Energy consumption monitoring device for single crystal rod pulling furnace

Abstract

The utility model discloses a single crystal pulling rod furnace energy consumption monitoring device which comprises a filter assembly, and the filter assembly comprises a filter box, an air inlet pipe, a cover plate, a mounting seat, four sliding grooves, two limiting plates, two mounting guide rails, two net cages, four sliding rails, a flow equalizing plate, a limiting seat and an inserting rod. According to the utility model, the molecular sieve and the zirconium-aluminum alloy powder are loaded through the two mesh cages, and then the mesh cages are arranged in the filter box, so that when the single crystal furnace works, argon is guided through the air distribution plate, and then water molecules and other trace impurity gases in the argon are removed through the molecular sieve and the zirconium-aluminum alloy powder, thereby further improving the purity of the argon; the purified argon flows into the single crystal furnace, and the argon is filtered and purified and the purity of the argon is improved while the monitoring of the consumption of the argon is not influenced by installing the filtering assembly, so that the overall function is enriched, and the production quality of monocrystalline silicon is improved.

Description

Technical Field

[0001] The utility model relates to a monitoring device, in particular to an energy consumption monitoring device for a single crystal rod drawing furnace, belonging to the technical field of energy consumption monitoring. Background Art

[0002] The single crystal rod pulling furnace is a key equipment used in the production process of single crystal silicon rods. Single crystal silicon rods are rod-shaped single crystal silicon materials pulled out from molten silicon by the direct pulling method. They are important raw materials for the modern solar photovoltaic industry and the electronic information industry. Argon plays an important role in the production of single crystal silicon. As a protective gas, argon surrounds the liquid surface of single crystal silicon and polycrystalline silicon to prevent them from being oxidized. It can also reduce the loss of heat energy, thereby playing a role in energy saving. As one of the key raw materials in the production process of single crystal rod pulling furnaces, argon is directly related to the production cost.

[0003] By real-time monitoring of argon consumption through energy consumption monitoring devices, manufacturers can accurately grasp the consumption of argon, thereby effectively managing inventory, avoiding over-purchasing or waste, and achieving cost control. However, there are often some impurity gases in the argon, which lead to insufficient purity of the argon, and then cause serious oxidation in the furnace, affecting the oxygen and carbon content of single crystal silicon. The existing argon energy consumption monitoring device only has a monitoring function, and cannot simultaneously achieve filtering and purification of argon, and its function is relatively single. Utility Model Content

[0004] In order to overcome the above-mentioned shortcomings, the utility model provides an energy consumption monitoring device for a single crystal rod pulling furnace. The device has a reasonably designed filtering component, which not only does not affect the monitoring of argon consumption, but also realizes the filtering and purification of argon, thereby improving the purity of argon, thereby enriching the overall function and improving the production quality of single crystal silicon.

[0005] Specifically, a single crystal rod pulling furnace energy consumption monitoring device includes a filter assembly, wherein the filter assembly includes a filter box, an air inlet pipe, a cover plate, a mounting seat, four slide slots, two limit plates, two mounting guide rails, two mesh cages, four slide rails, a flow equalizing plate, a limit seat and a plug rod;

[0006] The flow equalizing plate is fixedly connected to the inner wall of the filter box, the air inlet pipe is fixedly connected to one side of the filter box and is connected to the filter box, the two mounting guide rails are symmetrically fixedly connected to the inner wall of the filter box, the four slide rails are symmetrically fixedly connected to the upper surfaces of the two mesh cages, the four slide grooves are symmetrically opened on the front surface of the mounting seat, the mounting seat is fixedly connected to the lower surface of the cover plate, the two limit plates are symmetrically fixedly connected to the lower surface of the cover plate, the two limit seats are symmetrically fixedly connected to the front and rear surfaces of the filter box, and the insertion rod is slidably connected to the inside of the limit seat.

[0007] As a further preferred embodiment of the technical solution: a limiting hole is provided inside the limiting plate, and a tension spring is sleeved on the outer side wall of the insertion rod.

[0008] As a further preferred embodiment of the technical solution: one end of the insertion rod is fixedly connected to a pull ring, one end of the tension spring is fixedly connected to the limit seat, and the other end of the tension spring is fixedly connected to the pull ring.

[0009] As a further preferred embodiment of the technical solution: the end of the insertion rod away from the pull ring is slidably connected to the inner wall of the limiting hole, and the outer wall of the mounting seat is slidably connected to the inner wall of the filter box.

[0010] As a further preferred embodiment of the present technical solution: the lower surface of the cover plate is attached to the upper surface of the filter box, and the two mesh cages are slidably connected to the inner side walls of the two mounting guide rails.

[0011] As a further preferred embodiment of the present technical solution: the outer side wall of the slide rail is slidably connected to the inner side wall of the slide groove, and the upper surface of the flow equalizing plate is attached to the lower surface of the cover plate.

[0012] As a further preferred embodiment of the technical solution: a monitoring component is installed on a side of the filter box away from the air inlet pipe, and the monitoring component includes a delivery pipe and a flow meter;

[0013] One end of the delivery pipe is fixedly connected to a side of the filter box away from the air inlet pipe and communicated with the filter box, and the flow meter is installed on the outer side wall of the delivery pipe.

[0014] As a further preferred embodiment of the present technical solution: a single crystal furnace is installed at one end of the delivery pipe away from the filter box, and the delivery pipe is connected to an argon gas inlet of the single crystal furnace.

[0015] Advantages of the utility model: the utility model loads molecular sieve and zirconium-aluminum alloy powder through two mesh cages, and then installs the mesh cages in a filter box; when the single crystal furnace is working, the argon is guided by the air distribution plate, and then the water molecules and other trace impurity gases in the argon are removed by the molecular sieve and zirconium-aluminum alloy powder, thereby further improving its purity; the purified argon flows into the single crystal furnace, and the argon consumption can be monitored by a flow meter to grasp the argon consumption; by installing a filter component, while not affecting the monitoring of the argon consumption, the argon is filtered and purified, thereby improving the purity of the argon, thereby enriching the overall function and improving the production quality of single crystal silicon. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0017] Figure 1 It is a schematic diagram of the structure of the utility model;

[0018] Figure 2 This is a schematic diagram of the structure of the filter assembly of the utility model;

[0019] Figure 3 This is a schematic diagram of the mounting base structure of the utility model;

[0020] Figure 4 This is a schematic diagram of the mesh cage structure of the utility model;

[0021] Figure 5 It is a schematic diagram of the limit seat structure of the utility model.

[0022] In the figure: 101, filter assembly; 11, filter box; 12, air inlet pipe; 13, cover plate; 14, mounting seat; 15, limit hole; 16, slide groove; 17, limit plate; 18, mounting rail; 19, mesh cage; 20, slide rail; 21, flow equalizing plate; 22, limit seat; 23, pull ring; 24, tension spring; 25, plug rod; 301, monitoring assembly; 31, delivery pipe; 32, flow meter; 33, single crystal furnace. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] See also Figure 1-Figure 5 The present embodiment provides a single crystal rod pulling furnace energy consumption monitoring device, including a filter assembly 101, the filter assembly 101 includes a filter box 11, an air inlet pipe 12, a cover plate 13, a mounting seat 14, four slide grooves 16, two limit plates 17, two mounting guide rails 18, two mesh cages 19, four slide rails 20, a flow equalizing plate 21, a limit seat 22 and an insertion rod 25;

[0025] The flow equalizing plate 21 is fixedly connected to the inner wall of the filter box 11, the air inlet pipe 12 is fixedly connected to one side of the filter box 11 and communicates with the filter box 11, the two mounting guide rails 18 are symmetrically fixedly connected to the inner wall of the filter box 11, the four slide rails 20 are symmetrically fixedly connected to the upper surfaces of the two mesh cages 19, the four slide grooves 16 are symmetrically opened on the front surface of the mounting seat 14, the mounting seat 14 is fixedly connected to the lower surface of the cover plate 13, the two limit plates 17 are symmetrically fixedly connected to the lower surface of the cover plate 13, the two limit seats 22 are symmetrically fixedly connected to the front and rear surfaces of the filter box 11, and the insertion rod 25 is slidably connected to the inside of the limit seat 22.

[0026] In the present embodiment, specifically: a limiting hole 15 is provided inside the limiting plate 17, a tension spring 24 is sleeved on the outer wall of the insert rod 25, one end of the insert rod 25 is fixedly connected with a pull ring 23, one end of the tension spring 24 is fixedly connected to the limiting seat 22, and the other end of the tension spring 24 is fixedly connected to the pull ring 23. By pulling the pull ring 23 through the tension spring 24, the tension spring 24 pushes the insert rod 25, and then the insert rod 25 can be inserted into the limiting hole 15 to limit the position of the cover plate 13.

[0027] In the present embodiment, specifically: one end of the insertion rod 25 away from the pull ring 23 is slidably connected to the inner wall of the limiting hole 15, the outer wall of the mounting seat 14 is slidably connected to the inner wall of the filter box 11, the lower surface of the cover plate 13 is attached to the upper surface of the filter box 11, the two mesh cages 19 are slidably connected to the inner walls of the two mounting guide rails 18, and a sealing gasket is arranged between the cover plate 13 and the filter box 11 to increase the overall sealing.

[0028] In this embodiment, specifically: the outer wall of the slide rail 20 is slidably connected to the inner wall of the slide groove 16, the upper surface of the flow equalizing plate 21 is attached to the lower surface of the cover plate 13, and the mesh cage 19 and the cover plate 13 are connected by the slide rail 20, which facilitates the disassembly of the mesh cage 19 and the replacement of the molecular sieve and zirconium-aluminum alloy powder inside the mesh cage 19.

[0029] In this embodiment, specifically: a monitoring component 301 is installed on a side of the filter box 11 away from the air intake pipe 12, and the monitoring component 301 includes a delivery pipe 31 and a flow meter 32;

[0030] One end of the delivery pipe 31 is fixedly connected to a side of the filter box 11 away from the air inlet pipe 12 and is connected to the filter box 11. The flow meter 32 is installed on the outer wall of the delivery pipe 31. A single crystal furnace 33 is installed at the end of the delivery pipe 31 away from the filter box 11. The delivery pipe 31 is connected to the argon inlet of the single crystal furnace 33. When the single crystal furnace 33 is working, the filtered argon flows into the single crystal furnace 33. The consumption of argon can be monitored by the flow meter 32, so that the manufacturer can accurately grasp the consumption of argon to achieve cost control.

[0031] Working principle or structural principle, when in use, connect the delivery pipe 31 with the argon inlet of the single crystal furnace 33, connect the air inlet pipe 12 with the air outlet of the external argon tank, load the molecular sieve and zirconium-aluminum alloy powder into the two mesh cages 19 respectively, then insert the slide rail 20 on the mesh cage 19 into the corresponding slide groove 16, pick up the mesh cage 19 through the cover plate 13, then align the mesh cage 19 and insert it into the inside of the mounting guide rail 18, so that the mesh cage 19 with the molecular sieve is close to the air inlet pipe 12, press the cover plate 13 downward, insert the mounting seat 14 into the inside of the filter box 11, the cover plate 13 drives the limit plate 17 to move downward and contact the insertion rod 25, the insertion rod 25 is pushed, and the limit plate 17 drives the limit hole 15. When the limit When the positioning hole 15 moves to the position corresponding to the insertion rod 25, the insertion rod 25 is inserted into the limiting hole 15 under the pull of the tension spring 24. At this time, the installation is completed. When the single crystal furnace 33 is working, argon flows into the filter box 11 through the air inlet pipe 12. The argon can flow evenly in the filter box 11 through the flow equalizing plate 21, and then contacts with the molecular sieve and zirconium-aluminum alloy powder in the two mesh cages 19 in turn. The water molecules and other trace impurity gases in the argon can be removed by the molecular sieve and zirconium-aluminum alloy powder, thereby further improving its purity. Then the argon flows into the delivery pipe 31. At this time, the consumption of argon can be monitored by the flow meter 32 to grasp the consumption of argon and achieve cost control.

[0032] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A single crystal rod pulling furnace energy consumption monitoring device, It is characterized in that The filter assembly includes a filter box, an air inlet pipe, a cover plate, a mounting seat, four slide slots, two limit plates, two mounting guide rails, two mesh cages, four slide rails, a flow equalizing plate, a limit seat and a plug rod; The flow equalizing plate is fixedly connected to the inner wall of the filter box, the air inlet pipe is fixedly connected to one side of the filter box and is connected to the filter box, the two mounting guide rails are symmetrically fixedly connected to the inner wall of the filter box, the four slide rails are symmetrically fixedly connected to the upper surfaces of the two mesh cages, the four slide grooves are symmetrically opened on the front surface of the mounting seat, the mounting seat is fixedly connected to the lower surface of the cover plate, the two limit plates are symmetrically fixedly connected to the lower surface of the cover plate, the two limit seats are symmetrically fixedly connected to the front and rear surfaces of the filter box, and the insertion rod is slidably connected to the inside of the limit seat.

2. The single crystal rod drawing furnace energy consumption monitoring device according to claim 1, It is characterized in that A limiting hole is provided inside the limiting plate, and a tension spring is sleeved on the outer side wall of the insertion rod.

3. The single crystal rod drawing furnace energy consumption monitoring device according to claim 2, It is characterized in that One end of the insertion rod is fixedly connected with a pull ring, one end of the tension spring is fixedly connected to the limiting seat, and the other end of the tension spring is fixedly connected to the pull ring.

4. The single crystal rod drawing furnace energy consumption monitoring device according to claim 3, It is characterized in that One end of the insertion rod away from the pull ring is slidably connected to the inner wall of the limiting hole, and the outer wall of the mounting seat is slidably connected to the inner wall of the filter box.

5. The single crystal rod drawing furnace energy consumption monitoring device according to claim 4, It is characterized in that The lower surface of the cover plate is attached to the upper surface of the filter box, and the two mesh cages are slidably connected to the inner side walls of the two mounting guide rails.

6. The single crystal rod drawing furnace energy consumption monitoring device according to claim 5, It is characterized in that The outer side wall of the slide rail is slidably connected to the inner side wall of the slide groove, and the upper surface of the flow equalizing plate is attached to the lower surface of the cover plate.

7. The single crystal rod drawing furnace energy consumption monitoring device according to claim 5, It is characterized in that A monitoring component is installed on the side of the filter box away from the air inlet pipe, and the monitoring component includes a delivery pipe and a flow meter; One end of the delivery pipe is fixedly connected to a side of the filter box away from the air inlet pipe and communicated with the filter box, and the flow meter is installed on the outer side wall of the delivery pipe.

8. The single crystal rod drawing furnace energy consumption monitoring device according to claim 7, It is characterized in that A single crystal furnace is installed at one end of the delivery pipe away from the filter box, and the delivery pipe is connected to the argon gas inlet of the single crystal furnace.

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