High-purity helium filling system
By introducing a vacuum pump group and a helium analyzer to the high-purity helium filling system, combining the parallel filling pipeline and a helium booster membrane press, the problems of helium pollution and insufficient pressure are solved, and high efficiency and high efficiency are achieved Purity of helium.
Patent Information
- Application Number
- CN202420603808.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-27
- Publication Date
- 2024-12-13
- Estimated Expiration
- 2034-03-27
AI Technical Summary
The existing high-purity helium filling system is prone to helium pollution during the filling process, making it difficult to ensure high purity. Especially in the scientific field where the requirements for helium purity are high, the existing system design is not enough to meet high-efficiency filling. need.
A high-purity helium filling system including helium pipe bundle, output pipe, convergence pipe, filling pipe, vacuum pump group, helium cylinder group and helium analyzer was designed, through vacuum pumping operation and helium Real-time monitoring of gas analyzer, combined with parallel filling pipes and helium booster membrane press, achieve efficient and high-purity helium filling.
Through vacuum pump group and monitoring of helium analyzer, the vacuum degree and helium purity are ensured before and after filling, and the pressure in the pipeline after filling is solved through parallel filling pipelines and helium booster film presses. The problem of insufficient results enables efficient filling of high-purity helium.
Smart Images

Figure CN222164459U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of gas filling, in particular to a high-purity helium filling system. Background Art
[0002] High-purity helium has attracted attention due to its unique properties in superconducting technology, ultra-low temperature, gas detection and gas protection, and is widely used in scientific research, semiconductor manufacturing, nuclear industry, aerospace ships and other fields. High-purity helium is mostly used in gas cylinders, so the design of high-purity helium unloading and filling systems is crucial; common helium filling and filling systems include gas tube bundle vehicles, booster equipment, filters, filling busbars, etc. The system is simple and practical, but there are still problems such as helium contamination during the filling process. Therefore, in some scientific fields with high requirements for helium purity, a more efficient and practical filling system design is needed. Utility Model Content
[0003] Purpose of the utility model: The purpose of the utility model is to provide a helium purity detection, efficient, high-purity helium filling system.
[0004] Technical solution: The high-purity helium filling system of the utility model comprises a helium tube bundle vehicle, an output pipeline, a converging pipeline, a filling pipeline, a vacuum pump group, a helium cylinder group and a helium analyzer. The helium tube bundle vehicle, the output pipeline, the filling pipeline and the helium cylinder group are connected in sequence, the filling pipeline is connected to the helium cylinder group through the converging pipeline, the vacuum pump group is respectively connected to the output pipeline and the helium cylinder group through a vacuumizing pipeline, the output pipeline is provided with a helium analyzer, and valves are provided on the output pipeline, the filling pipeline, the converging pipeline and the vacuumizing pipeline; before gas filling, the valve is used for control, and the vacuum pump group vacuumizes the output pipeline and the helium cylinder group respectively to achieve the required vacuum degree.
[0005] Preferably, the filling pipeline includes a first filling pipeline and a second filling pipeline connected in parallel, and the second filling pipeline is provided with a pressure reducing valve and a helium filling membrane pressurizer to form a helium pressurized filling pipeline. During the filling stage, since the initial inflation pressure is relatively high, the first filling pipeline can be used for filling. As the helium filling proceeds, when the pressure in the cylinder and the pressure in the filling pipeline are in balance, the pressure in the pipeline is insufficient, and the second filling pipeline is used instead, and the helium filling is performed by pressurizing through the helium filling membrane pressurizer to achieve helium filling.
[0006] Preferably, the helium tube bundle vehicle is connected to the filling pipeline via a hose.
[0007] Preferably, a filter is provided on the output pipeline. If the helium analyzer on the output pipeline determines that the helium purity does not meet the requirements, it needs to be purified through the filter or a purification operation with higher requirements is required.
[0008] Preferably, the output pipeline is connected to an on-site venting pipeline.
[0009] Preferably, the confluence pipeline is provided with a helium analyzer for real-time monitoring of the purity of the helium before it is filled into the helium cylinder group.
[0010] Preferably, the helium cylinder group is two sets of steel cylinder groups connected in parallel, and each set of steel cylinder groups includes two types of filling steel cylinder groups, namely, container grids and bulk grids.
[0011] Beneficial effects: Compared with the prior art, the utility model has the following advantages: 1. The utility model uses valve control, and the vacuum pump group evacuates the output pipeline and the helium cylinder group respectively to achieve the required vacuum degree; the purity of the helium is monitored by a helium analyzer, and a filter is provided for purification; 2. The utility model solves the problem of insufficient pressure in the pipeline at the later stage of helium filling by connecting the first filling pipeline and the helium booster filling pipeline in parallel; 3. The utility model realizes high-purity filling of helium in a simple and efficient manner. BRIEF DESCRIPTION OF THE DRAWINGS
[0012] Figure 1 It is a structural schematic diagram of the utility model. DETAILED DESCRIPTION
[0013] The technical solution of the utility model is further described below in conjunction with the accompanying drawings.
[0014] The high-purity helium filling system of the utility model comprises a helium tube bundle vehicle 1, a hose 2, an output pipeline, a filter 3, a filling pipeline, a vacuum pump group 21 and a helium cylinder group 23. The helium tube bundle vehicle 1, the output pipeline, the filling pipeline and the helium cylinder group 23 are connected in sequence. The helium tube bundle vehicle is connected to the filling pipeline through the hose 2. The output pipeline is provided with a helium analyzer and a filter. The output pipeline is also connected to an on-site venting pipeline. The filling pipeline is connected to the helium cylinder group 23 through a converging pipeline. The converging pipeline is provided with a helium analyzer. The vacuum pump group is respectively connected to the helium cylinder group 23 through a vacuumizing pipeline. The output pipeline is connected to the helium cylinder group 23, and valves 4, 5, 6, 7, 8, 9, 10, 11, 13, 14, 15, 16, 17, 18, 19, 20, 22 are provided on the output pipeline, filling pipeline, confluence pipeline and vacuuming pipeline; before gas filling, the vacuum pump group is connected to the output pipeline to vacuumize the output pipeline, and disconnected after vacuuming; the vacuum pump group is connected to the helium cylinder group 23, and disconnected after vacuuming; by valve control, the vacuum pump group vacuumizes the output pipeline and the helium cylinder group respectively to achieve the required vacuum degree. The helium cylinder group is two sets of steel cylinder groups in parallel, and each set of steel cylinder groups includes two types of filling steel cylinder groups in the form of container grids and bulk grids.
[0015] The filling pipeline includes a first filling pipeline and a second filling pipeline connected in parallel, and a pressure reducing valve (valve 11) and a helium filling membrane pressurizer are arranged on the second filling pipeline to form a helium pressurized filling pipeline. During the filling stage, since the initial inflation pressure is relatively high, the first filling pipeline can be used for filling. As the helium filling proceeds, when the pressure in the cylinder and the pressure in the filling pipeline are in balance, the pressure in the pipeline is insufficient, and the second filling pipeline is used instead, and the helium filling membrane pressurizer is used for pressurization to achieve helium filling.
[0016] When the helium tube bundle car 1 is in place, connect the helium tube bundle car to the hose 2, and keep valves 4, 5, and 7 closed. Open valve 6 (unloading bus vacuum valve), start the vacuum pump group 21, open valve 16, slowly open valve 22 (vacuum angle valve), and use the vacuum pump to evacuate the hose and output pipeline. When the system vacuum reaches 2Pa and the evacuation time is greater than 2h, close valves 6 and 16.
[0017] Open valve 20 and use the vacuum pump group to evacuate the cylinder group. When the vacuum of the cylinder reaches the requirement, close valve 20 and valve 22 (vacuum angle valve).
[0018] Before filling, perform a preliminary check of the helium purity. Open valve 4 and analyze the helium purity through the helium analyzer in the output pipeline. If the purity is greater than 5N, filling can be carried out, and then valve 4 is closed.
[0019] For the filling system, two sets of parallel gas cylinder combinations are set up to allow gas filling at the same time. The switching between container compartments and bulk compartments must be operated according to actual user needs.
[0020] Taking one of the filling routes as an example, valves 7, 9, 15, and 18 are opened in sequence, and the valves of the container compartment or bulk compartment are opened as required.
[0021] Slowly open the cylinder valve and pre-fill high-pressure helium (20MPa) directly into the empty cylinder. When the filling pressure reaches the set value, switch the cylinder group.
[0022] As the filling process proceeds, when the pressure of the tube bundle truck and the cylinder pressure reach equilibrium (~15MPa), direct filling can no longer be continued and valve 9 is closed.
[0023] Switch the control valve, open valves 8, 13, and 14, adjust the pressure reducing valve 11 to 1MPa, and after the remaining high-pressure helium in the tube bundle is reduced in pressure, it is sent to the inlet of the 5N high-purity helium filling membrane press 12, and is pressurized by the membrane press (outlet pressure 15MPa), and the helium is filled into the cylinder group. After the filling is completed, valve 8 can be closed, valve 13 can be closed, and the membrane press can run in self-circulation.
[0024] The valve 17 is always kept open, and the helium analyzer at the confluence pipeline performs real-time monitoring of the corresponding purity.
Claims
1. A high-purity helium filling system, comprising a helium tube bundle vehicle (1), an output pipeline and a converging pipeline, characterized in that: It also comprises a filling pipeline, a vacuum pump group, a helium bottle group (23) and a helium analyzer. The helium tube bundle vehicle (1), the output pipeline, the filling pipeline and the helium bottle group (23) are connected in sequence. The filling pipeline is connected to the helium bottle group (23) via a converging pipeline. The vacuum pump group is connected to the output pipeline and the helium bottle group (23) via a vacuumizing pipeline. The output pipeline is provided with a helium analyzer. The output pipeline, the filling pipeline, the converging pipeline and the vacuumizing pipeline are all provided with valves. Before gas filling, the vacuum pump group is connected to the output pipeline to evacuate the output pipeline, and the connection is disconnected after the vacuumizing is completed. The vacuum pump group is connected to the helium bottle group (23), and the connection is disconnected after the vacuumizing is completed.
2. The high-purity helium filling system according to claim 1, characterized in that: The filling pipeline comprises a first filling pipeline and a second filling pipeline connected in parallel, and the second filling pipeline is provided with a pressure reducing valve (11) and a helium filling membrane press (12) to form a helium pressurized filling pipeline.
3. The high-purity helium filling system according to claim 1, characterized in that: The helium tube bundle vehicle (1) is connected to the filling pipeline via a hose (2).
4. The high-purity helium filling system according to claim 2, characterized in that: A filter (3) is provided on the output pipeline of the helium filling membrane press.
5. The high-purity helium filling system according to claim 1, characterized in that: The output pipeline is connected to an on-site venting pipeline.
6. The high-purity helium filling system according to claim 1, characterized in that: The confluence pipeline is provided with a helium analyzer.
7. The high-purity helium filling system according to claim 1, characterized in that: The helium cylinder group (23) is two sets of steel cylinder groups connected in parallel, and each set of steel cylinder groups includes two types of filling steel cylinder groups: a container grid and a bulk grid.
