Calibration method and device for pixel-level phase response of spatial light modulator based on diffraction measurement

By using a diffraction measurement-based method to calibrate the pixel-level phase response of a spatial light modulator, the problems of calibration complexity and environmental sensitivity in existing technologies are solved, achieving high-precision pixel-level phase response calibration and real-time control, which is applicable to practical optical systems.

CN122345474APending Publication Date: 2026-07-07ZHEJIANG UNIV
View PDF 0 Cites 0 Cited by

Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Applications(China)
Current Assignee / Owner
ZHEJIANG UNIV
Filing Date
2026-06-09
Publication Date
2026-07-07

AI Technical Summary

Technical Problem

In the existing technology, the calibration method of spatial light modulator has problems such as complex system structure, high environmental stability requirements, difficulty in reflecting the spatial non-uniformity of the device, and difficulty in in-situ application in actual optical systems. In particular, it is difficult to meet the high-precision light field control requirements in scenarios such as high-resolution microscopy imaging.

Method used

A diffraction-based measurement method is adopted to construct a diffraction measurement optical path that does not require a reference beam, and pixel-level phase response calibration of the spatial light modulator is performed. By using the diffraction physical model and spatial continuous function modeling, a pixel-by-pixel gray-phase lookup table is generated to achieve in-situ high-precision calibration.

Benefits of technology

The system structure is simplified, the calibration accuracy and stability are improved, the incident conditions are kept consistent with the actual working state, it is suitable for practical optical systems, and high-precision calibration and real-time control of pixel-level phase response are achieved.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN122345474A_ABST
    Figure CN122345474A_ABST
Patent Text Reader

Abstract

This invention discloses a pixel-level phase response calibration method and apparatus for spatial light modulators based on diffraction measurements. The method includes: constructing a diffraction measurement optical path; loading a periodic gray-scale modulation structure with variable contrast into the effective modulation region of the spatial light modulator to generate multi-level diffracted light; selecting the target order diffracted light through spatial filtering and focusing it for imaging to obtain diffracted light intensity data at each contrast level; based on the diffraction physical model relationship between the target order diffracted light intensity and the modulation phase, using a two-step nonlinear fitting to invert the phase-gray-scale response, and establishing a joint mapping of gray-scale values ​​with respect to pixel coordinates and the target phase through a three-dimensional polynomial model, generating a pixel-by-pixel gray-scale-phase lookup table offline for real-time phase modulation. This invention eliminates the need for complex interference optical paths, enabling in-situ pixel-level calibration within the system. It has advantages such as simple structure, high stability, and high calibration accuracy, and is suitable for fields such as precision imaging, wavefront modulation, and adaptive optics.
Need to check novelty before this filing date? Find Prior Art