Vibration actuator and vibration alert device

Abstract

While achieving a thin profile, it outputs a variety of appropriate vibrations to provide a rich and varied operating experience. It comprises: a first planar body and a second planar body, both magnetic and arranged opposite each other; a third planar body, disposed between the first and second planar bodies, and including a magnetic body; a plate-shaped electromagnet portion having a magnetic pole portion, a flat plate-shaped coil surrounding the magnetic pole portion, and a base plate portion connected to the coil, and arranged opposite to one of the first and third planar bodies on the other planar body; other electromagnet portions, constructed similarly to the electromagnet portion, and arranged opposite to one of the second and third planar bodies on the other planar body; and an elastic support portion that supports the third planar body so that it can move relative to the first planar body in an opposite direction. By utilizing the magnetic force generated by energizing multiple coils, at least two of the first, second, and third planar bodies are displaced and vibrate in a close manner.

Description

Technical Field

[0001] This invention relates to a vibration actuator and a vibration alert device having the same. Background Technology

[0002] Previously, for the fingertips of an operator that come into contact with the display screen shown on the touch panel, which is a sensing panel, a structure that provides vibration by a vibration actuator is known (Patent Document 1).

[0003] Patent Document 1 discloses a portable terminal device in which a vibration actuator is mounted on the back of a touch panel via a vibration transmission section. In the vibration actuator of this device, a movable member is configured to reciprocate along a guide axis arranged perpendicularly to the touch panel within a housing fixed to the vibration transmission section. The vibration actuator causes the movable member to collide with the housing in response to operation of the touch panel, thereby imparting vibration to the fingertip in contact with the touch panel via the vibration transmission section.

[0004] Existing technical documents

[0005] Patent documents

[0006] Patent Document 1: Japanese Patent Application Publication No. 2015-070729 Summary of the Invention

[0007] The problem that the invention aims to solve

[0008] However, in the vibration actuator of Patent Document 1, since the guide shaft that guides the reciprocating movement of the movable member is arranged perpendicularly to the display surface of the touch panel, the device itself becomes a structure with a length, i.e., a thickness, perpendicular to the display surface. Therefore, this structure has the following problem: a specified thickness of space is required on the back side of the touch panel, making the portable terminal device with the touch panel itself larger and difficult to miniaturize and thin.

[0009] With the miniaturization and thinning of such devices, it is desirable to miniaturize and thin the vibration actuators mounted on the devices themselves, and to provide users of the operating devices with a variety of operating sensations, including vibrations with larger amplitudes.

[0010] The purpose of this invention is to provide a vibration actuator and a vibration prompting device that can output appropriate vibrations to provide a variety of colorful operating sensations while achieving a thin profile.

[0011] Methods for solving problems

[0012] The vibration actuator of the present invention has the following structure and includes:

[0013] Both the first planar body and the second planar body are magnetic bodies and are arranged opposite to each other;

[0014] A third planar body is disposed between the first planar body and the second planar body, and includes a magnetic body;

[0015] A plate-shaped electromagnet part has a magnetic pole part, a flat plate-shaped coil surrounding the magnetic pole part, and a base plate part connected to the coil, and is disposed on the other surface opposite to one of the first surface body and the third surface body.

[0016] Other electromagnet parts, which are constructed in the same manner as the electromagnet parts, are disposed opposite to one of the planar bodies of the second and third planar bodies in the other planar body; and

[0017] An elastic support portion supports the third planar body so that it can move relative to the first planar body in an opposing direction.

[0018] By utilizing the magnetic force generated by energizing the plurality of coils, at least two of the first planar body, the second planar body, and the third planar body are displaced and vibrated in a close manner.

[0019] The vibration alert device of the present invention employs a structure in which a vibration actuator of the above-described structure is disposed on the back side of the operating surface and driven according to the operation of the operating surface.

[0020] The effects of the invention

[0021] According to the present invention, while achieving a thin profile, appropriate vibrations are output to provide a variety of operating sensations. Attached Figure Description

[0022] Figure 1 This is a perspective view of the vibration actuator according to Embodiment 1 of the present invention.

[0023] Figure 2 This is a sub-assembly diagram of the vibration actuator.

[0024] Figure 3 This is a partial exploded view of the vibration actuator.

[0025] Figure 4 yes Figure 1 A sectional view along line AA.

[0026] Figure 5 This is a schematic cross-sectional view showing the main structural components of the vibration actuator.

[0027] Figure 6 This is a schematic cross-sectional view illustrating an example of the operation of the main structural components of a vibration actuator when energized.

[0028] Figure 7 This is a schematic cross-sectional view illustrating an example of the operation of the main structural components of a vibration actuator when energized.

[0029] Figure 8 This is a schematic cross-sectional view illustrating an example of the operation of the main structural components of a vibration actuator when energized.

[0030] Figure 9 This is a schematic cross-sectional view illustrating an example of the operation of the main structural components of a vibration actuator when energized.

[0031] Figure 10 A, Figure 10 B and Figure 10 C is a diagram representing an example of an operating signal input to a coil.

[0032] Figure 11 This is a diagram illustrating an example of the operation of a vibration actuator corresponding to an action signal input to multiple coils.

[0033] Figure 12A , Figure 12B , Figure 12C as well as Figure 12D It means and Figure 11 The diagram shows the action of the vibration actuator corresponding to the action signal shown.

[0034] Figure 13A , Figure 13B , Figure 13C as well as Figure 13D It means and Figure 11 The diagram shows the action of the vibration actuator corresponding to the action signal shown.

[0035] Figure 14A as well as Figure 14B It means and Figure 11 The diagram shows the action of the vibration actuator corresponding to the action signal shown.

[0036] Figure 15 This is a sub-assembly diagram of a vibration actuator according to a modified embodiment 1 of the present invention.

[0037] Figure 16 This is a sub-assembly diagram of the vibration actuator according to Embodiment 2 of the present invention.

[0038] Figure 17 This is a sub-assembly diagram of the vibration actuator according to Embodiment 3 of the present invention.

[0039] Figure 18A as well as Figure 18B This is a diagram showing the installation status of the vibration actuator towards the vibration indication device.

[0040] Figure 19 This is a perspective view of the vibration actuator according to Embodiment 4 of the present invention.

[0041] Figure 20 This is a sub-assembly diagram of the vibration actuator.

[0042] Figure 21 This is a schematic cross-sectional view showing the main structural components of the vibration actuator.

[0043] Figure 22 This is a sub-assembly diagram of the vibration actuator according to Embodiment 5 of the present invention.

[0044] Figure 23 This is a schematic cross-sectional view showing the main structural components of the vibration actuator in Embodiment 5.

[0045] Figure 24 This is a schematic cross-sectional view showing the main structural components of the vibration actuator according to Embodiment 6 of the present invention.

[0046] Figure 25 This is a diagram illustrating the operation of a vibration alert device equipped with the vibration actuator.

[0047] Figure 26 This is a diagram showing a modified example of a vibration alert device equipped with a vibration actuator.

[0048] Symbol Explanation

[0049] 10, 10A, 10B, 10C, 10D, 10E, 10F: Vibration actuators

[0050] 20, 22: Electromagnet Section

[0051] 30: Magnetic core (first planar body)

[0052] 32: Magnetic core (second facet)

[0053] 34, 36: Magnetic pole section

[0054] 40, 42: Substrate part

[0055] 50, 52: Coils

[0056] 60, 62: Elastic support section

[0057] 80: Magnetic yoke (third facet)

[0058] 90: Counterweight (First Counterweight)

[0059] 92: Counterweight (Second Counterweight)

[0060] 302: Notch

[0061] 304: Plate-shaped protrusion

[0062] 305: Window

[0063] 308: Fixing hole

[0064] 402: Substrate body

[0065] 403, 501, 540, 601, 800: Openings

[0066] 404: Extension

[0067] 441: Solder pad

[0068] 500: Vibration alert device

[0069] 510: Touchpad Body

[0070] 520: Frame

[0071] 530: Bottom surface

[0072] 550: Buffer

[0073] 603: Connecting part on the movable part side

[0074] 604: Edge

[0075] 605: Core-side connection part (connecting piece)

[0076] 607: Positioning Department

[0077] 802: Lower surface

[0078] 804, 806: Fixing parts

[0079] 902: Movable part joint

[0080] 904: Concave Detailed Implementation

[0081] Hereinafter, various embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0082] In these embodiments, an orthogonal coordinate system (X, Y, Z) is used for explanation. The figures described later also use a common orthogonal coordinate system (X, Y, Z). Hereinafter, when the vibration actuator is applied to a vibration prompting device (also called an operation input device) through which information is input by the operator (the user), the lengths in the X, Y, and Z directions are defined as corresponding to the width, depth, and height of the vibration prompting device.

[0083] Furthermore, the positive Z-direction is the direction in which vibration feedback is given to the operator, referred to as the "planar side" (or "upper side"), and the negative Z-direction is the direction in which the operator presses during operation, referred to as the "bottom side" (or "lower side"). Additionally, "radial" is synonymous with the XY direction centered along the central axis in the Z-direction of the vibratory actuator coil, also referred to as the direction along the plate surface. Moreover, among the components constituting the vibratory actuator, the surface located on the "planar side" (or "upper side") is referred to as the "surface" (or "upper surface"), and the surface located on the "bottom side" (or "lower side") is referred to as the "back side" (or "lower surface"). When the posture of the vibratory actuator or vibration feedback device changes, the explanation should be based on the change in posture. Furthermore, the explanation should be based on the posture of the vibratory actuator when mounted on the vibration presentation device.

[0084] (Implementation Method 1)

[0085] <Overall Structure of Vibration Actuator 10>

[0086] Figure 1 This is a perspective view of the vibration actuator according to Embodiment 1 of the present invention. Figure 2 This is a sub-assembly diagram of the vibration actuator. Additionally, Figure 3 This is a partial exploded view of the vibration actuator. Figure 4 yes Figure 1 A sectional view along line AA.

[0087] The vibration actuator 10 of this embodiment is a small and thin vibration actuator that can obtain a variety of vibrations by using multiple electromagnet parts (coils and cores).

[0088] Vibration actuator 10 is used, for example, in an operating device having an operating surface (vibration indicator) for contact operation by an operator (see in this embodiment). Figure 25 The vibration alert device 500 of the touchpad body 510 shown (see reference) Figure 25 (The touchpad shown).

[0089] The vibration actuator 10 can provide the operator who is operating the device with a sense of touch (also known as "touch" or "force") by vibrating the operating device, depending on the purpose and usage of the operating device.

[0090] The vibration actuator 10 is a thin-film vibration actuator in the shape of a flat plate or a thin plate, with the Z-direction and -Z-direction as the thickness directions, and as the direction perpendicular to the surface of the surface-shaped vibration actuator. The vibration actuator 10 is configured on the back side of the operating device in the thickness direction (direction perpendicular to the surface) to enable the operating device to vibrate.

[0091] The vibration actuator 10 includes a magnetic core (first planar body) 30, an elastic support portion 60, an electromagnet portion 20, a counterweight 90, a magnetic yoke (third planar body) 80, a counterweight 92, an elastic support portion 62, an electromagnet portion 22, and a magnetic core (second planar body) 32. In the vibration actuator 10, the elastic support portion 60, the electromagnet portion 20, the counterweight 90, the magnetic yoke 80, the counterweight 92, the elastic support portion 62, the electromagnet portion 22, and the magnetic core 32 are sequentially stacked on the magnetic core 30.

[0092] The magnetic pole portion 34, the substrate portion 40, and the coil 50 constitute the electromagnet portion 20, and the magnetic pole portion 36, the substrate portion 42, and the coil 52 constitute the other electromagnet portion 22.

[0093] Electromagnetic parts 20 and 22 are respectively disposed between two planar bodies (between magnetic core 30 and magnetic yoke 80, and between magnetic core 32 and magnetic yoke 80).

[0094] The electromagnets 20 and 22, together with the two planar bodies, constitute a vibration unit. The movable parts of the multiple vibration units relative to the magnetic cores 30 and 32 are composed of the same magnetic yoke 80 and counterweights 90 and 92.

[0095] In the vibration actuator 10, the vibration unit can cause the magnetic core 30 and the magnetic yoke 80, and the magnetic core 32 and the magnetic yoke 80 to move relative to each other in the Z direction by energizing each coil 50 and 52, thereby generating vibration.

[0096] The vibration actuator 10 is configured such that the electromagnet parts 20 and 22 mounted on the magnetic cores 30 and 32 have their coils 50 facing each other and staggered by 90 degrees with the coil axis as the center, with the movable part sandwiched in the vertical direction.

[0097] The electromagnet part 22, magnetic core 32, magnetic pole part 36, substrate part 42, coil 52, elastic support part 62, and counterweight 92 have the same structure as the electromagnet part 20, magnetic core 30, magnetic pole part 34, substrate part 40, coil 50, elastic support part 60, and counterweight 90. Therefore, the description of the electromagnet part 20, magnetic core 30, magnetic pole part 34, substrate part 40, coil 50, elastic support part 60, and counterweight 90 will be provided, and detailed descriptions of structures identical to them will be omitted.

[0098] <Magnetic core 30 (first planar shape), magnetic core 32 (second planar shape)>

[0099] The magnetic core 30 is a flat magnetic body, and its outer edge is arranged such that it is surrounded by an elastic support portion 60. The magnetic core 32 is formed in the same way as the magnetic core 30.

[0100] On the outer periphery of the magnetic core 30, a notch 302 is provided on one set of opposite sides for the movable part side connection 603 of the elastic support 60 to retract, and a plate-shaped protrusion 304 is provided on another set of opposite sides protruding outward from each opposite side.

[0101] The notch 302 and the plate-shaped protrusion 304 in the magnetic core 30 are respectively formed on adjacent edges on the outer periphery of the magnetic core 30.

[0102] A portion of the elastic support portion 60 (core-side connection portion 605) is fixed to the plate-shaped protrusion 304. The plate-shaped protrusion 304 has: a window portion 305, which is inserted into the extension portion 404 of the substrate portion 40 to prevent interference with the elastic support portion 60; and a fixing hole 308, which is fixed to the object to be installed (e.g., the frame of the product) by means of a fixing component such as a screw. The notch portion 302 and the plate-shaped protrusion 304 may also be formed only on one opposite side of each pair of opposite sides. In addition, it can be said that a pair of plate-shaped protrusions 304 symmetrically support the elastic support portion 60 with the coil 50 as the center.

[0103] The magnetic core 30 is formed of a magnetic material such as silicon steel sheet or SECC (steel electrolytic cold commercial sheet). Furthermore, when used as a movable part, the magnetic core 30 also functions as a counterweight.

[0104] <Electromagnet section 20 (Magnetic pole section 34, base plate section 40, coil 50)>

[0105] The electromagnet section 20 is formed in the shape of a thin plate and includes a magnetic pole section 34 that is magnetized in the thickness direction (Z direction), a coil 50, and a substrate section 40. The electromagnet section 20 is disposed on the magnetic core 30.

[0106] The magnetic pole portion 34 is a flat magnetic body whose radial length is longer than its thickness, for example, formed in the shape of a circular plate. The magnetic pole portion 34 is integrally disposed on the magnetic core 30, inside the coil 50, and connected to the magnetic core 30. The magnetic pole portion 34 and the magnetic core 30 together constitute the core of the electromagnet.

[0107] The magnetic pole section 34 is energized by the coil 50 and is magnetized together with the magnetic core 30, with the front and back sides becoming magnetic pole surfaces where magnetic flux flows in the vertical direction, i.e., the thickness direction.

[0108] The coil 50 is formed as a flat, annular shape with a radial length longer than its thickness. The coil 50 is disposed on the magnetic core 30, separated from the substrate portion 40. The coil 50 is arranged to surround the magnetic pole portion 34, and the axis of the coil 50 is aligned with the axis of the magnetic pole portion 34. Because the coil 50 is an annular shape without edge portions prone to deviation, it exhibits high manufacturability as a coil with stable characteristics.

[0109] The coil 50 can be formed into a thin (flat) circular ring and can be constructed in any way. For example, it can be formed from UEW (polyurethane enameled copper wire).

[0110] The coil 50 is connected to the base plate 40 via wiring at both ends of the coil windings. The coil 50 can be a conventionally wound coil, such as an air-core coil with coil windings (UEW) extending from the inside of the annular coil body at both ends, or it can be a so-called α-wound coil with coil windings protruding from the outer periphery of the coil body at both ends.

[0111] The substrate 40 is powered via a wiring section connected to the coil 50. The substrate 40 is formed in the form of a film. The substrate 40 is, for example, a flexible substrate (FPC), which is constructed by providing copper as a conductive foil on a polyimide (Pl) film and adopts a low elasticity design to avoid affecting the characteristics of the spring that serves as the elastic support 60.

[0112] The substrate portion 40 has a substrate body 402 with an opening 403 and an extension portion 404 extending from a portion of the outer periphery of the substrate body 402. A wiring portion is disposed throughout the substrate body 402 and the extension portion 404, and the wiring portion connects a coil 50 on the substrate body 402 to a pad 441 at the front end of the extension portion 404. The coil 50 is electrically connected to an external device via the pad 441.

[0113] The substrate body 402 is mounted entirely on the magnetic core 30 with magnetic pole portions 34 disposed within the opening 403. The opening 501 of the coil 50 is located at a position corresponding to the opening 403. The substrate body 402 has an insulating film, which functions as an insulator to insulate the magnetic core 30 and the coil 50 by being sandwiched between them.

[0114] The extension 404 is arranged to extend outward along the lower surface of the magnetic core 30, passing through the window 305. Thus, the extension 404 traverses the elastic support 60 connected to the plate-shaped protrusion 304 without interference and extends to the outside of the vibration actuator 10. Furthermore, since the extension 404 passes through the window 305, the substrate 40 is positioned relative to the magnetic core 30.

[0115] The substrate 40 is a flexible printed circuit board (FPC) that has both insulation and conduction functions to the coil 50 (based on the wiring section). Therefore, it can prevent insulation failure, improve the winding of the wiring supplying power to the coil, and suppress coil breakage. Furthermore, when using connectors or similar devices for connection, this connection can be easily made.

[0116] <Elastic Support Section 60>

[0117] The elastic support portion 60 connects and supports the magnetic core 30 and the magnetic yoke 80 in a way that allows them to move freely relative to each other. Specifically, the elastic support portion 60 is disposed on the outside of the coil 50 and connects the magnetic core 30 to the counterweight 90.

[0118] The elastic support portion 60 has a predetermined thickness (thickness in the Z direction) and is arranged in layers between the magnetic core 30 and the counterweight 90 in the thickness direction (Z direction). The predetermined thickness ensures the length of relative movement between the magnetic core 30 and the magnetic yoke 80 (counterweight 90).

[0119] The elastic support 60 is formed of SUS or the like and is a flat, frame-like body that can deform elastically, such as a leaf spring.

[0120] The elastic support portion 60 has an opening 601 and is formed into a rectangular frame surrounding the magnetic core 30 and the coil 50. It is disposed on the outside of the magnetic core 30 and elastically deforms along the thickness direction (Z direction) on the outside. That is, the frame-shaped portion of the elastic support portion 60, formed by the edges 602 and 604 located on the outside of the magnetic core 30, can elastically deform in the Z direction. Through the deformation of the frame-shaped portion, specifically the deformation that brings the magnetic core 30 and the counterweight 90 closer together, the elastic support portion 60 brings the magnetic core 30 and the counterweight 90, in other words, the magnetic core 30 and the magnetic yoke 80, closer together and then separates.

[0121] The elastic support portion 60 has movable-side connecting portions 603 on each of its pair of parallel sides 602. These movable-side connecting portions 603 are engaged with the counterweight 90, which is fixed to the magnetic yoke 80, in a stacked state in the Z direction. Specifically, the movable-side connecting portions 603 of the elastic support portion 600 are connected to the movable-side connecting portions 902 of the counterweight 90, so that the counterweight is suspended between the movable-side connecting portions 603 of the pair of sides 602. Thus, the elastic support portion 60 provides elastic support to the movable side using a pair of portions on opposite sides, thereby providing well-balanced support and stable vibration.

[0122] Additionally, the elastic support portion 60 has a core-side connecting portion 605 on another pair of side portions 604 adjacent to a pair of side portions 602. The core-side connecting portion 605 engages with the plate-shaped protrusion 304 of the magnetic core 30 in a stacked state in the Z direction. The elastic support portion 60 is connected to the magnetic core 30 through a plurality of core-side connecting portions 605 that protrude inward from portions equally spaced apart from the frame body, and is connected to the counterweight 90 through other portions equally spaced apart from the core-side connecting portions 605, namely the movable part-side connecting portions 603.

[0123] The movable part side connecting portion 603 and the core side connecting portion 605 are plate-shaped portions (plate-shaped pieces) that protrude inward from the edges 602 and 604 of the frame-shaped portion constituting the elastic support portion 60. The movable part side connecting portion 603 and the core side connecting portion 605 are connected to the movable part joining portion 902 and the plate-shaped protrusion 304 respectively at their respective opposite edges of the elastic support portion 60, such that their surfaces contact each other in the Z direction.

[0124] The movable part side connecting part 603 and the core side connecting part 605 are arranged in the rectangular frame-shaped elastic support part 60 at a position rotated 90 degrees from each other, and are configured to have the same length and the same width. As a result, it is not necessary to determine the orientation of the elastic support part 60 during assembly, thus improving assemblability.

[0125] Furthermore, the elastic support 60 is a frame-like structure, which allows for an extension of the spring length and ensures stable assembly. Additionally, the elastic support 60 is a one-piece construction, thus improving component precision.

[0126] The elastic support portion 60 is disposed between the counterweight 90 and the magnetic core 30. The thickness of this space, i.e., the elastic support portion 60, defines the gap between the counterweight 90 and the electromagnet portion 20, i.e., the maximum movable range of the magnetic yoke 80. Furthermore, the thickness of each component refers to its "length in the Z direction." The elastic support portion 60, the counterweight 90, and the magnetic pole portion 34 are disposed between the magnetic core 30, which is a flat plate, and the magnetic yoke 80; therefore, the gap is set, for example, by the thickness of the counterweight 90 + the thickness of the elastic support portion 60 - the thickness of the magnetic pole portion 34.

[0127] The elastic support 60 deforms in the layer between the magnetic core 30 and the counterweight 90. The elastic support 60 provides good balance and support for one side of the counterweight 90 and the electromagnet part 20 relative to the other side in a state perpendicular to the opposite direction (vibration direction), allowing them to move freely from one side to the other.

[0128] In addition, such as Figure 4 As shown, the elastic support portion 60 is located in approximately the same layer as the coil 50 and the magnetic pole portion 34. Therefore, compared to a structure in which the elastic support portion 60 is stacked on top of the coil 50 and the magnetic pole portion 34, the thickness can be reduced, achieving an overall thinner profile. The elastic support portion 60 is positioned at a location that does not interfere with the magnetic core 30 on which the coil 50 and the magnetic pole portion 34 are disposed, and it deforms and displaces in the Z direction.

[0129] Furthermore, when the movable part 60 is movable relative to the electromagnet part 20, the displacement amount and natural vibration frequency of the movable part can be determined by setting the spring constant Ksp, and the resonant frequency can also be adjusted. In addition, when the movable part is driven (when it is movable), that is, when the coil 50 is energized, mechanical tactile sensation is generated by displacement.

[0130] <Weight 90>

[0131] The counterweight 90 is used to ensure the increase of the weight of the movable part and to create a gap in the movable area of ​​the elastic support part 60. The counterweight 90 is disposed on the lower surface 802 of the magnetic yoke 80 and has a predetermined length (thickness) in the vertical direction, so that the magnetic yoke 80 is separated from the electromagnet part 20 in the vertical direction.

[0132] The counterweight 90 is a frame-shaped plate, for example, formed in a rectangular frame shape. The counterweight 90 is mounted on the lower surface 802 of the magnetic yoke 80 and engages with the elastic support 60 via a movable joint 902 with a set of parallel opposite sides. The movable joint 902 has holes for connecting with the elastic support 60 and is formed protruding outward on each of a set of opposite sides.

[0133] The counterweight 90 is connected to the movable part connecting part 603 of the elastic support part 60 via the movable part connecting part 902 of the counterweight 90, and the counterweight 90 is suspended between the movable part connecting parts 603. The elastic support part 60 is deformably connected to the counterweight 90 on the outer periphery of the counterweight 90.

[0134] The counterweight 90 has a recess 904 on the opposite side, which is different from the opposite side of the movable joint 902. The recess 904 prevents interference with the core-side connection 605 of the elastic support 60 that moves in the vertical direction (Z direction).

[0135] like Figure 4 As shown, the counterweight 90 is, for example, formed as a square frame corresponding to the shape of the magnetic yoke 80. The counterweight 90 is sandwiched between the magnetic yoke 80 and the elastic support 60.

[0136] The counterweight 90 has a shape that avoids the coil 50 when the magnetic yoke 80 is displaced due to the deformation of the elastic support portion 60. The counterweight 90 is positioned outside the magnetic pole portion 34 and the coil 50 at a location that surrounds the magnetic pole surface that forms the magnetic yoke 80 (the central portion of the lower surface 802 opposite to the magnetic pole portion 34).

[0137] The counterweight 90 separates the magnetic yoke 80 from the magnetic core 30 by its length (thickness) in the vertical direction. The thickness of the counterweight 90, together with the elastic support part 60 and the magnetic pole part 34, forms the gap between the magnetic yoke 80 and the coil 50 and the magnetic pole part 34.

[0138] Therefore, the elastic support 60 can move to the same layer as the magnetic core 30, increasing the movable area. Thus, the movable area of ​​the movable part in the vibration actuator 10 is sufficiently set, enabling it to have appropriate vibration characteristics. Furthermore, this air gap is also formed in the vibration unit of the embodiments described later.

[0139] The counterweight 90 has a predetermined thickness that forms part of the deformation area of ​​the elastic support 60, thereby separating the elastic support 60 from the magnetic yoke 80 in the thickness direction (Z direction). In addition, the counterweight 90 separates the electromagnet part 20, i.e., the magnetic core 30, the coil 50, and the magnetic pole part 34 from the magnetic yoke 80 in the vibration direction (vertical direction, Z direction).

[0140] The counterweight 90 is formed, for example, from a high-precision steel sheet using austenitic stainless steel strip manufactured by cold rolling. The counterweight 90 is a non-magnetic material, but it can also be formed from either a magnetic material or a non-magnetic material, thus forming the magnetic circuit of the vibration actuator 10.

[0141] Furthermore, in each embodiment, the counterweight 90 can also increase the degree of freedom of elastic components such as leaf springs used in the elastic support 60 according to its design.

[0142] The counterweight 90 is made of sheet metal, allowing the use of sheet metal with a thickness that is easy to set accurately, thus improving the precision of the gap. Alternatively, the counterweight 90 can be made of a high-density material, which increases the weight of the movable part and thus increases the generated vibration. Furthermore, when the counterweight 90 is used as a counterweight for the movable part, its weight can be adjusted to set the natural vibration frequency of the movable part.

[0143] <Magnetic yoke (third facet) 80>

[0144] The magnetic yoke 80 is positioned opposite the electromagnet part 20 and is configured to move relative to the electromagnet part 20 towards each other. The magnetic yoke 80 and the counterweight 90 are integrally provided and function as a movable part relative to the magnetic core 30. The vibration actuator generates vibration by moving the magnetic yoke 80.

[0145] The magnetic yoke 80 is positioned above the magnetic pole portion 34 and the coil 50 on the lower surface 802. The magnetic yoke 80 is a rectangular plate-shaped planar body, for example, a planar body that is square when viewed from above. The magnetic yoke 80 is engaged with the elastic support portion 60 together with the counterweight 90 (movable part joint portion 902) on the lower surface 802 through a fixing portion 804 formed in the central portion of the opposing pair of sides.

[0146] The magnetic yoke 80 faces the magnetic pole portion 34. When the coil 50 is energized, the magnetic yoke 80 attracts the magnetic pole portion 34 by means of the magnetic attraction force generated between them. The magnetic yoke 80 is also positioned opposite the magnetic core 30, and they attract each other by means of the magnetic attraction force generated between the magnetic core 30 and the outer periphery of the magnetic pole portion 34.

[0147] The magnetic yoke 80 is composed of a single plate-shaped magnetic body and has high flatness. The magnetic yoke 80 can also be formed from soft magnetic materials such as silicon steel, permalloy, and ferrite. Alternatively, the magnetic yoke 80 can also be formed from electromagnetic stainless steel, sintered materials, MIM (metal injection molding) materials, laminated steel plates, and SECC (steel electrolytic cold commercial steel). The magnetic yoke 80 is particularly preferably made of silicon steel or SECC.

[0148] The magnetic yoke 80 is a flat plate with high flatness, so it can be arranged opposite to the magnetic pole surface of the magnetic pole section 34 with equal intervals, which can improve the accuracy of the gap surface and effectively exert the magnetic attraction between it and the electromagnet section 20.

[0149] The magnetic yoke 80 can adjust the airflow path within the internal space by changing its shape.

[0150] In addition, the magnetic yoke 80 is connected to the elastic support portion 62 together with the counterweight 92 on the upper surface 803 via the fixing portion 806 formed in the center of another pair of sides.

[0151] <Counterweight 92, base plate 42, elastic support 62, magnetic core 32>

[0152] The assembly of counterweight 92, substrate 42, elastic support 62, electromagnet 22 and magnetic core 32 is the same as the assembly of counterweight 90, substrate 40, elastic support 60, electromagnet 20 and magnetic core 30, and is also stacked from the magnetic core 32 side.

[0153] The counterweight 92, base plate 42, elastic support 62, electromagnet 22, and magnetic core 32 are arranged symmetrically about the magnetic yoke 80, with respect to the counterweight 90, base plate 40, elastic support 60, electromagnet 20, and magnetic core 30. Furthermore, the counterweight 92, base plate 42, elastic support 62, electromagnet 22, and magnetic core 32 are arranged in a state where they are rotated 90 degrees about the central axis of the vibration actuator 10.

[0154] Specifically, the counterweight 92 is disposed on the upper surface 803 of the magnetic yoke 80 at an orientation offset by 90 degrees from the magnetic yoke 80 with respect to the central axis of the vibrating actuator 10, and is fixed by the fixing part 806 via the movable part engagement 902. The movable part engagement 902 of the counterweight 92 is fixed to the set of opposite sides and the set of adjacent opposite sides that are engaged by the movable part engagement 902 of the counterweight 90.

[0155] An elastic support 62 is provided on the counterweight 92, and is connected to the movable side connection 603 of the elastic support 62 via a movable part joint 902.

[0156] On the elastic support portion 62, a coil 52 and a magnetic pole portion 36 (see reference 60) are connected in the same manner as on the elastic support portion 60. Figure 4 as well as Figure 5 ) magnetic core 32.

[0157] <Action of Vibration Actuator 10>

[0158] Figure 5 It is a diagram used to illustrate the operation of a vibration actuator.

[0159] In the vibration actuator 10, when no power is applied, energizing the coils 50 and 52 generates magnetic attraction between the magnetic poles 34 and 36, the magnetic cores 30 and 32, and the magnetic yoke 80. As a result, the magnetic yoke 80 and the magnetic core 32 are movable in a manner that allows them to approach or separate from the magnetic core 30.

[0160] Furthermore, the magnetic core 32 can move only relative to the magnetic yoke 80, or it can move together with the magnetic yoke 80 toward the magnetic core 30.

[0161] As these magnetic yokes 80 and magnetic cores 32 move, the amount of air in the internal space between the magnetic core 30 and the magnetic yoke 80, and between the magnetic yoke 80 and the magnetic core 32, changes within the vibration actuator 10 (see black arrows).

[0162] When the magnetic core 30 is close to the magnetic yoke 80, or when the magnetic yoke 80 is close to the magnetic core 32, the air in the internal space between the magnetic core 30 and the magnetic yoke 80, and the internal space between the magnetic yoke 80 and the magnetic core 32, is compressed. The compressed air is released to the outside (indicated by the direction of the black arrow). By adjusting the amount of compressed air released, the vibration actuator 10 can dampen the vibration.

[0163] Furthermore, when the magnetic core 30 is separated from the magnetic yoke 80 or the magnetic yoke 80 is separated from the magnetic core 32, air flows in from the outside into the internal space between the magnetic core 30 and the magnetic yoke 80, and into the internal space between the magnetic yoke 80 and the magnetic core 32. As a result, the compressed state of the air in the internal space is released.

[0164] <Example of vibration actuator operation>

[0165] Figures 6-9 This is a schematic cross-sectional view illustrating an example of the operation of the main structural components of a vibration actuator when energized.

[0166] The vibration actuator 10 increases the magnetic attraction in the magnetic circuit by using multiple coils 50, 52. In addition, the vibration actuator 10 uses multiple elastic support parts 60, 62 (e.g., leaf springs), so by setting the spring constant and the weight of the movable part as described later, it becomes a multi-resonance actuator with more than two resonance points.

[0167] One of the vibration units can operate (when one side of the coil is energized).

[0168] In vibration actuators, for example, such as Figure 6 As shown, when the coil 52 on the movable part side is energized to make the vibration actuator 10 movable, magnetic flux flows from the magnetic pole part 36 toward the direction in which the magnetic field is formed by the magnetic yoke 80. As a result, the magnetic yoke 80 is attracted by the upper magnetic pole part 36 (indicated by the central solid arrow).

[0169] Additionally, magnetic flux flows from the counterweight 92 on the magnetic yoke 80 to the magnetic core 32 (solid arrows on the left and right). As a result, the counterweight 92 is attracted by the magnetic core 32. At the same time, magnetic flux (dashed arrows) also flows through the magnetic yoke 80 and the counterweight 90 to the magnetic pole section 34 and the magnetic core 30, generating a magnetic attraction between them.

[0170] In this way, by energizing the coil 52 on the movable part side, the movable part on the magnetic core 30, which functions as a fixed part, moves toward the magnetic core 30.

[0171] This is independent of the direction of energization to coil 52; magnetic core 32 and magnetic yoke 80 are movable in a manner that approaches magnetic core 30. That is, by the magnetic force generated by energizing the plurality of coils 50 and 52, at least two of the magnetic cores (first planar body) 30, magnetic cores (second planar body) 32, and magnetic yokes (third planar body) 80 are displaced and vibrate in a manner that approaches each other.

[0172] When the magnetic attraction is released, the magnetic core 32 and the magnetic yoke 80 are displaced in a direction away from the magnetic core 30.

[0173] Additionally, in the vibration actuator 10, for example, such as Figure 7 As shown, when the coil 50 on the fixed side is energized to make the vibration actuator 10 movable, magnetic flux flows from the magnetic pole section 34 toward the magnetic yoke 80. That is, the magnetic yoke 80 approaches the magnetic pole section 34 by the magnetic attraction generated from the magnetic pole section 34 (refer to the central solid arrow). The magnetic yoke 80 generates magnetic poles due to its influence, and the magnetic flux flows through the magnetic core 32, approaching the magnetic yoke 80 by the magnetic core 32 (refer to the central dashed arrow). In addition, the magnetic flux flows from the counterweight 90 under the magnetic yoke 80 to the magnetic core 30 (left and right solid arrows). As a result, the counterweight 92 is attracted by the magnetic core 32. At the same time, the magnetic flux (dashed arrow) also flows through the magnetic yoke 80 and the counterweight 90 toward the magnetic pole section 34 and the magnetic core 30, generating a magnetic attraction between them.

[0174] Furthermore, regardless of the direction of energization of the coil 50 towards the fixed part, the magnetic yoke 80 and the magnetic core 32 are movable in a manner that approaches the magnetic core 30. When the magnetic attraction state is released, the magnetic core 32 and the magnetic yoke 80 are displaced in a direction away from the magnetic core 30.

[0175] <Both sides of the vibration unit can operate (both coils are energized)>

[0176] In the vibration actuator 10, the case where both driving sides of multiple vibration units are energized will be explained. When driving both sides of multiple vibration units, coils 50 and 52 are energized.

[0177] In the vibration actuator 10, for example, as Figure 8 As shown, even when the energizing directions of coils 50 and 52 are different, a magnetic field is generated from the magnetic pole portions 34 and 36 on the inner sides of the coils 50 and 52, which are arranged above and below the magnetic yoke 80, toward the magnetic yoke 80.

[0178] In addition, a magnetic field is generated from the counterweight 90 below the magnetic yoke 80 toward the magnetic core 30, and a magnetic field is generated from the counterweight 92 above the magnetic yoke 80 toward the magnetic core 32.

[0179] As a result, the magnetic core 32 and the magnetic yoke 80, which are movable parts, move toward the magnetic core 30 side of the fixed part (movable).

[0180] Furthermore, in this energized driving method, the magnetic fields from the magnetic cores 30 and 32 to the magnetic yoke 80 are of the same pole (e.g., N pole). When the magnetic yoke 80 collides, the magnetic flux extends along the upper and lower surfaces 803 and 802 of the magnetic yoke 80.

[0181] Therefore, the magnetic weights 90 and 92 disposed on the outer periphery of the magnetic yoke 80 can generate a magnetic attraction force across the entire surface of the magnetic yoke 80 by reducing the gap between their surfaces and those of the opposing magnetic cores 30 and 32. This suppresses deformation of the components during operation due to the low rigidity associated with thinning.

[0182] like Figure 9 As shown, when the coils 50 and 52 in the vibration actuator 10 are energized in the same direction, a magnetic field is generated from the magnetic pole portions 34 and 36 located on the inner sides of the upper and lower coils 50 and 52 respectively, toward the magnetic yoke 80. As a result, the upper and lower surfaces 803 and 802 of the magnetic yoke 80 collide with different magnetic poles.

[0183] For example, the magnetic pole portion 34 on the magnetic core 30 becomes the S pole, and the magnetic pole portion 36 on the magnetic core 32 becomes the N pole. In addition, the counterweight 90 below the magnetic yoke 80 generates a flow of magnetic flux from the magnetic core 30, and the counterweight 92 above the magnetic yoke 80 generates a magnetic field toward the magnetic core 32.

[0184] During this energization, opposite poles collide on opposite sides in the magnetic yoke 80, thus the magnetic flux is concentrated on the surfaces of the magnetic pole portions 34 and 36, which can generate a stronger magnetic attraction.

[0185] As a result, the magnetic core 32 and the magnetic yoke 80, which are movable parts, move toward the magnetic core 30 side of the fixed part (movable).

[0186] In the vibration actuator 10, if the magnetic core 32 is used as a fixed part, then the magnetic core 30 and the magnetic yoke 80 together become movable parts. The movable direction of energizing the coils 50 and 52 is the same as... Figure 9 Conversely, the magnetic core 30 is movable together with the magnetic yoke 80, moving towards the magnetic core 32.

[0187] Figure 10 A, Figure 10 B and Figure 10 C is a diagram representing an example of an operating signal input to the coil. Additionally, in Figure 10 A, Figure 10 B and Figure 10 In C, voltage, current, and displacement correspond to the displacement of the movable part (magnetic yoke 80 or magnetic core 32) caused by the supplied driving current pulse.

[0188] When controlling vibration in the vibration actuator 10, vibration can also be controlled by inputting pulse signals to coils 50 and 52.

[0189] For example, Figure 10 The signals shown in A~10C are diagrams illustrating an example of control of a vibration actuator based on pulse signals. Specifically, Figure 10 C is an example of a signal supplied in a way that shortens the decay period of the vibration based on the main driving pulse.

[0190] Figure 10 A indicates the operation of the vibration actuator when a single pulse of driving current is input. When a pulse signal is input to the coil, the magnetic poles 34 and 36 are energized via the coil, and the movable part of the magnetic yoke 80 or the magnetic core 32 is displaced downward by magnetic attraction.

[0191] Then, when the current is disconnected, the magnetic attraction is released, and the movable part rises and displaces due to the reaction force of the elastic support (spring). This causes vibration. Furthermore, the tactile sensation imparted to the user through this vibration is called a weak tactile sensation.

[0192] Figure 10 B indicates the operation of the vibration actuator when two drive current pulses are input. In this control, the initial pulse is input, and a second pulse is input at a timing that corresponds to the maximum displacement of the movable part based on the initial pulse input. This increases the amplitude (G value) of the movable part, maximizing the amplitude. Consequently, a stronger vibration can be delivered, providing a tactile feedback.

[0193] Figure 10 C inputs the driving current pulse as two pulses in two groups to the coil.

[0194] The initial two pulses are input, and after the movable part reaches its maximum amplitude, a second set of two driving current pulses is input during the vibration echo following the current disconnection. This interrupts the vibration echo, resulting in a vibration with a good disconnection feel. Figure 10 The driving current pulse of C acts as a braking pulse signal, which attenuates the vibration caused by the current pulse.

[0195] Therefore, it is possible to provide various vibration variations.

[0196] Furthermore, each signal can be input to multiple coils 50 and 52, thus generating a wider variety of vibrations, such as providing various tactile cues.

[0197] The vibration actuator 10 achieves cost reduction and is capable of generating various vibrations by using multiple identical component structures through improvements in movable part weight, magnetic circuit enhancement, and control methods.

[0198] Furthermore, if the magnetic yoke 80 is made into a movable part, the spring constant can be increased as the weight of the movable part increases.

[0199] In the vibration actuator 10, a flexible substrate 40 is led out from the magnetic core 30 mounted on the opposing surface. Therefore, when the wiring end is the opposing surface, the flexible substrate will not obstruct the movement of the movable part during driving.

[0200] Figure 11 These are diagrams illustrating an example of the operation of a vibration actuator corresponding to an action signal input to multiple coils. Figures 12-14 show examples of the operation of such actuators. Figure 11 The diagram shows the operation of the vibration actuator corresponding to the action signal shown. Figures 12-14 are used. Figure 5 The main structural diagram shown illustrates the process of moving towards... Figure 11 The vibration actuator shown is driven by the timing of the input action signal (applied driving voltage) of coil A and coil B. Figure 11 The coils A and B shown correspond to the coils 50 and 52 of the vibration actuator 10 shown in Figures 12 to 14.

[0201] Specifically, Figures 12A-14B Corresponding to Figure 11 Timing of input action signals (applying driving voltage) to coils A and B (1) ~ (10).

[0202] In addition, Figure 11 In the diagrams showing coils A and B receiving input action signals (driving voltage) and corresponding coils 50 and 52 in Figures 12-14, the state in which current flows through the coils (energized state) is illustrated with shaded lines. Furthermore, when the currents flowing through coils A and B (coils 50 and 52) are opposite in the energized state shown with shaded lines, the diagrams are illustrated by changing the orientation of the shaded areas to correspond to each other. In Figures 12-14, arrows represent the "movement of the movable part," the reaction force (called "spring reaction force") of the elastic support 60 and elastic support 62 generated by the movement of the movable part, and the "magnetic attraction force," respectively, with the size of the arrows indicating the difference in their magnitudes. Additionally, in... Figure 12A , Figure 12B , Figure 12C , Figure 12D , Figure 13A , Figure 13B , Figure 13C , Figure 13D , Figure 14A as well as Figure 14B For convenience, the elastic support parts 60 and 62 are omitted.

[0203] Figures 11-12 The vibration actuator 10 described in section 4 fixes the upper magnetic core 32 to the touchpad, which is the object to which vibration is applied, in the vibration prompting device, thus becoming a vibration actuator suspended from the lower surface of the touchpad. Furthermore, Figure 11 The coils A and B shown (coils 50 and 52 in Figures 12-14) are not connected and are controlled by applying driving voltages independently.

[0204] In addition to the magnetic attraction between the two vibrating units, the vibrating actuator 10 can also drive the movable part using the reaction force of the elastic supports 60 and 62. Using the magnetic attraction between the two vibrating units, they can attract objects to each other in the same direction together with the spring reaction force, or make their attraction repel each other and separate them.

[0205] exist Figure 11 In the process, the non-drive state where the coil is not energized (the state of timing (1)) is the state of coils A and B indicating the destination of (1) (non-energized state). The state of the vibration actuator 10 corresponding to this timing (1) is as follows: Figure 12A As shown, this becomes the initial state where the magnetic yoke 80 is located at the initial position D.

[0206] In addition, Figure 12A In the vibration actuator 10 shown, the weight of the movable part M, which is magnetically attracted by the vibration unit having an electromagnet part 22, is greater than the weight of the movable part m, which is magnetically attracted by the vibration unit having an electromagnet part 20 (the weight of the movable part M > the weight of the movable part m). The resonant frequency F0 of the movable part M and the resonant frequency f0 of the movable part m can be F0 < f0, or they can be set to F0 = f0 by adjusting the spring constant.

[0207] For the vibration actuator 10 in its initial state, if current flows simultaneously in the same direction through coils A and B (at time (2)), then as follows Figure 12B As shown, the vibration actuator 10 begins to attract magnetically.

[0208] exist Figure 12B In the vibration actuator 10 shown, the vibration units of the electromagnet sections 20 and 22 each generate a magnetic attraction force with the magnetic yoke 80 in the same direction (downward in this case), including the movable part of the magnetic yoke 80 and the magnetic core 30 moving towards the magnetic core 32 (see "Action of the movable part"). With this movement, a "spring reaction force" exerting a downward force is generated in the elastic support section (not shown). That is, it is driven in a way that pulls the movable part closer to the magnetic core 32.

[0209] Next, as shown at time (3), by stopping the energization of coils A and B, as... Figure 12C As shown, the vibration actuator 10 controls the vibration aftershock of the movable part when the stop coil is energized. At this time, in Figure 11 In the energized state T1 shown for coils A and B, the energization of coil B is stopped after the energization of coil A is stopped, but this is not the only possibility.

[0210] In the energized state T1 (and the same applies to T2~T5), it is preferable to adjust the timing in conjunction with the movement of the movable part so that the movement of the vibrating unit with electromagnet part 22 and the vibrating unit with electromagnet part 20 ends simultaneously.

[0211] In the vibration actuator 10, the movable part M, which is movable via the electromagnet part 22, is more movable than the movable part m, which is movable via the electromagnet part 20 (see reference). Figure 12A Therefore, when the displacement of movable part M and the displacement of movable part m are the same, it takes a longer time to attract movable part M compared to movable part m, which is lighter in weight.

[0212] In the energized state T1, to ensure the displacements are the same, the energizing of coil A (the magnetic attraction movable part m) is stopped first, and the energizing of coil B is prolonged, thus extending the magnetic attraction time of movable part M. Alternatively, the resonant frequencies of both coils can be adjusted to F0 = f0, and the timing of starting and stopping the energizing of the coils can be controlled accordingly. The energizing of coils A and B can also be stopped simultaneously.

[0213] During timing (4), although no energizer is applied to coils A and B, overshoot occurs due to inertia after the voltage application to coils A and B ends. Figure 12D As shown, the movable part (magnetic yoke 80, magnetic core 30, electromagnet part 20) is in the state closest to the magnetic core 32. That is, the movable part M, which is movable by the electromagnet part 22 (see reference). Figure 12A The movable part m, which is movable by the electromagnet part 20 below, is attracted to the magnetic core 32 by the magnetic attraction and is located at the lowest point, becoming the position where the respective spring reaction force is the maximum.

[0214] At timing (5), when the spring reaction force is at its maximum, current flows simultaneously in opposite directions through coils A and B, driving multiple vibrating units (equivalent to electromagnet parts 20 and 22). At timing (5), as... Figure 13A As shown, in addition to the spring reaction force on the movable part M, the electromagnets 20 and 22 generate a magnetic repulsion force by energizing coils A and B, with their like poles facing each other.

[0215] The movable part (magnetic yoke 80, magnetic core 30, electromagnet part 20) is controlled to move downwards at an accelerated speed (accelerator control). Specifically, in the force that causes the movable part to move downwards due to the spring reaction force of the two elastic support parts (not shown), a magnetic repulsive force of the same poles of electromagnet parts 20 and 22 is applied to each other.

[0216] As a result, while the magnetic yoke 80, the magnetic core 30, and the electromagnet part 20 move downward, the electromagnet part 20 and the magnetic core 30 further move in a manner that separates from the magnetic yoke 80 downward.

[0217] At the timing when energizing coils A and B stops (6), such as Figure 13B As shown, in each vibration unit, there is a spring reaction force from the elastic support (not shown) that exerts an upward force on each movable part, and magnetic attraction forces in mutually separating directions.

[0218] At the timing of stopping the energization of coils A and B (7), such as Figure 13C As shown, the magnetic yoke 80 and the magnetic core 30 are in their most separated state relative to the magnetic core 32, and the spring reaction force of the elastic support portion (not shown) that provides elastic support to each is at its maximum. That is, in Figure 13C In the middle, the movable part (mainly the magnetic core 30) is in an overshoot state due to inertia, and the magnetic yoke 80 and the magnetic core 30 have exceeded their initial positions, and the elastic support part (spring) is fully extended.

[0219] Next, through the spring reaction force and magnetic attraction force, control is applied to move the magnetic yoke 80 and the magnetic core 30 toward the magnetic core 32 side and to apply braking to this movement. This is a control that produces a vibration different from the vibration that decays through free vibration from the state of timing (7), and is a control that gives a tactile sensation of so-called shaking.

[0220] Specifically, in the state indicated by timing (7), in order to lift the heavier movable part (including the movable parts of the magnetic yoke 80 and the magnetic core 30) first, coil B is energized at timing (8). Furthermore, the timing of energizing coils A and B can be controlled by adjusting the movable parts M and m and their respective resonant frequencies F0 and f0, and they can also be energized simultaneously. In the vibration actuator 10 in the state of timing (8), as... Figure 13D As shown, the magnetic attraction force of the electromagnet part 22, relative to the magnetic yoke 80 and the magnetic core 30, generates a force from... Figure 13C The state of the spring reaction force on the two magnetic cores 32 sides (upper side) generates a force that moves towards the magnetic cores 32 sides.

[0221] Next, in order to stop the movement of the movable part (magnetic yoke 80, magnetic core 30, etc.) towards the magnetic core 32, its movement and free vibration are braked.

[0222] As shown in timing (9), in coil A, current flows in the opposite direction to that of coil B, as follows: Figure 14A As shown, the movement of the movable part toward the magnetic core 32 side (upper side) is braked, that is, magnetic repulsion braking is applied. Thus, in the vibration actuator 10 at timing (10), the upward-moving movable part is suddenly braked, thereby preventing the free vibration from decaying. Figure 14B As shown, the initial position D indicates a good break in vibration.

[0223] Furthermore, in each vibration unit of the vibration actuator 10, the multiple electromagnet sections 20 and 22, each having a magnetic pole section 34 and a magnetic pole section 36 respectively, exhibit individual differences (differences in inherent values) depending on the applied voltage. In this case, adjustments can be made to... Figure 12A The weights of the movable parts M and m, and their resonant frequencies F0 and f0, are used to address this.

[0224] <Variation Example>

[0225] Figure 15 This is a sub-assembly diagram of a vibration actuator according to a modified embodiment 1 of the present invention. Figure 15 This is a diagram showing the vibration actuator 10A viewed from above.

[0226] In the vibration actuator 10, multiple electromagnets 20 and 22 are respectively disposed on the magnetic cores 30 and 32, but are not limited to this. They can be disposed at any position as long as they are in their respective positions.

[0227] For example, such as Figure 15 As shown in the vibration actuator 10A, the magnetic pole portions 34 and 36 of the electromagnet portions 20 and 22 can also be provided on the lower surface 802 and upper surface 803 of the magnetic yoke 80 disposed between the magnetic cores 30 and 32. The vibration actuator 10A differs from the vibration actuator 10 only in the arrangement of the magnetic pole portions 34 and 36. The diagram showing the vibration actuator 10A viewed from below is similar to... Figure 15 The same diagram is in Figure 15 A diagram showing the positions of the constituent elements of a lieutenant general upside down.

[0228] That is, in this vibration actuator 10A, the counterweight 90 on the lower surface 802 of the magnetic yoke 80 (refer to...) Figure 5 The magnetic core 30 is assembled via the elastic support 60, and the magnetic pole portion 34 is disposed separately from the magnetic core 30 on the inner side of the coil 50 on the side of the magnetic core 30.

[0229] Additionally, a substrate portion 42 and a coil (see reference) are provided. Figure 3 The magnetic core 32 of the coil 52 is assembled to the counterweight 90 via the elastic support 62, and the magnetic pole part 36 is disposed separately from the magnetic core 32 on the inner side of the coil (not shown) on the side of the magnetic core 32.

[0230] Reference Figure 5 To explain, the structure of the vibration actuator 10A is as follows: Figure 5 The vibration actuator 10 shown has a structure in which magnetic pole portions 34 and 36 are moved vertically and disposed on the lower surface 802 and upper surface 803 of the magnetic yoke 80, respectively. Therefore, the vibration actuator 10A can have the same function as the vibration actuator 10.

[0231] Furthermore, in the vibration actuator 10A, reference Figure 5 The structure is explained as follows: the internal space formed between the magnetic cores 30 and 32, and between the magnetic poles 34 and 36 of the electromagnet parts 20 and 22 and the coils 50 and 52, is a labyrinthine shape that is bent into a Z shape multiple times.

[0232] That is, the vibration actuator 10A is configured such that the internal spaces between the magnetic core 30 and the magnetic yoke 80, and between the magnetic yoke 80 and the magnetic core 32, are labyrinth-shaped, and labyrinth-shaped exhaust portions are provided on the upper and lower surfaces 803 and 802 of the magnetic yoke 80. This allows for vibration attenuation when the vibration actuator 10A is movable. Compared to the vibration actuator 10, the vibration actuator 10A can more effectively attenuate vibration.

[0233] (Implementation Method 2)

[0234] Figure 16 This is a sub-assembly diagram of the vibration actuator according to Embodiment 2 of the present invention.

[0235] In the structure of the vibration actuator 10, multiple electromagnet parts 20 and 22 are respectively provided on the magnetic cores 30 and 32 that can function as fixed parts, but it is not limited to this.

[0236] like Figure 16 The vibration actuator 10B shown can also be configured to be disposed on the upper and lower surfaces of the magnetic yoke 80, which is a movable part. Figure 16 In the vibration actuator 10B shown, an elastic support portion 60 is disposed on the magnetic core 30, and a core-side connection portion 605 is connected to the plate-shaped protrusion 304 of the magnetic core 30.

[0237] Similarly, the core 32 also has a core-side connection portion 605 of the elastic support portion 62 connected to the plate-shaped protrusion 304 of the core 32. The elastic support portion 60 and the elastic support portion 62 are positioned opposite each other, and between them, the magnetic yoke 80 is configured such that electromagnet portions 20 and 22 and counterweights 90 and 92 are respectively mounted on its upper and lower surfaces 803 and 802.

[0238] A coil (not shown, but equivalent to) is mounted on the lower surface of the magnetic yoke 80. Figure 2 as well as Figure 3 The electromagnet portion 20 (including the base plate portion 40, magnetic pole portion (not shown), and coil) faces downwards, with the coil 50 shown. Additionally, a counterweight 90 is fixed to the extension 404 of the base plate portion 40 on the lower surface, surrounding the coil (not shown). The counterweight 90 is fixed to the movable side connection portion 603 of the elastic support portion 60 via a movable part engagement portion 902 separated in the Y direction, together with the fixing portion 804 of the magnetic yoke 80.

[0239] On the upper surface 803 of the magnetic yoke 80, the electromagnet portion 22 (magnetic pole portion 36, substrate portion 40, coil 52) is arranged to overlap with the electromagnet portion 20 on the lower surface. Thus, the extension portions 404 are arranged to extend outward from the magnetic yoke 80 in an overlapping manner.

[0240] The counterweight 92 is positioned such that it surrounds the coil 52 while rotating 90 degrees from the counterweight 92. A movable part connecting part 603, on the movable part side, to which the elastic support part 62, to which the magnetic core 32 is fixed, is connected to the movable part joint 902 of the counterweight 92.

[0241] In the vibration actuator 10B, the wiring for the coils 50 and 52 can be centrally led to the outside from the movable magnetic yoke 80, which is positioned between the magnetic cores 30 and 32.

[0242] (Implementation Method 3)

[0243] Figure 17 This is a sub-assembly diagram of the vibration actuator according to Embodiment 3 of the present invention.

[0244] like Figure 17 As shown in the vibration actuator 10C, in the vibration actuator 10, the electromagnet part 22 can also be disposed on the magnetic yoke 80 instead of the magnetic core 32.

[0245] exist Figure 17 In the vibration actuator 10C shown, a magnetic yoke 80 is provided on a magnetic core 30, which is equipped with an electromagnet section 20, and is connected to a counterweight 90 via an elastic support section 60. A magnetic pole section 36, serving as the electromagnet section 22, a base plate section 42, and a coil 52 are arranged on the upper surface of the magnetic yoke 80. The magnetic pole section 36 faces the counterweight 92 and the magnetic core 32, which is positioned opposite to it and separated from it by the elastic support section 62.

[0246] Figure 18A as well as Figure 18B This diagram shows the installation status of the vibration actuator towards the vibration alert device. Figure 18A It is a type of suspension that is installed in a suspended state on the object being installed. Figure 18B It is a structure that connects to both the mounting surface and the opposing surface of the object being installed.

[0247] like Figure 18A As shown, when the vibration actuator 10C is fixed to the mounting object (mounting surface) in a suspended state within the device, vibration is imparted to the mounting surface via indirect drive. On the other hand, as... Figure 18B As shown, when the vibration actuator 10C is clamped between the mounting surface and the opposing surface in the device, vibration is directly applied to the mounting surface, which is the object to be mounted.

[0248] (Implementation Method 4)

[0249] Figure 19 This is a perspective view of the vibration actuator according to Embodiment 4 of the present invention. Figure 20 This is a sub-assembly diagram of the vibration actuator. Additionally, Figure 21 This is a schematic cross-sectional view showing the main structural components of the vibration actuator.

[0250] The vibration actuator 10 is formed with a structure having multiple elastic support parts 60, but it is not limited to any structure having electromagnet parts 20 and 22.

[0251] Figures 19-21 The vibration actuator 10D shown has the same basic structure as the vibration actuator 10, but is configured with a single elastic support and multiple electromagnet parts 20, 22.

[0252] Compared with the vibration actuator 10, the vibration actuator 10D has the same structure as the magnetic core (first planar body) 30, elastic support part 60, electromagnet part 20, counterweight 90, and magnetic yoke (third planar body) 80, but the stacked structure on top of it is different.

[0253] An electromagnet portion 22, namely a substrate portion 42, a magnetic pole portion 36, and a coil 52 are disposed on the upper surface 803 of the magnetic yoke 80, and a counterweight 92 is disposed in a manner surrounding the coil 52.

[0254] The counterweight 92 is fixed at different positions relative to the magnetic yoke 80 and the counterweight 90 by rotating 90 degrees, via the movable part joint 902.

[0255] The counterweight 92 is fixed with the magnetic core 32 in a stacked state.

[0256] In this structure, the magnetic core 30 is used as a fixed part and is mounted on the mounting surface that is the object to be mounted. In addition to serving as the magnetic yoke 80, the magnetic core 32, and the counterweights 90 and 92, the electromagnet part 22 also functions as a movable part that is connected to the magnetic core 30 via the elastic support part 60.

[0257] This allows for an increase in the weight of the movable part, which is driven by two electromagnets 20 and 22, thus enabling high vibration. Furthermore, since the elastic support part 60 is a single unit, cost reduction is achieved.

[0258] Furthermore, the magnetic core 32 of the vibration actuator 10D can also be used upside down with the magnetic core 30. Alternatively, the magnetic core 32 can be configured to rotate 90 degrees together with the counterweight 90 and be mounted on the magnetic yoke 80.

[0259] (Implementation Method 5)

[0260] Figure 22 This is a sub-assembly diagram of the vibration actuator according to Embodiment 5 of the present invention. Figure 23 This is a schematic cross-sectional view showing the main structural components of the vibration actuator in Embodiment 5.

[0261] In the structure of the vibration actuator 10, for example, an air hole may be provided to connect the internal space between the magnetic core 30 and the magnetic yoke 80, and between the magnetic yoke 80 and the magnetic core 32.

[0262] Figure 22 as well as Figure 23 The vibration actuator 10E shown is a structure in which an opening 800 is provided in the center of the magnetic yoke 80.

[0263] Because of the central opening 800, the height of the magnetic poles 34 and 36, which are arranged opposite each other on the magnetic yoke 80, can be increased. By arranging them close together through the opening 800, the gap is shortened, thereby increasing the magnetic attraction or repulsion force. In addition, the driving area of ​​the movable part can be ensured.

[0264] Furthermore, compared to a structure where the magnetic yoke 80 is used as a magnetic body to generate magnetic attraction, if the magnetic yoke 80 is used as a non-magnetic yoke, the magnetic flux does not pass through the non-magnetic yoke but instead generates magnetic attraction or repulsion at the opposing magnetic poles of the magnetic pole portions 34 and 36, thus driving the movable part. Additionally, by utilizing the magnetic repulsion of the magnetic pole portions 34 and 36, the initial direction of motion is changed, allowing the timing of drive-based control to be advanced, thereby increasing tactile interference. This structure can also be applied to vibration actuators of other embodiments formed similarly.

[0265] Figure 24 This is a schematic cross-sectional view showing the main structure of the vibration actuator according to Embodiment 6 of the present invention. In the structure of the vibration actuator 10, for example, it may also be a structure in which the magnetic yoke 80 has been removed.

[0266] Figure 24 The vibration actuator 10F shown is an integrated structure in which the magnetic yoke 80 is removed and the counterweights 92, 92 fixed to the upper and lower surfaces of the magnetic yoke 80 are fixed to each other.

[0267] In the vibration actuator 10F, between the magnetic cores 30 and 32, there are integrated counterweights 90 and 92 connected to the magnetic cores 30 and 32 respectively via elastic support parts (not shown). One of the magnetic cores 30 and 32 can move by magnetic attraction or repulsion between them.

[0268] Vibration actuators 10, 10A to 10E can be connected to a vibration prompt unit that receives user press operations via one of the magnetic cores 30 and 32 provided with electromagnet parts 20.

[0269] Furthermore, since it has multiple movable parts, the weight of the movable parts can be effectively increased based on the shared components. Therefore, the weight of the movable parts can be ensured without using high-density materials, thus achieving cost reduction.

[0270] Furthermore, the vibration actuator uses multiple electromagnets 20 and 22 to control the movement of multiple movable parts (magnetic yoke 80, magnetic core 32). By adjusting the direction of application to the multiple coils 50 and 52 or the winding direction of the coils 50 and 52, the direction of movement can be changed by utilizing the repulsion of the magnetic field.

[0271] In this way, the vibration actuator 10 is formed into a flat plate shape, with one of the electromagnet part 20 and the movable part serving as the movable part, moving in one direction of the stacking direction (thickness direction) to approach the fixed part serving as the other. Furthermore, the reaction force of the elastic support part 60 causes the two parts that are approaching to move in the opposite direction to separate, thereby generating vibration in the vibration actuator 10.

[0272] The vibration actuator 10 vibrates, for example, the mounting surface of the object to be installed, such as a touch panel, which is an operating surface for user operation, and the mounting surface is mounted on the product frame in a vibrating manner.

[0273] <Driving principle of vibration actuator 10>

[0274] The driving principle of the vibration actuator 10 is briefly explained below. The vibration actuator 10 can also be driven using the following motion equations and circuit equations, and by generating resonance through pulses. Furthermore, the action is not driven by resonance, but rather by the touchpad (see reference 500) of the vibration alert device 500. Figure 25 The operation of the actuator 10 can be achieved, for example, by inputting a current pulse (which can be single or multiple) via a control unit (not shown). Alternatively, as energizing the coil 50 via the control unit, the vibrating actuator 10 can also vibrate by inputting a sine wave or cosine wave voltage into the coil 50 from an AC power supply. Preferably, an AC voltage is applied to the vibrating actuator 10, and the vibrating actuator 10 vibrates when a sine wave drive signal is input.

[0275] It should be noted that in the vibration actuator 10, when the electromagnet part 20 is fixed to the frame, and all the components that freely support the vibration are made movable, the movable parts reciprocate based on equations (1) and (2). Furthermore, when the electromagnet part 20 is made movable, the movable parts have a fixed surface, and are fixed to the frame with the fixed surface, the same equations (1) and (2) are satisfied to perform the reciprocating motion by changing the movable object.

[0276] [Formula 1]

[0277]

[0278] m: mass [kg]

[0279] x(t): Displacement [m]

[0280] K f Thrust constant [N / A]

[0281] i(t): Current [A]

[0282] Ksp Spring constant [N / m]

[0283] D: Attenuation constant [N / (m / s)]

[0284] [Equation 2]

[0285]

[0286] e(t): Voltage [V]

[0287] R: Resistance [Ω]

[0288] L: Inductance [H]

[0289] K e Back electromotive force constant [V / (rad / s)]

[0290] That is, the mass m [kg], displacement x (t) [m], and thrust constant K of the vibration actuator 10. f The values ​​of [N / A], current i(t) [A], spring constant Ksp [N / m], and attenuation coefficient D [N / (m / s)] can be appropriately varied within the range that satisfies equation (1). In addition, the values ​​of voltage e(t) [V], resistance R [Ω], inductance L [H], and back electromotive force constant Ke [V / (rad / s)] can be appropriately varied within the range that satisfies equation (2).

[0291] Thus, the vibration in the vibration actuator 10 is determined by the mass m of the movable part and the spring constant Ksp of the metal spring (a leaf spring in this embodiment) that serves as the elastic support part 60. In addition, the vibration generated by the vibration actuator 10 can be set and changed by the input voltage (e.g., a pulse, a sine wave, or a cosine wave voltage).

[0292] Furthermore, in this embodiment, the actuator drive signal is equivalent to a drive current pulse (also called a "current pulse") supplied to the coil 50 as a drive current for driving the movable part and the operating device. In the vibration actuator 10, when a current pulse is supplied to the coil 50, the movable part moves in one direction toward the electromagnet 20 due to the magnetic attraction between the electromagnet part 20 and the movable part, mechanically displacing itself. After the supply stops, it is allowed to vibrate freely. The resulting vibration is then imparted to the operating device. The elastic support part 60 can control the displacement based on the magnetic attraction and the free vibration period.

[0293] Furthermore, the actuator drive signal is generated by inputting a signal from a detection unit that detects the operator's actions. The detection unit may, for example, be a pressure sensor that senses the pressure based on the operator's actions as a pressure signal and converts that pressure signal into an electrical signal for output. Alternatively, the detection unit may be of the electrostatic capacitive type, or a proximity sensor that detects the position of the finger (the pressing object) by detecting the capacitive coupling between the operator's finger and the vibrating indicator.

[0294] For example, in the case of a vibration alert device, the vibration actuator 10 aims to provide a comfortable tactile and force sensation when the operator touches and operates the device, generating vibration to provide a tactile and force sensation. In contrast, the vibration actuator 10 has an exhaust section to increase the attenuation of the vibration after actuation in order to improve the tactile and force sensation. As a result, the vibration that produces the so-called after-vibration echo (also called "vibration aftersound") converges, the intensity of the tactile sensation becomes clear, and a refreshing tactile sensation is provided.

[0295] Furthermore, the vibration amplitude of the magnetic component or core generated by the electromagnet portion in the space formed between the electromagnet portion and the magnetic core or magnetic yoke (first, second, or third planar body) is defined by the spring constant of the elastic support portion of each vibration actuator 10A~10F. The vibration amplitude of the magnetic component or core in the space formed between the electromagnet portion and the magnetic component or core is defined by the thickness of the elastic body.

[0296] Furthermore, in the vibration actuators 10, 10A to 10F, whether the magnetic cores 30 and 32 are fixed or movable is determined by the magnetic cores fixed to the frame, so either is acceptable. Additionally, the magnetic cores 30 and 32 can be fixed to either the mounting surface or the opposing surface, or they can be suspended from the mounting surface. Furthermore, the type and timing of the drive signals to each coil 50 and 52 can be appropriately changed to attenuate vibration or amplify and continue vibration. Therefore, the vibration actuators 10, 10A to 10F can be made thin and produce a variety of appropriate vibrations, providing a rich and varied operating experience.

[0297] Furthermore, in each vibration actuator, as shown in the vibration actuator 10 of the embodiment, when the elastic body (plate-shaped elastic part) is a rectangular frame-shaped elastic body (frame), the elastic body may also support the core on one opposite side and be connected to a magnetic yoke on the other opposite side. That is, it may also have a configuration in which the first planar body and the third planar body are connected at a 90° offset position via the elastic support part.

[0298] <Vibration alert device (contact input device) 500>

[0299] Figure 25This diagram illustrates the operation of a vibration alert device equipped with this vibration actuator. Additionally, Figure 26 This is a diagram showing a modified example of a vibration alert device equipped with the vibration actuator.

[0300] Vibration alert device 500 is, for example, a touchpad used as an indicator device in a laptop computer or similar device, replacing a mouse.

[0301] The touchpad, serving as a vibration feedback device 500, is disposed in a rectangular opening 540 provided in the frame of a laptop or similar device. The touchpad has a plate-shaped touchpad body 510 that can be traced with a finger as a touch operation, a vibration actuator 10 disposed on the back of the touchpad body 510, and a frame portion 520 that separates the opening 540 surrounding the vibration actuator 10.

[0302] When the touchpad is touched, such as by tracing or tapping the touchpad body 510 with a finger, the vibration actuator 10 is subjected to tactile vibration. In addition, the vibration actuator 10 can be changed to any one of the vibration actuators 10A to 10F.

[0303] The vibration actuator 10 in the touchpad mounts a magnetic core 32 to the back of the touchpad body 510, directly driving the touchpad body 510 to impart vibration to the operator. Specifically, as... Figure 25 as well as Figure 26 As shown, the back side of the magnetic core 30 is fixed as a fixed surface on the bottom surface 530 of the opening 540 of the frame, and the movable part is fixed to the back side of the touchpad body 510. The touchpad body 510 is configured to close the opening 540 at the top. The touchpad body 510 is supported by the frame portion 520 that divides the frame via a buffer member 550.

[0304] Furthermore, the touchpad body 510 is fixed to the movable part by double-sided tape or the like as a fixing material. In addition, in the structure of the vibration prompting device 500, the vibration actuator 10 can also be installed to indirectly drive the touchpad body 510 to impart vibration via the magnetic core 32.

[0305] Vibration can also be generated by moving the movable part, including the magnetic core 32, through contact operations such as tracing or tapping the touchpad body 510 with a finger.

[0306] Alternatively, when a touch operation such as tracing or tapping the touchpad body 510 is performed, a pressure-sensitive sensor (detection unit) (not shown) senses the operation and drives the vibration actuator 10 based on the signal from the pressure-sensitive sensor.

[0307] Specifically, when the vibration alert device 500 is operated by contact between the operator's fingertip or other pressing object and the touchpad body 510 of the touchpad, the vibration actuator 10 is driven to vibrate accordingly. This vibration provides the operator with a tactile sensation. For example, in the case of pressing a switch, it can provide the tactile sensation of pressing a switch.

[0308] Furthermore, since a vibration actuator 10 is disposed on the back of the touchpad body 510, vibration can be directly applied to provide excellent tactile feedback. In addition, the vibration actuator 10 is a thin, flat plate, so it does not occupy a large amount of space in the vibration feedback device (contact input device) 500, thus improving the design of the contact input device.

[0309] Furthermore, in electronic devices equipped with touchpads, such as those with a display section like an LCD screen, the vibration actuator 10 can impart various tactile sensations to the touchpad in correspondence with the displayed image operated by the user. The vibration actuator 10 can also generate vibrations in a manner that imparts a tactile sensation corresponding to the image of a mechanical switch that is being touched and operated. Examples of mechanical switches include tactile switches, alternating switches, momentary switches, toggle switches, slide switches, rotary switches, DIP switches, and rocker switches. Additionally, in push-button switches, different degrees of pressure can be imparted to the switch's tactile sensation.

[0310] Thus, the vibration alerting device 500 of this embodiment achieves a realistic tactile feedback, similar to that of a switch, through a realistic tactile feedback based on load detection. Furthermore, the aforementioned vibration actuators 10A to 10F are, of course, driven using the same driving principle as the vibration actuator 10.

[0311] Furthermore, in the vibration alert device 500, the vibration actuator 10 is configured to be disposed between the touchpad body 510 and the bottom part 530, and vibration is imparted by so-called direct drive through the magnetic cores 32, 30 respectively mounted on the touchpad body 510 and the bottom part 530, but it is not limited to this. It is also possible to configure one of the magnetic cores 30, 32 to be fixed to the back of the touchpad body 510 and suspended, and vibration is imparted by indirect drive.

[0312] In the vibration alert device 500, a structure is designed to be advantageous for the corners of the touchpad. For example, when the touchpad body 510 is mounted in the center on the back, especially when a load is applied at the furthest point such as the corner of the mounting surface, the elastic support (spring) is subjected to a maximum torsional load. In this way, by increasing the torsional stiffness, the touchpad body 510 can be pressed down while remaining parallel to the bottom surface (opposing surface) 530, reducing in-surface tactile differences.

[0313] Industrial utilization potential

[0314] The vibration actuator and vibration alert device of the present invention have the effect of providing a variety of operating sensations while achieving a thin profile, and are useful, for example, as vibration actuators and vibration alert devices for PCBs, touch panels, operation panels, etc.

Claims

1. A vibration actuator, characterized in that, have: Both the first planar body and the second planar body are magnetic bodies and are arranged opposite to each other; A third planar body is disposed between the first planar body and the second planar body, and includes a magnetic body; A plate-shaped electromagnet part has a magnetic pole part, a flat plate-shaped coil surrounding the magnetic pole part, and a base plate part connected to the coil, and is disposed on the other surface opposite to one of the first surface body and the third surface body. Other electromagnet parts, which are constructed in the same manner as the electromagnet parts, are disposed opposite to one of the planar bodies of the second and third planar bodies in the other planar body; and An elastic support portion supports the third planar body so that it can move relative to the first planar body in an opposing direction. By utilizing the magnetic force generated by energizing the plurality of coils, at least two of the first planar body, the second planar body, and the third planar body are displaced and vibrated in a close manner.

2. The vibration actuator according to claim 1, characterized in that, have: Other elastic support components support the third planar body so that it can move relative to the second planar body in the opposite direction. The electromagnet portion is fixed to the first planar body, and the other electromagnet portions are fixed to the second planar body.

3. The vibration actuator according to claim 2, characterized in that, The third planar body has: a rectangular plate-shaped magnetic yoke; and, Multiple counterweights are disposed on the upper and lower surfaces of the magnetic yoke. The plurality of counterweights are movable in the opposite direction and connected to the elastic support and the other elastic support respectively through the deformation of the elastic support and the other elastic support.

4. The vibration actuator according to claim 3, characterized in that, The elastic support is a rectangular frame surrounding the first planar body, and is connected to the first planar body by a pair of connecting pieces protruding inward from opposite sides of the frame, and is connected to the other opposite sides in a state where the first counterweight, which is disposed on the lower surface of the magnetic yoke, is suspended. The other elastic support portions are formed in the same way as the elastic support portions, and are connected to the second counterweight disposed on the upper surface of the magnetic yoke by connecting pieces on opposite sides separated in a direction orthogonal to the first counterweight.

5. A vibration alert device, characterized in that, The vibration actuator of claim 1 is disposed on the back side of the operating surface and is driven according to the operation of the operating surface.

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