Large size glass sheet level tgv coating vacuum control system, method and apparatus

Abstract

This invention relates to the field of TGV through-hole electroplating technology, and provides a vacuum control system, method, and apparatus for large-size glass plate TGV coating. It employs a two-stage progressive mode of pre-treatment vacuuming and deep vacuuming, and achieves precise control through closed-loop feedback by detecting the vacuum degree. This prevents breakage of large-size glass during the vacuuming process. Furthermore, the pre-treatment duration is determined based on the actual size of the glass plate, the base area, and the incremental pre-treatment time per unit area, ensuring that the pressure inside the high aspect ratio hole remains as consistent as possible with the external pressure, further reducing the risk of breakage. In addition, during deep vacuuming, the target vacuum degree is determined based on the hole diameter, and the holding time is determined based on the aspect ratio of the TGV hole after reaching the target vacuum degree. This further improves the vacuuming effect in the TGV hole, increases the filling efficiency and success rate of the TGV glass substrate, and shortens the conventional hole-filling electroplating time.

Description

Technical Field

[0001] This invention relates to the field of TGV through-hole electroplating technology, and provides a vacuum control system, method and apparatus for large-size glass plate-level TGV coating. Background Technology

[0002] Currently, most advanced vacuum chambers on the market are manual vacuum chambers. For large-sized TGV glass substrates, it is necessary to avoid the risk of breakage while ensuring that the vacuum meets the requirements during vacuuming. When using conventional vacuum chambers on the market, the vacuum chamber is prone to leakage and fails to achieve the expected value. In later processes, this can easily lead to problems such as core encapsulation, cracks, and long filling times for TGV glass substrates. Even if the ratio of chemicals and additives is adjusted, it is difficult to control a series of problems that occur during filling during production.

[0003] Furthermore, for 4.5 generation large-size glass substrates, the diameter of the vias ranges from 30μm to 120μm, and the aspect ratio ranges from 11:1 to 60:1. For large-size vias with high aspect ratios, defects (such as microcracks) are more likely to occur during processing. These microcracks will significantly reduce the strength of the glass. In particular, during the vacuuming process, the uneven pressure inside and outside the hole makes it easier for the cracks to expand, which in turn makes the entire glass substrate more likely to break. Summary of the Invention

[0004] The purpose of this invention is to provide a vacuum control system, method and apparatus for large-size glass plate TGV coating, so as to solve the problem that existing vacuuming methods are prone to causing large-size glass plates to break.

[0005] In a first aspect, embodiments of the present invention provide a large-size glass plate-level TGV coating vacuum control system for controlling the vacuum level within a vacuum chamber, comprising: A vacuum module is used to connect to a vacuum pumping device and to adjust the vacuum level in the vacuum tank. A pressure detection module, used to detect the vacuum level inside the vacuum chamber; A pre-processing control module, electrically connected to the vacuuming module and the pressure detection module, is used to trigger a timing mechanism and maintain a first preset processing time when the vacuum level in the vacuum tank is detected to be stable within the range of -60KPa±1Kpa; wherein, the first preset processing time is determined based on the actual size of the glass plate, the base area, and the pre-processing increment time per unit area. A deep vacuum control module, electrically connected to the vacuum module and the pressure detection module, is used to determine the actual target vacuum level based on the TGV aperture, and maintain the target vacuum level for a second preset time after it is reached; wherein the second preset time is determined based on the thickness of the TGV glass substrate.

[0006] Optionally, the first preset processing time is determined based on the actual size of the glass plate, the base area, and the incremental preprocessing time per unit area, including: The first pretreatment time T is: first basic pretreatment time + (actual area A - basic area k) / 100 * (10~30s)). For example, for every additional 100cm... 2 The pretreatment time was extended by 10 seconds; the base area k was 2626.5 cm². 2 The first basic preprocessing time is 55-65 seconds.

[0007] Optionally, the second preset time is determined based on the thickness of the TGV glass substrate, including: the second pretreatment time T1 is: the second basic pretreatment time + (actual thickness - reference thickness) / 0.5 * (60-65); that is, for example, for every 0.5mm increase in thickness, the pretreatment time is extended by 60~65s; the thickness of the TGV glass substrate is greater than 0.5mm; the second basic pretreatment time is 175~185s.

[0008] Optionally, if the thickness of the TGV glass substrate is less than or equal to 0.5 mm, the depth vacuum control module is not activated.

[0009] Optionally, the actual target vacuum level is determined based on the TGV aperture, including: When the TGV aperture is ≤40μm, the target vacuum degree is -85KPa to -90KPa, and the actual target vacuum degree = -(absolute value of target vacuum degree + (40μm - TGV aperture) / (1~5μm) * (0.5~1Kpa). When the TGV aperture is greater than 40 μm, the target vacuum level is -80 kPa to -85 kPa, and the actual target vacuum level is equal to -(absolute value of target vacuum level - (TGV aperture - 40 μm) / (1~5 μm) * (0.5~1 kPa).

[0010] Optionally, the large-size glass plate-level TGV coating vacuum control system further includes a temperature detection module for acquiring the temperature inside the vacuum chamber. The temperature detection module is electrically connected to the deep vacuum control module and is used to start deep vacuuming after the pretreatment stage is completed and the temperature in the vacuum tank is detected to be stable at 25℃±1℃.

[0011] Optionally, the pretreatment control module further includes a valve control module, which controls the opening of the primary vacuum pump inlet valve and the closing of the secondary vacuum pump inlet valve, and reduces the vacuum level in the vacuum chamber from atmospheric pressure to -60 kPa within 30 to 60 seconds at a pressure drop rate of 0.5 to 1 kPa / s. The pressure detection module is used to collect data in real time. When the vacuum degree is stable within the range of -60KPa±1KPa, the timing mechanism is triggered to maintain the first preset processing time of 60s. During this period, the temperature of the vacuum chamber is monitored by the temperature detection module. If the temperature fluctuation exceeds ±2℃, the first preset processing time is automatically extended by 5~10s.

[0012] Optionally, after reaching the target vacuum level, the vacuum level is maintained for a second preset time, and a vacuum level calibration is performed every third preset time. If the deviation exceeds ±1 kPa, further pressure is required to maintain the target vacuum level.

[0013] Optionally, the second preset time is 160s~200s, and the third preset time is 25s~35s.

[0014] Optionally, the large-size glass plate-level TGV coating vacuum control system further includes: a gas detection module; the gas detection module is used to detect the gas concentration in the vacuum chamber; After approaching the target vacuum level, the gas detection module is controlled to detect the residual gas concentration. When the residual gas concentration is ≤10ppm, the deep vacuum is deemed qualified.

[0015] Secondly, embodiments of the present invention also provide a vacuum control method for large-size glass plate-level TGV coating, comprising: S100, Pre-processing vacuuming: Open the primary vacuum pump inlet valve, close the secondary vacuum pump inlet valve, and reduce the vacuum level in the vacuum chamber from atmospheric pressure to -60 kPa within 30 to 60 seconds at a pressure drop rate of 0.5 to 1 kPa / s; when the vacuum level in the vacuum chamber is detected to be stable within the range of -60 kPa ± 1 kPa, trigger the timing mechanism and maintain the first preset processing time; wherein, the first preset processing time is determined based on the actual size of the glass plate, the base area, and the pre-processing increment time per unit area; S200, Deep Vacuuming: After the pre-treatment vacuuming is completed and the temperature inside the vacuum chamber is detected to be stable at 25℃±1℃, deep vacuuming is started; the secondary vacuum pump inlet valve is opened to form a series working mode with the primary vacuum pump, and the vacuum regulating valve is turned on to perform gradient pressure increase; the actual target vacuum degree is determined according to the TGV aperture, and the target vacuum degree is maintained for a second preset time after it is reached; wherein, the second preset time is determined according to the thickness of the TGV glass plate.

[0016] Thirdly, embodiments of the present invention also provide a large-size glass plate-level TGV coating vacuum device, comprising: a vacuum tank, an automatic cover opening system, a vacuum pumping pipeline, a vacuum breaking pipeline, a spraying system, a vacuum pump system, and a coating vacuum control system as described in the first aspect.

[0017] This invention has at least the following technical effects: The large-size glass plate-level TGV coating vacuum control system, method, and apparatus provided by this invention adopt a two-stage progressive mode of pre-treatment vacuuming and deep vacuuming, and achieves precise control through closed-loop feedback by detecting the vacuum degree. This can prevent the large-size glass from breaking during the vacuuming process. Furthermore, the pre-treatment time is determined according to the actual size of the glass plate, the base area, and the incremental pre-treatment time per unit area, so that the pressure inside the high aspect ratio hole is kept as consistent as possible with the external pressure, further reducing the risk of breakage. In addition, during the deep vacuuming process, the corresponding actual target vacuum degree is determined according to the hole diameter, and the holding time is determined according to the thickness of the TGV glass substrate after reaching the actual target vacuum degree. This helps to further improve the vacuuming effect in the TGV holes, improve the hole filling efficiency and success rate of the TGV glass substrate, and shorten the conventional hole filling electroplating time. Attached Figure Description

[0018] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0019] Figure 1 A schematic diagram of the structure of a large-size glass plate-level TGV coating vacuum device provided in an embodiment of the present invention; Figure 2 A schematic diagram of the module connection of a large-size glass plate-level TGV coating vacuum control system provided for an embodiment of the present invention; Figure 3 A flowchart of a vacuum control method for large-size glass plate-level TGV coating provided in an embodiment of the present invention.

[0020] In the picture: 1-Vacuum tank; 2-Automatic lid opening system; 3-Vacuum extraction pipeline; 4-Vacuum breaking pipeline; 5-Spray system; 501-Spray tray; 502-Spray pipeline; 503-Manual valve; 504-Pneumatic valve; 505-Spray pump; 10 - Vacuuming module; 20 - Valve control module; 30 - Pressure detection module; 40 - Temperature detection module; 50 - Depth vacuuming control module; 60 - Pre-treatment control module; 70 - Timing module. Detailed Implementation

[0021] The technical solution of the present invention will be clearly and completely described below with reference to the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0022] It will be understood by those skilled in the art that, unless otherwise defined, all terms used herein (including technical and scientific terms) have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. It should also be understood that terms such as those defined in general dictionaries should be understood to have the meaning consistent with their meaning in the context of the prior art, and should not be interpreted in an idealized or overly formal sense unless specifically defined as herein. It will be understood by those skilled in the art that, unless specifically stated otherwise, the singular forms “a,” “an,” “the,” and “the” used herein may also include the plural forms.

[0023] Combination Figure 1 and Figure 2 As shown, this embodiment of the invention provides a large-size glass plate-level TGV coating vacuum device, including: a vacuum tank 1, an automatic cover opening system 2, a vacuum pumping pipeline 3, a vacuum breaking pipeline 4, a spraying system 5, a vacuum pump system, and a coating vacuum control system.

[0024] Specifically, the automatic lid opening system 2 is installed on the vacuum tank 1, and the vacuum pumping pipeline 3 and the vacuum breaking pipeline 4 are respectively connected to the vacuum tank 1. The spray system 5 includes a spray plate 501, a spray pipeline 502, and a spray pump 505 installed on the spray pipeline 502. The vacuum tank 1 is equipped with a spray plate 501, and the spray pipeline 502 is connected to the spray plate 501. Spray control is achieved through the control valve (including a manual valve 503 and a pneumatic valve 504) installed on the spray pipeline 502.

[0025] To ensure the filling quality of large-size TGV glass substrates in the aforementioned TGV coating vacuum device, this invention provides a large-size glass plate-level TGV coating vacuum control system. The size of the large-size glass plate TGV can include an area of ​​0.04m². 2 Preferably, the substrate area (size) of the above-mentioned substrate is 0.04m². 2 ~4m 2 Preferably, 0.26m 2~0.81m 2 Preferably, 0.67m 2 Based on the above area, the length of at least one side of the substrate is 200mm or more, preferably 200mm to 2000mm; specific size models may include (length * width) for example: 510mm*515mm to 850mm*950mm; typically, the size of a 4.5 generation glass product is 730mm*920mm.

[0026] The control system is used to control the vacuum level in the vacuum tank 1, and specifically includes: a vacuum pumping module 10, a pressure detection module 30, a pretreatment control module 60, and a deep vacuum pumping control module 50. Different modules in the control system can be implemented by the same controller or by different controllers. This embodiment does not make a specific limitation on this.

[0027] Specifically, the vacuum module 10 is connected to a vacuum pumping device (e.g., a vacuum pump) to control the start / stop and power of the vacuum pump, thereby adjusting the vacuum level within the vacuum chamber 1. The pressure detection module 30 is located within the vacuum chamber 1 to detect the vacuum level within the chamber, providing a reference for vacuum control. Optionally, in order to implement a two-stage vacuuming process of pre-treatment vacuuming and deep vacuuming, this embodiment of the invention includes a primary vacuum pump and a secondary vacuum pump.

[0028] (1) Pretreatment and vacuuming stage: The pretreatment control module 60 is electrically connected to the vacuum module 10 and the pressure detection module 30. When the vacuum level in the vacuum tank 1 is detected to be stable within the range of -60KPa±1Kpa, the timing mechanism is triggered and the first preset processing time is maintained. The first preset processing time is determined based on the actual size of the glass plate, the base area, and the pretreatment increment time per unit area.

[0029] Optionally, the control system also includes a timing module 70, which is used to measure time-related parameters. After the timing mechanism is triggered, the corresponding timing module 70 starts timing and sends a signal to execute the corresponding instruction action after the timing is completed.

[0030] Optionally, the first preset processing time is determined based on the actual size of the glass plate, the base area, and the incremental preprocessing time per unit area, including: The pretreatment time T is: first basic pretreatment time + (actual area A - basic area k) / 100 * (10~30 s) s); for example, for every additional 100 cm 2 The pretreatment time is extended by 10-30 seconds, and the base area k is 2626.5 cm². 2(Confirm the basic area of ​​the product size using the CCD function); the first basic pre-processing time is 55~65s.

[0031] Optionally, the pretreatment control module 60 further includes a valve control module 20, which is mainly used to control the pressure drop in the vacuum tank 1, control the opening of the primary vacuum pump inlet valve, and control the closing of the secondary vacuum pump inlet valve.

[0032] In one specific embodiment, the vacuum level in vacuum tank 1 is reduced from atmospheric pressure to -60 kPa within 30-60 seconds at a pressure drop rate of 0.5-1 kPa / s. The pressure detection module 30 is used to collect data in real time. When the vacuum level is detected to be stable within the range of -60 kPa ± 1 kPa, a timing mechanism is triggered to maintain a pre-processing time of 60 seconds (first pre-processing time). During this period, the temperature of vacuum tank 1 is monitored by the temperature detection module 40. If the temperature fluctuation exceeds ±2℃, the pre-processing time is automatically extended by 10 seconds. Glass is a poor conductor of heat, and large-size panels are more sensitive to temperature uniformity. Due to the asynchronous thermal expansion and contraction in different areas, additional thermal stress is generated, increasing the risk of breakage. Especially with large temperature fluctuations, the small aperture and high aspect ratio of the 4.5 generation glass-grade TGV through-holes exacerbate the temperature difference between the inside and outside of the holes. Under vacuum conditions, the possibility of breakage is more likely. By extending the pre-processing time according to temperature fluctuations, the impact of temperature fluctuations on the risk of breakage under vacuum conditions can be reduced.

[0033] (2) Deep vacuuming stage: The control module is electrically connected to the vacuum module 10 and the pressure detection module 30, and is used to determine the actual target vacuum level according to the TGV aperture, and maintain it for a second preset time after the actual target vacuum level is reached; wherein, the second preset time is determined according to the thickness of the TGV glass substrate.

[0034] It should be noted that the deep vacuuming stage is initiated when the pretreatment stage is completed and the cavity temperature stabilizes at 25℃±1℃.

[0035] Specifically, the temperature detection module 40 is electrically connected to the deep vacuum control module 50, and is used to start deep vacuuming after the pretreatment stage is completed and the temperature in the vacuum tank 1 is detected to be stable at 25℃±1℃.

[0036] Optionally, the actual target vacuum level is determined based on the TGV aperture, including: When the TGV aperture is ≤40μm, the target vacuum degree is -85KPa to -90KPa, and the actual target vacuum degree = -(absolute value of target vacuum degree + (40μm - TGV aperture) / (1~5μm) * (0.5~1Kpa). When the TGV aperture is greater than 40 μm, the target vacuum level is -80 kPa to -85 kPa, and the actual target vacuum level is equal to -(absolute value of target vacuum level - (TGV aperture - 40 μm) / (1~5 μm) * (0.5~1 kPa).

[0037] It should be noted that the aspect ratio of the large-size glass-grade TGV holes described in this embodiment of the invention is in the range of 11:1 to 60:1. Due to the low overall rigidity of large-size panels, if the vacuum is drawn too quickly, a severe pressure gradient will be generated within the substrate plane. Different areas will experience different pressure differences due to the different gas escape rates, leading to an increased risk of instantaneous bending or twisting of the substrate. Macroscopic deformation will concentrate stress in weak areas such as edges and hole clusters, increasing the risk of breakage. At the same time, the small aperture and high aspect ratio of large-size TGV glass holes make it difficult for gas to escape from deeper parts of the holes. The large pressure difference increases the risk of inducing defects within the holes or exacerbating existing defects. Therefore, by slowly reducing the pressure, the gas is discharged relatively evenly and smoothly from all parts of the panel, which is beneficial for uniform pressure under large sizes and helps reduce the risk of breakage caused by asynchronous pressure differences.

[0038] Furthermore, TGV glass, especially 4.5 generation TGV glass, has a smaller aperture and a higher depth-to-width ratio. Due to the deeper and smaller through-holes, it is more difficult to achieve uniform pressure inside and outside the hole. This results in a significant delay in aligning the pressure inside and outside the hole. The pressure difference will exert more additional tensile stress on the hole wall, making it prone to cracking. Maintaining sufficient pretreatment time for pressure stabilization helps to achieve uniform pressure inside and outside the hole, reducing the risk of breakage.

[0039] Furthermore, the pretreatment time is controlled according to the glass area, thereby determining the pressure equalization time based on the area of ​​the glass substrate. This is more conducive to reducing the risk of breakage in 4.5 generation TGV glass, which has small apertures and high aspect ratios. Due to the deeper and smaller apertures, it is difficult to achieve uniform pressure inside and outside the apertures. By adaptively adjusting the pressure equalization time based on the glass area, the risk of breakage can be reduced.

[0040] The vacuum system of this invention adopts a two-stage progressive mode of pre-treatment vacuuming and deep vacuuming, and achieves precise control through closed-loop feedback by detecting the vacuum degree. This can prevent large-size glass from breaking during the vacuuming process. The pre-treatment time is determined according to the actual size of the glass plate, the base area, and the incremental pre-treatment time per unit area, so that the pressure inside the high aspect ratio hole is kept as consistent as possible with the external pressure, further reducing the risk of breakage. In addition, during the deep vacuuming process, the corresponding actual target vacuum degree is determined according to the hole diameter, and the holding time is determined according to the thickness of the TGV hole after the target vacuum degree is reached. This helps to further improve the vacuuming effect in the TGV hole, improve the hole filling efficiency and success rate of the TGV glass substrate, and shorten the conventional hole filling electroplating time.

[0041] In some embodiments, after deep vacuuming, once the actual target vacuum level is detected and maintained for a second preset time, the vacuum level is calibrated every third preset time interval. If the deviation exceeds ±1 kPa, further pressurization is required to maintain the target vacuum level. Controlling the vacuum level according to the orifice diameter facilitates the deep expulsion of gas from the orifice, reducing the possibility of residue. Vacuum level deviation leads to increased gas residue in orifices with high aspect ratios, resulting in "core entrapment" and incomplete filling. Maintaining a small vacuum level deviation can further reduce the occurrence of problems such as "core entrapment" and incomplete filling.

[0042] Optionally, the second preset time is 160s~200s, and the third preset time is 25s~35s.

[0043] Optionally, the large-size glass plate-level TGV coating vacuum control system further includes a gas detection module; the gas detection module is used to detect the gas concentration in the vacuum chamber 1. After approaching the target vacuum level (at the end of the deep vacuuming stage), the gas detection module is controlled to detect the residual gas concentration. When the residual gas concentration is ≤10ppm, the deep vacuuming is deemed qualified.

[0044] It is understood that the vacuum adjustment accuracy in the embodiments of the present invention is ±1KPa, the deep gas driving time is 180s, and the residual gas concentration is ≤10ppm.

[0045] Based on the same inventive concept, such as Figure 3 As shown, this embodiment of the invention also provides a vacuum control method for large-size glass plate-level TGV coating, including: S100, Pre-processing vacuuming: Open the primary vacuum pump inlet valve, close the secondary vacuum pump inlet valve, and reduce the vacuum level in the vacuum tank 1 from atmospheric pressure to -60KPa within 30~60S at a pressure drop rate of 0.5~1KPa / s; when the vacuum level in the vacuum tank 1 is detected to be stable within the range of -60KPa±1Kpa, trigger the timing mechanism and maintain the first preset processing time; wherein, the first preset processing time is determined according to the actual size of the glass plate, the base area, and the pre-processing increment time per unit area.

[0046] S200, Deep Vacuuming: After the pre-treatment vacuuming is completed and the temperature in the vacuum tank 1 is detected to be stable at 25℃±1℃, deep vacuuming is started; the secondary vacuum pump inlet valve is opened to form a series working mode with the primary vacuum pump, and the vacuum regulating valve is turned on to perform gradient pressure increase; the actual target vacuum degree is determined according to the TGV aperture, and the target vacuum degree is maintained for a second preset time after it is reached; wherein, the second preset time is determined according to the thickness of the TGV glass substrate.

[0047] The vacuum control system and method for large-size glass plate TGV coating provided in this invention, by setting a pressure detection module 30 in the vacuum tank 1 and working with the vacuum pumping module 10, can accurately and stably control the pressure in the vacuum tank, thereby achieving a pressure deviation of ≤±1kPa for large-size glass panels. This avoids problems such as "insufficient pressure in the edge area, incomplete gas expulsion in the through holes" and blockage of pipelines by product fragments. At the same time, gradient vacuuming (pressure drop rate as low as 1kPa / s) is adopted, combined with precise control of final pressure holding (±1kPa), thereby avoiding the risk of warping and cracking of large-size glass due to sudden pressure changes, and improving the vacuuming effect in the holes of large-size glass plate TGV coating, which is beneficial to improving the yield of subsequent hole filling electroplating.

[0048] Those skilled in the art will understand that the steps, measures, and schemes in the various operations, methods, and processes discussed in this invention can be alternated, modified, combined, or deleted. Furthermore, other steps, measures, and schemes in the various operations, methods, and processes discussed in this invention can also be alternated, modified, rearranged, decomposed, combined, or deleted. Furthermore, steps, measures, and schemes in the prior art that are similar to those disclosed in this invention can also be alternated, modified, rearranged, decomposed, combined, or deleted.

[0049] In the description of this invention, it should be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0050] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0051] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal communication between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0052] In the description of this specification, specific features, structures, materials, or characteristics may be combined in any suitable manner in one or more embodiments or examples.

[0053] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A large-size glass plate-level TGV coating vacuum control system for controlling the vacuum level in a vacuum tank, characterized in that, include: A vacuum module is used to connect to a vacuum pumping device and to adjust the vacuum level in the vacuum tank. A pressure detection module, used to detect the vacuum level inside the vacuum chamber; A pre-processing control module, electrically connected to the vacuuming module and the pressure detection module, is used to trigger a timing mechanism and maintain a first preset processing time when the vacuum level in the vacuum tank is detected to be stable within the range of -60KPa±1Kpa; wherein, the first preset processing time is determined based on the actual size of the glass plate, the base area, and the pre-processing increment time per unit area. A deep vacuum control module, electrically connected to the vacuum module and the pressure detection module, is used to determine the actual target vacuum level based on the TGV aperture, and maintain the target vacuum level for a second preset time after it is reached; wherein the second preset time is determined based on the thickness of the TGV glass substrate.

2. The large-size glass plate-level TGV coating vacuum control system according to claim 1, characterized in that, The first preset processing time is determined based on the actual size of the glass plate, the base area, and the incremental pre-processing time per unit area, including: The first preset processing time T is: First basic pre-processing time + (Actual area A - Basic area k) / 100cm 2 *(10~30s)); where the base area k is 2626.5cm². 2 The first basic preprocessing time is 55-65 seconds.

3. The large-size glass plate-level TGV coating vacuum control system according to claim 1, characterized in that, The second preset time is determined based on the thickness of the TGV glass substrate, including: the second pretreatment time T1 is: the second basic pretreatment time + (actual thickness - reference thickness) / 0.5 * (60~65); the thickness of the TGV glass substrate is greater than 0.5mm, and the second basic pretreatment time is 175~185s.

4. The large-size glass plate-level TGV coating vacuum control system according to claim 1, characterized in that, If the thickness of the TGV glass substrate is less than or equal to 0.5 mm, the depth vacuum control module will not be activated.

5. The large-size glass plate-level TGV coating vacuum control system according to claim 1, characterized in that, Determining the actual target vacuum level based on the TGV aperture includes: When the TGV aperture is ≤40μm, the target vacuum degree is -85KPa to -90KPa, and the actual target vacuum degree = -(absolute value of target vacuum degree + (40μm - TGV aperture) / (1~5μm) * (0.5~1Kpa). When the TGV aperture is greater than 40 μm, the target vacuum level is -80 kPa to -85 kPa, and the actual target vacuum level is equal to -(absolute value of target vacuum level - (TGV aperture - 40 μm) / (1~5 μm) * (0.5~1 kPa).

6. The large-size glass plate-level TGV coating vacuum control system according to claim 1, characterized in that, It also includes a temperature detection module for obtaining the temperature inside the vacuum chamber; The temperature detection module is electrically connected to the deep vacuum control module and is used to start deep vacuuming after the pretreatment stage is completed and the temperature in the vacuum tank is detected to be stable at 25℃±1℃.

7. The large-size glass plate-level TGV coating vacuum control system according to claim 6, characterized in that, The pretreatment control module further includes: a valve control module; The valve control module is used to control the opening of the primary vacuum pump inlet valve and the closing of the secondary vacuum pump inlet valve, and to reduce the vacuum level in the vacuum chamber from atmospheric pressure to -60 kPa within 30 to 60 seconds at a pressure drop rate of 0.5 to 1 kPa / s. The pressure detection module is used to collect data in real time. When the vacuum degree is stable within the range of -60KPa±1KPa, the timing mechanism is triggered to maintain the first preset processing time. During this period, the temperature of the vacuum chamber is monitored by the temperature detection module. If the temperature fluctuation exceeds ±2℃, the preprocessing time is automatically extended by 5-10s.

8. The large-size glass plate-level TGV coating vacuum control system according to claim 6, characterized in that, After reaching the actual target vacuum level, maintain it for a second preset time, and perform vacuum level calibration every third preset time interval. If the deviation exceeds ±1KPa, further pressure needs to be added to maintain the actual target vacuum level.

9. The large-size glass plate-level TGV coating vacuum control system according to claim 1, characterized in that, It also includes: a gas detection module; the gas detection module is used to detect the gas concentration in the vacuum chamber; After approaching the target vacuum level, the gas detection module is controlled to detect the residual gas concentration. When the residual gas concentration is ≤10ppm, the deep vacuum is deemed qualified.

10. A vacuum control method for large-size glass plate-level TGV coating, characterized in that, include: S100, Pre-processing vacuuming: Open the primary vacuum pump inlet valve, close the secondary vacuum pump inlet valve, and reduce the vacuum level in the vacuum chamber from atmospheric pressure to -60 kPa within 30 to 60 seconds at a pressure drop rate of 0.5 to 1 kPa / s; when the vacuum level in the vacuum chamber is detected to be stable within the range of -60 kPa ± 1 kPa, trigger the timing mechanism and maintain the first preset processing time; wherein, the first preset processing time is determined based on the actual size of the glass plate, the base area, and the pre-processing increment time per unit area; S200, Deep Vacuuming: After the pre-treatment vacuuming is completed and the temperature in the vacuum chamber is detected to be stable at 25℃±1℃, deep vacuuming is started; the secondary vacuum pump inlet valve is opened to form a series working mode with the primary vacuum pump, and the vacuum regulating valve is turned on to perform gradient pressure increase; the actual target vacuum degree is determined according to the TGV aperture, and the actual target vacuum degree is maintained for a second preset time after reaching it; wherein, the second preset time is determined according to the thickness of the TGV glass substrate.

11. A large-size glass plate-level TGV coating vacuum device, characterized in that, include: Vacuum bath, automatic lid opening system, vacuum pumping pipeline, vacuum breaking pipeline, spraying system, vacuum pump system, and coating vacuum control system as described in any one of claims 1-9.

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