Electrode introduction assembly and tubular chemical vapor deposition equipment

Abstract

The utility model discloses an electrode lead-in assembly and tubular chemical vapor deposition equipment, the electrode lead-in assembly comprises a support rod, an electrode stem, an electrode body and a support piece, the electrode stem is arranged in the support rod in a penetrating manner, the electrode stem and the support rod are mutually isolated, the electrode body is provided with a first electrode part and a second electrode part which are connected, the first electrode part is connected with the electrode stem, and the second electrode part is connected with the support piece. The electrode body is isolated from the supporting rod, and the second electrode part is exposed at the top and / or the side part of the supporting piece and is in contact with the boat body; a tubular chemical vapor deposition apparatus includes an electrode introduction assembly. According to the utility model, the electrode rod is introduced from the inside of the support rod, does not occupy the reaction and debugging space in the reaction cavity, is not easy to be plated with a conductive film, and can be independently detached from the support rod, cleaned and replaced without integrally replacing the support rod, so that the leveling operation on the electrode is saved, and the maintenance is more convenient.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaic cell manufacturing, in particular to an electrode introduction component and a tubular chemical vapor deposition device. Background Art

[0002] Tubular chemical vapor deposition equipment such as CVD and PECVD use support rods to support the graphite boat. The electrode rods are introduced from the furnace door and are arranged on both sides of the support rods. The electrode rods are connected to the conductive blocks, and the graphite boat is pressed on the conductive blocks for conduction. The electrode rods occupy the space of the reaction chamber. During the operation of the equipment, the electrode rods become longer due to heat, and exert pressure on the tube wall, which is not conducive to debugging. The electrode rods are contaminated by dust and are easily coated with a conductive film, resulting in abnormal arcing. Therefore, the equipment needs to be maintained frequently. During maintenance, the entire support rod needs to be removed, which is inconvenient to maintain. In addition, when the support rod is dragged in the furnace body, it is easy to damage the tube body, affecting the service life of the equipment. Summary of the invention

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model proposes an electrode introduction assembly, which is convenient for maintenance and debugging and can increase the reaction chamber space.

[0004] The utility model also provides a tubular chemical vapor deposition device having the electrode introduction component.

[0005] According to the first aspect of the present invention, the electrode introduction assembly includes:

[0006] A support rod having a receiving cavity therein;

[0007] An electrode rod, inserted into the accommodating cavity and used for introducing an electrode, wherein the electrode rod is isolated from the supporting rod;

[0008] an electrode body, comprising a first electrode portion and a second electrode portion connected to each other, wherein the first electrode portion is inserted into the accommodating cavity and connected to the electrode rod, and the second electrode portion is located outside the support rod, and the electrode body and the support rod are isolated from each other;

[0009] The support member is made of insulating material, is detachably connected to the support rod, and is used to support the boat body. The second electrode portion is exposed on the top and / or side of the support member and is in contact with the boat body.

[0010] The electrode introduction assembly according to the embodiment of the utility model has at least the following beneficial effects:

[0011] The electrode rod in the utility model is introduced from the inside of the support rod, does not occupy the reaction and debugging space inside the reaction chamber, the dust in the reaction chamber is isolated from the outside of the support rod, the electrode rod is not polluted by dust, and is not easily plated with a conductive film, and the insulating parts of the electrode introduction assembly exposed outside the reaction chamber only have a partial surface of the support member exposed in the reaction chamber. Even if the exposed surface of the support member is plated with a conductive film, since the support member is detachably connected to the support rod, the support member can be removed from the support rod separately, and cleaned and replaced, without replacing the support rod as a whole, which makes maintenance more convenient; in addition, since there is no need to disassemble the electrode rod and the electrode body during maintenance, the leveling operation of the electrode is saved, and the debugging steps during maintenance are more convenient.

[0012] According to some embodiments of the present invention, the electrode introduction assembly further includes a first insulating member, which is sleeved on the outside of the electrode rod and located between the outer wall of the electrode rod and the inner wall of the support rod.

[0013] According to some embodiments of the utility model, the electrode introduction assembly also includes a second insulating member, which is wrapped around the side of the electrode body, and the top surface of the second electrode part is exposed at the top of the support member, and one end of the first insulating member is inserted into the second insulating member, or the end of the second insulating member is inserted into the first insulating member.

[0014] According to some embodiments of the present invention, the second electrode portion is arranged to protrude outwardly relative to a side portion of the first electrode portion.

[0015] According to some embodiments of the utility model, the electrode introduction assembly also includes a second insulating member, which is attached to the bottom of the second electrode part and is located between the second electrode part and the support rod, or the second insulating member is attached to the side and bottom of the second electrode part and is located between the second electrode part and the support member and between the second electrode part and the support rod.

[0016] According to some embodiments of the utility model, the second insulating member protrudes outward relative to the side of the second electrode portion, the support member has a mounting groove and a through hole connected to the top of the mounting groove, the second electrode portion is accommodated in the through hole, the second insulating member is accommodated in the mounting groove, the bottom of the second electrode portion and a portion of the groove wall of the mounting groove are in contact with the top surface of the second insulating member, the bottom of the second insulating member is in contact with the top surface of the support rod, and the side of the second insulating member is in contact with the groove wall of the mounting groove.

[0017] According to some embodiments of the present invention, the support member is wrapped around at least two side surfaces of the support rod, and every two of the side surfaces are not parallel.

[0018] According to some embodiments of the present utility model, the electrode body is plugged into the electrode rod, or the electrode rod is threadedly connected to the electrode body.

[0019] According to some embodiments of the utility model, a plurality of the support members are detachably connected to each of the support rods, the top surface of each of the support members is flush, and the second electrode portion is exposed from the top of one of the support members.

[0020] According to the second aspect of the present invention, a tubular chemical vapor deposition device includes:

[0021] The electrode introduction assembly of the first aspect embodiment;

[0022] The tube body has a reaction chamber inside, and the electrode introduction assembly is accommodated in the reaction chamber.

[0023] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The present invention is further described below with reference to the accompanying drawings and embodiments, wherein:

[0025] Figure 1 A schematic diagram of an embodiment of an electrode introduction assembly of the utility model;

[0026] Figure 2 for Figure 1 A cross-sectional view at one of the supports;

[0027] Figure 3 for Figure 2 A partial enlarged view of the middle A;

[0028] Figure 4 is a schematic diagram of an embodiment of a support member;

[0029] Figure 5 It is a schematic diagram of an embodiment of the tubular chemical vapor deposition equipment of the utility model;

[0030] Figure 6 for Figure 5 A cross-sectional view of an embodiment of a mid-tube chemical vapor deposition apparatus;

[0031] Figure 7 for Figure 6 Schematic diagram of the coordination between the middle boat foot and the electrode introduction assembly.

[0032] Reference numerals:

[0033] Graphite boat 10, boat foot 101;

[0034] Electrode introduction assembly 100, support rod 110, accommodating cavity 111, electrode rod 120, electrode body 130, first electrode portion 131, second electrode portion 132, support member 140, mounting groove 141, through hole 142, first insulating member 150, second insulating member 160;

[0035] Tube body 200 and reaction chamber 210 . DETAILED DESCRIPTION

[0036] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0037] In the description of the present invention, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0038] In the description of the present utility model, "several" means more than one, "many" means more than two, "greater than", "less than", "exceed" etc. are understood to exclude the number itself, and "above", "below", "within" etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used to distinguish the technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0039] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0040] In the description of the utility model, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0041] In an embodiment of the present utility model, an electrode introduction assembly 100 is provided, such as Figure 5 After the electrode introduction assembly 100 is placed into the reaction chamber 210, the external electrode can be introduced into the reaction chamber 210, so that the graphite boat 10 located in the reaction chamber 210 forms electrical conduction with the electrode. It can be understood that the above-mentioned reaction chamber 210 is a cavity inside a tubular vapor deposition reaction device, and the tubular vapor deposition reaction device can be a PECVD coating device, a CVD coating device, etc.

[0042] Reference Figures 1 to 3 The electrode introduction assembly 100 includes a support rod 110, an electrode rod 120, an electrode body 130 and a support member 140. The interior of the support rod 110 is hollow and forms a receiving cavity 111. The electrode rod 120 is arranged in the receiving cavity 111. One end of the electrode rod 120 is used to connect the RF electrode to introduce the RF electrode into the reaction chamber 210. The electrode body 130 has a first electrode portion 131 and a second electrode portion 132 connected to each other. The first electrode portion 131 is inserted into the receiving cavity 111 and connected to the electrode rod 120. The second electrode portion 132 is located outside the support rod 110, and the support member 140 is detachably connected to the outside of the support rod 110 and is used to support the boat body. The second electrode portion 132 is exposed on the top and / or side of the support member 140. When the boat body is placed on the support member 140, the boat body is supported by the support member 140 and contacts the second electrode portion 132, so that the external electrode is introduced into the reaction chamber 210 through the electrode rod 120, the first electrode portion 131 and the second electrode portion 132, and is electrically connected to the graphite boat 10.

[0043] In addition, the support member 140 is made of insulating material, and the electrode rod 120 and the support rod 110, as well as the electrode body 130 and the support rod 110 are isolated from each other. Therefore, the graphite boat 10 and the support member 140, the support rod 110 and the electrode rod 120, and the electrode body 130 and the support rod 110 are insulated. There is only one passage in the electrode introduction assembly 100 for introducing the electrode into the graphite boat 10 through the electrode rod 120 and the electrode body 130, thereby avoiding abnormal coating.

[0044] When the vapor deposition reaction is carried out in the reaction chamber 210, the components exposed in the reaction chamber 210 are contaminated by dust, and there is a possibility that the surface is plated with a conductive film, resulting in abnormal arcing. The conventional electrode introduction rod is arranged on the side of the support rod, which makes the electrode introduction rod extremely susceptible to dust contamination. Therefore, it is necessary to frequently perform maintenance such as replacement and cleaning. During maintenance, the support rod and the electrode rod must be dragged out of the reaction chamber 210 as a whole, which is inconvenient to disassemble. After the electrode rod is re-installed into the reaction chamber 210, in order to ensure that the electrode introduced by the electrode rod can accurately contact the graphite boat, the electrode at the end of the electrode rod needs to be leveled, and the debugging is relatively cumbersome. Since the electrode rod is exposed in the reaction chamber 210, the electrode rod is deformed after being heated and stretched, and it is easy to cover the inner wall of the tube body 200, affecting the service life of the tube body 200 and increasing the difficulty of debugging the electrode.

[0045] The electrode rod 120 in the utility model is introduced from the inside of the support rod 110, does not occupy the reaction and debugging space inside the reaction chamber 210, the dust in the reaction chamber 210 is isolated from the outside of the support rod 110, the electrode rod 120 is not polluted by dust, and is not easily plated with a conductive film; after the electrode introduction assembly 100 is placed in the reaction chamber 210, the boat foot 101 of the graphite boat 10 contacts the second electrode portion 132 and the top surface of the support member 140, the second electrode portion 132 and part of the surface of the support member 140 are shielded by the boat foot 101, and the support rod 110 itself is made of a conductive material. Among the insulating parts of the electrode introduction assembly 100 exposed outside the reaction chamber 210, only the support member 140 is partially exposed inside the reaction chamber 210. Even if the exposed surface of the support member 140 is plated with a conductive film, since the support member 140 is detachably connected to the support rod 110, the support member 140 can be removed from the support rod 110 separately, and cleaned and replaced, without replacing the support rod 110 as a whole, so maintenance is more convenient. In addition, since there is no need to disassemble the electrode rod 120 and the electrode body 130 during the maintenance process, the leveling operation of the electrode is saved, and the debugging steps during the maintenance process are more convenient.

[0046] It can be understood that the bottom of the boat foot 101 of the graphite boat 10 has a bottom surface and a side surface, and the top surface and side profile of the support member 140 can be set to match the bottom surface and side surface of the boat foot 101. When the boat foot 101 of the graphite boat 10 is placed on the support member 140, the top surface of the support member 140 contacts the bottom surface of the boat foot 101, and the side surface of the support member 140 contacts the side surface of the boat foot 101; the second electrode portion 132 can be set to be exposed only on the top surface of the support member 140. In this case, The second electrode portion 132 contacts the bottom surface of the boat foot 101 to form electrical conduction, or the second electrode portion 132 can be set to be exposed only on the side of the support member 140. In this case, the second electrode portion 132 contacts the side of the boat foot 101 to form electrical conduction; of course, the second electrode portion 132 can also be exposed on the top surface and side of the support member 140 at the same time, and contact the side and bottom surfaces of the boat foot 101 at the same time, thereby increasing the contact area between the second electrode portion 132 and the boat foot 101.

[0047] It should be noted that in the present application, the mutual isolation between the electrode rod 120 and the support rod 110, and the mutual isolation between the electrode body 130 and the support rod 110 refer to electrical insulation between the two, and the isolation method is not limited to coating an insulating coating on the facing surfaces of the two, pasting an insulating layer, or setting an insulating structure between the two.

[0048] In one embodiment, Figure 3 , an insulating structure is provided between the electrode rod 120 and the support rod 110 to achieve electrical insulation, for example, the electrode introduction assembly 100 also includes a first insulating member 150, the first insulating member 150 is sleeved on the outside of the electrode rod 120, and is located between the outer wall of the electrode rod 120 and the inner wall of the support rod 110, and the first insulating member 150 is made of an insulating material; by providing the first insulating member 150 on the outside of the electrode rod 120, the first insulating member 150 isolates the electrode rod 120 from the support rod 110, thereby achieving electrical isolation between the electrode rod 120 and the support rod 110, and the first insulating member 150 can be made of an insulating material that is resistant to high temperatures and has a certain structural strength, such as ceramics, which can not only achieve insulation protection for the electrode rod 120, but also adapt to the high-temperature coating environment in the reaction chamber 210, and has a certain temperature insulation effect, thereby reducing the deformation of the electrode rod 120 under the influence of high temperature, so that the electrode introduction assembly 100 has a longer service life.

[0049] Furthermore, an insulating structure is also provided between the electrode body 130 and the support rod 110 to achieve electrical insulation. For example, the electrode introduction assembly 100 also includes a second insulating member 160, which is wrapped around the side of the electrode body 130, and the top surface of the second electrode portion 132 is exposed on the top of the support member 140; when a chemical deposition reaction is carried out in the reaction chamber 210, the bottom surface of the boat foot 101 contacts the top surface of the second electrode portion 132, thereby achieving electrical connection between the electrode rod 120 and the graphite boat 10, and the top surface of the second electrode portion 132 is blocked by the boat foot 101, and the entire side surface of the electrode body 130 is blocked by the second insulating member 160, so that the electrode body 130 and the support rod 110 remain in an insulated state; similarly, the second insulating member 160 can be made of an insulating material that is resistant to high temperatures and has a certain structural strength, such as ceramics.

[0050] It should be noted that the interior of the second insulating member 160 should have an inner cavity capable of penetrating the electrode body 130, and the inner wall shape of the second insulating member 160 should match the outer contour of the electrode body 130. Exemplarily, the electrode body 130 is configured as a cylindrical structure of equal diameter, the first electrode portion 131 is located at the lower part of the electrode body 130, the second electrode portion 132 is located at the upper part of the electrode body 130, the second insulating member 160 has a cylindrical inner cavity, and is sleeved on the outside of the electrode body 130; or, the electrode body 130 is configured as a stepped columnar structure, and the cross-sectional area of ​​the lower part is smaller than the cross-sectional area of ​​the upper part, the first electrode portion 131 is located at the lower part of the electrode body 130, the second electrode portion 132 is located at the upper part of the electrode body 130, the second insulating member 160 has a stepped inner cavity, and the cross-sectional area of ​​the upper inner cavity is larger than the cross-sectional area of ​​the lower inner cavity, and the second insulating member 160 is sleeved on the outside of the electrode body 130.

[0051] Furthermore, the vertical length of the second insulating member 160 can be set to be equal to the vertical length of the electrode body 130. In this way, the entire side of the electrode body 130 is shielded and isolated by the second insulating member 160, and a portion of the second insulating member 160 is passed through the support member 140. In this way, the insulation between the electrode body 130 and the support rod 110 can be achieved, and the insulation between the electrode body 130 and the support member 140 can also be strengthened.

[0052] It can be understood that when the electrode body 130 is set to a columnar structure of unequal diameters, setting the cross-sectional area of ​​the second electrode portion 132 to be larger than the cross-sectional area of ​​the first electrode portion 131 can increase the contact area between the second electrode portion 132 and the boat foot 101, and make the electrical connection between the second electrode portion 132 and the boat foot 101 more stable; illustratively, the second electrode portion 132 protrudes outward relative to the side of the first electrode portion 131, and the second electrode portion 132 is located on the top of the first electrode portion 131. In this way, the contact area between the top surface of the second electrode portion 132 and the boat foot 101 is larger, thereby achieving a stable electrical connection between the electrode body 130 and the graphite boat 10.

[0053] In addition, in the case where the second electrode portion 132 protrudes outwardly relative to the side of the first electrode portion 131, the second insulating member 160 protrudes outwardly relative to the side of the second electrode portion 132, that is, the second insulating member 160 exceeds the side surface of the second electrode portion 132, the second insulating member 160 is attached to the bottom of the second electrode portion 132, the second insulating member 160 is located between the bottom surface of the second electrode portion 132 and the top surface of the support rod 110, and part of the surface of the support member 140 and part of the bottom surface of the second electrode portion 132 are in contact with the top surface of the second insulating member 160; setting the second insulating member 160 as a protruding structure can further isolate the support rod 110 from the second electrode portion 132, thereby ensuring effective insulation between the second electrode portion 132 and the support rod 110. Alternatively, in another embodiment, the second insulating member 160 is attached to the side and bottom of the second electrode portion 132, and the second insulating member 160 is located between the second electrode portion 132 and the support member 140 and between the second electrode portion 132 and the support rod 110. In this way, the side and bottom of the second electrode portion 132 are both isolated, thereby strengthening the electrical isolation of the second insulating member 160 to the second electrode portion 132.

[0054] Further, see Figure 4 The support member 140 has a mounting groove 141 and a through hole 142 connected to the top of the mounting groove 141. The second insulating member 160 protrudes outward relative to the side of the second electrode portion 132. At the same time, the second electrode portion 132 protrudes outward relative to the side of the first electrode portion 131. The second electrode portion 132 is accommodated in the through hole 142. In this way, the top surface of the second electrode portion 132 is exposed and can contact the boat foot 101. The bottom of the second electrode portion 132 can be connected to the first electrode portion 131. The second insulating member 160 is accommodated in the mounting groove 141. The inner diameter of the mounting groove 141 on the side of the second electrode portion 132 is larger than the inner diameter of the through hole 142. The mounting groove 141 and the inner wall of the through hole 142 are combined into a stepped form. The bottom of the second electrode portion 132 and part of the groove wall of the mounting groove 141 are in contact with the top surface of the second insulating member 160. The bottom of the second insulating member 160 is in contact with the top surface of the support rod 110, and the side of the second insulating member 160 is in contact with the groove wall of the mounting groove 141.

[0055] In addition, the first insulating member 150 and the second insulating member 160 are plugged into each other to facilitate the connection between the electrode body 130 and the electrode rod 120; illustratively, the lower end of the second insulating member 160 is inserted into the first insulating member 150, the lower end of the electrode body 130 is inserted into the first insulating member 150 and connected to the electrode rod 120, and the connection method between the electrode body 130 and the electrode rod 120 is not limited to plug-in, threaded connection, etc.; or, one end of the first insulating member 150 is inserted into the second insulating member 160, the electrode rod 120 is inserted into the second insulating member 160 and connected to the electrode body 130, and the connection method between the electrode body 130 and the electrode rod 120 is not limited to plug-in, threaded connection, etc.

[0056] The detachable connection method between the support member 140 and the support rod 110 is not limited to plug-in, abutment, etc. Exemplarily, a portion of the surface of the support member 140 contacts the top surface of the support rod 110. Under the action of its own gravity, the support member 140 abuts against the top surface of the support rod 110, and the position of the support member 140 is fixed; the electrode body 130 and the electrode rod 120 are pre-installed inside the support rod 110 and fixed relative to the support rod 110, the second electrode portion 132 is located at the top of the support member 140, and the outer periphery of the second electrode portion 132 is covered with a second insulating member 160. After the graphite boat 10 is placed on the top surface of the support member 140, the boat foot 101 contacts the top surface of the second electrode portion 132 and supports the support member 140; after the surface of the support member 140 is plated with a conductive film, since the support member 140 abuts against each other, the support member 140 can be easily separated from the support rod 110, and the support member 140 can be taken out of the reaction chamber 210 for cleaning and replacement.

[0057] It should be noted that a through hole 142 for accommodating the second electrode portion 132 and a mounting groove 141 for accommodating the second insulating member 160 are provided in the support member 140. The groove wall of the mounting groove 141 and the side wall of the second insulating member 160, as well as the hole wall of the through hole 142 and the outer wall of the second electrode portion 132 are mutually limited. The second electrode portion 132 and the second insulating member 160 can position the support member 140 to prevent the support member 140 from moving relative to the support rod 110, so that the support member 140 can provide stable support to the graphite boat 10.

[0058] Alternatively, a downwardly recessed limiting groove is provided on the top of the support rod 110, and part of the support member 140 is embedded in the limiting groove. At this time, the support member 140 and the support rod 110 are vertically plugged, and the groove wall of the limiting groove limits the support member 140. Similarly, after the support member 140 is plated with the conductive film, the support member 140 is lifted upward to be separated from the limiting position of the support rod 110, so that the support member 140 can be separated from the support rod 110, and the support member 140 can be taken out of the reaction chamber 210 for cleaning and replacement.

[0059] Alternatively, the support member 140 is wrapped around at least two side surfaces of the support rod 110, and each of the two side surfaces is not parallel. After the support member 140 is installed on the support rod 110, the support member 140 can be mutually limited with different side surfaces of the support rod 110, so that the support member 140 maintains a stable position relative to the support rod 110. It should be noted that the cross section of the support rod 110 can be set to a rectangular, circular, polygonal or other shape. The support member 140 referred to in this application is wrapped around at least two side surfaces of the support rod 110, and does not have a clear boundary between the two side surfaces. The two side surfaces can be two parts of an arc surface at one end, as long as the two side surfaces are not parallel. Specifically, in one embodiment, the cross section of the support rod 110 is set to a rectangular shape, the cross section of the support member 140 is "U"-shaped, and the inner wall of the support member 140 is wrapped around the top surface and two opposite side surfaces of the support rod 110; or, in another embodiment, the cross section of the support rod 110 is set to a circular shape, the cross section of the support member 140 is set to an arc shape, and the inner wall of the support member 140 wraps around the upper arc surface of the support rod 110.

[0060] It should be noted that when the process reaction is carried out in the reaction chamber 210, at least part of the top surface of the support member 140 and the top surface of the second electrode portion 132 are shielded by the boat foot 101 and are not contaminated by external dust. That is, the exposed area of ​​the support member 140 is smaller, which can reduce the area where the conductive film is plated, thereby reducing the number of maintenance times, extending the coating time, and improving production capacity.

[0061] It can be understood that each support rod 110 is detachably connected to a plurality of support members 140, the top surface of each support member 140 is flush, and each support member 140 is in contact with a boat foot 101 of the graphite boat 10, so that different positions of the graphite boat 10 are supported by different support members 140, and the support surface of each support member 140 is flush, ensuring that each support member 140 can contact the boat foot 101 of the graphite boat 10, and preventing the graphite boat 10 from shaking above the support rod 110. The second electrode portion 132 is exposed from the top of one of the support members 140, that is, the electrode body 130 is led out from one of the support members 140 and forms an electrical connection with the boat foot 101.

[0062] Reference Figure 5 (To facilitate the display of the internal structure, the tube body 200 is processed in a perspective manner) Figure 7In an embodiment of the utility model, a tubular chemical vapor deposition device is also provided, including the above-mentioned electrode introduction component 100, and also including a tube body 200, which has a reaction chamber 210 inside. The electrode introduction component 100 is accommodated in the reaction chamber 210 to introduce the electrode into the reaction chamber 210; the electrode introduction component 100 is provided with two groups, and the two groups of electrode introduction components 100 respectively support the two sides of the graphite boat 10, and the two groups of electrode introduction components 100 respectively introduce positive electrodes and negative electrodes into the reaction chamber 210, and the positive electrodes and the negative electrodes are respectively connected to different boat feet 101 of the graphite boat 10, so that the graphite boat 10 forms a conductive path with the positive and negative electrodes.

[0063] When a chemical deposition reaction is carried out in the reaction chamber 210, since the support member 140 is in contact with the boat foot 101, a portion of the support member 140 is shielded by the graphite boat 10, and the exposed area of ​​the support member 140 is small, and is less affected by dust pollution, thereby reducing the maintenance frequency and improving production capacity; moreover, only the support member 140 has an exposed area in the insulating structure of the electrode introduction assembly 100, and the support member 140 is detachably connected to the support rod 110, so that the support member 140 can be easily detached from the support rod 110, and the support member 140 can be cleaned and maintained, and other components in the electrode introduction assembly 100 do not need to be replaced, and there is no need to level the electrode before and after replacement, and the maintenance convenience is high.

[0064] The embodiments of the utility model are described in detail above in conjunction with the accompanying drawings, but the utility model is not limited to the above embodiments. Various changes can be made within the knowledge of ordinary technicians in the relevant technical field without departing from the purpose of the utility model. In addition, the embodiments of the utility model and the features in the embodiments can be combined with each other without conflict.

Claims

1. An electrode introduction assembly, characterized in that: include: A support rod having a receiving cavity therein; An electrode rod, inserted into the accommodating cavity and used for introducing an electrode, wherein the electrode rod is isolated from the supporting rod; an electrode body, comprising a first electrode portion and a second electrode portion connected to each other, wherein the first electrode portion is inserted into the accommodating cavity and connected to the electrode rod, and the second electrode portion is located outside the support rod, and the electrode body and the support rod are isolated from each other; The support member is made of insulating material, is detachably connected to the support rod, and is used to support the boat body. The second electrode portion is exposed on the top and / or side of the support member and is in contact with the boat body.

2. The electrode introduction assembly according to claim 1, characterized in that: The electrode introduction assembly further includes a first insulating member, which is sleeved on the outside of the electrode rod and located between the outer wall of the electrode rod and the inner wall of the support rod.

3. The electrode introduction assembly according to claim 2, characterized in that: The electrode introduction assembly also includes a second insulating member, which is wrapped around the side of the electrode body. The top surface of the second electrode part is exposed at the top of the support member. One end of the first insulating member is inserted into the second insulating member, or the end of the second insulating member is inserted into the first insulating member.

4. The electrode introduction assembly according to claim 1, characterized in that: The second electrode portion is disposed to protrude outward relative to a side portion of the first electrode portion.

5. The electrode introduction assembly according to claim 4, characterized in that: The electrode introduction assembly also includes a second insulating member, which is attached to the bottom of the second electrode part and is located between the second electrode part and the support rod, or the second insulating member is attached to the side and bottom of the second electrode part and is located between the second electrode part and the support member and between the second electrode part and the support rod.

6. The electrode introduction assembly according to claim 5, characterized in that: The second insulating member protrudes outward relative to the side of the second electrode portion, the support member has a mounting groove and a through hole connected to the top of the mounting groove, the second electrode portion is accommodated in the through hole, the second insulating member is accommodated in the mounting groove, the bottom of the second electrode portion and a portion of the groove wall of the mounting groove are in contact with the top surface of the second insulating member, the bottom of the second insulating member is in contact with the top surface of the support rod, and the side of the second insulating member is in contact with the groove wall of the mounting groove.

7. The electrode introduction assembly according to claim 1, characterized in that: The support member is wrapped around at least two side surfaces of the support rod, and each two side surfaces are not parallel.

8. The electrode introduction assembly according to claim 1, characterized in that: The electrode body is plugged into the electrode rod, or the electrode rod is threadedly connected to the electrode body.

9. The electrode introduction assembly according to claim 1, characterized in that: A plurality of the support members are detachably connected to each of the support rods, the top surface of each of the support members is flush, and the second electrode portion is exposed from the top of one of the support members.

10. Tubular chemical vapor deposition equipment, characterized in that include: The electrode introduction assembly according to any one of claims 1 to 9; The tube body has a reaction chamber inside, and the electrode introduction assembly is accommodated in the reaction chamber.

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