A method and system for driving and detecting a MEMS piezoelectric micropump

Abstract

This invention discloses a driving detection method and system adapted for MEMS piezoelectric micropumps, relating to the field of piezoelectric micropump testing technology. It employs a three-stage closed-loop control architecture of calibration-tuning-monitoring: in the calibration stage, the calibration value f0 of the resonant frequency and the detuning judgment threshold P are determined. th1 During the tuning phase, the current energy difference P between adjacent frequency points is obtained. delta Based on P th1 and P delta Determine whether the tuning process is normal or abnormally detuned; obtain the detuning judgment threshold P. th2 Entering the monitoring phase, comparing P delta With P th2 The invention performs frequency domain processing on the drive current sample signal to extract current energy change characteristics. During the calibration phase, the difference in the frequency sweep current energy change is used to obtain the resonant state detuning or dynamic fine-tuning frequency, so that the piezoelectric micropump can maintain its operation at its resonant point. This improves the frequency point of energy conversion and output state, and realizes dynamic tracking of the mechanical resonant frequency of the piezoelectric micropump.

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