Target material surface treatment device

Abstract

The utility model relates to the technical field of metal target material processing, and discloses a target material surface treatment device which comprises a working table, a driving assembly is arranged on the rear side of the exterior of the working table, the exterior of the driving assembly is rotationally connected with a rotating plate, and the left side and the right side of the rotating plate are rotationally connected with follow-up plates. A rotating shaft is rotatably connected to the outer portion of the follow-up plate, a gear is fixedly connected to the outer portion of the rotating shaft, a base is fixedly connected to the top of the workbench, a plurality of sliding grooves are formed in the top of the base, a plurality of driving clamping plates are slidably connected to the top of the base, and toothed plates are fixedly connected to the tops of the driving clamping plates. And a plurality of driven blocks are fixedly connected to the top of the base. According to the clamping device, the connected follow-up plate can be driven by the hydraulic cylinder to move, so that the driving clamping plates do non-interference movement, the sliding rod slides in the sleeve, and reset power is provided by the spring.

Description

Technical Field

[0001] The utility model relates to the technical field of metal target material processing, in particular to a target material surface processing device. Background Art

[0002] Metal targets are materials used to prepare thin films or surface coatings, and are usually used in thin film deposition technologies such as physical evaporation, sputtering, and chemical vapor deposition. These technologies are widely used in semiconductor manufacturing, optical coatings, solar cells, photosensitive materials, and other fields. Polishing is an important process step in the preparation of thin films or coatings on metal targets. Polishing can make the surface of the metal target smoother and reduce the surface roughness. A flat surface helps to achieve uniformity during the thin film deposition process, ensuring that the film has consistent thickness and quality on the substrate.

[0003] After searching: Chinese patent announcement number: CN214213285U, it relates to the field of rotating target technology, and discloses a surface treatment device for rotating target. Its technical solution is: including a support plate, a grinding mechanism is provided on the top of the support plate, and a collecting mechanism is provided on the bottom of the support plate; the grinding mechanism includes a first fixed plate and a second fixed plate, the first fixed plate and the second fixed plate are respectively fixed on both sides of the top of the support plate, a clamping assembly is provided on one side of the first fixed plate, and a motor is provided on one side of the second fixed plate. The beneficial effect of the utility model is: through the design of the grinding mechanism, the grinding sheet can be driven to move back and forth through structures such as reciprocating screws, and the grinding sheet can be rotated through the design of structures such as rotating plates, that is, the surface of the target can be processed through the grinding sheet, the smoothness of the target surface is improved, and the problem of more turning tool marks on the surface of the target is avoided, so that the formed target has a good appearance and the normal use of the target is guaranteed. ESM has applied for invention patents for the same invention on the same day.

[0004] The above patent specification embodiment records that "further, the clamping assembly includes a threaded rod 26, and two clamps 27 are fixed on the outside of the threaded rod 26. The two clamps 27 are connected to the threaded rod 26 by threads and the threads of the two clamps 27 are opposite. A through slot 28 is opened on the first fixed plate 2, and the two clamps 27 pass through the through slot 28 and extend out of one side of the through slot 28. A handle 29 is provided on the top of the threaded rod 26", which can enable the device to clamp and fix the object well for easy grinding and polishing. However, this clamping method cannot fix multiple objects and clamp objects of different sizes. Therefore, in view of the above-mentioned deficiencies, a new target material surface treatment device is proposed. Utility Model Content

[0005] The utility model aims to solve the shortcomings of the prior art and proposes a target surface treatment device, which aims to improve the problem that some prior arts cannot clamp multiple objects at the same time during use.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] A target surface treatment device comprises a workbench, a driving assembly is arranged on the outer rear side of the workbench, a rotating plate is rotatably connected to the outside of the driving assembly, follower plates are rotatably connected to the left and right sides of the rotating plate, a rotating shaft is rotatably connected to the outside of the follower plate, a gear is fixedly connected to the outside of the rotating shaft, a base is fixedly connected to the top of the workbench, a plurality of slide grooves are arranged on the top of the base, a plurality of active clamping plates are slidably connected to the top of the base, a toothed plate is fixedly connected to the top of the active clamping plate, and a plurality of passive blocks are fixedly connected to the top of the base;

[0008] As a further description of the above technical solution:

[0009] The driving assembly includes a hydraulic cylinder, a push rod, and a central shaft. The outside of the hydraulic cylinder is fixedly connected to the outside side of the workbench, the top of the push rod is fixedly connected to the output end of the hydraulic cylinder, and the outside of the central shaft is fixedly connected to the outside of the push rod.

[0010] As a further description of the above technical solution:

[0011] The four corners of the bottom of the workbench are fixedly connected with supporting legs, the top of the workbench is fixedly connected with a plurality of supporting columns, the tops of the plurality of supporting columns are fixedly connected with a top plate, and the top of the top plate is fixedly connected with a fixing plate.

[0012] As a further description of the above technical solution:

[0013] The top of the fixed plate is fixedly connected to a motor, the driving end of the motor is fixedly connected to a driving shaft, the inside of the top plate is rotatably connected to a driven shaft, the outside of the driving shaft is fixedly connected to a driving wheel, the outside of the driven shaft is fixedly connected to a driven wheel, and a belt is sleeved between the driving wheel and the driven wheel.

[0014] As a further description of the above technical solution:

[0015] The bottoms of the driving shaft and the driven shaft are fixedly connected with connecting discs, the bottoms of the connecting discs are fixedly connected with multiple sleeves, the insides of the sleeves are slidably connected with sliding rods, the outsides of the sleeves and the sliding rods are provided with springs, and the bottoms of multiple sliding rods on the same side are fixedly connected with polishing wheels.

[0016] As a further description of the above technical solution:

[0017] One end of the spring is fixedly connected to the bottom of the connecting disc, and the other end of the spring is fixedly connected to the top of the polishing wheel.

[0018] As a further description of the above technical solution:

[0019] The outside of the gear on the same side is meshed with the outsides of the two tooth plates, and the bottom of the active clamping plate is in contact with the inner wall of the slide groove.

[0020] The utility model has the following beneficial effects:

[0021] 1. In the utility model, with the coordinated use of structures such as a rotating plate, a follower plate, a rotating shaft, and a gear, the device can drive the connected follower plate to move through a hydraulic cylinder during use, thereby allowing multiple active clamping plates to move without interfering with each other, thereby solving the problem that some devices cannot clamp multiple objects at the same time.

[0022] 2. In the utility model, with the coordinated use of connecting discs, sleeves, slide rods, springs and other structures, the device can slide inside the sleeve through the slide rod during use and the spring provides the power for resetting, thus solving the problem that some devices cannot polish multiple objects at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 A three-dimensional diagram of a target surface treatment device proposed by the utility model;

[0024] Figure 2 This is a schematic diagram of the base structure of a target surface treatment device proposed by the utility model;

[0025] Figure 3 This is a schematic diagram of the central axis structure of a target surface treatment device proposed by the utility model;

[0026] Figure 4 This is a schematic diagram of the connecting disc structure of a target surface treatment device proposed by the utility model.

[0027] Legend:

[0028] 1. Workbench; 2. Hydraulic cylinder; 3. Push rod; 4. Center axis; 5. Rotating plate; 6. Follower plate; 7. Rotating shaft; 8. Gear; 9. Base; 10. Slide; 11. Active clamping plate; 12. Tooth plate; 13. Passive block; 14. Support leg; 15. Support column; 16. Top plate; 17. Fixed plate; 18. Motor; 19. Active shaft; 20. Driven shaft; 21. Active wheel; 22. Driven wheel; 23. Belt; 24. Connecting disc; 25. Sleeve; 26. Slide rod; 27. Spring; 28. Polishing wheel. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0030] Reference Figure 1 and Figure 2 The utility model provides an embodiment: a target surface treatment device, including a workbench 1, a driving assembly is arranged on the outer rear side of the workbench 1 to provide power for the clamping and fixing of the device, the driving assembly includes a hydraulic cylinder 2, a push rod 3, and a central axis 4, the outer part of the hydraulic cylinder 2 is fixedly connected to the outer side of the workbench 1, so that the device remains stable during operation, the top of the push rod 3 is fixedly connected to the output end of the hydraulic cylinder 2, so that the power of the driving source is transmitted out, the outer part of the central axis 4 is fixedly connected to the outer part of the push rod 3, and the outer part of the driving assembly is rotatably connected with a rotating plate 5, which can be rotated on the outer part of the central axis 4 to adjust the clamping diameter, and the left and right sides of the rotating plate 5 can be rotated. Both sides are rotatably connected with a follower plate 6, the outside of the follower plate 6 is rotatably connected with a rotating shaft 7, the outside of the rotating shaft 7 is fixedly connected with a gear 8, which can transmit power to different external places, the top of the workbench 1 is fixedly connected with a base 9, the top of the base 9 is provided with a plurality of slide grooves 10, which are convenient for the movement of the internal structure, the top of the base 9 is slidably connected with a plurality of active clamping plates 11 for actively clamping external objects, the outside of the gear 8 on the same side is meshed with the outside of the two tooth plates 12, the bottom of the active clamping plate 11 is in contact with the inner wall of the slide groove 10, the top of the active clamping plate 11 is fixedly connected with a tooth plate 12, and the top of the base 9 is fixedly connected with a plurality of passive blocks 13.

[0031] like Figure 1As shown: the four corners of the bottom of the workbench 1 are fixedly connected with support legs 14 for bearing the power of the entire device; the top of the workbench 1 is fixedly connected with multiple support columns 15 for supporting the top structure; the tops of the multiple support columns 15 are fixedly connected with a top plate 16; the top of the top plate 16 is fixedly connected with a fixed plate 17.

[0032] like Figure 1 and Figure 3 As shown: the top of the fixed plate 17 is fixedly connected to a motor 18, the driving end of the motor 18 is fixedly connected to a driving shaft 19, the inside of the top plate 16 is rotatably connected to a driven shaft 20, the outside of the driving shaft 19 is fixedly connected to a driving wheel 21, the outside of the driven shaft 20 is fixedly connected to a driven wheel 22, and a belt 23 is sleeved between the driving wheel 21 and the driven wheel 22.

[0033] like Figure 1 and Figure 4 As shown: the bottom of the driving shaft 19 and the driven shaft 20 are fixedly connected with a connecting disc 24, and the bottom of the connecting disc 24 is fixedly connected with multiple sleeves 25 to facilitate the movement of the structure. The inside of the sleeve 25 is slidably connected with a slide rod 26, which can slide inside the sleeve 25. The outside of the sleeve 25 and the slide rod 26 is provided with a spring 27 to provide power to the structures at both ends by storing elastic force. The bottom of the multiple slide rods 26 on the same side is fixedly connected with a polishing wheel 28, one end of the spring 27 is fixedly connected to the bottom of the connecting disc 24, and the other end of the spring 27 is fixedly connected to the top of the polishing wheel 28.

[0034] Compared with some existing technologies, the above content enables the device to drive the connected follower plate 6 to move through the hydraulic cylinder 2 during use, so that multiple active clamping plates 11 can move without interfering with each other. The sliding rod 26 slides inside the sleeve 25 and the spring 27 provides the power for resetting, which solves the problem that some devices cannot clamp multiple objects at the same time and cannot polish multiple objects at the same time.

[0035] Working principle: First, place multiple objects of different sizes on the base 9, between the active clamping plate 11 and the passive block 13, then start the hydraulic cylinder 2, so that the push rod 3 drives the rotating plate 5 rotating on the central axis 4 to move. Because the two ends of the rotating plate 5 rotate with the follower plates 6, the gear 8 rotating on the rotating shaft 7 is driven to move. When the gear 8 moves, it drives the tooth plate 12 to move, so that the active clamping plate 11 moves with the tooth plate 12. When it contacts the object, the device stops moving and maintains the clamping state, and then starts the motor 1. 8 makes the driving shaft 19 rotate, because the driving shaft 19 is fixedly connected to the outside with a driving wheel 21, so that the driving wheel 21 drives the driven wheel 22 to rotate through the belt 23, thereby driving the driven shaft 20 to rotate, so the two connecting discs 24 rotate, and drive the polishing wheel 28 to rotate through the sleeve 25 and the slide bar 26, so that the polishing wheel 28 grinds and polishes the object. When encountering an uneven object, the slide bar 26 will slide inside the sleeve 25, and the spring 27 provides the power of resetting so as to close to the object to achieve the processing purpose.

[0036] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A target surface treatment device, comprising a workbench (1), Features: A driving assembly is arranged on the outer rear side of the workbench (1), the driving assembly is rotatably connected to a rotating plate (5) on the outside, the rotating plate (5) is rotatably connected to follower plates (6) on both the left and right sides, the follower plate (6) is rotatably connected to a rotating shaft (7) on the outside, the rotating shaft (7) is fixedly connected to a gear (8) on the outside, the workbench (1) is fixedly connected to a base (9) on the top, a plurality of slide grooves (10) are provided on the top of the base (9), a plurality of active clamping plates (11) are slidably connected to the top of the base (9), a toothed plate (12) is fixedly connected to the top of the active clamping plate (11), and a plurality of passive blocks (13) are fixedly connected to the top of the base (9).

2. A target surface treatment device according to claim 1, Features: The driving assembly comprises a hydraulic cylinder (2), a push rod (3), and a central shaft (4); the outside of the hydraulic cylinder (2) is fixedly connected to the outside side of the workbench (1); the top of the push rod (3) is fixedly connected to the output end of the hydraulic cylinder (2); and the outside of the central shaft (4) is fixedly connected to the outside of the push rod (3).

3. A target surface treatment device according to claim 1, Features: The four corners of the bottom of the workbench (1) are fixedly connected to support legs (14), the top of the workbench (1) is fixedly connected to a plurality of support columns (15), the tops of the plurality of support columns (15) are fixedly connected to a top plate (16), and the top of the top plate (16) is fixedly connected to a fixing plate (17).

4. A target surface treatment device according to claim 3, Features: The top of the fixed plate (17) is fixedly connected to a motor (18), the driving end of the motor (18) is fixedly connected to a driving shaft (19), the interior of the top plate (16) is rotatably connected to a driven shaft (20), the exterior of the driving shaft (19) is fixedly connected to a driving wheel (21), the exterior of the driven shaft (20) is fixedly connected to a driven wheel (22), and a belt (23) is sleeved between the driving wheel (21) and the driven wheel (22).

5. A target surface treatment device according to claim 4, Features: The bottoms of the driving shaft (19) and the driven shaft (20) are both fixedly connected with a connecting disc (24), the bottoms of the connecting disc (24) are fixedly connected with a plurality of sleeves (25), the interior of the sleeves (25) is slidably connected with a sliding rod (26), the exteriors of the sleeves (25) and the sliding rod (26) are sleeved with a spring (27), and the bottoms of the plurality of sliding rods (26) on the same side are fixedly connected with a polishing wheel (28).

6. A target surface treatment device according to claim 5, Features: One end of the spring (27) is fixedly connected to the bottom of the connecting disc (24), and the other end of the spring (27) is fixedly connected to the top of the polishing wheel (28).

7. A target surface treatment device according to claim 1, Features: The outside of the gear (8) on the same side is meshed with the outsides of the two tooth plates (12), and the bottom of the active clamping plate (11) is in contact with the inner wall of the slide groove (10).

Images