Silicon ring inner ring visual inspection device and silicon ring visual inspection system

Abstract

The utility model provides a silicon ring inner ring visual inspection device and a silicon ring visual inspection system, the silicon ring inner ring visual inspection device is used for detecting the inner ring surface of a silicon ring, the silicon ring inner ring visual inspection device comprises a bearing mechanism and a visual mechanism, the bearing mechanism comprises a bearing part for bearing the silicon ring and a first drive for driving the bearing part to rotate, the silicon ring is driven by the first driver to rotate by taking the axis of the silicon ring as the center, the visual mechanism comprises a camera and a reflecting mirror, the visual angle range of the camera covers the reflecting surface of the reflecting mirror, and when the silicon ring rotates, the reflecting range of the reflecting mirror covers the inner ring surface of the silicon ring. Through the arrangement, automatic image capturing of the inner ring surface of the silicon ring is realized, the equipment is reasonable in structural design and convenient for automatic detection, and the detection efficiency is greatly improved.

Description

Technical Field

[0001] The utility model relates to the technical field of optical automated detection, in particular to a silicon ring inner ring visual detection device and a silicon ring visual detection system. Background Art

[0002] The silicon ring is an auxiliary component in the integrated circuit manufacturing process, mainly used in the etching process to support and fix the silicon wafer. If there is damage on the surface of the silicon ring, impurities will be generated during the etching process, causing contamination to the silicon wafer to be etched, affecting the yield of the final product. Therefore, it is generally necessary to ensure that the surface of the silicon ring is a flawless polished surface. As for silicon ring inspection, the inner ring of the silicon ring is relatively small, so it is difficult to use a visual mechanism to visually inspect the inner ring side of the silicon ring.

[0003] Therefore, it is necessary to design a silicon ring inner ring visual inspection device and a silicon ring visual inspection system to solve the above problems. Utility Model Content

[0004] The utility model aims to provide a silicon ring inner ring visual detection device which can quickly and automatically detect the silicon ring inner ring.

[0005] To achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a silicon ring inner ring visual detection device, which is used to detect the inner ring surface of the silicon ring, the silicon ring inner ring visual detection device includes a bearing mechanism and a visual mechanism, the bearing mechanism includes a bearing part that bears the silicon ring and a first drive that drives the bearing part to rotate, the silicon ring rotates around its own axis driven by the first drive, the visual mechanism includes a camera and a reflector, the viewing angle range of the camera covers the reflective surface of the reflector, and when the silicon ring rotates, the reflective range of the reflector covers the inner ring surface of the silicon ring.

[0006] As a further improved technical solution of the utility model, the bearing part includes a tray, a plurality of pads arranged on the tray and a vacuum suction nozzle, the pads are evenly distributed along the circumference of the tray, and a limit plate is also provided on the outer side of each pad. When the silicon ring is placed on the pad, the plurality of limit plates are located on the outer periphery of the silicon ring.

[0007] As a further improved technical solution of the utility model, the tray is provided with a plurality of adjustment holes evenly spaced outward from its rotation center, and the cushion block is fixedly connected to the adjustment holes by bolts.

[0008] As a further improved technical solution of the utility model, the visual mechanism also includes a second drive for driving the camera and the reflector to rise and fall, the second drive is provided with a mounting plate, the camera is vertically arranged on the mounting plate, and the reflector is arranged below the camera.

[0009] As a further improved technical solution of the utility model, the angle between the reflecting surface of the reflector and the optical axis of the camera is 45°, and the bearing part rotates in the horizontal direction.

[0010] As a further improved technical solution of the utility model, the visual mechanism also includes a light source, and the light source and the reflector are arranged on the same plane.

[0011] As a further improved technical solution of the utility model, the bearing mechanism further includes a moving module, and the first drive is arranged on the moving module.

[0012] As a further improved technical solution of the utility model, the moving module is a linear slide.

[0013] The utility model aims to provide a silicon ring visual detection system which can quickly and automatically detect the inner ring of a silicon ring.

[0014] To achieve the above-mentioned purpose, the utility model adopts the following technical solution: a silicon ring visual inspection system, which includes a multi-axis manipulator and a silicon ring inner ring visual inspection mechanism as described in any of the above items, wherein the multi-axis manipulator is used to grab the silicon ring onto the carrying part, or remove the silicon ring from the carrying part.

[0015] As a further improved technical solution of the utility model, it also includes a loading mechanism and a unloading mechanism, the loading mechanism includes a loading rack, a loading roller, a material frame for placing silicon rings and a limit block, and the unloading mechanism includes a unloading rack, a unloading roller, a material frame for placing silicon rings and a limit block.

[0016] It can be seen from the above technical scheme that the utility model reflects the image of the inner surface of the silicon ring by arranging a reflector, thereby changing the imaging direction of the camera, and further changing the installation direction and position of the camera, and further driving the silicon ring to rotate by the first drive to realize automatic imaging of the inner surface of the silicon ring; in addition, by arranging a second drive to drive the camera and the reflector to rise and fall synchronously, and at the same time arranging a moving module to move the silicon ring in the horizontal direction, the loading process and the detection process of the silicon ring are located at different positions, thereby avoiding structural interference between the two processes, and the structural design is reasonable and convenient for automated detection, which greatly improves the detection efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a three-dimensional diagram of a silicon ring visual inspection system according to an embodiment of the present invention.

[0018] Figure 2 for Figure 1 A three-dimensional diagram of the feeding mechanism.

[0019] Figure 3 for Figure 1 A three-dimensional diagram of the multi-axis robot.

[0020] Figure 4 for Figure 1 A three-dimensional diagram of the middle carrying mechanism.

[0021] Figure 5 for Figure 1 Stereoscopic diagram of the visual mechanism.

[0022] Figure 6 for Figure 1 Enlarged view of the middle rectangular portion. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical solutions and advantages of the present invention more clear, the present invention is described in detail below with reference to the accompanying drawings and specific embodiments.

[0024] Please refer to Figure 1 As shown, the utility model provides a silicon ring visual inspection system, which includes a loading mechanism 10, a multi-axis material transfer robot 20, a silicon ring inner ring visual inspection device and a unloading mechanism.

[0025] Please also refer to Figure 2 As shown, the loading mechanism 10 includes a loading rack 11, a loading roller 12, a material frame 13 for placing silicon rings, and a stop block 14. When working, the fully loaded material frame 13 is manually placed on the loading rack 11 and pushed in by the loading roller 12. When the material frame 13 abuts against the stop block 14 on one side of the loading rack 11, the material frame 13 is in place. The unloading mechanism includes a qualified product unloading mechanism 51 and a unqualified product unloading mechanism 52. The qualified product unloading mechanism 51 and the unqualified product unloading mechanism 52 have the same structure as the loading mechanism 10, including an unloading rack, an unloading roller, a material frame for placing silicon rings, and a stop block.

[0026] Please refer to Figure 3 As shown, the multi-axis manipulator 20 is used to grab the silicon ring onto the silicon ring inner ring visual inspection device, or remove the silicon ring from the silicon ring inner ring visual inspection device to the qualified product unloading mechanism 51 or the unqualified product unloading mechanism 52. Specifically, the multi-axis material transfer manipulator 20 can be a six-axis manipulator, which includes a base 21, a first connecting shaft 22 arranged on the top of the base 21, a second connecting shaft 23 arranged at the other end of the first connecting shaft 22, a third connecting shaft 24 arranged at the other end of the second connecting shaft 23, a fourth connecting shaft 25 arranged at the other end of the third connecting shaft 24, a fifth connecting shaft 26 arranged at the other end of the fourth connecting shaft 25, a sixth connecting shaft 27 arranged at the other end of the fifth connecting shaft 26, and a pneumatic finger 28 arranged at the end of the sixth connecting shaft 27. The multi-axis manipulator 20 can be used to grasp the silicon ring and flexibly load and unload the material.

[0027] The action flow of the multi-axis manipulator 20 is as follows: the pneumatic fingers 28 move to the material frame taking position of the loading mechanism 10, the pneumatic fingers 28 open to support the inner ring surface of the silicon ring, the pneumatic fingers 28 drive the silicon ring to rise and leave the material frame 13, and the multi-axis manipulator 20 moves the product to the silicon ring inner ring visual inspection device for inspection. After the inspection is completed, the multi-axis manipulator removes the silicon ring from the silicon ring inner ring visual inspection device to the qualified product unloading mechanism 51 or the unqualified product unloading mechanism 52.

[0028] Please refer to Figure 1 As shown, the silicon ring inner ring visual detection device includes a bearing mechanism 30 for bearing the movement of the silicon ring and a visual mechanism 40 for taking an image of the silicon ring inner ring. Figure 5 As shown, the bearing mechanism 30 includes a bearing part 31 for bearing the silicon ring, a first drive 32 and a moving module 33. The first drive 32 drives the bearing part 31 to rotate in the horizontal direction. The silicon ring is arranged on the bearing part 31 and rotates around its own axis driven by the first drive 32. The bearing part 31 includes a tray 311, a plurality of pads 312 arranged on the tray 311 and a vacuum suction nozzle 313. The plurality of pads 312 are evenly distributed along the circumference of the tray 311. A limit plate 3121 is also provided on the outer side of each pad 312. When the silicon ring is placed on the pad 312, the plurality of limit plates 3121 are located on the outer periphery of the silicon ring. A plurality of evenly spaced adjustment holes 314 are provided on the tray 311 from its rotation center outward. The pad 312 is fixed to the adjustment hole 314 by bolts, so that it can be compatible with silicon rings of a larger specification range. Preferably, the tray 31 is cross-shaped, and there are four pads 312, which are respectively arranged at the four ends of the cross, and each branch of the cross is provided with two rows of adjustment holes 314. The first drive 32 is arranged on the mobile module 33, and the mobile module 33 is preferably a linear slide, one end of which is arranged close to the multi-axis mechanical claw 20, and the other end of the linear slide is located below the detection station of the visual mechanism 40.

[0029] Please refer to Figure 5 and Figure 6As shown, the visual mechanism 40 includes a bracket 41, a second drive 42, a camera 44, a reflector 47 and a light source 48. The second drive 42 is arranged on the bracket 41, and is used to drive the camera 44, the reflector 47 and the light source 48 to rise and fall synchronously. Specifically, a horizontally arranged first mounting plate 43 is arranged on the second drive 42, and the camera 44 is vertically arranged on the first mounting plate 43. The reflector 47 is arranged below the camera 44, and the viewing angle range of the camera 44 covers the reflective surface of the reflector 47. Specifically, a second mounting plate 46 is arranged below the first mounting plate 43, and the reflector 47 and the light source 48 are arranged on the second mounting plate 46, and the angle between the reflective surface of the reflector 47 and the optical axis of the camera 44 is 45°. When the second drive 42 drives the reflector 47 to move to be flush with the silicon ring, the first drive 32 drives the silicon ring to rotate, and the reflection range of the reflector 47 covers the inner ring surface of the silicon ring. The light source 48 is flush with the reflector 47 in the horizontal direction to provide light to the inner ring surface of the silicon ring.

[0030] In this embodiment, the working process of the silicon ring inner ring visual inspection device is as follows: first, the mobile module 33 drives the carrying part 31 to move to the loading position of the multi-axis manipulator 20, the multi-axis manipulator 20 grabs the silicon ring and places it on the carrying part 31, and the vacuum suction nozzle 313 on the carrying part 31 is started to adsorb and fix the silicon ring; then, the mobile module 33 moves the silicon ring to the inspection station of the visual mechanism 40; after the silicon ring is in place, the second drive 42 drives the camera 44, the reflector 47 and the light source 48 to descend into the inner ring of the silicon ring, and the first drive 32 drives the silicon ring to rotate in the horizontal direction to complete the imaging inspection of the inner ring of the silicon ring; after the inspection is completed, the vacuum is turned off, and the multi-axis manipulator 20 puts the silicon ring into the qualified product unloading mechanism 51 or the unqualified product unloading mechanism 52 according to the inspection results.

[0031] The silicon ring inner ring visual inspection device reflects the image of the inner ring surface of the silicon ring by setting a reflector 47, changes the imaging direction of the camera 44, and then changes the installation direction and position of the camera 44, and further drives the silicon ring to rotate through the first drive 32 to realize automatic imaging of the inner ring surface of the silicon ring. In addition, by setting the second drive 42 to drive the camera 44, the reflector 47 and the light source 48 to rise and fall synchronously, and setting the moving module to move the silicon ring in the horizontal direction, the feeding process and the detection process of the silicon ring are located at different positions, avoiding structural interference between the two processes, and the structural design is reasonable and convenient for automatic detection, which greatly improves the detection efficiency.

[0032] Terms such as "upper" and "lower" used herein to indicate spatial relative positions are used for the purpose of convenience to describe the relationship of one feature relative to another feature as shown in the drawings. It is understood that, depending on the placement of the product, the terms of spatial relative positions may be intended to include different orientations other than those shown in the drawings, and should not be construed as limitations on the claims.

[0033] In addition, the above embodiments are only used to illustrate the present invention and are not intended to limit the technical solutions described in the present invention. The understanding of this specification should be based on the technical personnel in the relevant technical field. Although this specification has described the present invention in detail with reference to the above embodiments, ordinary technical personnel in the field should understand that the technical personnel in the relevant technical field can still modify or make equivalent substitutions to the present invention, and all technical solutions and improvements thereof that do not depart from the spirit and scope of the present invention should be included in the scope of the claims of the present invention.

Claims

1. A silicon ring inner ring visual inspection device, used to inspect the inner ring surface of a silicon ring, characterized by: The silicon ring inner ring visual detection device includes a bearing mechanism and a visual mechanism, the bearing mechanism includes a bearing part that bears the silicon ring and a first drive that drives the bearing part to rotate, the silicon ring rotates around its own axis driven by the first drive, the visual mechanism includes a camera and a reflector, the viewing angle range of the camera covers the reflective surface of the reflector, and when the silicon ring rotates, the reflective range of the reflector covers the inner ring surface of the silicon ring.

2. The silicon ring inner ring visual detection device according to claim 1, characterized in that: The bearing part includes a tray, a plurality of pads arranged on the tray and a vacuum suction nozzle, the pads are evenly distributed along the circumference of the tray, and a limiting plate is also provided on the outer side of each pad. When the silicon ring is placed on the pad, the plurality of limiting plates are located on the outer periphery of the silicon ring.

3. The silicon ring inner ring visual detection device as claimed in claim 2, characterized in that: The tray is provided with a plurality of adjustment holes which are evenly spaced outward from the rotation center thereof, and the cushion blocks are fixedly connected to the adjustment holes by bolts.

4. The silicon ring inner ring visual detection device according to claim 1, characterized in that: The visual mechanism also includes a second drive for driving the camera and the reflector to rise and fall, the second drive is provided with a mounting plate, the camera is vertically arranged on the mounting plate, and the reflector is arranged below the camera.

5. The silicon ring inner ring visual detection device as claimed in claim 4, characterized in that: The angle between the reflective surface of the reflector and the optical axis of the camera is 45°, and the supporting part rotates in the horizontal direction.

6. The silicon ring inner ring visual detection device as claimed in claim 4, characterized in that: The visual mechanism also includes a light source, and the light source and the reflector are arranged on the same plane.

7. The silicon ring inner ring visual detection device according to claim 1, characterized in that: The bearing mechanism further comprises a moving module, and the first drive is arranged on the moving module.

8. The silicon ring inner ring visual detection device as claimed in claim 7, characterized in that: The moving module is a linear slide.

9. A silicon ring visual inspection system, characterized in that: It comprises a multi-axis manipulator and a silicon ring inner ring visual inspection mechanism as described in any one of claims 1 to 8, wherein the multi-axis manipulator is used to grab the silicon ring onto the bearing portion, or remove the silicon ring from the bearing portion.

10. The silicon ring visual inspection system according to claim 9, characterized in that: It also includes a loading mechanism and a unloading mechanism. The loading mechanism includes a loading rack, a loading roller, a material frame for placing silicon rings and a limit block. The unloading mechanism includes a unloading rack, a unloading roller, a material frame for placing silicon rings and a limit block.

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