Vacuum manipulator vacuum performance test equipment
By designing vacuum robot vacuum performance testing equipment, the vacuum robot's ultimate adsorption capacity is tested using components such as slide chutes, sliders, arc-shaped support plates and air pumps, which solves the problem of wafer disengagement when the vacuum robot moves at high speed, and improves the test Efficiency and equipment practicality reduce production costs.
Patent Information
- Application Number
- CN202420935306.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-30
- Publication Date
- 2025-01-07
- Estimated Expiration
- 2034-04-30
AI Technical Summary
Vacuum robots can easily cause wafer disengagement when moving at high speed, causing damage and increasing production costs. A device that can accurately, quickly and effectively test vacuum performance is needed.
A vacuum robot vacuum performance testing equipment is designed, including a box, a test chamber, a slide, a slide, a slide, a curved support plate, a test disk, a screw, a motor, an air pump and a sensor, through the push-up block and a curved side The pressing push of the push block and the pressing of the air pump test the ultimate adsorption capability of the vacuum robot.
It improves the working efficiency of vacuum performance testing, enhances the practicality of the equipment, avoids wafer detachment damage caused by insufficient adsorption capacity, and reduces production costs.
Smart Images
Figure CN222318485U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of vacuum manipulator performance detection, and more specifically, particularly relates to a vacuum performance testing device for a vacuum manipulator. Background Art
[0002] With the rapid development of the semiconductor industry, the demand for vacuum manipulators used in the semiconductor production process continues to increase. How to accurately, quickly and efficiently realize the various process flows of wafer production and automated handling has become the focus of attention, which has also brought about an increasing market demand for vacuum manipulators and their vacuum performance testing equipment.
[0003] Since the vacuum manipulator will lift the wafer and move it at high speed during use, the wafer may easily fall off the top of the vacuum manipulator due to inertia during high-speed movement, causing damage to the wafer and increasing production costs. Therefore, it is very necessary to test the vacuum performance of the vacuum manipulator during operation before use.
[0004] Therefore, in view of this, the existing structure and defects are studied and improved, and a vacuum performance testing device for a vacuum manipulator is provided, in order to achieve a more practical purpose. Utility Model Content
[0005] In order to solve the above technical problems, the utility model provides a vacuum performance test device for a vacuum manipulator, which is achieved by the following specific technical means:
[0006] A vacuum performance testing device for a vacuum manipulator comprises a box body, a test chamber is provided on one side of the box body, a first slide groove is provided at the top of the test chamber, a first slider is slidably installed in the first slide groove, a side test assembly is installed at the bottom end of the first slider through a bracket, a pair of arc support plates are symmetrically installed on one side of the bottom end of the test chamber, a test disk is placed between the pair of arc support plates, a second slide groove is provided at the middle position of the bottom end of the test chamber, a lower test assembly is installed in the second slide groove, and recovery grooves are provided at the bottom end of the test chamber at positions located on both sides of the second slide groove.
[0007] Furthermore, a first screw is rotatably installed in the first sliding groove, and the first screw passes through the left and right sides of the first sliding block and is threadedly connected to the first sliding block.
[0008] Furthermore, a first motor is installed on one side of the first slide slot, and an output end of the first motor is drivingly connected to the first screw via a coupling.
[0009] Furthermore, the lower test assembly includes a second slider, the second slider is slidably installed in a second slide groove, a third slide groove is provided at the top of the second slider, a third slider is slidably installed in the third slide groove, a square mounting plate is installed at the top of the third slider, a pair of push-up blocks are symmetrically installed on both sides of the top of the square mounting plate, a first sealing gasket is installed on the peripheral side of the bottom end of the third slider, and the other side of the first sealing gasket is tightly attached to the peripheral side of the third slide groove.
[0010] Furthermore, a pair of guide rods are installed in the second slide groove, and the pair of guide rods pass through the bottom end of the second slider and are slidably connected to the second slider. A second screw rod is rotatably installed in the second slide groove, and the second screw rod passes through the bottom end of the second slider and is threadedly connected to the second slider.
[0011] Furthermore, a second motor is installed at the bottom end of the second slide slot, and an output end of the second motor is drivingly connected to the second screw via a coupling.
[0012] Furthermore, the side test assembly includes a mounting seat, which is installed on the bottom end of the first slider through a bracket, a fourth slide groove is provided on one side of the mounting seat, a fourth slider is slidably installed on one side of the fourth slide groove, an arc-shaped side push block is installed on one side of the fourth slider, and the shape and size of the arc-shaped side push block match the shape and size of the test disk, a second sealing gasket is installed on the peripheral side of the fourth slider, and the other side of the second sealing gasket is tightly against the peripheral side of the fourth slide groove.
[0013] Furthermore, sensors are installed on the top of one of the pair of upper push blocks and one side of the arc-shaped side push block, and the sensor located at the top of the upper push block is electrically connected to the second motor, and the sensor located on one side of the arc-shaped side push block is electrically connected to the first motor.
[0014] Furthermore, a first air pump and a second air pump are installed on one side of the box body, and the first air pump and the second air pump are connected to one side of the third slide groove and one side of the fourth slide groove through air paths respectively.
[0015] Furthermore, the first air pump and the second air pump are both electrically connected to the sensor.
[0016] Compared with the prior art, the utility model has the following beneficial effects:
[0017] The vacuum performance testing device of the vacuum manipulator in the utility model is used in coordination with a box body, a test chamber, a first slide groove, a first slider, an arc-shaped support plate, a test plate, a second slide groove, a recovery groove, a first screw rod, a first motor, a second slider, a third slide groove, a third slider, a square mounting plate, an upper push block, a first sealing pad, a guide rod, a second screw rod, a second motor, a mounting seat, a fourth slide groove, a fourth slider, an arc-shaped side push block, a second sealing pad, a sensor, a first air pump and a second air pump. It is convenient to test the ultimate adsorption capacity of the vacuum manipulator through the extrusion and pushing of the upper push block and the arc-shaped side push block and the pressurization of the first air pump and the second air pump, and the test result is reflected by the pressure values of the first air pump and the second air pump, thereby improving the working efficiency of the vacuum performance testing equipment of the vacuum manipulator during testing, improving the practicability of the equipment, avoiding the detachment and damage of the wafer due to insufficient adsorption capacity of the vacuum manipulator, and reducing the production cost. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] Figure 1 It is a three-dimensional schematic diagram of the utility model.
[0019] Figure 2 It is a three-dimensional schematic diagram of the box structure of the utility model.
[0020] Figure 3 It is a front cross-sectional schematic diagram of the internal structure of the box body of the utility model.
[0021] Figure 4 The utility model Figure 3 Enlarged schematic diagram of part A.
[0022] Figure 5 The utility model Figure 3 Schematic diagram of the enlarged portion B.
[0023] In the figure, the corresponding relationship between the component names and the figure numbers is as follows:
[0024] 1. Box body; 2. Test chamber; 3. First slide groove; 4. First slider; 5. Arc support plate; 6. Test plate; 7. Second slide groove; 8. Recovery groove; 9. First screw rod; 10. First motor; 11. Second slider; 12. Third slide groove; 13. Third slider; 14. Square mounting plate; 15. Push-up block; 16. First sealing gasket; 17. Guide rod; 18. Second screw rod; 19. Second motor; 20. Mounting seat; 21. Fourth slide groove; 22. Fourth slider; 23. Arc side push block; 24. Second sealing gasket; 25. Sensor; 26. First air pump; 27. Second air pump. DETAILED DESCRIPTION
[0025] The following is a further detailed description of the implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.
[0026] In the description of the present invention, unless otherwise specified, "multiple" means two or more; the terms "upper", "lower", "left", "right", "inner", "outer", "front end", "rear end", "head", "tail" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", "third" and the like are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.
[0027] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0028] Example:
[0029] As attached Figure 1 To Attachment Figure 5 As shown:
[0030] The utility model provides a vacuum performance testing device for a vacuum manipulator, comprising a box body 1, a test chamber 2 is provided on one side of the box body 1, a first slide groove 3 is provided on the top of the test chamber 2, a first slider 4 is slidably installed in the first slide groove 3, a side test assembly is installed on the bottom end of the first slider 4 through a bracket, a pair of arc-shaped support plates 5 are symmetrically installed on one side of the bottom end of the test chamber 2, a test disc 6 is placed between the pair of arc-shaped support plates 5, a second slide groove 7 is provided at the middle position of the bottom end of the test chamber 2, a lower test assembly is installed in the second slide groove 7, and recovery grooves 8 are provided at the bottom end of the test chamber 2 at positions located on both sides of the second slide groove 7.
[0031] Among them, a first screw rod 9 is rotatably installed in the first slide groove 3, and the first screw rod 9 passes through the left and right sides of the first slider 4 and is threadedly connected to the first slider 4. Through the rotation of the first screw rod 9, under the limiting action of the first slide groove 3, the first slider 4 moves, driving the side test assembly to move to the specified position.
[0032] A first motor 10 is installed on one side of the first slide slot 3 , and an output end of the first motor 10 is transmission-connected to the first screw 9 via a coupling. The first motor 10 drives the first screw 9 to rotate, thereby driving the first slider 4 to move.
[0033] Among them, the lower test component includes a second slider 11, which is slidably installed in the second slide groove 7. A third slide groove 12 is provided at the top of the second slider 11, and a third slider 13 is slidably installed in the third slide groove 12. A square mounting plate 14 is installed at the top of the third slider 13, and a pair of upper push blocks 15 are symmetrically installed on both sides of the top of the square mounting plate 14. A first sealing gasket 16 is installed on the peripheral side of the bottom end of the third slider 13, and the other side of the first sealing gasket 16 is close to the peripheral side of the third slide groove 12. Through the upward movement of the second slider 11, the upper push block 15 is close to the bottom end of the test disk 6, and then the first air pump 26 is turned on, and the first air pump 26 injects gas into the third slide groove 12 to increase the pressure in the third slide groove 12, so that the air pressure pushes the third slider 13 to move upward, driving a pair of upper push blocks 15 to push the test disk 6 upward until the test disk 6 is detached from the surface of the vacuum manipulator. At this time, the air pressure value displayed by the first air pump 26 is the maximum pressure value that the vacuum manipulator can withstand in the vertical direction.
[0034] Among them, a pair of guide rods 17 are installed in the second slide groove 7, and the pair of guide rods 17 pass through the bottom end of the second slider 11 and are slidably connected to the second slider 11. A second screw rod 18 is rotatably installed in the second slide groove 7, and the second screw rod 18 passes through the bottom end of the second slider 11 and is threadedly connected to the second slider 11. Through the rotation of the second screw rod 18, under the limiting action of the pair of guide rods 17, the second slider 11 moves up and down.
[0035] A second motor 19 is installed at the bottom end of the second slide groove 7, and the output end of the second motor 19 is transmission-connected to the second screw rod 18 via a coupling. The second motor 19 drives the second screw rod 18 to rotate, thereby driving the second slider 11 to move.
[0036] Among them, the side test assembly includes a mounting seat 20, which is mounted on the bottom end of the first slider 4 through a bracket, a fourth slide groove 21 is provided on one side of the mounting seat 20, a fourth slider 22 is slidably mounted on one side of the fourth slide groove 21, an arc-shaped side push block 23 is installed on one side of the fourth slider 22, and the shape and size of the arc-shaped side push block 23 match the shape and size of the test disk 6, a second sealing gasket 24 is installed on the peripheral side of the fourth slider 22, and the other side of the second sealing gasket 24 is close to the peripheral side of the fourth slide groove 21, when the first slider 4 drives the arc-shaped side push block 23 to move to a position near the test disk 6 through the mounting seat 20, the second air pump 27 is turned on, and gas is injected into the fourth slide groove 21 to achieve pressurization in the fourth slide groove 21, so that the air pressure pushes the fourth slider 22 to move in the direction of the test disk 6 until the test disk 6 falls off the surface of the vacuum manipulator, and the air pressure value displayed by the second air pump 27 at this time is the maximum thrust value that the vacuum manipulator can withstand in the horizontal direction.
[0037] Among them, sensors 25 are installed on the top of one of the pair of upper push blocks 15 and one side of the arc-shaped side push block 23, and the sensor 25 located at the top of the upper push block 15 is electrically connected to the second motor 19, and the sensor 25 located on one side of the arc-shaped side push block 23 is electrically connected to the first motor 10.
[0038] A first air pump 26 and a second air pump 27 are installed on one side of the box body 1, and the first air pump 26 and the second air pump 27 are connected to one side of the third chute 12 and one side of the fourth chute 21 through air paths, respectively.
[0039] Among them, the first air pump 26 and the second air pump 27 are both electrically connected to the sensor 25. When the sensor 25 at the top of the push-up block 15 detects that the push-up block 15 is in contact with the test disk 6, the second motor 19 is turned off to stop the second slider 11 from rising, and then the first air pump 26 is turned on to inject gas into the third slide groove 12. When the test disk 6 is detached from the surface of the vacuum manipulator, the sensor 25 cannot detect the contact of the object. After controlling the first air pump 26 to be turned off, the second motor 19 is controlled to be turned on again to drive the second slider 11 to return to the second slide groove 7. When the sensor 25 located on one side of the arc-shaped side push block 23 detects that the arc-shaped side push block 23 is in contact with the test disk 6, the second motor 19 is turned off to stop the first slider 4 from moving, and then the second air pump 27 is turned on to inject gas into the fourth slide groove 21. When the test disk 6 is detached from the surface of the vacuum manipulator, the sensor 25 cannot detect the contact of the object. After controlling the second air pump 27 to be turned off, the first motor 10 is controlled to be turned on again to drive the first slider 4 to reset.
[0040] The working principle of this embodiment is as follows: when performing the vacuum performance test of the vacuum manipulator, the staff first places the test disc 6 between a pair of arc-shaped support plates 5, and then controls the vacuum manipulator to adsorb and lift the test disc 6 from directly below the test disc 6 to the middle position of the test chamber 2, and then turns on the second motor 19, which drives the second screw 18 to rotate. Under the limiting action of a pair of guide rods 17, the second slider 11 moves upward until the sensor 25 contacts the test disc 6. At this time, the second motor 19 is turned off, and the first air pump 26 is turned on to inject gas into the third slide groove 12 to increase the pressure in the third slide groove 12, so that the air pressure pushes the third slider 13 to move upward, driving a pair of upper push blocks 15 to push the test disc 6 upward until the test disc 6 is detached from the surface of the vacuum manipulator. At this time, the air pressure value displayed by the first air pump 26 is the maximum pressure value that the vacuum manipulator can withstand in the vertical direction. When the test disc 6 is detached from the surface of the vacuum manipulator, the sensor 25 cannot detect the contact of the object, and the first air pump 26 is controlled to be turned off and then the second motor 19 is controlled to be turned on again. The first motor 10 is turned on, driving the second slider 11 to return to the second chute 7. At this time, the staff places another test disk 6 between a pair of arc-shaped support plates 5, and then turns on the first motor 10. The first motor 10 drives the first screw 9 to rotate. Under the limiting action of the first chute 3, the first slider 4 moves, driving the arc-shaped side push block 23 to move in the direction of the test disk 6 until the sensor 25 detects that the arc-shaped side push block 23 is in contact with the test disk 6. The second motor 19 is turned off to stop the first slider 4 from moving. Then the second air pump 27 is turned on to inject gas into the fourth chute 21 to increase the pressure in the fourth chute 21, so that the air pressure pushes the fourth slider 22 to move in the direction of the test disk 6 until the test disk 6 falls off the surface of the vacuum manipulator. At this time, the air pressure value displayed by the second air pump 27 is the maximum thrust value that the vacuum manipulator can withstand in the horizontal direction. When the test disk 6 is detached from the surface of the vacuum manipulator, the sensor 25 cannot detect the contact of the object. After controlling the second air pump 27 to be turned off, the first motor 10 is controlled to be turned on again, driving the first slider 4 to reset, and completing the vacuum performance test.
[0041] The embodiments of the present invention are provided for the purpose of illustration and description, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiments are selected and described to better illustrate the principles and practical applications of the present invention, and to enable those of ordinary skill in the art to understand the present invention and thereby design various embodiments with various modifications suitable for specific purposes.
Claims
1. A vacuum performance test device for a vacuum manipulator, comprising a box (1), characterized in that: A test chamber (2) is provided on one side of the box body (1), a first slide groove (3) is provided at the top of the test chamber (2), a first slider (4) is slidably installed in the first slide groove (3), a side test assembly is installed at the bottom end of the first slider (4) through a bracket, a pair of arc-shaped support plates (5) are symmetrically installed on one side of the bottom end of the test chamber (2), a test disc (6) is placed between the pair of arc-shaped support plates (5), a second slide groove (7) is provided at the middle position of the bottom end of the test chamber (2), a lower test assembly is installed in the second slide groove (7), and a recovery groove (8) is provided at the bottom end of the test chamber (2) at positions located on both sides of the second slide groove (7).
2. The vacuum performance testing device for a vacuum manipulator according to claim 1, characterized in that: A first screw rod (9) is rotatably mounted in the first sliding groove (3), and the first screw rod (9) passes through the left and right sides of the first sliding block (4) and is threadedly connected to the first sliding block (4).
3. The vacuum performance testing device for a vacuum manipulator according to claim 2, characterized in that: A first motor (10) is installed on one side of the first slide groove (3), and an output end of the first motor (10) is transmission-connected to a first screw rod (9) via a coupling.
4. The vacuum performance testing device for a vacuum manipulator according to claim 1, characterized in that: The lower test assembly comprises a second slider (11), the second slider (11) is slidably installed in a second slide groove (7), a third slide groove (12) is provided at the top end of the second slider (11), a third slider (13) is slidably installed in the third slide groove (12), a square mounting plate (14) is installed at the top end of the third slider (13), a pair of upper push blocks (15) are symmetrically installed on both sides of the top end of the square mounting plate (14), a first sealing gasket (16) is installed on the peripheral side of the bottom end of the third slider (13), and the other side of the first sealing gasket (16) is tightly attached to the peripheral side of the third slide groove (12).
5. The vacuum performance testing device for a vacuum manipulator as claimed in claim 4, characterized in that: A pair of guide rods (17) are installed in the second slide groove (7), and the pair of guide rods (17) pass through the bottom end of the second slider (11) and are slidably connected to the second slider (11); a second screw rod (18) is rotatably installed in the second slide groove (7), and the second screw rod (18) passes through the bottom end of the second slider (11) and is threadedly connected to the second slider (11).
6. The vacuum performance testing device for a vacuum manipulator as claimed in claim 5, characterized in that: A second motor (19) is installed at the bottom end of the second slide groove (7), and the output end of the second motor (19) is transmission-connected to the second screw rod (18) via a coupling.
7. The vacuum performance testing device for a vacuum manipulator according to claim 4, characterized in that: The side test assembly comprises a mounting seat (20), wherein the mounting seat (20) is mounted on the bottom end of the first slider (4) through a bracket, a fourth slide groove (21) is provided on one side of the mounting seat (20), a fourth slider (22) is slidably mounted on one side of the fourth slide groove (21), an arc-shaped side push block (23) is mounted on one side of the fourth slider (22), and the shape and size of the arc-shaped side push block (23) match the shape and size of the test disk (6), a second sealing gasket (24) is mounted on the peripheral side of the fourth slider (22), and the other side of the second sealing gasket (24) is in close contact with the peripheral side of the fourth slide groove (21).
8. The vacuum performance testing device for a vacuum manipulator according to claim 7, characterized in that: A sensor (25) is installed at the top of one of the pair of upper push blocks (15) and one side of the arc-shaped side push block (23), and the sensor (25) located at the top of the upper push block (15) is electrically connected to the second motor (19), and the sensor (25) located at one side of the arc-shaped side push block (23) is electrically connected to the first motor (10).
9. The vacuum performance testing device for a vacuum manipulator according to claim 1, characterized in that: A first air pump (26) and a second air pump (27) are installed on one side of the box body (1), and the first air pump (26) and the second air pump (27) are connected to one side of the third slide groove (12) and one side of the fourth slide groove (21) respectively through air paths.
10. The vacuum performance testing device for a vacuum manipulator according to claim 9, characterized in that: The first air pump (26) and the second air pump (27) are both electrically connected to the sensor (25).