Reaction chamber pressure regulating valve and regulating method

Abstract

This invention discloses a reaction chamber pressure regulating valve and regulating method. The regulating valve mainly includes a valve plate, a drive unit, elastic components, and a controller. The valve plate is driven by the drive unit to close and open the chamber's exhaust port. The elastic component group is compressed when the valve plate opens the exhaust port, and the elastic compression force is transmitted through a pressure sensor to the controller to determine the elastic deformation, and the drive unit is adjusted accordingly. Simultaneously, the elastic component can be reset by the compressed state when the chamber needs to close the exhaust port. This invention uses the controller to receive the detection value from the pressure sensor to determine the compression deformation of the elastic component at the corresponding position, and adjusts the corresponding drive unit to balance the deformation of each elastic component, thereby improving the levelness of the valve plate adjustment process and enhancing the stability of the chamber's exhaust and closing processes.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing equipment technology, and in particular to a reaction chamber pressure regulating valve and regulating method. Background Technology

[0002] In semiconductor manufacturing processes, wafer surface treatment often involves placing the wafer in a vacuum chamber and processing it with process gases. During processing, the process gases and reactants need to be promptly discharged to maintain stable pressure within the reaction chamber. Furthermore, maintaining a good seal within the reaction chamber before and after processing is crucial. Therefore, pressure control valves are typically installed between the reaction chamber and the exhaust port to regulate the exhaust volume and reaction chamber pressure by controlling the valve's opening. However, most commonly used pressure control valves in reaction chambers are those that regulate pressure based on a set gas pressure. For swing-opening valves, their asymmetrical shape makes it difficult to achieve symmetrical airflow during opening and closing, affecting exhaust efficiency. For lifting-opening valves, the valve plate may experience leveling issues during lifting, affecting the uniformity of airflow. Furthermore, the leveling of the valve plate can compromise the sealing effect within the reaction chamber, creating a risk of leakage.

[0003] Therefore, how to improve the stability of the valve structure in the gas exhaust and sealing process in the reaction chamber is a technical problem that urgently needs to be solved by those skilled in the art. Summary of the Invention

[0004] In view of this, the purpose of the present invention is to provide a reaction chamber pressure regulating valve and regulating method to improve the stability of the valve structure in the venting and sealing process in the reaction chamber.

[0005] To achieve the above objectives, the present invention provides the following technical solution:

[0006] A reaction chamber pressure regulating valve, comprising

[0007] A valve plate is disposed in the chamber to close the exhaust port of the chamber. The valve plate is driven by a drive unit, which drives the valve plate to move toward the chamber to connect the chamber and the exhaust port.

[0008] An elastic component is fixed at both ends to the side of the valve plate facing the interior of the chamber and the inner wall of the chamber, respectively. The elastic component is in a compressed state when the valve plate is separated from the exhaust port, and a pressure sensor is provided in the connection area between the elastic component and the inner wall of the chamber. The drive unit is provided in a one-to-one correspondence with the elastic component.

[0009] The controller is communicatively connected to the pressure sensor and the drive unit, and adjusts the drive distance of the drive unit to equalize the detection values ​​of each pressure sensor.

[0010] Preferably, in the above-mentioned reaction chamber pressure regulating valve, the valve plate is a circular structure or a symmetrical regular polygonal structure, and the driving unit and the elastic component are evenly arranged in multiples on the circumference of the valve plate.

[0011] Preferably, in the above-mentioned reaction chamber pressure regulating valve, the driving unit includes a lifting rod disposed through the outer wall of the chamber, and an electric cylinder for driving the lifting rod to move. One end of the lifting rod that enters the chamber is provided with a first buffer and abuts against the valve plate.

[0012] Preferably, in the above-mentioned reaction chamber pressure regulating valve, a sealing ring is provided on the valve plate, and when the valve plate closes the exhaust port, the sealing ring is located radially between the exhaust port and the lifting rod on the valve plate.

[0013] Preferably, in the above-mentioned reaction chamber pressure regulating valve, the elastic component includes a top plate, a spring, and a bellows. One end of the spring is fixed to the top plate, and the top plate is in contact with the pressure sensor. The other end of the spring is fixedly connected to the valve plate, and the bellows is sleeved on the outer periphery of the spring and surrounds the spring.

[0014] Preferably, in the above-mentioned reaction chamber pressure regulating valve, the valve plate is a circular or symmetrical regular polygonal structure and the elastic component is fixedly connected to one side surface area of ​​the valve plate, or...

[0015] The valve plate extends outwards evenly in the circumferential direction with at least two connecting arms, and each connecting arm is fixedly connected to one of the elastic components.

[0016] Preferably, in the above-mentioned reaction chamber pressure regulating valve, the valve plate is provided with a mounting hole, the drive unit includes a stepped lifting base, the first step of the lifting base passes through the mounting hole, and a buckle plate with an outer diameter larger than the outer diameter of the mounting hole is fixedly provided at one end of the first step through the valve plate; a second buffer is provided on the side of the second step facing the valve plate.

[0017] Preferably, in the above-mentioned reaction chamber pressure regulating valve, a sealing element is fixedly provided on the side of the buckle plate facing the valve plate, and the outer periphery of any of the mounting holes is surrounded by the sealing element.

[0018] A regulating method for the reaction chamber pressure regulating valve described in the above embodiments, the regulating method comprising at least the following steps:

[0019] Valve plate drive: When the chamber needs to be vented, the controller drives four drive units to lift the valve plate toward the inside of the chamber. The four pressure sensors receive the pressure feedback from the elastic component and feed it back to the controller.

[0020] Valve plate detection: When the pressure values ​​F1, F2, F3, and F4 received by the controller from the four pressure sensors are not completely equal, the compression deformation of each elastic component is calculated according to Hooke's Law F=-kx as X1, X2, X3, and X4, respectively, and then the average deformation X0=(X1+X2+X3+X4) / 4 is obtained.

[0021] Valve plate leveling: For the first drive unit, the deformation of its corresponding first elastic component is X. 1， For X1 and X0, when X1 < X0, the controller adjusts the first drive unit to continue driving the valve plate toward the interior of the chamber, and the driving distance is (X0-X1); while when X1 > X0, the controller adjusts the first drive unit to descend so that the valve plate moves toward the exhaust port position, and the driving distance is (X1-X0); the controller adjusts the other three drive units in the same way as it adjusts the first drive unit.

[0022] Preferably, in the above adjustment method, when the chamber needs to be closed, the controller adjusts the drive unit to descend, and the valve plate is driven by the elastic component to move toward the exhaust port; the controller also performs the valve plate detection step and the valve plate leveling step to keep the valve plate in a horizontal state and close the exhaust port.

[0023] As can be seen from the above technical solution, the reaction chamber pressure regulating valve provided by the present invention mainly includes a valve plate, a drive unit, an elastic component, and a controller. The valve plate is disposed in the chamber to close the exhaust port of the chamber, and is driven from the outside of the chamber by the drive unit so that the valve plate moves toward the inside of the chamber to connect the chamber and the exhaust port, and realize the exhaust action. Based on this structure, the elastic component is fixed at both ends to the side of the valve plate facing the inside of the chamber and the inner wall of the chamber, respectively. The elastic component is in a compressed state when the valve plate is separated from the exhaust port, that is, when the valve plate moves toward the inside of the chamber, it will compress the elastic component, causing the elastic component to produce elastic deformation. Correspondingly, the pressure sensor detects the elastic force of each elastic component and feeds it back to the controller. The controller adjusts the driving action of the drive unit based on this, and balances the detection values ​​of each pressure sensor to improve the levelness of the valve plate, thereby avoiding problems such as poor exhaust or unstable sealing caused by poor levelness of the valve plate. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 This is a schematic diagram of the reaction chamber pressure regulating valve installed in the chamber according to an embodiment of the present invention;

[0026] Figure 2 for Figure 1 Top view;

[0027] Figure 3 This is a detailed structural diagram of the elastic component;

[0028] Figure 4 Schematic diagram of the valve plate sealing the exhaust port structure;

[0029] Figure 5 A top view of a regulating valve with four drive units;

[0030] Figure 6 for Figure 5 A frontal sectional view;

[0031] Figures 7-9 These are schematic diagrams of valve plate structures in different embodiments;

[0032] Figure 10 A schematic diagram of a structure in which the lifting base drives the valve plate to close the air inlet;

[0033] Figure 11 This is a schematic diagram of the structure of the lifting base and the valve plate.

[0034] Wherein, 10-valve plate; 110-sealing ring; 120-connecting arm; 130-mounting hole; 20-drive unit; 210-lifting rod; 220-electric cylinder; 230-first buffer; 240-lifting base; 2410-first-stage step; 2420-second-stage step; 250-clasp plate; 260-second-stage buffer; 270-sealing element; 30-elastic component; 310-top plate; 320-spring; 330-bellows; 40-pressure sensor; 510-chamber; 520-exhaust port;

[0035] 610 - First drive unit; 620 - Second drive unit; 630 - Third drive unit; 640 - Fourth drive unit; 710 - First pressure sensor; 720 - Second pressure sensor; 730 - Third pressure sensor; 740 - Fourth pressure sensor; 810 - First elastic component; 820 - Second elastic component; 830 - Third elastic component; 840 - Fourth elastic component. Detailed Implementation

[0036] The core of this invention is to disclose a reaction chamber pressure regulating valve and regulating method to improve the stability of the valve structure in the venting and sealing process within the reaction chamber.

[0037] To enable those skilled in the art to better understand the present invention, embodiments of the present invention will be described below with reference to the accompanying drawings. Furthermore, the embodiments shown below do not limit the scope of the invention as described in the claims. Additionally, the complete contents of the configurations shown in the embodiments below are not limited to those necessary for the solution of the invention described in the claims.

[0038] like Figure 1 Right now Figure 2 As shown, the reaction chamber pressure regulating valve provided in this embodiment of the invention mainly includes a valve plate 10, a drive unit 20, an elastic component 30, and a controller to achieve horizontal operation during valve regulation. During the exhaust process of the chamber 510, the airflow around the valve plate 10 is made more uniform, and the valve plate 10 has a more stable seal when closing the exhaust port 520. Specifically, the valve plate 10 is positioned at the exhaust port 520 of the chamber 510 to close the exhaust port 520. It should be noted that the valve plate 10 is preferably a regular plate structure and is arranged coaxially with the exhaust port 520. If the valve plate 10 is circular, it is coaxial with the circular exhaust port 520, so that the exhaust port 520 has a uniform closing length in its radial direction. Simultaneously, during the process of the chamber 510 venting after the valve plate 10 separates from the exhaust port 520, the circumferential airflow channel of the exhaust port 520 is similarly blocked by the valve plate 10, resulting in better exhaust stability.

[0039] Meanwhile, the valve plate 10 is driven by a drive unit 20, which penetrates the wall of the chamber 510 to drive the valve plate 10, thereby reducing the impact of the drive unit 20 on the internal structure and sealing of the chamber 510. The drive unit 20 also drives the valve plate 10 to move towards the interior of the chamber 510, connecting the chamber 510 with the exhaust port 520 to meet the exhaust requirements of the chamber 510. Based on this, an elastic component 30 is disposed inside the chamber 510, with both ends of each elastic component 30 fixedly connected to the inner wall of the chamber 510 and the side of the valve plate 10 facing inwards from the chamber 510, respectively. The elastic component 30 is compressed when the valve plate 10 is separated from the exhaust port 520. It should be noted that since the chamber only separates from the exhaust port 520 via the action of the drive unit 20 when exhaust is required, the elastic component 30 is compressed when the drive unit 20 drives the valve plate 10 towards the interior of the chamber 510. On the one hand, the elastic component 30 can provide a stable connection base structure for the valve plate 10 inside the chamber 510, and the elastic component 30 in the compressed state can apply an elastic force to the valve plate 10 towards the exhaust port 520 when the drive unit 20 stops driving, thereby realizing the reset of the valve plate 10; on the other hand, in this embodiment of the invention, a pressure sensor 40 is provided in the connection area between the elastic component 30 and the inner wall of the chamber 510. The pressure sensor 40 is used to detect the compressive force when the corresponding elastic component 30 is compressed and feed it back to the controller.

[0040] It should be noted that in the above embodiments, a pressure sensor 40 is provided in the connection area between each elastic component 30 and the inner wall of the chamber 510. Simultaneously, the drive units 20 and elastic components 30 are arranged in a one-to-one correspondence. Specifically, this means that the number of drive units 20 and elastic components 30 is the same, and when a single drive unit 20 drives the valve plate 10 towards the interior of the chamber 510, the elastic component 30 corresponding to that drive unit 20 will experience the greatest compression effect compared to other elastic components 30. In some embodiments of the present invention, the number of drive units 20 and elastic components 30 is the same, and a set of corresponding drive units 20 and elastic components 30 are collinearly arranged in the direction perpendicular to the valve plate 10, so that the driving force of a single drive unit 20 can be transmitted to the corresponding elastic component 30 position to the maximum extent.

[0041] It should be further explained that when the valve plate 10 closes the exhaust port 520 inside the chamber 510, the elastic component 30 can also be in a compressed state to apply a pressing force toward the inner wall of the chamber 510 to the valve plate 10, thereby improving the sealing effect of the valve plate 10 on the exhaust port 520.

[0042] Furthermore, the controller is communicatively connected to each pressure sensor 40 to receive the compressive force of the elastic component 30 transmitted by each pressure sensor 40. At the same time, the controller is also communicatively connected to each drive unit 20 to adjust the driving action of the drive unit 20 on the valve plate 10.

[0043] The controller can be a central processing unit (CPU) or a programmable logic controller (PLC) that can be adjusted. It balances the detection values ​​of each pressure sensor 40 by adjusting the driving distance of each drive unit 20. Specifically, based on the positional settings of the elastic component 30 and the drive unit 20, when the controller detects that the detection value of a single pressure sensor 40 is smaller than the detection values ​​of all pressure sensors 40, it indicates that the deformation of the elastic component 30 corresponding to that pressure sensor 40 is too small. The controller then drives the drive unit 20 corresponding to that elastic component 30 to enhance the driving effect on the valve plate 10, thereby increasing the detection value of the pressure sensor 40 to approach the average value, until the detection values ​​of all pressure sensors 40 are similar or equal. This indicates that the compression deformation effect of each elastic component 30 is similar or the same, thereby achieving a relatively horizontal state during the movement of the valve plate 10 and optimizing the stability of the valve plate 10 in the exhaust and sealing process of the chamber 510.

[0044] Furthermore, in some embodiments of the present invention, such as Figure 5 and Figure 6 As shown, to improve the stability of the valve plate 10 adjustment process, the valve plate 10 is designed as a circular structure and is arranged on the same central axis as the exhaust port 520. At the same time, four drive units 20 and four elastic components 30 are evenly arranged in the circumferential direction of the valve plate 10. The controller can apply a driving action to the valve plate 10 through the drive unit 20 at four points in the circumferential direction of the valve plate 10, and the elastic components 30 can also connect the valve plate 10 to the chamber 510 from four points in the circumferential direction of the valve plate 10. This can improve the stability of the valve plate 10 movement process, and the controller can more accurately transmit the drive adjustment of a single drive unit 20 to the corresponding elastic component 30 position. The valve plate 10 will only make height adjustments for the drive of a single drive unit 20. Compared with the two-point drive structure, this can avoid the risk of the valve plate 10 tilting to both sides when adjusting a single drive unit 20, thus improving the stability of the valve plate 10 adjustment process.

[0045] It should be noted that the valve plate 10 can also be a regular polygonal structure, such as an equilateral triangle, a regular quadrilateral, or a regular pentagon. When the valve plate 10 can also be a regular polygonal structure, it is preferable that the drive unit 20 and the elastic component 30 are both evenly arranged in the circumferential direction of the valve plate 10 in a number equal to the number of sides of the valve plate 10, so that each side of the regular polygonal valve plate 10 has a drive unit 20 capable of adjusting its height, thereby improving the accuracy of angle adjustment.

[0046] Furthermore, in the reaction chamber pressure regulating valve provided in this embodiment of the invention, the drive unit 20 includes a lifting rod 210 and an electric cylinder 220. The electric cylinder 220 is used to drive the extension and retraction of the lifting rod 210. The lifting rod 210 is disposed through the outer wall of the chamber 510, and a first buffer 230 is provided at one end of the lifting rod 210 that penetrates into the chamber 510, and abuts against the valve plate 10. The first buffer 230 can be an elastic ball head or an elastic gasket, etc. The point contact method can make the effect of the lifting rod 210 on the valve plate 10 more precise. When the elastic component 30 and the drive unit 20 are collinearly arranged in a direction perpendicular to the valve plate 10, the lifting effect transmitted by the lifting rod 210 from the point of action can be mostly applied to the corresponding elastic component 30 position, thereby reducing the impact on the elastic components 30 at other positions and avoiding excessive changes in the detection value of the pressure sensor 40 corresponding to the elastic components 30 at other positions, thus improving the accuracy of the valve plate 10 adjustment process.

[0047] Furthermore, the lifting rod 210 contacts the valve plate 10 through the first buffer 230, which protects the bottom of the valve plate 10 from damage and leakage. It also prevents metal particle contamination caused by friction between the lifting rod 210 and the valve plate 10. The abutting engagement drive allows the valve plate 10 to float, enabling the drive unit 20 to drive the valve plate 10 at individual points, thereby meeting the adjustment requirements of the compressive force of the individual elastic component 30.

[0048] Based on the above embodiments, such as Figure 1 and Figure 4 As shown, a sealing ring 110 is also provided on the side of the valve plate 10 facing the exhaust port 520 to improve the sealing effect of the valve plate 10 on the exhaust port 520, that is, the valve plate 10 as... Figure 4Even when the valve plate 10 is slightly tilted, the seal of the exhaust port 520 can still be maintained by the elastic effect of the sealing ring 110. When the valve plate 10 is closing the exhaust port 520, the sealing ring 110 is located radially between the exhaust port 520 and the lifting rod 210. This allows the lifting rod 210 to maintain the sealing effect on the outer periphery of the exhaust port 520 while reducing the size of the sealing ring 110, thereby reducing the risk of leakage of the sealing ring 110 by reducing the sealing area. At the same time, it enables the lifting rod 210 to drive the valve plate 10 from a position far from the center of the valve plate 10. The driving effect of each lifting rod 210 on the valve plate 10 is relatively independent, and the leveling effect of the valve plate 10 when the controller adjusts the individual drive unit 20 is optimized.

[0049] Furthermore, in the reaction chamber pressure regulating valve provided in the embodiments of the present invention, such as Figure 3 As shown, the elastic component 30 specifically includes a top plate 310, a spring 320, and a bellows 330. The spring 320 serves as a component connecting the valve plate 10 and feeding back the contraction deformation force to the pressure sensor 40. One end of the spring 320 is fixedly connected to the valve plate 10, while the other end is fixed to the top plate 310. The elastic compressive force of the spring 320 is transmitted to the pressure sensor 40 through the top plate 310. The surface contact between the top plate 310 and the pressure sensor 40 optimizes the stability and accuracy of force transmission. Furthermore, the bellows 330 is sleeved around and surrounds the spring 320 to protect it. It should be noted that the enclosing function of the bellows 330 around the spring 320 specifically refers to the fact that the bellows 330, together with the valve plate 10 and the interior of the chamber 510, forms a cylindrical closed cavity structure, and the spring 320 is completely placed within this closed cavity structure. This allows the bellows 330 to protect the spring 320 during operation within the chamber 510. Simultaneously, the bellows 330, through its expandable and deformable capability, moves with the spring 320 to ensure smooth movement of the valve plate 10. It should also be noted that in some embodiments of the present invention, the bellows 330 is made of metal to ensure it can effectively protect the spring 320 within the chamber 510.

[0050] Furthermore, in the reaction chamber pressure regulating valve provided in the embodiments of the present invention, such as Figure 7 As shown, the valve plate 10 can adopt various structures to adapt to different structures of the chamber 510. For example, the valve plate 10 can be a circular structure, and the elastic component 30 is fixedly connected to the circular surface area of ​​the valve plate 10, while the drive unit 20 abuts and drives the valve plate 10 from the circular surface area on the other side of the valve plate 10. Similarly, the valve plate 10 can also be a regular polygonal structure, and the drive unit 20 abuts and drives the valve plate 10 from the surface area on the other side of the valve plate 10.

[0051] In other embodiments of the present invention, such as Figure 8 and Figure 9 As shown, the valve plate 10 may also include a circular main body structure, with at least two connecting arms 120 evenly extending outwards in the circumference of the circular main body structure. Correspondingly, an elastic component 30 is fixedly connected to each connecting arm 120 to realize the setting of the valve plate 10 in the cavity. The drive unit 20 can also drive the valve plate 10 by applying force to the connecting arm 120. The setting of the connecting arm 120 can make the main body of the valve plate 10 maintain the integrity of the structure without contacting the drive unit 20 and the elastic component 30, thereby improving the integrity and safety of the main body.

[0052] Furthermore, in order to improve the stability of the valve plate 10 driving process, in some embodiments of the present invention, such as... Figure 10 and Figure 11 As shown, the valve plate 10 has a mounting hole 130, and the drive unit 20 includes a stepped lifting base 240. The lifting base 240 can be lifted and lowered under the action of drive components, such as electric cylinder 220, air cylinder, etc. The stepped configuration specifically refers to the lifting base 240 having a variable cross-section structure in the direction perpendicular to the valve plate 10, with its outer diameter on the side away from the valve plate 10 being larger than its outer diameter on the side closer to the valve plate 10. On this basis, the first step 2410 of the lifting base 240, that is, the side of the lifting base 240 close to the valve plate 10, passes through the mounting hole 130 to extend into the cavity. At the same time, a buckle plate 250 is fixedly installed at the end of the first step 2410 that passes through the valve plate 10. The outer diameter of the buckle plate 250 is larger than the outer diameter of the mounting hole 130, so that the buckle plate 250 and the first step 2410 cooperate to form a T-shaped structure and pass through the mounting hole 130. The second step 2420, i.e. the side of the lifting base 240 away from the valve plate 10, is provided with a second buffer 260 on the side facing the valve plate 10. The second buffer 260 is located on the mounting surface of the first step 2410 on the second step 2420. The second buffer 260 can be a ring structure and surround the first step 2410, or it can be an independent structure with multiple buffers spaced apart on the mounting surface.

[0053] In the above structure, when the controller needs to drive the valve plate 10 away from the exhaust port 520, the lifting base 240 rises and contacts the valve plate 10 through the second buffer 260, thereby lifting the valve plate 10 to move through the second buffer 260; when the controller needs to drive the valve plate 10 to close the exhaust port 520, the valve plate 10 is subjected to the action of the elastic component 30 and the pressing action of the buckle plate 250, thereby achieving the sealing of the exhaust port 520, which can further improve the sealing effect of the valve plate 10 on the exhaust port 520.

[0054] Furthermore, it should be noted that a sealing element 270 is also fixedly provided on the side of the buckle plate 250 facing the valve plate 10. The outer periphery of any mounting hole 130 is surrounded by the sealing element 270. It should be noted that the sealing element 270 can be provided with two annular structures with different radii to achieve sealing of multiple mounting holes 130 from the inner and outer rings of multiple drive units 20; similarly, multiple sealing elements 270 can also be provided, with each sealing element 270 surrounding the outer periphery of a single mounting hole 130 to achieve sealing of multiple mounting holes 130.

[0055] Furthermore, this embodiment of the invention also provides an adjustment method for adjusting the reaction chamber pressure regulating valve provided in the above embodiment. Specifically, for ease of understanding, this is illustrated by taking an example where four elastic components 30 and driving units 20 are arranged circumferentially on the circular valve plate 10. The adjustment methods for other valve plate structures and other arrangements of elastic components 30 and driving units 20 are similar to the following steps. This adjustment method includes at least the following steps:

[0056] S01: Valve plate drive: When the chamber needs to be vented, the controller drives four drive units to lift the valve plate towards the inside of the chamber. The four corresponding pressure sensors receive the pressure feedback from the elastic component and feed back the controller pressure value.

[0057] S02: Valve plate detection: The controller receives pressure values ​​from four pressure sensors and calculates the compression deformation of each elastic component.

[0058] Specifically, the controller receives pressure values ​​from four pressure sensors: the first pressure sensor 710 reports pressure value F1, the second pressure sensor 720 reports pressure value F2, the third pressure sensor 730 reports pressure value F3, and the fourth pressure sensor 740 reports pressure value F4.

[0059] When the four pressure values ​​are not completely equal, the controller determines that the valve plate is not horizontal. At this time, the controller calculates the compression deformation of each elastic component according to Hooke's Law F=-kx, that is, the compression deformation of the first elastic component 810 is X1, the compression deformation of the second elastic component 820 is X2, the compression deformation of the third elastic component 830 is X3, and the compression deformation of the fourth elastic component 840 is X4. Then, the average deformation X0=(X1+X2+X3+X4) / 4 is calculated.

[0060] S03: Valve plate leveling: The controller calculates the drive adjustment amount of each drive unit and feeds back the corresponding adjustment value of each drive unit.

[0061] Specifically, taking the first drive unit 610 as an example, the deformation of the first elastic component 810 corresponding to the first drive unit 610 is X1. The controller compares X1 and X0 in real time. When X1 < X0, it means that the deformation of the first elastic component 810 has not reached the average deformation of the four elastic components. At this time, the controller needs to adjust the first drive unit 610 to continue driving the valve plate 10 towards the interior of the chamber 510 to further compress the first elastic component 810 and increase its deformation. At the same time, according to Hooke's Law, the controller adjusts the driving adjustment of the first drive unit 610 on the valve plate 10 by (X0 - X1). On the other hand, when X1 > X0, it means that the deformation of the first elastic component 810 exceeds the average deformation of the four elastic components. At this time, the controller needs to adjust the first drive unit 610 to descend to reduce the driving effect on the valve plate 10, so that the valve plate 10 moves towards the exhaust port 520, and the driving distance is (X1 - X0).

[0062] It should be noted that the controller adjusts the second drive unit 620, the third drive unit 630, and the fourth drive unit 640 in the same way as it adjusts the first drive unit 610, and will not be described again here. The controller adjusts the actions of the four drive units until the feedback values ​​of the four pressure sensors are the same, or within the error allowed in actual production, so that the valve plate 10 can be regarded as being in a horizontal state, thereby ensuring a stable airflow output from the chamber 510 during the exhaust process.

[0063] Furthermore, when the chamber 510 needs to be closed, the controller adjusts the drive unit to descend, and the valve plate is driven by the elastic component to move toward the exhaust port 520. At the same time, the controller also executes steps S02 and S03 in the above embodiment to keep the valve plate 10 in a horizontal state and close the exhaust port 520, thereby improving the sealing effect of the valve plate 10 on the exhaust port 520.

[0064] The terms "first," "second," "third," "left," and "right," etc., used in the specification, claims, and accompanying drawings of this invention are used to distinguish different objects, not to describe a specific order. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or device that includes a series of steps or units may include steps or units not listed, but rather steps or units not listed.

[0065] The above description of the disclosed embodiments enables those skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A reaction chamber pressure regulating valve, characterized in that, include: A valve plate (10) is disposed in the chamber (510) to close the exhaust port (520) of the chamber (510). The valve plate (10) is connected to a drive unit (20). The drive unit (20) is used to drive the valve plate (10) to move toward the chamber (510) to connect the chamber (510) and the exhaust port (520). The elastic component (30) is fixed at both ends to the side of the valve plate (10) facing the interior of the chamber (510) and the inner wall of the chamber (510), respectively. The elastic component (30) is in a compressed state when the valve plate (10) is separated from the exhaust port (520), and a pressure sensor (40) is provided in the connection area between the elastic component (30) and the inner wall of the chamber (510); the drive unit (20) is provided in a one-to-one correspondence with the elastic component (30); The controller is communicatively connected to the pressure sensor (40) and the drive unit (20), and the controller adjusts the drive distance of the drive unit (20) to equalize the detection values ​​of each pressure sensor (40).

2. The reaction chamber pressure regulating valve as described in claim 1, characterized in that, The valve plate (10) is a circular structure or a symmetrical regular polygonal structure, and the driving unit (20) and the elastic component (30) are evenly arranged in multiple directions around the valve plate (10).

3. The reaction chamber pressure regulating valve as described in claim 1, characterized in that, The drive unit (20) includes a lifting rod (210) that passes through the outer wall of the chamber (510) and an electric cylinder (220) that drives the lifting rod (210) to move. One end of the lifting rod (210) that passes into the chamber (510) is provided with a first buffer (230) and abuts against the valve plate (10).

4. The reaction chamber pressure regulating valve as described in claim 3, characterized in that, A sealing ring (110) is provided on the valve plate (10). When the valve plate (10) closes the exhaust port (520), the sealing ring (110) is located in the radial direction of the valve plate (10) between the exhaust port (520) and the lifting rod (210).

5. The reaction chamber pressure regulating valve as described in claim 1, characterized in that, The elastic component (30) includes a top plate (310), a spring (320) and a bellows (330). One end of the spring (320) is fixed to the top plate (310), and the top plate (310) is in contact with the pressure sensor (40). The other end of the spring (320) is fixedly connected to the valve plate (10). The bellows (330) is sleeved on the outer periphery of the spring (320) and surrounds the spring (320).

6. The reaction chamber pressure regulating valve as described in claim 1, characterized in that, The valve plate (10) is a circular or symmetrical regular polygon structure and the elastic component (30) is fixedly connected to one side surface area of ​​the valve plate (10), or, The valve plate (10) extends evenly in the circumferential direction with at least two connecting arms (120), and each connecting arm (120) is fixedly connected to an elastic component (30).

7. The reaction chamber pressure regulating valve as described in claim 1, characterized in that, The valve plate (10) is provided with a mounting hole (130). The drive unit (20) includes a stepped lifting base (240). The first step (2410) of the lifting base (240) passes through the mounting hole (130), and a buckle plate (250) with an outer diameter larger than the outer diameter of the mounting hole (130) is fixedly provided at one end of the first step (2410) that passes through the valve plate (10). A second buffer (260) is provided on the side of the second step (2420) facing the valve plate (10).

8. The reaction chamber pressure regulating valve as described in claim 7, characterized in that, At least one of the buckle plate (250) and the valve plate (10) is provided with a seal (270), and the outer periphery of any of the mounting holes (130) is surrounded by the seal (270).

9. An adjustment method, characterized in that, The method for adjusting the reaction chamber pressure regulating valve according to claim 2 includes at least the following steps: Valve plate drive: When the chamber needs to be vented, the controller drives four drive units to lift the valve plate toward the inside of the chamber. The four pressure sensors receive the pressure feedback from the elastic component and feed it back to the controller. Valve plate detection: When the pressure values ​​F1, F2, F3, and F4 received by the controller from the four pressure sensors are not completely equal, the compression deformation of each elastic component is calculated according to Hooke's Law F=-kx as X1, X2, X3, and X4, respectively, and then the average deformation X0=(X1+X2+X3+X4) / 4 is obtained. Valve plate leveling: For the first drive unit, the deformation of its corresponding first elastic component is X1. The controller compares X1 with X0. When X1 < X0, the controller adjusts the first drive unit to continue driving the valve plate towards the interior of the chamber, and the driving distance is (X0-X1). When X1 > X0, the controller adjusts the first drive unit to descend so that the valve plate moves towards the exhaust port, and the driving distance is (X1-X0). The controller adjusts the other three drive units in the same way as it adjusts the first drive unit.

10. The adjustment method as described in claim 9, characterized in that, When the chamber (510) needs to be closed, the controller adjusts the drive unit (20) to descend, and the valve plate (10) is driven by the elastic component (30) to move toward the exhaust port (520); the controller also performs the valve plate detection step and the valve plate leveling step to keep the valve plate (10) in a horizontal state and close the exhaust port (520).

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