A shock detection device for a cylinder of a semiconductor device

Abstract

This invention discloses a vibration detection device for cylinders in semiconductor equipment, relating to the field of semiconductor equipment testing technology. The device includes a frame and a posture adjustment assembly mounted on the frame for adjusting the spatial test posture of the cylinder under test. This assembly includes a tilt adjustment mechanism and an azimuth adjustment mechanism, used to adjust the pitch angle and horizontal azimuth angle of the cylinder under test, respectively. A cylinder clamping assembly is also included for fixing the cylinder body of the cylinder under test. This invention, by constructing a spatial posture adjustment architecture integrating both tilt and azimuth adjustment mechanisms, endows the testing platform with the ability to reproduce the directional coordinates of the entire spatial domain. This structure enables the cylinder under test to fully simulate its actual service postures, such as tilting, side suspension, or inversion, under set test conditions, thereby reflecting the local wear and friction waveform characteristics of the internal components of the cylinder caused by gravity under the corresponding gravity offset component.

Description

Technical Field

[0001] This invention relates to the field of semiconductor equipment testing technology, and more specifically to a vibration detection device for a cylinder in a semiconductor device. Background Technology

[0002] In semiconductor manufacturing equipment (such as lithography machines, vapor deposition equipment, or wafer transfer modules), cylinders are widely used to drive various process actuators. Because the process has strict preset standards for cleanroom environment and smoothness of micro-movements, micro-particle contamination and movement lag caused by minor wear of guide components or seals inside the cylinder can directly interfere with the positioning accuracy of the wafer. Therefore, it is necessary to closely monitor and evaluate the friction and vibration state during its operation.

[0003] In the prior art, the factory calibration or offline testing of the health status of such cylinders is usually carried out using a fixed test bench arranged horizontally or vertically. The specific testing process is as follows: the cylinder to be tested is rigidly locked on the test bench of the fixed plane, and a constant or alternating resistance is applied to the cylinder piston rod by a tension and compression loading mechanism arranged in a single axis direction; then, the friction operation waveform when the cylinder performs reciprocating extension and retraction movements under the fixed reference posture is extracted using a vibration sensor.

[0004] However, existing testing equipment cannot reflect the actual operating conditions of semiconductor equipment, and the test results lack objectivity. Specifically, the internal space of semiconductor equipment is compact, and cylinders are often installed at specific composite spatial angles. Due to the limited freedom of spatial attitude adjustment (limited to two-dimensional static placement in horizontal or vertical directions), existing technologies cannot reproduce the local unilateral wear interference phenomenon of internal components induced by changes in the gravity component vector when cylinders are installed at different tilt angles and horizontal orientations inside complex equipment. This mechanical limitation results in the friction vibration waveform characteristics obtained under a single fixed posture having a lower fit with the vibration spectrum generated under the actual complex assembly conditions of the cylinder than the preset evaluation standard, leading to insufficient objectivity of the test baseline data. Summary of the Invention

[0005] The purpose of this invention is to provide a vibration detection device for a cylinder in a semiconductor device, so as to solve the problems mentioned in the background art.

[0006] To solve the above-mentioned technical problems, the technical solution adopted by the present invention is as follows: A vibration detection device for a cylinder in a semiconductor device includes a frame; it further includes: a posture adjustment assembly, mounted on the frame, for adjusting the spatial test posture of the cylinder under test, including a tilt adjustment mechanism and an azimuth adjustment mechanism, for adjusting the pitch angle and horizontal azimuth angle of the cylinder under test, respectively; a cylinder clamping assembly, mounted on the azimuth adjustment mechanism, for fixing the cylinder body of the cylinder under test; a load simulation assembly, mounted on the tilt adjustment mechanism, the movable end of which is connected to the piston rod of the cylinder under test via a rotary joint, for applying a resistance load to the piston rod; and a vibration detection module, mounted on the azimuth adjustment mechanism, for collecting the mechanical vibration signal transmitted when the cylinder under test moves; the tilt adjustment mechanism includes a support arm mounted on the frame and a tilt drive assembly for driving the support arm to deflect, and the azimuth adjustment mechanism is mounted on the support arm.

[0007] By employing the above technical solution and setting up a posture adjustment component consisting of a tilt adjustment mechanism and an azimuth adjustment mechanism, the composite coordinate adjustment of the cylinder's pitch angle and horizontal azimuth angle in three-dimensional space is achieved. The tilt adjustment mechanism uses a tilt drive component to drive the support arm to tilt, and the acquired vibration detection signal includes the offset interference characteristics of gravity in different spatial dimensions. Since the moving end of the load simulation component is connected to the piston rod through a rotating joint, the circumferential rotational stress generated by the cylinder under test during azimuth angle adjustment can be physically released, eliminating the mechanical interference caused by horizontal rotation, ensuring the mechanical decoupling of load loading and posture adjustment, and resulting in more objective vibration baseline data.

[0008] Furthermore, since the above scheme uses a posture adjustment component to simulate the working environment of the cylinder under test, the cylinder under test cannot be directly connected to the frame. If the support arm adopts a single-sided cantilever connection structure, when the support arm drives the cylinder to tilt, the overall physical center of gravity of the system deviates from the rotation axis at the bottom of the cantilever, which increases the lever arm generated by the gravity offset, and thus inputs an alternating overturning moment to the frame. Under the dynamic impact of the cylinder under test, this overturning moment amplifies the low-frequency flexural deformation and vibration of the test platform body, interfering with the vibration detection signal.

[0009] A further improvement to the technical solution of this invention is that: the tilt adjustment mechanism further includes two uprights, which are arranged at a distance from each other on the top of the frame; the support arm is configured as a U-shaped cradle structure, with its two ends rotatably connected to the two uprights respectively, and the rotation axes of the two rotatably connected points are collinear; the tilt drive assembly includes a transmission box fixedly installed on one of the uprights, with a worm gear rotatably connected inside the transmission box, the central axis of the worm gear extending to the outside of the transmission box and fixedly connected to one end of the support arm; a worm gear meshing with the worm gear is rotatably connected inside the transmission box; a tilt motor is fixedly installed outside the transmission box, with the output end of the tilt motor extending to the inside of the transmission box and connected to the worm gear. The physical center of gravity of the cylinder under test and the cylinder clamping assembly is configured to be located on the rotation axis of the support arm.

[0010] By adopting the above technical solution, the single-sided cantilever force-bearing mode is transformed into a double-end simply supported force-bearing mode. Through the design of a U-shaped cradle structure and the forced collinearity of the overall physical center of gravity and the pitch and rotation axis, the gravity vector always penetrates the support axis when the cylinder under test switches between any tilt angle within the 0-90° range. This eliminates the additional lever arm caused by gravity offset from a physical structure perspective, limiting the boundary of overturning moment generation. At the same time, utilizing the mechanical self-locking characteristics exhibited by the worm gear structure, the mechanical transmission stiffness in the locked test state is greater than that of a conventional direct-drive motor brake structure. The overall bending stiffness and static torsional section modulus of the mechanism are greater than those of a cantilever platform, the signal-to-noise ratio of the extracted seismic wave signal is better than that of a non-collinear structure, and the interference vibration introduced by frame deformation is less than that of a single-sided cantilever structure test platform.

[0011] Furthermore, if the vibration detection module is fixed to the frame and remains stationary, the relative measurement point positions of the detection module and the cylinder surface will drift spatially as the horizontal azimuth angle of the cylinder under test changes, making it difficult to maintain a consistent spatial detection benchmark. At the same time, if the cylinder and the follow-up detection module are stacked on the same side, the increased module mass will generate an asymmetrical static unbalanced force on the horizontal rotation axis, making the end of the rotating arm prone to micro-deflection and interfering with the purity of the high-frequency vibration signal.

[0012] A further improvement of the technical solution of the present invention is that: the orientation adjustment mechanism includes a support frame fixedly connected to the center of the support arm, the support frame is a hollow cylindrical structure, an orientation motor is fixedly installed at the bottom of the support frame, the output end of the orientation motor extends to the top of the support frame and is fixedly connected to a rotating arm, a cylinder clamping assembly is fixedly installed on one side of the top of the rotating arm; a mounting plate is fixedly connected to the side of the rotating arm away from the cylinder clamping assembly, and a vibration detection module is fixedly connected to the mounting plate.

[0013] By adopting the above technical solution, the vibration detection module mounting plate is indirectly rigidly connected to the rotating arm, forming a coaxial follow-up relationship with the cylinder under test. This ensures that the physical contact point or observation angle of the detection module for extracting signals remains unchanged relative to the surface of the cylinder under test under any horizontal azimuth angle switching, and the consistency of its test boundary conditions is greater than that of the static detection platform. Furthermore, by arranging the cylinder clamping assembly and the mounting plate of the bearing vibration detection module on both sides of the rotation center of the rotating arm, a lever-type symmetrical counterweight arrangement is formed in terms of physical structure. This opposing structure uses the mass of the detection module and the mounting plate itself to compensate for part of the static unbalanced torque at the cylinder end, so that the mass eccentricity of the rotating arm during operation and locking pressure holding is smaller than that of the same-side stacked structure. Its mechanical stability after dynamic adjustment is better than that of the asymmetrical cantilever structure, reducing the interference of the frame's own vibration on the actual friction waveform of the cylinder body.

[0014] Furthermore, if the load simulation component only uses a fixed mass traction counterweight structure, it shows that it cannot reproduce the defect of the semiconductor equipment cylinder grabbing workpieces of different specifications (such as wafers or carriers of different sizes) in actual working conditions; at the same time, if multiple counterweights are directly and freely stacked at the bearing end to achieve variable load, when the cylinder is subjected to high-frequency reciprocating extension and retraction test, the freely stacked counterweights are prone to axial micro bounce and metal impact.

[0015] A further improvement of the technical solution of the present invention is that: the load simulation component includes a fixed plate, which is fixedly connected between the two sides of the inner wall of the support arm; a slide rail is fixedly connected to the top of the fixed plate, a follower slider is slidably connected to the slide rail, an L-shaped plate is fixedly connected to one side of the follower slider, a weight rod is fixedly connected to the top of the L-shaped plate, and a counterweight is placed on the weight rod; a strip groove is opened on the side wall of the L-shaped plate, a clamping screw is rotatably connected inside the strip groove, a clamping slider is threadedly connected to the outside of the clamping screw, the clamping slider is slidably connected to the strip groove, and a pressure ring is fixedly connected to the side of the clamping slider near the weight rod.

[0016] By adopting the above technical solution, through the linear guidance of the follower slider and the slide rail, and by adding or removing counterweights of different masses on the weight rod, the device can output equivalent resistance loads of various gradients according to the test requirements. Its simulation coverage of variable load conditions is greater than that of the constant mass load mechanism. Furthermore, by rotating the clamping screw to drive the clamping slider to undergo mechanical displacement, the connected pressure ring applies axial preload to the counterweight from top to bottom, rigidly locking the counterweight in a discrete state to the L-shaped plate. This mechanical interlocking structure suppresses the bouncing and collision of the counterweight under the inertial impact of the cylinder, ensuring the purity of the shock wave data under variable load testing.

[0017] Furthermore, when the cylinder under test is adjusting its horizontal azimuth angle, its piston rod will rotate circumferentially, while the counterweight on the linear slide rail does not have rotational freedom. If a rigid direct connection is used, the cylinder's rotation will introduce uncontrollable torsional stress into the piston rod. In addition, the diameter of the piston rod thread varies for different specifications of semiconductor cylinders. When changing different cylinders under test, the traditional threaded direct connection method requires disassembling and replacing the entire transmission chain structure.

[0018] A further improvement of the technical solution of the present invention is as follows: an adapter rod is rotatably connected to the end of the L-shaped plate, a through hole is provided on the fixed plate for the adapter rod to pass through, and a mounting base is fixedly connected to the end of the adapter rod away from the L-shaped plate; a bidirectional screw is rotatably connected inside the mounting base, and two connecting sliders are symmetrically threaded to the outside of the bidirectional screw. The connecting sliders are slidably connected to the mounting base, and a mating seat is fixedly connected to the side of each of the two connecting sliders. A half-groove is provided on the side of each of the two mating seats that are close to each other, and the two half-grooves together form a cylindrical groove; a mating block is placed inside the cylindrical groove, and a mating screw hole is provided in the middle of the mating block.

[0019] By employing the above technical solution, the rotating connection structure between the adapter rod and the L-shaped plate allows the front-end transmission assembly, consisting of the cylinder under test and the adapter rod, to rotate freely relative to the L-shaped plate. This structure physically isolates the rotational interference force caused by cylinder position adjustment, ensuring that the pure axial resistance load extracted from the piston rod during reciprocating motion testing is unaffected by torque. Furthermore, by driving two docking seats with a bidirectional screw to achieve clamping or loosening, docking blocks with docking screw holes of different diameters can be quickly replaced. This modular clamping structure limits the replacement range to independent cylindrical docking blocks, avoids the disassembly of the entire load assembly, and improves operating efficiency.

[0020] A further improvement of the technical solution of the present invention is that: the cylinder clamping assembly includes a fixed base fixedly connected to the rotating arm and a clamp seat set on the fixed base. The clamp seat is rotatably connected to a bidirectional adjusting screw. The bidirectional adjusting screw is symmetrically threaded to two chucks on the outside. A V-shaped positioning groove is opened on the side of the two chucks that are close to each other.

[0021] By adopting the above technical solution, the mechanical synchronous transmission characteristics generated by the positive and negative thread sections of the bidirectional adjusting screw are used to drive the two chucks to produce equidistant opposite or opposite movements. Combined with the symmetrical tangential geometric constraints applied to the outer wall of the cylindrical cylinder by the V-shaped positioning grooves on the inner side of the two chucks, automatic mechanical alignment of cylinders of different models is realized. This interlocking structure forcibly locks the geometric center line of cylinders with different outer diameter specifications on the theoretical reference axis of the test platform, eliminating the radial shear stress of the piston rod caused by clamping eccentricity from a physical level.

[0022] Furthermore, in the above-mentioned technical solution of the orientation adjustment mechanism, since the horizontal orientation angle locking of the rotating arm and cylinder clamping assembly relies solely on the meshing force of the electromagnetic brake or reduction gear pair inside the orientation motor for pressure maintenance, in the locked state, there is inevitably a microscopic gear meshing backlash or electromagnetic creep in the electromagnetic transmission chain. When the cylinder under test performs a high-frequency reciprocating axial extension test, this mechanical backlash is easily induced to generate microscopic circumferential torsional oscillations in the rotating arm and clamping assembly under the impact of alternating inertial load.

[0023] A further improvement of the technical solution of the present invention is that a locking cylinder is fixedly connected to the side of the fixed base away from the support frame, the piston rod of the locking cylinder extends to the other side of the fixed base and is fixedly connected to a locking block, and the locking block abuts against the support frame.

[0024] By adopting the above technical solution, an auxiliary rigid locking mechanism independent of the azimuth motor drive chain is introduced. The strong frictional contact between the locking block and the stationary support frame transforms the original single-point cantilever limit of the motor into an external friction lock. This completely bypasses and locks the mechanical backlash of the motor reducer from a physical perspective. Its torsional stiffness in the locked state is greater than that of a single motor brake structure, effectively suppressing the micro-torsional vibration induced by alternating loads. This makes the system's underlying mechanical disturbance rejection better than that of a pure motor positioning mechanism.

[0025] Furthermore, if the rotation limit of the adjustment mechanism is too small (e.g., the adjustment range is less than 180°), it cannot fully reproduce the omnidirectional inverted or side-suspended assembly posture of the cylinder inside the semiconductor device; if the posture adjustment mechanism adopts a continuous rotation design without mechanical limits (i.e., unidirectional rotation greater than 360°), the signal harness of the cylinder air pipe and vibration detection module arranged at the moving end must be transmitted through a rotary joint or conductive slip ring and other transfer mediums, which has the defect of mixing uncontrollable background electrical noise into the real piezoelectric vibration signal.

[0026] A further improvement of the technical solution of the present invention is that the pitch adjustment range of the tilt adjustment mechanism and the horizontal rotation range of the azimuth adjustment mechanism are both configured as a continuously adjustable range from -180° to +180° based on a preset calibration zero position.

[0027] By adopting the above technical solution, the reciprocating controlled stroke physically blocks the interference of wire harness entanglement caused by unidirectional infinite rotation. The stroke limitation allows the high-frequency transmission coaxial cable of the vibration detection module to be directly routed across the system using a flexible drag chain, eliminating the conductive slip ring transfer structure that is prone to generating noise. It reduces the risk of mechanical inertia runaway of the test platform. When the cylinder carries an asymmetrical heavy-duty fixture seat to perform large-angle attitude switching, the ±180° software and mechanical dual hard limit can avoid structural interference and pipeline tearing caused by over-adjustment.

[0028] By adopting the above technical solution, the technical effects achieved by this invention compared to the prior art are as follows: 1. This invention provides a vibration detection device for cylinders in semiconductor equipment. By constructing a spatial pose adjustment architecture that integrates tilt and orientation adjustment mechanisms, the test platform is endowed with the ability to reproduce the directional coordinates of the entire spatial domain. This structure enables the cylinder under test to fully simulate the composite assembly postures such as tilt, side suspension or inversion during its actual service under the set test conditions, thereby reflecting the local wear and friction waveform characteristics of the internal components of the cylinder caused by gravity under the corresponding gravity offset component.

[0029] 2. This invention provides a vibration detection device for a cylinder in a semiconductor device. By employing a U-shaped support arm structure and ensuring that the rotation axis of the tilting motor passes through the physical center of gravity of the system, a collinear support system without eccentricity is established in spatial mechanics. This support system cuts off the physical path of alternating overturning torque transmitted from gravity offset to the support mechanism, eliminating the microscopic bending deformation caused by off-center loading during variable angle testing. This shields the reverse transmission of external low-frequency vibration noise to the cylinder measuring point, ensuring the fidelity of the high-frequency piezoelectric detection signal.

[0030] 3. This invention provides a vibration detection device for cylinders in semiconductor equipment. It utilizes cylinder clamping assemblies arranged on both sides of the rotation center of a rotating arm and a mounting plate to form a lever-type counterweight structure. The module's own mass compensates for the static unbalanced torque generated by horizontal orientation adjustment, eliminating micro-mechanical oscillations at the cantilever end. Simultaneously, the vibration detection module and the cylinder under test are arranged in the same rotational reference system to form a coaxial follow-up relationship, rigidly locking the relative spatial coordinate vector between the sensor and the measuring point surface. This prevents measuring point slippage during azimuth angle switching and ensures the consistency of boundary conditions for all-around azimuth calibration data.

[0031] 4. This invention provides a vibration detection device for a cylinder in a semiconductor device. Utilizing the synchronous reverse displacement characteristics of a bidirectional adjusting screw, and combining the symmetrical tangential and normal thrust applied to the outer wall of the cylindrical cylinder by the V-shaped positioning grooves on the inner sides of the two clamps, a mechanical automatic centering structure is constructed that is not limited by the cylinder's outer diameter. This clamping mechanism forcibly constrains and locks the geometric center axis of semiconductor cylinders of different specifications onto the system's preset theoretical loading baseline, eliminating the radial shear stress on the piston rod caused by misaligned assembly from a physical source, thus ensuring the coaxiality of the frictional resistance loading process.

[0032] 5. This invention provides a vibration detection device for a semiconductor equipment cylinder. By configuring flexibly increaseable and decreaseable counterweights on a linear guide assembly, it achieves a stepwise simulation of the equivalent resistance load of the semiconductor cylinder when gripping workpieces of different sizes. Combined with an axial pre-tightening locking mechanism driven by a clamping screw, continuous downward pressure is applied to the stacked counterweights, physically integrating them into a gapless rigid body. This suppresses the microscopic bouncing of the counterweights and metal collisions caused by the cylinder performing high-frequency alternating expansion and contraction, cutting off the transmission and contamination of mechanical impact noise into the detection baseline signal. Attached Figure Description

[0033] The invention will now be further described with reference to the accompanying drawings.

[0034] Figure 1 This is a three-dimensional structural diagram of the entire invention; Figure 2 This is a three-dimensional structural diagram of the internal structure of the device of the present invention; Figure 3 This is a schematic diagram of the pose adjustment component of the present invention; Figure 4 This is a partial three-dimensional structural diagram of the cylinder clamping assembly and vibration detection module of the present invention. Figure 5 This is a schematic diagram of the cylinder clamping assembly and orientation adjustment mechanism of the present invention; Figure 6 This is a schematic diagram of the load simulation component of the present invention; Figure 7 This is a schematic diagram showing the disassembled structure of the connection between the cylinder under test and the load simulation component in this invention.

[0035] In the diagram: 1. Frame; 2. Vibration detection module; 3. Posture adjustment component; 30. Tilt adjustment mechanism; 301. Stand; 302. Worm gear; 303. Worm wheel; 304. Tilt motor; 305. Support arm; 306. Transmission box; 31. Orientation adjustment mechanism; 311. Support frame; 312. Orientation motor; 313. Rotating arm; 4. Load simulation component; 401. Fixed plate; 402. Slide rail; 403. Follower slider; 404. L-shaped plate; 405. Weight rod; 406. Strip groove; 407. Clamping screw; 408. Clamping slider; 409. Pressure ring; 410. Counterweight; 411. Through hole; 501. Adapter rod; 502. Mounting base; 503. Bidirectional screw; 504. Connecting slider; 505. Docking seat; 506. Half groove; 507. Docking block; 508. Docking screw hole; 6. Cylinder clamping assembly; 601. Fixed base; 602. Clamping seat; 603. Bidirectional adjusting screw; 604. Chuck; 701. Locking cylinder; 702. Locking block; 8. Mounting plate. Detailed Implementation

[0036] The present invention will be further described in detail below with reference to the embodiments.

[0037] Example 1 like Figures 1-7 As shown, the present invention provides a vibration detection device for a cylinder in a semiconductor device, including a frame 1; further comprising: a posture adjustment assembly 3, disposed on the frame 1, for adjusting the spatial test posture of the cylinder under test, including a tilt adjustment mechanism 30 and an azimuth adjustment mechanism 31, for adjusting the pitch angle and horizontal azimuth angle of the cylinder under test, respectively; a cylinder clamping assembly 6, mounted on the azimuth adjustment mechanism 31, for fixing the cylinder body of the cylinder under test; a load simulation assembly 4, disposed on the tilt adjustment mechanism 30, the movable end of which is connected to the piston rod of the cylinder under test through a rotating joint, for applying a resistance load to the piston rod; a vibration detection module 2, disposed on the azimuth adjustment mechanism 31, for collecting the mechanical vibration signal generated when the cylinder under test moves; the tilt adjustment mechanism 30 includes a support arm 305 disposed on the frame 1 and a tilt drive assembly for driving the support arm 305 to deflect, and the azimuth adjustment mechanism 31 is mounted on the support arm 305.

[0038] In this embodiment, by setting up a pose adjustment component 3 consisting of a tilt adjustment mechanism 30 and an azimuth adjustment mechanism 31, the composite coordinate adjustment of the cylinder's pitch angle and horizontal azimuth angle in three-dimensional space is realized. The tilt adjustment mechanism 30 uses the tilt drive component to drive the support arm 305 to tilt and deflect. The vibration detection signal it acquires includes the offset interference characteristics of gravity in different spatial dimensions. Its coverage of the actual working conditions of the equipment is better than that of a single-degree-of-freedom test bench, and the acquired vibration baseline data has higher objectivity.

[0039] Its specific working principle and operating status are as follows: Before conducting the cylinder calibration test, the spatial posture is simulated and adjusted. The control system sends a target tilt angle pulse signal to the tilt drive component. The output of the tilt motor 304 drives the worm 302 inside the transmission box 306 to rotate. Since the worm 302 and the worm wheel 303 mesh with each other, the rotation of the worm 302 drives the worm wheel 303 to perform a decelerating rotary motion. The support arm 305, which is fixedly connected to the central shaft of the worm wheel 303, tilts accordingly, thereby driving the orientation adjustment mechanism 31 and the cylinder under test installed on it to adjust to the preset tilt angle. This worm wheel 303 and worm 302 transmission process not only amplifies the output torque of the motor, but more importantly, when the tilt motor 304 is powered off or stops outputting, the physical self-locking characteristics of the worm wheel 303 and worm 302 are used to keep the support arm 305 stably suspended. Its position locking state does not require the motor to continuously apply electromagnetic pressure holding torque, thereby shielding the signal pollution caused by the high-frequency electromagnetic oscillation of the motor, and making the low-frequency mechanical environment background noise transmitted from the test platform to the cylinder less than that of the electromagnetic direct drive holding system.

[0040] After the pitch angle adjustment is completed or during the synchronous adjustment process, the azimuth adjustment mechanism 31 is activated to adjust the horizontal azimuth angle of the cylinder under test on the support arm 305. After the spatial dual-axis coordinate positioning is completed, the cylinder under test is set to a composite spatial posture that conforms to the actual equipment assembly state.

[0041] Subsequently, the control system commands the cylinder under test to begin reciprocating motion, and simultaneously activates the load simulation component 4. Since the movable end of the load simulation component 4 is connected to the piston rod via a rotating joint, when the orientation adjustment mechanism 31 drives the cylinder under test to adjust its horizontal azimuth angle and generate circumferential rotation, the rotating joint allows the piston rod to rotate freely relative to the L-shaped plate 404, thereby physically isolating torsional stress and avoiding mechanical interference to the horizontal rotation of the cylinder. According to the load model set in the test program, a precise axial resistance load is applied to the piston rod. During this operation, because the cylinder under test is in a specific spatial orientation, the contact surfaces between the internal piston and cylinder barrel, and between the piston rod and guide sleeve, are affected by the gravitational component, generating specific microscopic radial bias pressure.

[0042] Finally, the vibration detection module 2, arranged on the cylinder clamping assembly 6 or the outer wall of the cylinder under test, collects the mechanical vibration signal generated by the cylinder in a specific spatial position and under a specific axial resistance coupling state in real time. The detection device enables the acquired acoustic vibration spectrum to directly reflect the unilateral friction waveform characteristics of the cylinder when it is in a complex assembly angle. Its data completeness for assessing the micro-wear of the cylinder's internal seals or the sub-health state of the guide is greater than that of the traditional horizontal calibration device.

[0043] Among them, the vibration detection module 2 can be a non-contact optical vibration measurement unit or a dynamic-static decoupled vibration transmission component and a fixed piezoelectric sensor: The optical vibration measurement unit is fixedly mounted on the outer wall of the support frame 311 of the orientation adjustment mechanism 31, and the detection beam emitting end of the optical vibration measurement unit is pointed towards the measured area of ​​the cylinder under test; preferably, the optical vibration measurement unit adopts a laser Doppler vibrometer. The microscopic high-frequency deformation of the cylinder's outer wall caused by internal friction is directly extracted using the principle of optical interference. Since the detection module does not physically contact the cylinder in its spatial rotation and pitch positions, the additional centrifugal force and vibration interference generated by the mass of the contact sensor itself under rotational conditions are completely eliminated; at the same time, the dragging and pulling phenomenon of the signal harness during three-dimensional spatial tracking is avoided.

[0044] The dynamic-static decoupling vibration transmission assembly consists of a high acoustic impedance annular structure, which is fitted between the drive shaft of the rotating arm 313 of the orientation adjustment mechanism 31 and the support frame 311; a fixed piezoelectric sensor is rigidly connected to the outer wall of the support frame 311. Abnormal mechanical waves inside the cylinder under test are transmitted to the rotating arm 313 via the cylinder clamping assembly 6, then penetrate the high acoustic impedance annular structure to reach the support frame 311, and are finally picked up by the sensor in the non-rotating coordinate system. This scheme transfers the electrical signal acquisition point from the moving end to the stationary end, avoiding the introduction of rotating electromagnetic slip rings or cable chains.

[0045] Example 2 like Figure 2 and Figure 3 As shown, based on Embodiment 1, the present invention provides a technical solution: Preferably, the tilt adjustment mechanism 30 further includes two uprights 301, which are arranged at intervals on the top of the frame 1; the support arm 305 is configured as a U-shaped cradle structure, with its two ends rotatably connected to the two uprights 301 respectively, and the rotation axes of the two rotatably connected points are collinear; the tilt drive assembly includes a transmission box 306 fixedly installed on one of the uprights 301, the transmission box 306... A worm gear 303 is rotatably connected internally, and the central axis of the worm gear 303 extends to the outside of the transmission box 306 and is fixedly connected to one side end of the support arm 305; a worm 302 that meshes with the worm gear 303 is rotatably connected internally to the transmission box 306; an inclinometer motor 304 is fixedly installed externally to the transmission box 306, and the output end of the inclinometer motor 304 extends to the inside of the transmission box 306 and is connected to the worm 302; the physical center of gravity of the cylinder under test and the cylinder clamping assembly 6 is configured to be located on the rotation axis of the support arm 305.

[0046] In this embodiment, the single-sided cantilever force mode is transformed into a double-end simply supported force mode. Through the design of the U-shaped cradle structure and the forced collinear arrangement of the overall physical center of gravity of the system with the pitch and rotation axis, the gravity vector always penetrates the support axis when the cylinder under test switches between any tilt angles within the range of 0-90°. This eliminates the additional lever arm generated by gravity offset from the physical structure, limits the boundary of the overturning moment, and the overall bending stiffness and static torsional section modulus of the mechanism are greater than those of the cantilever platform. The signal-to-noise ratio of the extracted seismic wave signal is better than that of the non-collinear structure.

[0047] The tilting motor 304 drives the worm gear 303 and worm 302 structure in the transmission box 306. The central shaft of the worm gear 303 transmits torque to one end of the U-shaped support arm 305, driving the entire U-shaped support arm 305 to rotate synchronously around the concentric collinear bearings of the two end frames 301. During this dynamic displacement and subsequent static test locking, because the combined center of gravity of the cylinder under test, the orientation adjustment mechanism 31, and the cylinder clamping assembly 6 is precisely balanced and falls on the virtual axis of the pitch rotation, the frame 1 only bears the vertically downward static gravity load. This collinear matching design of the physical center of gravity avoids the generation of additional alternating torque during rotation and testing, ensuring that the mechanical clearance at the top rotating connection of the frame 301 is not amplified by the asymmetrical load; thus, when the cylinder is subjected to resistance loading test, the vibration generated by the deformation of the test platform frame 1 is less than that of the single-sided cantilever structure test platform.

[0048] like Figure 2 , Figure 4 and Figure 5 As shown, in this embodiment, preferably, the orientation adjustment mechanism 31 includes a support frame 311 fixedly connected to the center of the support arm 305. The support frame 311 has a hollow cylindrical structure. An orientation motor 312 is fixedly installed at the bottom of the support frame 311. The output end of the orientation motor 312 extends to the top of the support frame 311 and is fixedly connected to a rotating arm 313. A cylinder clamping assembly 6 is fixedly installed on one side of the top of the rotating arm 313. A mounting plate 8 is fixedly connected to the side of the rotating arm 313 away from the cylinder clamping assembly 6. A vibration detection module 2 is fixedly connected to the mounting plate 8.

[0049] In this embodiment, by indirectly rigidly connecting the vibration detection module 2 mounting plate 8 to the rotating arm 313, a coaxial follow-up relationship is formed with the cylinder under test, ensuring that the physical contact point or observation angle of the detection module for extracting signals remains unchanged relative to the surface of the cylinder under test under any horizontal azimuth angle switching, and the consistency of its test boundary conditions is greater than that of the static detection platform. Furthermore, by arranging the cylinder clamping assembly 6 and the mounting plate 8 of the bearing vibration detection module 2 on both sides of the rotation center of the rotating arm 313, a lever-type symmetrical counterweight arrangement is formed in terms of physical structure. This opposing structure uses the mass of the detection module and the mounting plate 8 to compensate for part of the static unbalanced torque at the cylinder end, so that the mass eccentricity of the rotating arm 313 during operation and locking pressure holding is smaller than that of the same-side stacked structure; its mechanical stability after dynamic adjustment is better than that of the asymmetrical cantilever structure, reducing the interference of the frame 1's own vibration on the real friction waveform of the cylinder body.

[0050] By controlling the operation of the azimuth motor 312, the output end of which extends above the support frame 311 is driven to rotate, thereby driving the rotating arm 313 to rotate in the azimuth of the relative horizontal plane. During this rotation positioning and subsequent vibration calibration test, since the mounting plate 8 and the cylinder clamping assembly 6 are both fixed on the same rotating arm 313, the vibration detection module 2 rotates coaxially and synchronously with the cylinder under test. This follow-up structure strictly locks the relative coordinate vector between the vibration signal acquisition point and the outer wall of the cylinder body, so that when the test system compares the friction vibration spectrum under different azimuth angles, the distortion will not occur due to the slippage of the measuring point position. Meanwhile, since the cylinder clamping assembly 6 is distributed on one side of the rotating arm 313, while the mounting plate 8 and the vibration detection module 2 fixed thereon are distributed on the other side of the rotating arm 313, the two form a mechanical balancing structure with the output shaft of the azimuth motor 312 as the physical fulcrum, which avoids excessive radial load on the motor main bearing due to excessive load on one side after azimuth adjustment; in the test locked state, the micro-deflection deformation at the end of the rotating arm 313 is physically suppressed, ensuring that the acoustic impedance of the vibration wave is in a stable range during the transmission process from the cylinder body to the detection module.

[0051] like Figure 3 and Figure 4 As shown, in this embodiment, preferably, a locking cylinder 701 is fixedly connected to the side of the fixed base 601 away from the support frame 311, the piston rod of the locking cylinder 701 extends to the other side of the fixed base 601 and is fixedly connected to a locking block 702, and the locking block 702 abuts against the support frame 311.

[0052] By introducing an auxiliary rigid locking mechanism independent of the transmission chain of the orientation motor 312, and utilizing the strong frictional contact between the locking block 702 and the stationary support frame 311, the original single-point cantilever limit of the motor is transformed into peripheral friction locking. This completely bypasses and locks the mechanical backlash of the motor reducer from a physical perspective. Its torsional stiffness in the test locked state is greater than that of a single motor brake structure, effectively suppressing the micro-torsional vibration induced by alternating loads, making the system's underlying mechanical disturbance immunity better than that of a pure motor positioning mechanism.

[0053] During the posture adjustment phase, the locking cylinder 701 is in a depressurized and retracted state, and the locking block 702 maintains a small gap with the surface of the support frame 311 below. The azimuth motor 312 can drive the rotating arm 313 and the fixed base 601 to the preset horizontal azimuth angle without interference. Before the system reaches the target azimuth angle and prepares to start the cylinder reciprocating test, the control system supplies high-pressure air to the locking cylinder 701. The piston rod of the locking cylinder 701 extends downwards to overcome the return resistance, and the locking block 702 at the drive end directly presses against the outer wall of the stationary support frame 311 with a set normal pressure. This locking structure shields the secondary excitation effect caused by gear backlash, so that the mechanical wave transmitted to the vibration detection module 2 only contains the real friction characteristics of the cylinder body, thus outputting pure calibration data.

[0054] Example 3 like Figure 4 , Figure 6 and Figure 7 As shown, based on Embodiment 2, the present invention provides a technical solution: Preferably, the load simulation component 4 includes a fixed plate 401, which is fixedly connected between the two sides of the inner wall of the support arm 305; a slide rail 402 is fixedly connected to the top of the fixed plate 401, a follower slider 403 is slidably connected to the slide rail 402, an L-shaped plate 404 (i.e., the movable end of the load simulation component 4) is fixedly connected to one side of the follower slider 403, a weight rod 405 is fixedly connected to the top of the L-shaped plate 404, and a counterweight 410 is placed on the weight rod 405; a strip groove 406 is provided on the side wall of the L-shaped plate 404, a clamping screw 407 is rotatably connected inside the strip groove 406, a clamping slider 408 is threadedly connected to the outside of the clamping screw 407, the clamping slider 408 is slidably connected to the strip groove 406, and a pressure ring 409 is fixedly connected to the side of the clamping slider 408 near the weight rod 405.

[0055] In this embodiment, by using the linear guiding cooperation between the follower slider 403 and the slide rail 402, and by adding or removing counterweights 410 of different masses on the weight rod 405, the device can output equivalent resistance loads of various gradients according to the test requirements. Its simulation coverage of variable load conditions is greater than that of a constant mass load mechanism. Furthermore, by rotating the clamping screw 407, the clamping slider 408 is driven to undergo mechanical displacement, causing the connected pressure ring 409 to apply an axial preload to the counterweight 410 from top to bottom, rigidly locking the counterweight 410, which is in a discrete state, onto the L-shaped plate 404. This mechanical interlocking structure suppresses the bouncing and collision of the counterweights under the inertial impact of the cylinder, ensuring the purity of the shock wave data under variable load testing.

[0056] When different load sizes need to be simulated, the operator or automated robot places the corresponding number and mass of counterweights 410 on the weight rod 405. Then, the clamping screw 407, which is configured inside the strip groove 406, is rotated. The transmission characteristics of the threaded pair force the clamping slider 408 to slide linearly downward along the guide trajectory of the strip groove 406. The clamping slider 408 drives the side pressure ring 409 to press down synchronously until the pressure ring 409 tightly adheres to and presses down the end face of the uppermost counterweight 410. After the test is started, the extension and retraction of the cylinder piston rod drives the follower slider 403 to reciprocate linearly along the slide rail 402. Within this operating range, the clamping structure physically integrates all the stacked counterweights 410 and the L-shaped plate 404 into a rigid body without assembly gaps. This rigid assembly avoids the counterweight loosening and micro-impact sound caused by sudden changes in test acceleration, keeps the load acting on the cylinder piston rod constant, and prevents secondary vibration sources from interfering with the vibration detection module 2.

[0057] like Figure 4 , Figure 6 and Figure 7 As shown, in this embodiment, preferably, an adapter rod 501 is rotatably connected to the end of the L-shaped plate 404. A through hole 411 for the adapter rod 501 to pass through is provided on the fixed plate 401. A mounting base 502 is fixedly connected to the end of the adapter rod 501 away from the L-shaped plate 404. A bidirectional screw 503 is rotatably connected inside the mounting base 502. Two connecting sliders 504 are symmetrically threaded to the outside of the bidirectional screw 503. The connecting sliders 504 are slidably connected to the mounting base 502. A mating seat 505 is fixedly connected to the side of each of the two connecting sliders 504. A half-groove 506 is provided on the side of each of the two mating seats 505 that are close to each other. The two half-grooves 506 together form a cylindrical groove. A mating block 507 is placed inside the cylindrical groove. A mating screw hole 508 is provided in the middle of the mating block 507.

[0058] In this embodiment, the rotating connection structure between the adapter rod and the L-shaped plate 404 allows the front-end transmission assembly, consisting of the cylinder under test and the adapter rod, to rotate freely relative to the L-shaped plate 404. This structure physically isolates the rotational interference force caused by cylinder position adjustment, ensuring that the pure axial resistance load extracted from the piston rod during reciprocating motion testing is not affected by torque. This part realizes the specific connection form of the rotating pair between the piston rod of the cylinder under test and the load simulation component 4. Furthermore, the two docking seats 505 are driven by the bidirectional screw 503 to achieve clamping or loosening action, so that the docking blocks 507 with docking screw holes 508 of different diameters can be quickly replaced. This modular clamping structure limits the replacement range to the independent cylindrical docking blocks 507, avoids the disassembly of the entire load assembly, and improves the operating efficiency.

[0059] When performing cylinder model matching, the operator rotates the bidirectional screw 503 in the forward direction. Utilizing the synchronous reverse displacement characteristics of the forward and reverse thread pairs, the connecting sliders 504 and mating seats 505 on both sides are driven to expand outward, opening the cylindrical groove formed by the two half-grooves 506. Then, the mating block 507, which matches the piston rod thread of the cylinder to be tested, is screwed into the piston rod end and placed into the cylindrical groove. The bidirectional screw 503 is rotated in the reverse direction, causing the two mating seats 505 to rigidly lock the mating block 507, completing the physical connection of the transmission chain. When the vibration calibration test is started, the piston rod of the cylinder under test performs an axial extension and retraction action. The push-pull load is transmitted to the adapter rod through the docking block 507 and the mounting base 502 in sequence. The adapter rod uses the rotating connection pair (such as the embedded thrust bearing component) between its end and the L-shaped plate 404 to transmit the full axial force to the L-shaped plate 404, thereby driving the counterweight 410 to reciprocate linearly along the slide rail 402 to provide constant resistance. When the posture adjustment component 3 drives the cylinder to rotate circumferentially, the docking block 507, the mounting base 502 and the adapter rod, as a whole, undergo coaxial free rotation at the end of the L-shaped plate 404. During this dynamic process, the circumferential rotational stress is physically cut off by the rotating pair of the rod, and the L-shaped plate 404 and the slider at the rear maintain a purely linear guiding state, thereby ensuring the absolute directionality of the friction test load acting on the cylinder piston rod.

[0060] The 508 threaded hole is an internally threaded hole, with thread specifications selected from M5, M6, M8, M10×1.25, M12×1.25, or M16×1.5. These specifications strictly correspond to the standard dimensions (including coarse and fine threads) of the cylinder piston rod end under the ISO and GB standards, enabling this testing device to cover mainstream cylinders in semiconductor equipment ranging from miniature to medium diameter (6mm-50mm). Operators can directly perform seamless clamping, and the mechanical conversion process before testing takes less time than with non-standard customized adapters.

[0061] The standard threaded pair fit tolerance ensures the mechanical engagement stiffness between the mating screw hole 508 and the piston rod external thread. When the cylinder performs dynamic loading test, the axial tensile and compressive impact resistance of this standard threaded pair is better than that of the non-standard clearance fit structure. It suppresses the secondary acoustic vibration caused by the slippage of the thread clearance from a physical level, so that the fidelity of the shock wave data transmitted to the detection module is greater than that of the clearance fit structure.

[0062] Example 4 like Figure 3 , Figure 4 and Figure 5As shown, based on Embodiment 3, the present invention provides a technical solution: Preferably, the cylinder clamping assembly 6 includes a fixed base 601 fixedly connected to the rotating arm 313 and a clamp seat 602 disposed on the fixed base 601. The clamp seat 602 is rotatably connected to a bidirectional adjusting screw 603. The bidirectional adjusting screw 603 is symmetrically threaded to two chucks 604. A V-shaped positioning groove is provided on the side of the two chucks 604 that are close to each other.

[0063] In this embodiment, the mechanical synchronous transmission characteristics generated by the forward and reverse thread sections of the bidirectional adjusting screw 603 are used to drive the two chucks 604 to produce equidistant opposite or opposite movements. Combined with the symmetrical tangential geometric constraints applied to the outer wall of the cylindrical cylinder by the V-shaped positioning grooves on the inner side of the two chucks 604, automatic mechanical alignment of cylinders of different models is realized. This interlocking structure forcibly locks the geometric center line of cylinders with different outer diameter specifications on the theoretical reference axis of the test platform, eliminating the radial shear stress of the piston rod caused by clamping eccentricity from a physical level.

[0064] When changing to a different model of cylinder under test, the operator rotates the bidirectional adjusting screw 603 in the forward direction. The forward and reverse threaded sections at both ends drive the two chucks 604 to slide outward synchronously along the fixed base 601, opening up the clamping space. Then, the cylinder body of the cylinder under test is placed between the two chucks 604, and the bidirectional adjusting screw 603 is rotated in the reverse direction. The two chucks 604 move towards the geometric center synchronously. During this process, the four ramp surfaces formed by the V-shaped positioning grooves on the two chucks 604 simultaneously contact and press the outer cylindrical surface of the cylinder. Under the pushing action of the normal component force of the V-shaped groove ramps, the cylinder is automatically guided to the absolute symmetrical center surface of the two V-shaped positioning grooves and is rigidly locked at this position. Through this mechanical centering and clamping process, regardless of how the outer diameter of the cylinder under test changes, the axis of motion of its internal piston rod is always absolutely collinear with the transmission reference axis where the docking block 507, the connecting slider 504, and the adapter rod are located. In subsequent loading tests, the attitude bias force caused by gravity or orientation adjustment is uniformly absorbed by the V-shaped contact surface, avoiding structural collision noise caused by unilateral loosening, and ensuring that the internal vibration data of the cylinder obtained by the detection module is not affected by external assembly errors.

[0065] Example 5 Based on Embodiment 1, the present invention provides a technical solution: preferably, the pitch adjustment range of the tilt adjustment mechanism 30 and the horizontal rotation range of the azimuth adjustment mechanism 31 are both configured as a continuously adjustable range from -180° to +180° based on a preset calibration zero position.

[0066] In this embodiment, the reciprocating controlled stroke physically blocks the interference of wire harness entanglement caused by unidirectional infinite rotation. This stroke limitation allows the high-frequency transmission coaxial cable of the vibration detection module 2 to be routed directly across the system using a flexible drag chain, eliminating the conductive slip ring transfer structure that is prone to generating noise. This reduces the risk of mechanical inertia runaway of the test platform. When the cylinder carries the asymmetrical heavy-duty fixture seat 602 to perform large-angle attitude switching, the ±180° software and mechanical dual hard limit can avoid structural interference and pipeline tearing caused by over-adjustment.

[0067] The present invention has been described in detail above. However, modifications or improvements can be made to it, which will be obvious to those skilled in the art. Therefore, any modifications or improvements that do not depart from the spirit of the present invention are within the scope of protection of the present invention.

Claims

1. A vibration detection device for a cylinder in a semiconductor device, comprising a frame (1); characterized in that, Also includes: The pose adjustment component (3) is set on the frame (1) and is used to adjust the spatial test pose of the cylinder under test. It includes a tilt adjustment mechanism (30) and an azimuth adjustment mechanism (31) for adjusting the pitch angle and horizontal azimuth angle of the cylinder under test, respectively. The cylinder clamping assembly (6) is installed on the orientation adjustment mechanism (31) and is used to fix the cylinder body of the cylinder to be tested; The load simulation component (4) is mounted on the tilt adjustment mechanism (30), and its movable end is connected to the piston rod of the cylinder under test through a rotating joint, for applying a resistance load to the piston rod; Vibration detection module (2) is installed on the orientation adjustment mechanism (31) and is used to collect the mechanical vibration signal generated when the cylinder under test moves; The tilt adjustment mechanism (30) includes a support arm (305) disposed on the frame (1) and a tilt drive assembly for driving the support arm (305) to deflect. The orientation adjustment mechanism (31) is mounted on the support arm (305).

2. The vibration detection device for a semiconductor equipment cylinder according to claim 1, characterized in that: The tilt adjustment mechanism (30) further includes two uprights (301), which are arranged at intervals on the top of the frame (1). The support arm (305) is configured as a U-shaped cradle structure, with its two ends rotatably connected to the two uprights (301), and the rotation axes of the two rotatably connected points are collinear. The tilt drive assembly includes a transmission box (306) fixedly mounted on one of the uprights (301), and a worm gear (303) is rotatably connected inside the transmission box (306). The central axis of the worm gear (303) extends to the outside of the transmission box (306) and is fixedly connected to one side end of the support arm (305); the transmission box (306) is rotatably connected to a worm (302) that meshes with the worm gear (303); an inclinometer motor (304) is fixedly installed on the outside of the transmission box (306), and the output end of the inclinometer motor (304) extends to the inside of the transmission box (306) and is connected to the worm (302); the physical center of gravity of the cylinder under test and the cylinder clamping assembly (6) is configured to be located on the rotation axis of the support arm (305).

3. The vibration detection device for a semiconductor equipment cylinder according to claim 2, characterized in that: The orientation adjustment mechanism (31) includes a support frame (311) fixedly connected to the center of the support arm (305). The support frame (311) is a hollow cylindrical structure. An orientation motor (312) is fixedly installed at the bottom of the support frame (311). The output end of the orientation motor (312) extends to the top of the support frame (311) and is fixedly connected to a rotating arm (313). The cylinder clamping assembly (6) is fixedly installed on one side of the top of the rotating arm (313). An mounting plate (8) is fixedly connected to the side of the rotating arm (313) away from the cylinder clamping assembly (6). The vibration detection module (2) is fixedly connected to the mounting plate (8).

4. The vibration detection device for a semiconductor equipment cylinder according to claim 3, characterized in that: The load simulation component (4) includes a fixed plate (401), which is fixedly connected between the two sides of the inner wall of the support arm (305); a slide rail (402) is fixedly connected to the top of the fixed plate (401), a follower slider (403) is slidably connected on the slide rail (402), an L-shaped plate (404) is fixedly connected to one side of the follower slider (403), and a weight rod (405) is fixedly connected to the top of the L-shaped plate (404). A counterweight (410) is placed on the L-shaped plate (405); a strip groove (406) is provided on the side wall of the L-shaped plate (404); a clamping screw (407) is rotatably connected inside the strip groove (406); a clamping slider (408) is threadedly connected to the outside of the clamping screw (407); the clamping slider (408) is slidably connected to the strip groove (406); and a pressure ring (409) is fixedly connected to the side of the clamping slider (408) near the weight rod (405).

5. A vibration detection device for a semiconductor equipment cylinder according to claim 4, characterized in that: The L-shaped plate (404) is rotatably connected to an adapter rod (501). The fixed plate (401) has a through hole (411) for the adapter rod (501) to pass through. The end of the adapter rod (501) away from the L-shaped plate (404) is fixedly connected to a mounting base (502). The mounting base (502) is rotatably connected to a bidirectional screw (503). The bidirectional screw (503) is symmetrically threaded with two connecting sliders (504). The connecting sliders (504) are slidably connected to the mounting base (502). The sides of the two connecting sliders (504) are fixedly connected to mating seats (505). The two mating seats (505) are provided with half-grooves (506) on the side that is close to each other. The two half-grooves (506) together form a cylindrical groove. A mating block (507) is placed inside the cylindrical groove. A mating screw hole (508) is provided in the middle of the mating block (507).

6. The vibration detection device for a semiconductor equipment cylinder according to claim 5, characterized in that: The cylinder clamping assembly (6) includes a fixed base (601) fixedly connected to the rotating arm (313) and a clamp seat (602) disposed on the fixed base (601). The clamp seat (602) is rotatably connected to a bidirectional adjusting screw (603). The bidirectional adjusting screw (603) is symmetrically threaded to two chucks (604). A V-shaped positioning groove is provided on the side of the two chucks (604) that are close to each other.

7. A vibration detection device for a semiconductor equipment cylinder according to claim 6, characterized in that: A locking cylinder (701) is fixedly connected to the side of the fixed base (601) away from the support frame (311). The piston rod of the locking cylinder (701) extends to the other side of the fixed base (601) and is fixedly connected to a locking block (702). The locking block (702) abuts against the support frame (311).

8. The vibration detection device for a semiconductor equipment cylinder according to claim 1, characterized in that: The pitch adjustment range of the tilt adjustment mechanism (30) and the horizontal rotation range of the azimuth adjustment mechanism (31) are both configured as a continuously adjustable range from -180° to +180° based on a preset calibration zero position.

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