on the outer wall of the lowest inclined block 212. The side of the receiving block 221 away from the fixed rod 211 does not contact the baffle 121, and the side of the mud collection trough 222 away from the fixed rod 211 is inclined inward. By setting three baffles 121, when the semi-solid asphalt paste above the furnace falls due to the vibration generated by the rotation of the fan blade shaft 17, it will first fall onto the uppermost baffle 121. When the fan blade shaft 17 rotates, it drives the three fixed rods 211 to rotate, and drives the inclined blocks 212 on the fixed rods 211 to rotate, and so on. Figure 7 As shown, there are three gaps between the four fixing rods 211, which are precisely positioned to accommodate three baffles 121. Since the inclined block 212 is in close contact with the baffle 121, when the fixing rods 211 rotate with the fan blade shaft 17, they cause the inclined block 212 to move close to the surface of the baffle 121, pushing the asphalt paste accumulated above the baffle 121 towards the fixing ring 112. The side of the inclined block 212 closest to the fan blade shaft 17 is thicker than the side furthest from the fan blade shaft 17. When the inclined block 212 scrapes away the asphalt paste above the baffle 121, it pushes the accumulated asphalt paste towards the fixing ring 112, thus entering the fixing ring 112 through the collection trough 113. The baffle 121 located below... The material is directly placed above the crucible. At this time, the side of the bottom baffle 121 closest to the crucible will also produce asphalt paste. The side of the receiving block 221 away from the fixing rod 211 does not contact the baffle 121. At this time, the asphalt paste above the mud collection trough 222 is pushed by the inclined block 212 and accumulates, thus falling into the mud collection trough 222. When rotating, the material accumulated in the mud collection trough 222 is squeezed by the newly accumulated asphalt paste above and affected by centrifugal force, and also moves towards the fixing ring 112. Furthermore, the side of the bottom fixing rod 211 and the receiving block 221 closest to the crucible is more difficult to form semi-solid asphalt paste on its surface than a stationary surface because it is driven to rotate by the fan blade shaft 17.

[0029] The spring plate assembly 31 includes a plurality of protruding blocks 312 fixedly connected to the outer wall of the curved spring piece 311; Among them, several protruding blocks 312 are arranged in a linear array; The protrusions 312 on two adjacent curved spring pieces 311 are staggered; When the two inclined blocks 212 located above and below the baffle 121 scrape the surface of the baffle 121, the semi-solid asphalt paste in front of the inclined blocks 212 in the direction of movement will accumulate. When the inclined blocks 212 pass the flow hole 122 above the baffle 121, the accumulated asphalt paste will enter the flow hole 122. As the fixing rod 211 passes the flow hole 122, the asphalt paste will stick to the flow hole 122 and form a smooth layer of asphalt paste in the flow hole 122, and micro-solidification will occur in the flow hole 122. By setting the bending spring 311 and the protruding block 312, when the fixing rod 211 contacts the surface of the baffle 121, the bending spring 311 is squeezed and also sticks tightly to the baffle 121, and the protruding block 312 is subjected to... When the baffle 121 is pressed, it will approach the fixed rod 211, thereby causing the curved spring 311 near the protruding block 312 to move closer to the fixed rod 211. When the fixed rod 211 sweeps past the flow hole 122 above the baffle 121, the protruding block 312 is not restricted by the baffle 121. When the curved spring 311 releases its elastic potential energy, the protruding block 312 extends into the flow hole 122. As a result, when the inclined block 212 passes through the flow hole 122, the asphalt paste formed will have a break, making it difficult to form a complete layer of asphalt paste in the flow hole 122. When the curved spring 311 passes over the flow hole 122, the protruding block 312 contacts the edge of the flow hole 122 and is pressed by the baffle 121 again, moving towards the fixed rod 211. As the fixed rod 211 rotates with the fan blade shaft 17, the position of the bending spring 311 relative to the baffle 121 also changes continuously. As a result, some asphalt paste enters the gap between the bending spring 311 and the baffle 121, thus solidifying and making it difficult for the bending spring 311 to bend. By setting the bending spring 311 to be wavy, when the protruding block 312 repeatedly enters and exits the flow hole 122, the bending distance of the bending spring 311 continuously expands and contracts. As a result, when the asphalt paste is micro-solidified on the surface of the bending spring 311, it is difficult for it to adhere to the surface of the bending spring 311, so that the bending spring 311 can still deform normally.

[0030] One specific application of this embodiment is as follows: In use, the operator opens the furnace cover 14 to separate the furnace cover 14 from the pit furnace 13, places the crucible containing isostatic graphite into the pit furnace 13, then closes the furnace cover 14, connects the vacuum pump 15 and the gas filling pump 16, starts the vacuum pump 15 to evacuate the pit furnace 13, and then starts the gas filling pump 16 to fill the pit furnace 13 with argon gas. After repeatedly performing the evacuation and argon filling operations, the furnace is ensured to be filled with argon gas and maintain a slight positive pressure. The heating system and the motor on the fan blade shaft 17 are then started.

[0031] During the calcination of isostatically pressed graphite, the presence of asphalt binder in the isostatically pressed graphite green body causes the asphalt to decompose at high temperatures, producing a large amount of gaseous volatiles. These volatiles flow upwards with the circulating airflow within the furnace, eventually reaching the fan area at the top of the furnace. During the vacuuming and argon purging processes, the graphite is impacted by the airflow, causing graphite powder to disperse into the pit furnace chamber 13. This powder combines with the gaseous volatiles to form a semi-solid asphalt paste at the top of the furnace. By using three baffles 121, when the semi-solid asphalt paste above the furnace falls due to the vibration generated by the rotation of the fan blade shaft 17, it first falls onto the uppermost baffle 121. As the fan blade shaft 17 rotates, it drives the three fixed rods 211 to rotate, which in turn drives the inclined blocks 212 on the fixed rods 211 to rotate. Furthermore, as... Figure 7 As shown, there are three gaps between the four fixing rods 211, which are precisely where the three baffles 121 are placed. Since the inclined block 212 is in close contact with the baffle 121, when the fixing rods 211 rotate with the fan blade shaft 17, they drive the inclined block 212 to move close to the surface of the baffle 121, pushing the asphalt paste accumulated above the baffle 121 toward the fixing ring 112. The side of the inclined block 212 closer to the fan blade shaft 17 is thicker than the side of the inclined block 212 farther from the fan blade shaft 17. At this time, when the inclined block 212 scrapes the asphalt paste above the baffle 121, it will push the accumulated asphalt paste toward the fixing ring 112, thereby entering the fixing ring 112 through the collection trough 113. The lower baffle 121 directly covers the crucible. At this time, asphalt paste will also be generated on the side of the lowest baffle 121 closest to the crucible. The receiving block 221 moves away from the fixing rods 211. One side of 11 does not contact the baffle 121. At this time, the asphalt paste above the mud collection trough 222 is pushed by the inclined block 212 and accumulates, thus falling into the mud collection trough 222. When rotating, the asphalt paste accumulated in the mud collection trough 222 is squeezed by the newly accumulated asphalt paste above and affected by centrifugal force, and also moves towards the fixing ring 112. Furthermore, the side of the bottom fixing rod 211 and the receiving block 221 near the crucible is more difficult to form semi-solid asphalt paste on its surface than a stationary surface because it is driven to rotate by the fan blade shaft 17. Through the application of the above components, it is effectively prevented that the semi-solid asphalt paste above the furnace will fall into the crucible due to its own weight and the vibration generated when the fan blade shaft 17 rotates, and adhere to the surface of the isostatic graphite, causing internal impurities to appear in the graphite during calcination, which affects the product quality.

[0032] Utilizing the characteristic of the aforementioned device where the fixing rod 211 scrapes the asphalt paste from the surface of the baffle 121, when the two inclined blocks 212 located above and below the baffle 121 scrape the surface of the baffle 121, the semi-solid asphalt paste in front of the moving direction of the inclined blocks 212 will accumulate. When the inclined blocks 212 pass through the flow hole 122 above the baffle 121, the accumulated asphalt paste will enter the flow hole 122. As the fixing rod 211 passes through the flow hole 122, the asphalt paste will adhere to the flow hole 122 and form a smooth layer of asphalt paste in the flow hole 122, and micro-solidification will occur in the flow hole 122. By setting the bending spring 311 and the protruding block 312, when the fixing rod 211 contacts the surface of the baffle 121, the bending spring 311 is squeezed and also sticks tightly to the baffle 121. The protruding block 312 is squeezed by the baffle 121 and will move closer to the fixing rod 211. 11, thereby driving the curved spring 311 near the protruding block 312 to move closer to the fixed rod 211. When the fixed rod 211 sweeps past the flow hole 122 above the baffle 121, the protruding block 312 is not restricted by the baffle 121. When the curved spring 311 releases its elastic potential energy, the protruding block 312 extends into the flow hole 122. As a result, when the inclined block 212 passes through the flow hole 122, the asphalt paste formed has a break, making it difficult to form a complete layer of asphalt paste in the flow hole 122. When the curved spring 311 crosses the flow hole 122, the protruding block 312 contacts the edge of the flow hole 122 and is squeezed by the baffle 121 again, moving towards the fixed rod 211. Through the application of the above components, the problem of asphalt paste forming a complete layer of asphalt paste in the flow hole 122, micro-curing and blocking the flow hole 122, affecting the normal circulation of hot air, is effectively alleviated.

[0033] Utilizing the characteristic of the bending spring 311 closely adhering to the baffle 121, as the fixed rod 211 rotates with the fan blade shaft 17, the position of the bending spring 311 relative to the baffle 121 continuously changes. Consequently, some asphalt paste enters the gap between the bending spring 311 and the baffle 121, resulting in solidification and making it difficult for the bending spring 311 to bend. By setting the bending spring 311 to a wavy shape, when the protruding block 312 repeatedly enters and exits the flow hole 122, the bending distance of the bending spring 311 continuously expands and contracts. Thus, when the asphalt paste micro-solidifies on the surface of the bending spring 311, it is difficult for it to adhere to the surface of the bending spring 311, allowing the bending spring 311 to still deform normally. Through the application of the above components, the problem of asphalt paste micro-solidifying in the gap between the bending spring 311 and the baffle 121, making it difficult for the bending spring 311 to deform normally, is effectively prevented.

[0034] Taking advantage of the airflow characteristics of the above-mentioned equipment through the flow hole 122, by staggering the three baffles 121, the flow holes 122 on the three baffles 121 are not on the same axis. When the airflow flows smoothly in the flow hole 122, it prevents the asphalt paste falling from above from directly passing through the uppermost baffle 121. Furthermore, the three-layer staggered structure forces the heat flow to change direction multiple times between layers, resulting in thorough mixing. Through the application of the above components, the problem of asphalt paste falling directly through the flow hole 122 into the crucible is effectively prevented. At the same time, it alleviates the problem that when using a single-layer baffle 121, the heat flow is prone to form a low-speed dead zone, leading to uneven temperature in the furnace.

[0035] The preferred embodiments of the present invention disclosed above are merely illustrative of the invention. These preferred embodiments do not exhaustively describe all details, nor do they limit the invention to the specific implementations described. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of the invention, thereby enabling those skilled in the art to better understand and utilize the invention. The invention is limited only by the claims and their full scope and equivalents.

Claims

1. A protective device for a third-generation semiconductor isostatic pressing graphite calcination furnace, comprising a pit furnace (13) and a furnace cover (14), wherein a vacuum pump (15) is fixedly connected to the right side of the pit furnace (13), an air filling pump (16) is fixedly connected to the right side of the pit furnace (13), and a fan blade shaft (17) is rotatably connected to the top of the furnace cover (14), characterized in that, Also includes: The blocking mechanism (1) is fixedly installed on the bottom outer wall of the furnace cover (14). The blocking mechanism (1) includes several connecting rods (111) fixedly connected to the bottom of the furnace cover (14). The bottom of the several connecting rods (111) is fixedly connected to a fixing ring (112). The inner wall of the fixing ring (112) is fixedly connected to several baffles (121). Scraping mechanism (2), the scraping mechanism (2) is fixedly installed at the bottom of the outer wall of the fan blade shaft (17), the scraping mechanism (2) includes a number of fixed rods (211) fixedly connected to the bottom of the outer wall of the fan blade shaft (17). The elastic mechanism (3) is fixedly installed on the outer wall of the fixed rod (211). The elastic mechanism (3) includes a plurality of curved spring pieces (311) fixedly connected to the outer wall of the fixed rod (211).

2. The protection device for a third-generation semiconductor isostatic pressing graphite calcination furnace according to claim 1, characterized in that: The blocking mechanism (1) further includes: A fixing component (11) is installed on the inner wall of the fixing ring (112); A baffle assembly (12) is installed on the outer wall of a baffle (121); The fixing component (11) provides basic support for fixing the baffle assembly (12).

3. The protection device for a third-generation semiconductor isostatic pressing graphite calcination furnace according to claim 2, characterized in that: The scraping mechanism (2) further includes: Scraping assembly (21), which is fixedly installed on the outer wall of the fixing rod (211); The material collection assembly (22) is fixedly installed on the outer wall of the fixing rod (211); Among them, the material collection assembly (22) is located on the outer wall of the bottommost fixed rod (211), and the fan blade shaft (17) rotates under the drive of the motor, which in turn drives the fixed rod (211) to rotate.

4. The protection device for a third-generation semiconductor isostatic pressing graphite calcination furnace according to claim 3, characterized in that: The elastic mechanism (3) further includes: A spring plate assembly (31) is fixedly installed on the outer wall of a curved spring sheet (311); The fan blade shaft (17) rotates under the drive of the motor, which in turn drives the fixed rod (211) to rotate, and causes the spring plate assembly (31) to contact the baffle (121), and the spring plate assembly (31) is squeezed and deformed.

5. The protection device for a third-generation semiconductor isostatic pressing graphite calcination furnace according to claim 4, characterized in that: The fixing component (11) includes a material collection trough (113) formed on the inner wall of the fixing ring (112). The asphalt paste scraped off by the fixing rod (211) will be discharged into the aggregate trough (113).

6. The protection device for a third-generation semiconductor isostatic pressing graphite calcination furnace according to claim 5, characterized in that: The baffle assembly (12) includes a plurality of flow holes (122) formed on the outer wall of the baffle (121), and a plurality of material discharge grooves (123) are formed on the outer wall of the baffle (121). Among them, the flow hole (122) allows airflow to pass through, so that the airflow in the well furnace (13) circulates under the drive of the fan blades on the fan blade shaft (17).

7. The protection device for a third-generation semiconductor isostatic pressing graphite calcination furnace according to claim 6, characterized in that: The scraping assembly (21) includes an inclined block (212) fixedly connected to the outer wall of the fixed rod (211). The side of the inclined block (212) closer to the fan blade shaft (17) is thicker than the side of the inclined block (212) further away from the fan blade shaft (17).

8. The protection device for a third-generation semiconductor isostatic pressing graphite calcination furnace according to claim 7, characterized in that: The material collection assembly (22) includes a receiving block (221) fixedly connected to the outer wall of the inclined block (212), and the outer wall of the receiving block (221) is provided with a mud collection groove (222). Among them, the receiving block (221) is located on the outer wall of the lowest inclined block (212). The side of the receiving block (221) away from the fixed rod (211) does not contact the baffle (121), and the side of the mud collection trough (222) away from the fixed rod (211) is inclined inward.

9. The protection device for a third-generation semiconductor isostatic pressing graphite calcination furnace according to claim 4, characterized in that: The spring plate assembly (31) includes a plurality of protruding blocks (312) fixedly connected to the outer wall of the curved spring plate (311). Among them, several protruding blocks (312) are arranged in a linear array.

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