Optical fiber, detection device, and semiconductor device

By designing a multi-core array optical fiber, the problem of mismatch between the optical fiber and the spectrometer was solved, achieving high-precision and high-reliability optical signal transmission and improving the detection capability of the detection device.

CN122449677APending Publication Date: 2026-07-24SHENZHEN SICARRIER IND MACHINES CO LTD
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Patent Information

Application Number
CN202610702446.1
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-05-20
Publication Date
2026-07-24

AI Technical Summary

Technical Problem

The mismatch between the port of the conventional optical fiber and the coupling slit of the spectrometer results in a weak plasma glow intensity, which prevents the spectrometer from effectively acquiring sufficient light signals, thus affecting the accuracy and reliability of the detection device.

Method used

The design of multi-core array optical fiber improves optical signal transmission efficiency and mechanical protection by arranging at least some of the fiber cores in a linear array at the second transmission end, adapting its shape to the coupling slit of the spectrometer, and combining cladding and coating layers.

Benefits of technology

It significantly improves the optical path coupling efficiency between the optical fiber and the spectrometer, enhances the detection accuracy and reliability of the detection device, simplifies the optical path system, and reduces connection loss.

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Abstract

The invention discloses an optical fiber, a detection device and semiconductor equipment, and relates to the technical field of semiconductor detection. Wherein the optical fiber comprises a plurality of fiber cores and a coating layer; the coating layer is arranged outside the plurality of fiber cores; the optical fiber is provided with a first transmission end and a second transmission end, the first transmission end is used for receiving optical signals, and the second transmission end is used for being connected with a spectrograph; one ends of at least part of the fiber cores are arranged in a linear array at the second transmission end, and the linear array is matched with a coupling slit of a spectrograph. According to the invention, the problem of insufficient light path coupling efficiency under a low glow condition in the prior art is solved, and high-precision and high-reliability detection and control are realized.
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