Carrier plate transmission part for film forming cavity and film forming cavity

Abstract

The utility model provides a carrier plate transmission part for a film forming cavity and the film forming cavity. The carrier plate transmission piece for the film forming cavity comprises a first metal part and a second metal part which are adjacent to each other, and further comprises an insulating part arranged between the first metal part and the second metal part, and a strip-shaped slit is formed between the insulating part and at least one of the first metal part and the second metal part. According to the utility model, the influence of winding plating can be effectively reduced, and the maintenance and replacement period is greatly prolonged.

Description

Technical Field

[0001] The utility model relates to the field of solar cell manufacturing, in particular to a carrier plate transmission component used in a film forming cavity and a film forming cavity. Background Art

[0002] Silicon-based thin film / crystalline silicon heterojunction solar cells (hereinafter referred to as heterojunction solar cells, also known as HIT or SHJ solar cells) are one of the current mainstream high-efficiency solar cell technology routes. HIT solar cells are also the third generation of high-efficiency solar cell technology, which combines the advantages of the first generation of crystalline silicon and the second generation of silicon thin film, has the characteristics of high conversion efficiency and low temperature coefficient, and has a good market prospect.

[0003] The typical HIT solar cell structure is a first electrode, a first transparent conductive layer, an N-type amorphous or microcrystalline layer, a first intrinsic amorphous or microcrystalline passivation layer, an N-type single crystal silicon wafer, a second intrinsic amorphous or microcrystalline silicon passivation layer, a P-type amorphous silicon or microcrystalline layer, a second transparent conductive layer, and a second electrode. The most mainstream method for depositing the N-type amorphous or microcrystalline layer, the first intrinsic passivation layer, the second intrinsic amorphous or microcrystalline silicon passivation layer, and the P-type amorphous or microcrystalline layer on the front and back of the silicon wafer is PECVD (Plasma Enhanced Chemical Vapor Deposition) method, and the most mainstream method for depositing the first and second electrodes is PVD (Physical Vapor Deposition) method. The deposition process of the PECVD equipment is low-temperature deposition, and the deposited film layer is very thin. In the subsequent TCO deposition process using PVD, low-temperature deposition is also required, and the deposition process avoids damage and impact on the existing CVD prepared film layer. Therefore, the PVD equipment for preparing TCO (Transparent Conducting Oxide) film layers must have low temperature, low film damage and meet the technical requirements of good optical and electrical properties of the TCO film layers.

[0004] In the process of preparing TCO film, heat mainly comes from the condensation heat release of atoms and electrons in the plasma, and film damage mainly comes from the bombardment of oxygen anions and high-energy electrons during the sputtering process of ITO. One of the characteristics of magnetron sputtering devices is to use the Lorentz force of the magnetic field to bind and extend the movement path of electrons in the electric field, increase the probability of collision between electrons and working gas atoms, and increase the ionization rate of gas atoms, so that more high-energy ions bombard the target material and less high-energy electrons bombard the plated substrate. Therefore, the current mainstream practice is to use strong magnetic field magnetic bars to more effectively constrain electrons to increase plasma density, reduce sputtering voltage, and reduce the energy of oxygen anions and electrons (collectively referred to as negative particles). At the same time, an anode device is configured to collect escaping negative particles and reduce the number of negative particles running onto the substrate.

[0005] Although the configuration of strong magnetic field magnetic bars and anode devices can effectively reduce the impact of negative particles on the substrate, some escaped negative particles may still run towards the substrate. In order to further reduce the impact of negative particles on the substrate or silicon wafer, the carrier supporting the substrate needs to be insulated from the cavity during the transmission process in the process area, so that after a certain number of negative particles attach to the surface of the carrier, a suspended potential will be formed, which will repel the free negative particles outside, thereby effectively reducing the number of negative particles running onto the substrate.

[0006] At present, the mainstream method of carrier electric suspension transmission technology is to use insulating materials to make rollers and guide wheel frames for conveying carriers. Figure 1 as well as Figure 2 , both show the specific structures of the conveying roller, magnetic fluid bearing and guide wheel in the prior art. Figure 1 As shown, the conveying roller 1 includes a metal roller shaft 10, a metal roller 11 sleeved on the metal roller shaft 10, and a roller rubber ring 12 sleeved on the metal roller 11, and the magnetic fluid bearing 4 includes a magnetic fluid bearing housing 40 and a metal cavity side wall 41 supporting the magnetic fluid bearing housing 40. Figure 2 As shown, the guide wheel 2 includes a metal pin shaft 20, a guide wheel frame 21 for supporting and accommodating the metal pin shaft 20, and a rotating wheel 22 sleeved on the metal pin shaft.

[0007] However, the plating phenomenon is quite serious during the sputtering process in the PVD process area. In a short period of time, the entire outer surface of the roller 11, the guide wheel frame 21 and the magnetic fluid bearing housing 40 will be plated with a sufficiently thick film. This film connects the carrier 3 with the roller 11, the guide wheel frame 21 and the magnetic fluid of the magnetic fluid bearing housing 40, thereby causing the carrier electric suspension to fail. The charges accumulated on the carrier will be discharged instantly along the conduction path. Due to the skin effect of the current along the surface of the conductor, it is possible to form discharge lines on the substrate depending on the amount of charge accumulation and the line of the conduction path. It is also possible that high-temperature ablation will occur in the local overcurrent of the carrier transmission parts such as the roller 11, the guide wheel frame 21 and the magnetic fluid bearing housing 40. To deal with this situation, frequent replacement of the roller 11, the guide wheel frame 21 and the magnetic fluid bearing housing 40 not only greatly increases the operating and maintenance costs, but also consumes a lot of time, affecting production.

[0008] Therefore, how to provide a carrier plate transmission component and a film forming chamber for a film forming chamber to effectively reduce the impact of wrap-around plating and significantly extend the maintenance and replacement cycle has become a technical problem that needs to be urgently solved in the industry. Utility Model Content

[0009] In view of the above-mentioned problems in the prior art, the utility model proposes a carrier transmission component for a film forming chamber, which includes a first metal component and a second metal component adjacent to each other, and also includes an insulating component arranged between the first metal component and the second metal component, and a long strip-shaped slit is provided between the insulating component and at least one of the first metal component and the second metal component.

[0010] In one embodiment, the width of the long strip slit is in the range of 0.2 mm to 0.8 mm, and the length is in the range of 10 mm to 30 mm.

[0011] In one embodiment, the transmission member is a transmission roller, which includes a metal roller shaft, a roller insulating sleeve mounted on the metal roller shaft, a metal roller mounted on the roller insulating sleeve, and a roller rubber ring mounted on the metal roller. The first metal component, the second metal component, and the insulating component are the metal roller shaft, the metal roller, and the roller insulating sleeve, respectively. The first long strip slit is arranged between the roller insulating sleeve and the metal roller and the metal roller shaft.

[0012] In one embodiment, the conveying roller further includes a metal pressure cover, and the second elongated slit is arranged between the roller insulation sleeve and the metal roller and the metal pressure cover.

[0013] In one embodiment, the roller shaft is a stainless steel shaft, the metal roller is a stainless steel roller, and the roller insulation sleeve is a roller polypropylene sleeve or a roller polyetheretherketone sleeve.

[0014] In one embodiment, the transmission member is a guide wheel, and the guide wheel includes a metal pin shaft, a guide wheel frame for supporting and accommodating the metal pin shaft, a metal bearing sleeved on the metal pin shaft, a metal spacer sleeve arranged between the guide wheel frame and the metal bearing, and a guide wheel insulating sleeve sleeved on the metal bearing. The first metal component, the second metal component and the insulating component are the metal spacer sleeve, the metal bearing and the guide wheel insulating sleeve respectively. The third elongated slit is arranged between the guide wheel insulating sleeve and the metal spacer sleeve, and the fourth elongated slit is arranged between the guide wheel insulating sleeve and the metal pin shaft and the metal bearing.

[0015] In one embodiment, the metal pin shaft, guide wheel frame, metal bearing and metal spacer are respectively a stainless steel pin shaft, a stainless steel guide wheel frame, a stainless steel bearing and a stainless steel spacer, and the guide wheel insulating sleeve is a guide wheel polypropylene sleeve or a guide wheel polyetheretherketone sleeve.

[0016] In one embodiment, the transmission member is a magnetic fluid bearing, which includes a magnetic fluid bearing housing, a bearing insulating sleeve sleeved on the magnetic fluid bearing housing, and a metal cavity side wall arranged around the bearing insulating sleeve. The first metal component, the second metal component and the insulating component are the magnetic fluid bearing housing, the metal cavity side wall and the bearing insulating sleeve, respectively. A fifth long strip slit is arranged between the magnetic fluid bearing housing and the bearing insulating sleeve.

[0017] In one embodiment, the magnetic fluid bearing housing is a stainless steel housing, the metal cavity side wall is a stainless steel side wall, and the bearing insulation sleeve is a bearing polypropylene sleeve or a bearing polyetheretherketone sleeve.

[0018] The utility model also provides a film forming chamber, which includes a chamber, a heating plate located in the chamber, and a carrier plate transmission component for the film forming chamber located at the bottom of the chamber, wherein the carrier plate transmission component for the film forming chamber is the carrier plate transmission component for the film forming chamber as described in any of the above items.

[0019] Compared with the prior art in which no insulating component is provided between adjacent metal parts or even if an insulating component is provided, no slit is provided between the insulating component and the metal parts, which is easy to cause the transmission part to be turned on due to film coating, the carrier plate transmission part for the film forming chamber of the utility model includes a first metal part and a second metal part adjacent to each other, and further includes an insulating component provided between the first metal part and the second metal part, and a long strip-shaped slit is provided between the insulating component and at least one of the first metal part and the second metal part. The utility model can effectively reduce the impact of winding plating and greatly extend the maintenance and replacement cycle. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The above features and advantages of the present invention can be better understood after reading the detailed description of the embodiments of the present disclosure in conjunction with the following drawings. In the drawings, the components are not necessarily drawn to scale, and components with similar related properties or features may have the same or similar reference numerals.

[0021] Figure 1 It is a schematic diagram of the composition structure of an embodiment of a carrier plate transmission component used in a film forming chamber in the prior art.

[0022] Figure 2 For along Figure 1 Schematic diagram of the cross-sectional structure of the carrier plate transmission component formed by the GG cutting line in FIG.

[0023] Figure 3 It is a schematic diagram of the composition structure of an embodiment of a carrier plate transmission component for a film forming chamber of the utility model.

[0024] Figure 4 for Figure 3 Schematic diagram of the enlarged structure of area A in FIG.

[0025] Figure 5 for Figure 3 Schematic diagram of the enlarged structure of area B in FIG.

[0026] Figure 6 for Figure 3 Schematic diagram of the enlarged structure of the C region.

[0027] Figure 7 For along Figure 3 Schematic diagram of the cross-sectional structure of the carrier plate transmission component formed by the FF cutting line in FIG.

[0028] Figure 8 for Figure 7 Schematic diagram of the enlarged structure of the D area.

[0029] Fig. 9 for Figure 7 Schematic diagram of the enlarged structure of the E area. DETAILED DESCRIPTION

[0030] The present invention is described in detail below in conjunction with the accompanying drawings and specific embodiments, so as to more clearly understand the purpose, characteristics and advantages of the present invention. It should be understood that the various aspects described below in conjunction with the accompanying drawings and specific embodiments are merely exemplary and should not be construed as limiting the scope of protection of the present invention in any way. Unless the context clearly indicates otherwise, the singular forms "one" and "the" include plural referents. The words "first", "second" and similar terms used in this specification and the claims do not indicate any order, quantity or importance, but are only used to distinguish different components.

[0031] The utility model provides a carrier transmission member for a film forming chamber, comprising a first metal component, a second metal component and an insulating component, wherein the insulating component is arranged between the first metal component and the second metal component, and a long strip slit is provided between the insulating component and at least one of the first metal component and the second metal component. The width of the long strip slit ranges from 0.2 mm to 0.8 mm, and the length ranges from 10 mm to 30 mm.

[0032] See also Figures 3 to 6 , Figure 3 This is a schematic diagram of the composition structure of an embodiment of a carrier plate transmission member for a film forming chamber of the utility model. Figures 4 to 6 They are Figure 3 Schematic diagram of the enlarged structure of area A, area B, and area C. Figure 3As shown, the transmission member is a transmission roller 5, which includes a metal roller shaft 50, a roller insulating sleeve 51 sleeved on the metal roller shaft 50, a metal roller 52 sleeved on the roller insulating sleeve 51, and a roller rubber ring 53 sleeved on the metal roller 52. The transmission roller 5 may also include a metal pressure cover 54.

[0033] The first metal component, the second metal component and the insulating component are respectively the metal roller shaft 50, the metal roller 52 and the roller insulating sleeve 51. The roller shaft 50 can be a stainless steel shaft, the metal roller 52 can be a stainless steel roller, and the roller insulating sleeve 51 can be a roller polypropylene sleeve or a roller polyetheretherketone sleeve. Figure 4 As shown, the first long strip slit GAP1 is disposed between the roller insulating sleeve 51 and the metal roller 52 and the metal roller shaft 50. Figure 5 As shown, the second long strip slit GAP2 is disposed between the roller insulating sleeve 51 and the metal roller 52 and the metal pressure cover 53 .

[0034] See also Figure 3 , the transmission member may also be a magnetic fluid bearing 6, and the magnetic fluid bearing 6 includes a metal cavity side wall 60, a magnetic fluid bearing housing 61, and a bearing insulating sleeve 62. The magnetic fluid bearing housing 61 covers the magnetic fluid bearing, and the bearing insulating sleeve 62 is sleeved on the magnetic fluid bearing housing 61. The metal cavity side wall 60 is arranged around the bearing insulating sleeve 62, that is, the bearing insulating sleeve 62 is arranged between the metal cavity side wall 60 and the magnetic fluid bearing housing 61. The first metal component, the second metal component, and the insulating component are the magnetic fluid bearing housing 61, the metal cavity side wall 60, and the bearing insulating sleeve 62, respectively. The magnetic fluid bearing housing 61 is a stainless steel housing, the metal cavity side wall 60 is a stainless steel side wall, and the bearing insulating sleeve 62 is a bearing polypropylene sleeve or a bearing polyetheretherketone sleeve.

[0035] like Figure 6 As shown, the third long strip slit GAP3 is arranged between the magnetic fluid bearing housing 61 and the bearing insulating sleeve 62 .

[0036] See also Figures 7 to 9 , Figure 7 For along Figure 3 The schematic diagram of the cross-sectional structure of the carrier plate transmission part formed by the FF section line in the figure, Figure 8 and Fig. 9 They are Figure 7 Schematic diagram of the enlarged structure of the D and E regions. Figure 7As shown, the transmission member is a guide wheel 7, and the guide wheel 7 includes a metal pin shaft 70, a guide wheel frame 71, a metal spacer 72, a metal bearing 73, and a guide wheel insulating sleeve 74. The guide wheel frame 71 is used to support and accommodate the metal pin shaft 70, the metal bearing 73 is sleeved on the metal pin shaft 70, the metal spacer 72 is arranged between the guide wheel frame 71 and the metal bearing 73, and the guide wheel insulating sleeve 74 is sleeved on the metal bearing 73. The metal pin shaft 70, the guide wheel frame 71, the metal bearing 73, and the metal spacer 72 can be a stainless steel pin shaft, a stainless steel guide wheel frame, a stainless steel bearing, and a stainless steel spacer, respectively, and the guide wheel insulating sleeve 74 can be a guide wheel polypropylene sleeve or a guide wheel polyetheretherketone sleeve.

[0037] The first metal component, the second metal component and the insulating component are respectively the metal spacer 72, the metal bearing 73 and the guide wheel insulating sleeve 74. Figure 8 As shown, the fourth long strip slit GAP4 is disposed between the guide wheel insulating sleeve 74 and the metal spacer sleeve 72. Fig. 9 As shown, the fifth long strip slit GAP5 is arranged between the guide wheel insulating sleeve 74 and the metal pin shaft 70 and the metal bearing 73 .

[0038] The utility model adopts a special insulating structure such as the feeding roller 5, the magnetic fluid bearing 6 and the guide wheel 7 to effectively reduce the influence of winding plating, greatly increase the forming time of the film on the conductive path, so that the carrier board electrical suspension transmission remains non-conductive for a long time, which is conducive to process stability.

[0039] The independent structure of the insulating sleeve of the roller 5, magnetic fluid bearing 6 and guide wheel 7 means that only the insulating sleeve needs to be replaced during maintenance, which can effectively reduce maintenance costs and improve the market competitiveness of the equipment. The independent structure of the insulating sleeve allows the parts other than the insulating sleeve of the roller 5, magnetic fluid bearing 6 and guide wheel 7 to be made of stainless steel, which can greatly improve the rigidity, prevent the groove deformation from causing the roller rubber ring to be extruded, and effectively resist the high temperature ablation caused by accidental conduction discharge, thereby improving the stability of the equipment.

[0040] The utility model also provides a film forming chamber, comprising a chamber, a heater, and a transmission member arranged in the chamber for driving a carrier carrying a silicon wafer to move, wherein the transmission member is any of the above-mentioned carrier transmission members for the film forming chamber. Figure 3 The conveying roller 5 or the magnetic fluid bearing 6 shown in the figure may also be Figure 6 The guide wheel 7 is shown. The film forming chamber can be a physical vapor deposition PVD chamber.

[0041] The carrier plate transmission member for the film forming chamber of the utility model comprises a first metal component and a second metal component adjacent to each other, and further comprises an insulating component arranged between the first metal component and the second metal component, wherein a long strip-shaped slit is provided between the insulating component and at least one of the first metal component and the second metal component. The utility model can effectively reduce the influence of winding plating and greatly extend the maintenance and replacement cycle.

[0042] The above embodiments are provided for persons familiar with the art to implement or use the present invention. Personnel familiar with the art can make various modifications or changes to the above embodiments without departing from the utility model concept of the present invention. Therefore, the protection scope of the present invention is not limited to the above embodiments, but should be the maximum scope of the innovative features mentioned in the claims.

Claims

1. A carrier plate transmission member for a film forming chamber, comprising a first metal component and a second metal component adjacent to each other, characterized in that: It also includes an insulating component arranged between the first metal component and the second metal component, and a long strip slit is provided between the insulating component and at least one of the first metal component and the second metal component; the transmission member is a transmission roller, and the transmission roller includes a metal roller shaft, a roller insulating sleeve sleeved on the metal roller shaft, a metal roller sleeved on the roller insulating sleeve, and a roller rubber ring sleeved on the metal roller, the first metal component, the second metal component and the insulating component are the metal roller shaft, the metal roller and the roller insulating sleeve respectively, and the first long strip slit is provided between the roller insulating sleeve and the metal roller and the metal roller shaft.

2. The carrier plate transmission member for a film forming chamber according to claim 1, characterized in that: The width of the long strip slit is in the range of 0.2 mm to 0.8 mm, and the length is in the range of 10 mm to 30 mm.

3. The carrier plate transmission member for a film forming chamber according to claim 1, characterized in that: The conveying roller also includes a metal pressure cover, and the second long strip slit is arranged between the roller insulation sleeve and the metal roller and the metal pressure cover.

4. The carrier plate transmission member for a film forming chamber according to claim 1, characterized in that: The roller shaft is a stainless steel shaft, the metal roller is a stainless steel roller, and the roller insulation sleeve is a roller polypropylene sleeve or a roller polyetheretherketone sleeve.

5. The carrier plate transmission member for a film forming chamber according to claim 1, characterized in that: The transmission part is a guide wheel, which includes a metal pin shaft, a guide wheel frame for supporting and accommodating the metal pin shaft, a metal bearing sleeved on the metal pin shaft, a metal spacer sleeve arranged between the guide wheel frame and the metal bearing, and a guide wheel insulating sleeve sleeved on the metal bearing. The first metal component, the second metal component and the insulating component are the metal spacer sleeve, the metal bearing and the guide wheel insulating sleeve respectively. The third elongated slit is arranged between the guide wheel insulating sleeve and the metal spacer sleeve, and the fourth elongated slit is arranged between the guide wheel insulating sleeve and the metal pin shaft and the metal bearing.

6. The carrier plate transmission member for a film forming chamber according to claim 5, characterized in that: The metal pin shaft, guide wheel frame, metal bearing and metal spacer are respectively a stainless steel pin shaft, a stainless steel guide wheel frame, a stainless steel bearing and a stainless steel spacer, and the guide wheel insulating sleeve is a guide wheel polypropylene sleeve or a guide wheel polyetheretherketone sleeve.

7. The carrier plate transmission member for a film forming chamber according to claim 1, characterized in that: The transmission part is a magnetic fluid bearing, which includes a magnetic fluid bearing housing, a bearing insulating sleeve sleeved on the magnetic fluid bearing housing, and a metal cavity side wall arranged around the bearing insulating sleeve. The first metal component, the second metal component and the insulating component are the magnetic fluid bearing housing, the metal cavity side wall and the bearing insulating sleeve respectively. A fifth long strip slit is arranged between the magnetic fluid bearing housing and the bearing insulating sleeve.

8. The carrier plate transmission member for a film forming chamber according to claim 7, characterized in that: The magnetic fluid bearing housing is a stainless steel housing, the metal cavity side wall is a stainless steel side wall, and the bearing insulation sleeve is a bearing polypropylene sleeve or a bearing polyetheretherketone sleeve.

9. A film forming chamber, comprising a chamber, a heater, and a transmission member arranged in the chamber for driving a carrier carrying a silicon wafer to move, characterized in that: The transmission member is a carrier plate transmission member for a film forming chamber as described in any one of claims 1 to 8.

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