A fast tunable six-degree-of-freedom mirror alignment device

Abstract

The application belongs to the technical field of precise optical adjustment, and discloses a kind of fast adjustable six-degree-of-freedom mirror alignment device, including substrate and first, second, third adjustment structure.Third adjustment ring is rotatably installed on substrate, and third adjustment structure is formed by cooperating with rotary drive structure, to realize mirror rotation around axis.Second adjustment ring is slidably installed on third adjustment ring, and second adjustment structure is formed by driving it to slide along mirror diameter direction by translation drive structure, to realize corresponding in-plane translation.First adjustment ring is connected to second adjustment ring, and first adjustment structure is formed by cooperating with axially arranged first drive structure, to realize mirror pitch, yaw and axial displacement adjustment, to solve the problem that existing similar device structure is complex and difficult to integrate in compact optical platform and equipment.

Description

Technical Field

[0001] This invention relates to the field of precision optical adjustment technology, and more specifically to a fast-adjustable six-degree-of-freedom mirror alignment device. Background Technology

[0002] In fields such as precision optical imaging and optical inspection, achieving rapid, precise, and stable control of the beam propagation path is a core requirement. As the most basic optical path steering element, the precise adjustment of the spatial attitude of a mirror directly determines the efficiency of optical path construction. Current technologies employ multiple adjustment frames connected in series; however, this method results in a large volume and low space utilization. Furthermore, this series structure often suffers from severe motion coupling; adjusting one degree of freedom frequently interferes with other already adjusted degrees of freedom, leading to a cumbersome and time-consuming adjustment process.

[0003] In the prior art, mirror alignment mainly relies on manual or electric adjustment frames. These devices typically use multiple adjustment frames connected in series or stacked to achieve multi-degree-of-freedom adjustment. Chinese utility model patent CN218675452U discloses a six-degree-of-freedom adjustable optical device, including: stacked mirrors, a mounting assembly, a rotation adjustment assembly, and a translation adjustment assembly; the rotation adjustment assembly connects the mirrors and the mounting assembly, and has a first axis, a second axis, and a third axis that form angles between each pair; the translation adjustment assembly connects the mirrors and the mounting assembly, and has a first translation trajectory, a second translation trajectory, and a third translation trajectory that form angles between each pair; the mirrors are configured to rotate relative to the mounting assembly about the first, second, and third axes, and to translate relative to the mounting assembly along the first, second, and third translation trajectories.

[0004] However, the existing six-degree-of-freedom adjustable optical devices are bulky and not compact enough. These devices are made up of multiple single-degree-of-freedom adjustment devices stacked together, resulting in low space utilization. The complex mechanical stacking makes the devices heavy and difficult to integrate into compact optical platforms or equipment. Summary of the Invention

[0005] Therefore, the technical problem to be solved by the present invention is to overcome the defects of the existing six-degree-of-freedom adjustable optical device, which has a complex structure and is difficult to integrate into a compact optical platform or device, thereby providing a fast adjustable six-degree-of-freedom mirror alignment device.

[0006] A fast-adjustable six-degree-of-freedom mirror alignment device includes: a base plate; a first adjustment structure for driving the mirror to pitch, yaw, and axial displacement; a second adjustment structure for driving the mirror to translate within the plane of the mirror's diameter; and a third adjustment structure for driving the mirror to rotate about an axis. A third adjustment ring is rotatably mounted on the base plate. A rotation drive structure for pushing the third adjustment ring to rotate is provided on the base plate. The third adjustment ring and the rotation drive structure together constitute the third adjustment structure. A second adjustment ring is slidably mounted on the third adjustment ring. A translation drive structure for driving the second adjustment ring to slide in the diameter direction of the mirror is fixed on the third adjustment ring. The second adjustment ring and the translation drive structure together constitute the second adjustment structure. The second adjustment ring is connected to a first adjustment ring. A first drive structure is fixed on the second adjustment ring and arranged parallel to the axis of the first adjustment ring. The first adjustment ring and the first drive structure together constitute the first adjustment structure.

[0007] Furthermore, three sets of first threaded pairs are evenly fixed on the second adjusting ring along the circumferential direction. Each first threaded pair includes a first threaded rod that abuts against the surface of the first adjusting ring. Three sets of springs are evenly arranged on the first adjusting ring along the circumferential direction. One end of each spring is fixed to the first adjusting ring, and the other end is fixed to the second adjusting ring. The springs and the first threaded pairs together constitute the first driving structure.

[0008] Furthermore, three first mounting countersunk holes are evenly provided on the second adjusting ring along the circumferential direction. The first mounting countersunk holes extend in the direction close to the first adjusting ring. A first threaded pair is installed in the first mounting countersunk hole. The first threaded pair also includes a first bushing. The first threaded rod is screwed into the first bushing. The stepped structure of the first mounting countersunk hole is fixed to the first bushing to fix the first threaded pair.

[0009] Furthermore, the first adjusting ring has a process hole, which corresponds to the first threaded pair. Two fixing pins with extension directions perpendicular to the axis of the reflector are fixed in parallel inside the process hole. The first threaded pair includes a first threaded rod, and the fixing pins form an abutment groove that abuts against the end of the first threaded rod.

[0010] Furthermore, three sets of spring mounting holes are evenly provided on the first adjusting ring along the circumferential direction. Each set of spring mounting holes includes two through holes. A spring fixing pin is fixed to the side of the through hole facing away from the second adjusting ring, and a spring is fixed on the spring fixing pin.

[0011] Furthermore, four fixing blocks are evenly fixed on the third adjusting ring along the circumferential direction. The fixing blocks are provided with corresponding second mounting countersunk holes. A second threaded pair is installed in the second mounting countersunk hole. The second threaded pair includes a second threaded rod. The end of the second threaded rod abuts against the side plane of the second adjusting ring to drive the second adjusting ring to translate relative to the third adjusting ring along the diameter direction of the reflector, thereby driving the reflector to translate. The fixing blocks and the second threaded pair together constitute the translation driving structure.

[0012] Furthermore, the second adjusting ring has three first threaded holes evenly arranged along the circumferential direction, and the third adjusting ring has a fixed countersunk hole that is axially opposite to the first threaded holes. A second fixing screw is installed in the fixed countersunk hole. The diameter of the through hole of the fixed countersunk hole is larger than that of the second fixing screw to realize the relative sliding between the second adjusting ring and the third adjusting ring.

[0013] Furthermore, a disc spring is fitted onto the second fixing screw, with one side of the disc spring abutting against the second fixing screw and the other side abutting against the stepped surface of the fixing countersunk hole.

[0014] Furthermore, two sets of mounting blocks are provided on the substrate along the circumferential direction. The mounting blocks are provided with a third mounting countersunk hole. A third threaded pair is installed in the third mounting countersunk hole. A corresponding tangential plane is provided on the third adjusting ring. The tangential plane and the third threaded pair cooperate to drive the third adjusting ring to rotate and drive the reflector to rotate. The third threaded pair and the mounting blocks together constitute a rotation drive structure.

[0015] Furthermore, six sets of arc-shaped holes are evenly formed on the substrate along the circumferential direction, and a second threaded hole corresponding to the arc-shaped hole is formed on the third adjusting ring. A third fixing screw is installed in the arc-shaped hole. The third fixing screw fixes the substrate and the third adjusting ring and meets the requirement of relative rotation between the two through the arc-shaped hole.

[0016] The present invention provides a rapidly adjustable six-degree-of-freedom mirror alignment device. By setting three corresponding adjustment structures, different attitude states of the mirror are adjusted, thereby achieving the purpose of mirror adjustment. Compared with the prior art, the present invention has a simpler and more compact structure, and each adjustment structure is relatively independent, preventing coupling and avoiding the interference of already adjusted degrees of freedom when adjusting other degrees of freedom, as is the case in the prior art. In summary, the technical solution of the present invention solves the problem that the existing six-degree-of-freedom adjustable optical devices have complex structures and are difficult to integrate into compact optical platforms or devices.

[0017] This invention, through the cooperation of three sets of threaded pairs and springs, not only ensures the accuracy of adjusting the pitch, yaw and axial movement of the reflector, but also ensures that the first and second adjusting rings will not shift due to the influence of gravity, thereby affecting the adjustment of other degrees of freedom.

[0018] The present invention fixes the first threaded pair by creating a countersunk hole, which further optimizes the spatial distance between the first adjusting ring and the second adjusting ring, and ensures the compactness of the structure of the present invention.

[0019] This invention forms an abutment groove that mates with the threaded rod by setting a corresponding fixing pin. Compared with the direct machining method, it is easier to process and the structural strength is guaranteed.

[0020] The present invention fixes the spring by setting a spring fixing pin, which is simpler to process than directly machining the structure to fix the spring. Furthermore, by setting the spring fixing pin on the side opposite to the second adjusting ring and passing the spring through the through hole, the stability between the first adjusting ring and the second adjusting ring is further improved.

[0021] The present invention sets up a corresponding fixing block, and then installs the second threaded pair inside the fixing block. Compared with the prior art, the use of the threaded pair as the driving structure has higher adjustment precision, simpler structure, and the second and third adjusting rings are less prone to movement.

[0022] This invention uses a second fixing screw to fix the second and third adjusting rings together. Compared to other structures, it has a simpler structure and better fixing effect. Furthermore, the relatively sliding of the second and third adjusting rings is achieved through a large fixing countersunk hole. Its simple structure makes it less prone to failure and highly reliable.

[0023] This invention provides axial preload to the second fixing screw by setting a disc spring, which is simpler in structure and occupies less space compared to other structures.

[0024] This invention features a third threaded joint and a tangential plane on the third adjusting ring. The cooperation of these two components drives the rotation of the third adjusting ring relative to the substrate. Compared to other methods, this results in higher adjustment accuracy and a simpler structure.

[0025] This invention achieves the fixation of the third adjusting ring to the base plate through the cooperation of the arc-shaped hole, the threaded hole, and the second fixing screw. The structure is reliable and stable. At the same time, the presence of the arc-shaped hole also ensures that the two can rotate relative to each other. Its structure is simple and highly reliable. Attached Figure Description

[0026] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0027] Figure 1 This is an isometric view of the fast-adjustable six-degree-of-freedom mirror alignment device of the present invention; Figure 2 This is an exploded view of the fast-adjustable six-degree-of-freedom mirror alignment device of the present invention; Figure 3 This is a left view of the first adjustment ring of the fast-adjustable six-degree-of-freedom mirror alignment device of the present invention; Figure 4This is a right view of the first adjustment ring of the fast-adjustable six-degree-of-freedom mirror alignment device of the present invention; Figure 5 This is a partial enlarged view of point A of the first adjustment ring of the fast-adjustable six-degree-of-freedom mirror alignment device of the present invention; Figure 6 This is a partial enlarged view of point B of the first adjustment ring of the fast adjustable six-degree-of-freedom mirror alignment device of the present invention; Figure 7 This is a left view of the second adjustment ring of the fast-adjustable six-degree-of-freedom mirror alignment device of the present invention; Figure 8 This is a right view of the second adjustment ring of the fast-adjustable six-degree-of-freedom mirror alignment device of the present invention; Figure 9 This is a schematic diagram of the first drive structure of the fast-adjustable six-degree-of-freedom mirror alignment device of the present invention; Figure 10 This is a cross-sectional view of the first drive structure of the fast-adjustable six-degree-of-freedom mirror alignment device of the present invention; Figure 11 This is a schematic diagram of the translation drive structure of the fast-adjustable six-degree-of-freedom mirror alignment device of the present invention; Figure 12 This is a cross-sectional view of the translation drive structure of the fast-adjustable six-degree-of-freedom mirror alignment device of the present invention; Figure 13 This is a left view of the third adjustment ring of the fast-adjustable six-degree-of-freedom mirror alignment device of the present invention; Figure 14 This is a front view of the third adjustment ring of the fast-adjustable six-degree-of-freedom mirror alignment device of the present invention; Figure 15 This is a right view of the third adjustment ring of the fast-adjustable six-degree-of-freedom mirror alignment device of the present invention; Figure 16 This is a schematic diagram of the rotation drive structure of the fast-adjustable six-degree-of-freedom mirror alignment device of the present invention; Figure 17 This is a cross-sectional view of the rotation drive structure of the fast-adjustable six-degree-of-freedom mirror alignment device of the present invention; Figure 18 This is an isometric view of the substrate of the fast-adjustable six-degree-of-freedom mirror alignment device of the present invention; Figure 19 This is a schematic diagram showing the adjustment of pitch, yaw, and axial translation of the rapidly adjustable six-degree-of-freedom mirror alignment device of the present invention. Figure 20 This is a schematic diagram illustrating the adjustment of the left-right translation, up-down translation, and roll of the fast-adjustable six-degree-of-freedom mirror alignment device of the present invention.

[0028] Explanation of reference numerals in the attached figures: 1. Reflector; 2. Adhesive layer; 3. Adapter ring; 4. First adjusting ring; 41. Boss; 411. Through hole; 42. Spring mounting hole; 422. Spring retaining pin; 43. Process hole; 431. Retaining pin; 5. Spring; 6. Second adjusting ring; 61. First threaded hole; 62. Mounting hole; 63. First mounting countersunk hole; 64. Side plane; 65. Spring retaining hole; 7. First threaded pair; 71. First bushing; 72. First threaded rod; 721. Ball head; 8. Translation drive structure; 81. Fixing block; 811. Second mounting countersunk hole; 82. Second threaded pair; 821. Second bushing; 822. Second threaded rod; 9. Third adjusting ring; 91. First operating hole; 92. Second threaded hole; 93. Fixed countersunk hole; 94. Tangential plane; 95. First mounting threaded hole; 96. Annular protrusion; 10. Rotary drive structure; 101. Mounting block; 1001. Third mounting countersunk hole; 102. Third threaded pair; 1021. Third bushing; 1022. Third threaded rod; 11. Base plate; 111. Second mounting threaded hole; 112. Fixed threaded hole; 113. Annular boss; 114. Second operating hole; 115. Arc-shaped hole; 116. Adjusting hole; 117. Central circular hole. Detailed Implementation

[0029] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0030] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0031] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0032] Furthermore, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0033] Example 1 like Figure 1-10 and Figure 19 The image shows a fast-adjustable six-degree-of-freedom mirror alignment device, comprising: a base plate 11; a first adjustment structure for driving the mirror 1 to pitch, yaw, and axial displacement; a second adjustment structure for driving the mirror 1 to translate within the plane of the mirror 1's diameter; and a third adjustment structure for driving the mirror 1 to rotate around an axis. A third adjustment ring 9 is rotatably mounted on the base plate 11. A rotation drive structure 10 for pushing the third adjustment ring 9 to rotate is provided on the base plate 11. The third adjustment ring 9 and the rotation drive structure 10 together constitute the third adjustment structure. A second adjustment ring 6 is slidably mounted on the third adjustment ring 9. A translation drive structure 8 for driving the second adjustment ring 6 to slide in the diameter direction of the mirror 1 is fixed on the third adjustment ring 9. The second adjustment ring 6 and the translation drive structure 8 together constitute the second adjustment structure. The second adjustment ring 6 is connected to a first adjustment ring 4. A first drive structure is fixed on the second adjustment ring 6 and arranged parallel to the axis of the first adjustment ring 4. The first adjustment ring 4 and the first drive structure together constitute the first adjustment structure.

[0034] Furthermore, three sets of first threaded pairs 7 are evenly fixed along the circumferential direction on the second adjusting ring 6. Each first threaded pair 7 includes a first threaded rod 72, which abuts against the surface of the first adjusting ring 4. Three sets of springs 5 ​​are evenly arranged along the circumferential direction on the first adjusting ring 4. Each set of springs 5 ​​includes two independent springs 5. One end of each spring 5 is fixed to the first adjusting ring 4, and the other end is fixed to the second adjusting ring 6. The springs 5 ​​and the first threaded pairs 7 together constitute the first driving structure. Through the cooperation of the springs 5 ​​and the first threaded pairs 7, the precision of the adjustment is ensured, and the second adjusting ring 6 and the first adjusting ring 4 are stably connected, allowing them to be stably fixed when no adjustment is being made.

[0035] To further reduce the overall space of the device, three first mounting countersunk holes 63 are evenly formed along the circumference of the second adjusting ring 6. The first mounting countersunk holes 63 extend towards the first adjusting ring 4. A first threaded pair 7 is installed in the first mounting countersunk hole 63. The first threaded pair 7 includes a first bushing 71 and a first threaded rod 72 installed in the first bushing 71. The stepped structure of the first mounting countersunk hole 63 is fixed to the first bushing 71 to fix the first threaded pair 7. The end face of the first bushing 71 is fixed to the stepped structure of the first mounting countersunk hole 63 by bonding. The first threaded rod 72 extends out of the first mounting countersunk hole 63 and abuts against the surface of the first adjusting ring 4. By fixing the first threaded pair 7 by forming the first mounting countersunk holes 63 on the second adjusting ring 6, it occupies less space and has a more compact structure compared to other structures.

[0036] Furthermore, the first adjusting ring 4 has a process hole 43, which corresponds to the first threaded pair 7. Two fixing pins 431 extending perpendicularly to the axis of the reflector 1 are fixed parallel to each other in the process hole 43. The first threaded pair 7 includes a first threaded rod 72, and the fixing pins 431 form an abutment groove that abuts against the ball head 721 at the end of the first threaded rod 72. By bonding the fixing pins 431, a V-shaped abutment groove that abuts against the ball head 721 at the end of the first threaded rod 72 is formed. Compared with directly machining the abutment groove, this method is easier to process and requires less effort.

[0037] To ensure a more stable connection between the spring 5 and the first adjusting ring 4 and the second adjusting ring 6, three sets of spring mounting holes 42 are evenly provided on the first adjusting ring 4 along the circumferential direction. Each set of spring mounting holes 42 includes two through holes. A spring fixing pin 422 is glued and fixed to the side of the through hole facing away from the second adjusting ring 6, and the spring 5 is fixed on the spring fixing pin 422. The second adjusting ring 6 has a corresponding spring fixing hole 65, and a corresponding spring fixing pin 422 is also glued and fixed in the spring fixing hole 65. Both ends of the spring 5 are connected to the spring fixing pin 422 respectively. By providing spring mounting holes 42 on the first adjusting ring 4 and gluing spring fixing pins 422 to the side of the spring mounting hole 42 facing away from the second adjusting ring 6, the connection and fixation effect between the first adjusting ring 4 and the second adjusting ring 6 is better ensured.

[0038] The third adjusting ring 9 has a first operating hole 91 at the position corresponding to the first threaded pair 7, through which the first threaded rod 72 of the first threaded pair 7 extends. The base plate 11 has a second operating hole 114 corresponding to the first operating hole 91. The first threaded rod 72 of the first threaded pair 7 passes through the first operating hole 91 and the second operating hole 114 to facilitate the operation of the first threaded pair 7.

[0039] There are three sets of first threaded joints 7. By keeping two of the first threaded joints 7 stationary and adjusting the remaining precision threaded joint 7, the screw depth of the first threaded rod 72 into the first bushing 71 is changed. The first threaded rod 72 pushes the first adjusting ring 4, causing an angle change, which in turn affects the pitch angle of the reflector 1. To adjust the tilt angle of the reflector, one of the first threaded joints 7 can be kept stationary while adjusting the other two, causing the two first threaded rods 72 to move in opposite directions, thus tilting the reflector left or right. Axial translation of the reflector in the optical path can be achieved by simultaneously adjusting all three first threaded joints 7. Adjusting the first threaded rods 72 in the same direction allows for axial forward and backward movement of the reflector 1.

[0040] Example 2 This embodiment mainly focuses on the second adjustment structure. The first adjustment structure can adopt the structure in Embodiment 1, which will not be described again in this embodiment.

[0041] like Figure 1-2 , Figure 7-8 as well as Figure 11-16 The image shows a fast-adjustable six-degree-of-freedom mirror alignment device, comprising: a base plate 11; a first adjustment structure for driving the mirror 1 to pitch, yaw, and axial displacement; a second adjustment structure for driving the mirror 1 to translate within the plane of the mirror 1's diameter; and a third adjustment structure for driving the mirror 1 to rotate around an axis. A third adjustment ring 9 is rotatably mounted on the base plate 11. A rotation drive structure 10 for pushing the third adjustment ring 9 to rotate is provided on the base plate 11. The third adjustment ring 9 and the rotation drive structure 10 together constitute the third adjustment structure. A second adjustment ring 6 is slidably mounted on the third adjustment ring 9. A translation drive structure 8 for driving the second adjustment ring 6 to slide in the diameter direction of the mirror 1 is fixed on the third adjustment ring 9. The second adjustment ring 6 and the translation drive structure 8 together constitute the second adjustment structure. The second adjustment ring 6 is connected to a first adjustment ring 4. A first drive structure is fixed on the second adjustment ring 6 and arranged parallel to the axis of the first adjustment ring 4. The first adjustment ring 4 and the first drive structure together constitute the first adjustment structure.

[0042] Furthermore, four fixing blocks 81 are evenly fixed along the circumferential direction on the third adjusting ring 9. The fixing blocks 81 are fixed to the third adjusting ring 9 by screws and the first mounting threaded hole 95 on the third adjusting ring 9. The fixing blocks 81 have corresponding second mounting countersunk holes 811. A second threaded pair 82 is installed in the second mounting countersunk hole 811. The second threaded pair 82 includes a second threaded rod 822 and a second bushing 821. The end face of the second bushing 821 is bonded and fixed to the end face of the second mounting countersunk hole 811. The second threaded rod 822 of the second threaded pair 82 extends out of the second mounting countersunk hole 811, and the end of the second threaded rod 822 abuts against the side plane 64 of the second adjusting ring 6, thereby pushing the second adjusting ring 6 to translate relative to the third adjusting ring 9 along the diameter direction of the reflector 1. The position of the second adjusting ring 6 is controlled by four sets of second threaded pairs 82. Compared with other structures, its structure is simple and the adjustment accuracy is high.

[0043] Furthermore, the second adjusting ring 6 has three first threaded holes 61 evenly arranged along its circumference, and the third adjusting ring 9 has corresponding fixing countersunk holes 93. A second fixing screw is installed in the fixing countersunk hole 93, which securely connects the second adjusting ring 6 and the third adjusting ring 9. The diameter of the through hole 93 is larger than that of the second fixing screw to allow relative sliding between the second adjusting ring 6 and the third adjusting ring 9. This design achieves relative sliding between the second adjusting ring 6 and the third adjusting ring 9, and compared to other structures, it is simple in structure and reliable in effect.

[0044] Furthermore, a disc spring is fitted onto the second fixing screw, with one side of the disc spring abutting against the second fixing screw and the other side abutting against the stepped surface of the fixing countersunk hole 93.

[0045] To facilitate adjustment of the second fixing screw, an adjustment hole 116 is provided on the base plate 11 at the position corresponding to the fixing countersunk hole 93, and the tightness of the second fixing screw can be adjusted through the adjustment hole 116.

[0046] Taking leftward translation as an example, the adjusting ring 9 and the base plate 11 are kept fixed, and the translation drive structure 8 located in the upper and lower directions is kept still. The left translation drive structure 8 is loosened, and the second threaded rod 822 of the right translation drive structure 8 is adjusted so that the second threaded rod 822 pushes the adjusting ring 6 to move to the left, thereby driving the reflector to translate to the left. After the movement, all translation drive structures 8 are tightened to achieve the locking function of translation.

[0047] Example 3 This embodiment mainly focuses on the third adjustment structure. The first adjustment structure can adopt the structure in Embodiment 1, and the second adjustment structure can adopt the structure in Embodiment 2. These will not be described again in this embodiment.

[0048] like Figure 1-2 , Figure 13-18 as well as Figure 20 The image shows a fast-adjustable six-degree-of-freedom mirror alignment device, comprising: a base plate 11; a first adjustment structure for driving the mirror 1 to pitch, yaw, and axial displacement; a second adjustment structure for driving the mirror 1 to translate within the plane of the mirror 1's diameter; and a third adjustment structure for driving the mirror 1 to rotate around an axis. A third adjustment ring 9 is rotatably mounted on the base plate 11. A rotation drive structure 10 for pushing the third adjustment ring 9 to rotate is provided on the base plate 11. The third adjustment ring 9 and the rotation drive structure 10 together constitute the third adjustment structure. A second adjustment ring 6 is slidably mounted on the third adjustment ring 9. A translation drive structure 8 for driving the second adjustment ring 6 to slide in the diameter direction of the mirror 1 is fixed on the third adjustment ring 9. The second adjustment ring 6 and the translation drive structure 8 together constitute the second adjustment structure. The second adjustment ring 6 is connected to a first adjustment ring 4. A first drive structure is fixed on the second adjustment ring 6 and arranged parallel to the axis of the first adjustment ring 4. The first adjustment ring 4 and the first drive structure together constitute the first adjustment structure.

[0049] Furthermore, two sets of mounting blocks 101 are arranged circumferentially on the substrate 11. The mounting blocks 101 are fixed to the substrate 11 by screws. The substrate 11 has a second mounting threaded hole 111 for fixing the mounting blocks 101. The mounting blocks 101 have a third mounting countersunk hole 1001, and a third threaded pair 102 is installed in the third mounting countersunk hole 1001. The third threaded pair 102 includes a third bushing 1021 and a third threaded rod 1022. The end face of the third bushing 1021 is bonded to the stepped surface of the third mounting countersunk hole 1001. The third adjusting ring 9 has corresponding tangential planes 94. Four tangential planes 94 are symmetrically arranged, and two oppositely arranged tangential planes 94 abut against the third threaded rod 1022. The tangential planes 94 and the third threaded pair 102 cooperate to drive the reflector 1 to rotate. The third threaded pair 102 and the mounting blocks 101 together constitute the rotation drive structure 10. The third adjusting ring 9 has an annular protrusion 96, and the substrate 11 has a central circular hole 117 that matches the annular protrusion 96. The inner wall of the central circular hole 117 and the annular protrusion 96 cooperate to form a rotary pair. The rotation of the third adjusting ring 9 relative to the substrate 11 is achieved through the cooperation of the third threaded pair 102 and the tangential plane 94 on the third adjusting ring 9. Compared with other methods, the adjustment accuracy is higher and the structure is simpler. In this embodiment, the mounting blocks 101 are arranged opposite each other on both sides of the axis of symmetry of the substrate 11. Of course, in other embodiments, they can also be arranged diagonally, as long as they can satisfy the requirement of driving the rotation of the third adjusting ring 9.

[0050] Furthermore, the substrate 11 is provided with an annular boss 113, on which six sets of arc-shaped holes 115 are evenly formed along the circumference. The third adjusting ring 9 is provided with second threaded holes 92 corresponding to the arc-shaped holes 115, and the second threaded holes 92 are evenly formed along the circumference. A third fixing screw is installed in the arc-shaped hole 115, which fixes the substrate 11 and the third adjusting ring 9, and allows for relative rotation between the two through the arc-shaped hole 115. The cooperation of the arc-shaped hole 115, the second threaded hole 92, and the third fixing screw achieves the fixation of the third adjusting ring 9 and the substrate 11, resulting in a reliable and stable structure. At the same time, the presence of the arc-shaped hole 115 also ensures that the two can rotate relative to each other, making the structure simple and highly reliable. The substrate 11 is also provided with fixing threaded holes 112 for connection and fixation with other structures. The number and position of the fixing threaded holes 112 can be adjusted according to actual conditions.

[0051] Furthermore, the first adjustment structure also includes an adapter ring 3. The adapter ring 3 has six threaded holes evenly spaced along its circumference. An adhesive layer 2 is provided between the adapter ring 3 and the reflector 1. The first adjustment ring 4 has a through hole 411 axially opposite to the threaded holes. The first adjustment ring 4 and the adapter ring 3 are fixed together by a first fixing screw. To better secure the adapter ring 3 and the first adjustment ring 4, the first adjustment ring 4 also has six protrusions 41 evenly spaced along its circumference. The protrusions 41 are located on the side of the first adjustment ring 4 facing the reflector 1, and each protrusion 41 has a through hole 411 for the first fixing screw to pass through. By using the adapter ring 3, the connection between the reflector 1 and the first adjustment ring 4 is transformed into a connection between the first adjustment ring 4 and the adapter ring 3, further reducing the possibility of the reflector 1 being affected during installation and ensuring the accuracy of the reflector 1. Simultaneously, to further increase space utilization, the through hole 411 is a countersunk hole.

[0052] The adhesive layer 2 serves to bond the back of the reflector 1 to the adapter ring 3. Its material is room temperature vulcanizing silicone rubber. The specific type of silicone rubber, the shape of the adhesive layer 2, the area and thickness of the adhesive layer 2 can be selected according to the actual use requirements.

[0053] Furthermore, the second adjusting ring 6 has a mounting hole 62 for installing the first fixing screw, and the mounting hole 62 is axially opposite to the through hole 411 on the first adjusting ring 4.

[0054] The reflector 1, adhesive layer 2, adapter ring 3, first adjusting ring 4, second adjusting ring 6, and third adjusting ring 9 are connected in sequence, while the substrate 11 remains fixed. Two sets of the third driving device are provided. Loosening one of the rotary driving structures 10 allows adjustment of the third threaded rod 1022 of the other rotary driving structure 10, causing the third threaded rod 1022 to push the third adjusting ring 9 clockwise, thereby adjusting the roll angle of the reflector 1. After adjustment, the two rotary driving structures 10 are tightened to lock the roll angle.

[0055] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the scope of protection of this invention.

Claims

1. A fast-adjustable six-degree-of-freedom mirror alignment device, characterized in that, include: The substrate (11) includes a first adjustment structure for driving the pitch, yaw, and axial displacement of the reflector (1), a second adjustment structure for driving the reflector (1) to translate within the plane of the reflector (1)'s diameter, and a third adjustment structure for driving the reflector (1) to rotate around its axis. A third adjustment ring (9) is rotatably mounted on the substrate (11). A rotation drive structure (10) for driving the third adjustment ring (9) to rotate is provided on the substrate (11). The third adjustment ring (9) and the rotation drive structure (10) together constitute the third adjustment structure. A second adjusting ring (6) is slidably mounted on the ring (9). A translation drive structure (8) is fixed on the third adjusting ring (9) to drive the second adjusting ring (6) to slide in the diameter direction of the reflector (1). The second adjusting ring (6) and the translation drive structure (8) together constitute the second adjusting structure. The second adjusting ring (6) is connected to the first adjusting ring (4). A first drive structure is fixed on the second adjusting ring (6) in a direction parallel to the axis of the first adjusting ring (4). The first adjusting ring (4) and the first drive structure together constitute the first adjusting structure.

2. The rapidly adjustable six-degree-of-freedom mirror alignment device according to claim 1, characterized in that: Three sets of first threaded pairs (7) are evenly fixed on the second adjusting ring (6) along the circumferential direction. The first threaded pair (7) includes a first threaded rod (72), which abuts against the surface of the first adjusting ring (4). Three sets of springs (5) are evenly arranged on the first adjusting ring (4) along the circumferential direction. One end of the spring (5) is fixed to the first adjusting ring (4), and the other end is fixed to the second adjusting ring (6). The spring (5) and the first threaded pair (7) together constitute the first driving structure.

3. The rapidly adjustable six-degree-of-freedom mirror alignment device according to claim 2, characterized in that: The second adjusting ring (6) has three first mounting countersunk holes (63) evenly opened along the circumferential direction. The first mounting countersunk holes (63) extend in the direction close to the first adjusting ring (4). The first threaded pair (7) is installed in the first mounting countersunk hole (63). The first threaded pair (7) also includes a first bushing (71). The first threaded rod (72) is screwed into the first bushing (71). The stepped structure of the first mounting countersunk hole (63) is fixed to the first bushing (71) to fix the first threaded pair (7).

4. The rapidly adjustable six-degree-of-freedom mirror alignment device according to claim 2 or 3, characterized in that: The first adjusting ring (4) has a process hole (43) which corresponds to the first threaded pair (7). Two fixing pins (431) with extending directions perpendicular to the axis of the reflector (1) are fixed in parallel inside the process hole (43). The fixing pins (431) form an abutment groove that abuts against the end of the first threaded rod (72).

5. The rapidly adjustable six-degree-of-freedom mirror alignment device according to claim 2 or 3, characterized in that: The first adjusting ring (4) has three sets of spring mounting holes (42) evenly opened along the circumferential direction. Each set of spring mounting holes (42) includes two through holes. A spring fixing pin (422) is fixed on the side of the through hole facing away from the second adjusting ring (6). The spring (5) is fixed on the spring fixing pin (422).

6. The rapidly adjustable six-degree-of-freedom mirror alignment device according to claim 1, characterized in that: Four fixing blocks (81) are evenly fixed on the third adjusting ring (9) along the circumferential direction. The fixing blocks (81) are provided with corresponding second mounting countersunk holes (811). A second threaded pair (82) is installed in the second mounting countersunk hole (811). The second threaded pair (82) includes a second threaded rod (822). The end of the second threaded rod (822) abuts against the side plane (64) of the second adjusting ring (6) to drive the second adjusting ring (6) to translate relative to the third adjusting ring (9) along the diameter direction of the reflector (1) and thus drive the reflector (1) to translate. The fixing blocks (81) and the second threaded pair (82) together constitute the translation driving structure (8).

7. The rapidly adjustable six-degree-of-freedom mirror alignment device according to claim 1, characterized in that: The second adjusting ring (6) has three first threaded holes (61) evenly arranged along the circumferential direction. The third adjusting ring (9) has a fixed countersunk hole (93) that is axially opposite to the first threaded hole (61). A second fixing screw is installed in the fixed countersunk hole (93). The diameter of the through hole of the fixed countersunk hole (93) is larger than that of the second fixing screw to realize the relative sliding between the second adjusting ring (6) and the third adjusting ring (9).

8. The rapidly adjustable six-degree-of-freedom mirror alignment device according to claim 7, characterized in that: A disc spring is fitted on the second fixing screw. One side of the disc spring abuts against the second fixing screw, and the other side abuts against the stepped surface of the fixing countersunk hole (93).

9. The rapidly adjustable six-degree-of-freedom mirror alignment device according to claim 1, characterized in that: Two sets of mounting blocks (101) are provided on the substrate (11) along the circumferential direction. A third mounting countersunk hole (1001) is provided on the mounting block (101). A third threaded pair (102) is installed in the third mounting countersunk hole (1001). A corresponding tangential plane (94) is provided on the third adjusting ring (9). The tangential plane (94) and the third threaded pair (102) cooperate to drive the third adjusting ring (9) to rotate and drive the reflector (1) to rotate. The third threaded pair (102) and the mounting block (101) together constitute the rotation drive structure (10).

10. The rapidly adjustable six-degree-of-freedom mirror alignment device according to claim 1, characterized in that: The substrate (11) has six sets of arc-shaped holes (115) evenly distributed along the circumference. The third adjusting ring (9) has a second threaded hole (92) corresponding to the arc-shaped holes (115). A third fixing screw is installed in the arc-shaped hole (115). The third fixing screw fixes the substrate (11) and the third adjusting ring (9) and satisfies the requirement of relative rotation between the two through the arc-shaped hole (115).

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