Wafer boat box with data card sleeve

By adopting a removable elastic pressing ruler and positioning system in the crystal boat box, the problem of damage to the existing crystal boat box during the transport of wafers is solved, and effective distribution with the data card holder is achieved, which improves transportation efficiency and safety.

CN222683180UActive Publication Date: 2025-03-28GUANGDONG MEIJIE MICRO NEW MATERIAL CO LTD
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Patent Information

Application Number
CN202420462538.3
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-03-11
Publication Date
2025-03-28
Estimated Expiration
2034-03-11

AI Technical Summary

Technical Problem

Existing wafer boat boxes are prone to damage when transporting wafers and cannot be distributed with data card holders.

Method used

A wafer boat box with a data card sleeve is designed, which uses a removable elastic pressing ruler for wafer contact, and ensures the correct positioning of the data card sleeve and prevents wear through the positioning column and limiting baffle.

Benefits of technology

Through the design of the elastic pressing ruler, the risk of damage to the wafer is reduced, and through the use with the data card sleeve, transportation efficiency and safety are improved.

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Abstract

The utility model discloses a crystal boat box with a data card sleeve, which comprises the data card sleeve, an upper shell, a lower shell and a crystal boat box middle frame, the data card sleeve is detachably mounted at the top of the upper shell, mounting blocks are arranged on the periphery of the data card sleeve, the upper shell is hinged to one side of a lower port of the lower shell, and the lower shell is hinged to one side of the lower port of the lower shell. A material pressing ruler plate used for elastically abutting against a wafer is detachably and fixedly installed at the top in the upper shell, the wafer box middle frame is installed on the lower shell and installed in the lower shell, and a positioning rubber column matched with the bottom of the wafer box middle frame in an inserted mode and a fixing piece correspondingly clamped with the bottom of the wafer box middle frame are fixed to the inner bottom face of the lower shell. A plurality of positioning columns are arranged at the top of the upper shell, and limiting baffles are arranged on the outer sides of the positioning columns. According to the utility model, the positioning columns can be matched to convey the data card sleeve; the material pressing ruler plate is detachably installed and can be replaced after being used for a long time and seriously abraded, the cost is saved, and the material pressing ruler plate can be used in cooperation with wafer boxes of different specifications and is very convenient to use.
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