Three-dimensional force sensor for shield cutter

Abstract

The utility model discloses a three-dimensional force sensor for a shield cutter, and the sensor comprises a housing which is provided with a first layer plate and a second layer plate which are oppositely arranged; the first flexible functional layer is positioned in the shell and is fixed on the first laminate; the plurality of first groove structures are arranged on the first flexible functional layer; the second flexible functional layer is positioned in the shell and is fixed on the second laminate; the plurality of second groove structures are arranged on the second flexible functional layer; and the plurality of second groove structures and the plurality of first groove structures are oppositely arranged in a staggered manner, so that when the shell is extruded, the first flexible functional layer and the second flexible functional layer are meshed with each other. When an external force acts on the sensor, the force can be concentrated at the edges and the tip ends of the first groove structure and the second groove structure, so that even small force change can generate obvious deformation in the areas, the sensor can more sensitively sense the force in different directions and with different magnitudes, and the tiny force change can be more easily detected; the multi-dimensional sensing capability is improved, and the detection sensitivity is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of three-dimensional force sensors, in particular to a three-dimensional force sensor for a shield cutter. Background Technique

[0002] As a large-scale mechanical equipment in the field of mechanical engineering, a shield machine is commonly used for the excavation work of underground tunnels and plays an extremely important role in the fields of railway, highway, subway engineering, etc. in China. The cutters of the shield machine are the basis and guarantee for its excavation work, and the tunneling efficiency of the shield machine is greatly affected by the cutter head structure. The complex and changeable engineering geological conditions and engineering properties result in a complex interaction relationship between the cutter head system of the shield machine and underground substances. The external forces acting on the cutters during the working process are not only from one direction, but in many cases include shear forces and torsional forces in multiple directions. If the external load exceeds the limit that the cutters can bear, the cutters will be damaged, causing construction problems. Therefore, it is very important to detect the force change of the shield machine cutters; real-time detection can effectively avoid the problem of excessive load on the cutters caused by changes in the external material structure or improper operation, and can effectively ensure construction safety and operation efficiency.

[0003] In the prior art, the flexible material layers arranged on the opposite surfaces of two laminates are both planar structures. By the extrusion deformation of the two flexible material layers caused by the stress deformation of the two laminates, the construction environment pressure is measured. However, since the contact surface between the two flexible material layers is planar, the change rate of the contact surface during deformation is small, which often leads to insufficient sensitivity of the existing three-dimensional force sensors.

[0004] Therefore, the prior art still needs to be improved and developed. Summary of the Utility Model

[0005] The technical problem to be solved by the utility model is to provide a three-dimensional force sensor for a shield cutter aiming at improving the detection sensitivity in view of the above defects of the prior art.

[0006] The technical solution adopted by the utility model to solve the technical problem is as follows:[[]]

[0007] A three-dimensional force sensor for a shield cutter, which comprises a housing. The housing has a first laminate and a second laminate arranged oppositely, and further comprises:

[0008] A first flexible functional layer, which is located inside the housing and fixed on the first laminate;

[0009] A plurality of first groove structures, which are arranged on the first flexible functional layer;

[0010] A second flexible functional layer, which is located inside the housing and fixed on the second laminate;

[0011] A plurality of second groove structures are arranged on the second flexible functional layer;

[0012] The plurality of second groove structures are opposite to the plurality of first groove structures and are arranged in a staggered manner, so that when the housing is compressed, the first flexible functional layer and the second flexible functional layer are meshed with each other.

[0013] The three-dimensional force sensor for a shield tool, wherein the first flexible functional layer has a flexible layer, and the first groove structure is arranged on the flexible layer.

[0014] The three-dimensional force sensor for a shield tool, wherein the flexible layer comprises:

[0015] A flexible layer body, arranged on the first layer board;

[0016] The conductive layer is arranged on a side of the flexible layer body away from the first layer board and covers the first groove structure.

[0017] The three-dimensional force sensor for a shield tool, wherein the conductive layer comprises a gold nanoparticle conductive layer.

[0018] The three-dimensional force sensor for a shield tool, wherein the first flexible functional layer comprises:

[0019] A plurality of flexible layers are sequentially arranged along the arrangement direction of the first layer board and the second layer board; one of the flexible layers is bonded to the first layer board, and the remaining flexible layers form a flexible layer unit in pairs, and two adjacent flexible layer units are meshed with each other through a groove structure;

[0020] A plurality of third groove structures are arranged on the flexible layer attached to the first layer board;

[0021] A plurality of fourth groove structures are arranged on the flexible layer unit closest to the first layer board, and are arranged opposite to and staggered with the plurality of third groove structures, so that the flexible layer unit closest to the first layer board can be engaged with the flexible layer attached to the first layer board;

[0022] The first groove structure is arranged on the flexible layer unit closest to the second flexible functional layer.

[0023] The three-dimensional force sensor for a shield tool further comprises:

[0024] A signal receiver is arranged on the outside of the shell and is electrically connected to the first flexible functional layer and the second flexible functional layer respectively; the signal receiver is used to connect to a control system.

[0025] The three-dimensional force sensor for a shield cutter, wherein both the first groove structure and the second groove structure are square groove structures.

[0026] The three-dimensional force sensor for a shield cutter, wherein both the first groove structure and the second groove structure are conical groove structures.

[0027] The three-dimensional force sensor for a shield cutter further includes:

[0028] A support bracket, which is arranged between the first layer plate and the second layer plate and is detachably connected to the first layer plate and the second layer plate respectively; the support bracket is used to adjust the distance between the first layer plate and the second layer plate.

[0029] The three-dimensional force sensor for a shield cutter, wherein a plurality of assembly holes are arranged on both the first layer plate and the second layer plate.

[0030] Beneficial effects: When an external force acts on the three-dimensional force sensor for a shield cutter, the force will concentrate on the edges and tip positions of the first groove structure and the second groove structure; this stress concentration effect makes it possible that even a small force change will generate significant deformation in these areas. The change in the contact area will affect the conduction and distribution of the force, enabling the sensor to more sensitively perceive forces in different directions and of different magnitudes, so that the three-dimensional force sensor for a shield cutter can more easily detect small force changes, improving the multi-dimensional sensing ability of the three-dimensional force sensor for a shield cutter, thereby achieving the purpose of enhancing the detection sensitivity. Description of the Drawings

[0031] Figure 1 is a schematic structural diagram of the first flexible functional layer in Embodiment 1 of the present invention;

[0032] Figure 2 is a reference diagram of the usage state of the three-dimensional force sensor for a shield cutter in its natural state in Embodiment 2 of the present invention;

[0033] Figure 3 is a reference diagram of the usage state of the three-dimensional force sensor for a shield cutter when it is compressed and deformed in the present invention;

[0034] Figure 4 is a reference diagram of the usage state of the three-dimensional force sensor for a shield cutter when it is torsionally deformed in the present invention;

[0035] Figure 5 is a schematic diagram of the working system of the three-dimensional force sensor for a shield cutter in the present invention;

[0036] Figure 6It is the functional principle block diagram of the three-dimensional force sensor for shield cutters described in the present utility model. Specific embodiments

[0037] The embodiments of the present utility model will be described below with reference to the accompanying drawings and preferred embodiments. Those skilled in the art can easily understand other advantages and effects of the present utility model from the content disclosed in this specification. The present utility model can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present utility model. It should be understood that the preferred embodiments are only for explaining the present utility model and not for limiting the protection scope of the present utility model.

[0038] It should be noted that the diagrams provided in the following embodiments only illustrate the basic concept of the present utility model in a schematic manner. Therefore, only the components related to the present utility model are shown in the diagrams, rather than being drawn according to the number, shape, and size of the components in actual implementation. The type, quantity, and ratio of each component in actual implementation can be arbitrarily changed, and the component layout type may also be more complex.

[0039] The present utility model provides a three-dimensional force sensor for shield cutters, as Figure 2 shown. The three-dimensional force sensor for shield cutters includes a housing, a first flexible functional layer 1, a second flexible functional layer 2, a plurality of first groove structures 3, and a plurality of second groove structures 4; the housing has a first layer plate 10 and a second layer plate 20 arranged oppositely, the first flexible functional layer 1 is located inside the housing and fixed on the first layer plate 10; a plurality of first groove structures 3 are provided on the first flexible functional layer 1; the second flexible functional layer 2 is located inside the housing and fixed on the second layer plate 20; a plurality of second groove structures 4 are provided on the second flexible functional layer 2; a plurality of the second groove structures 4 and a plurality of the first groove structures 3 are arranged opposite to and offset from each other, so that when the housing is squeezed, the first flexible functional layer 1 and the second flexible functional layer 2 can mesh with each other.

[0040] Specifically, a plurality of the first groove structures 3 are arranged in an array on the first flexible functional layer 1 and located on the side of the first flexible functional layer 1 facing the second flexible functional layer 2; a plurality of second groove structures 4 are arranged in an array on the second flexible functional layer 2 and located on the side of the second flexible functional layer 2 facing the first flexible functional layer 1; then, the first groove structure 3 array and the second groove structure 4 array are arranged opposite to each other and offset from each other, so that when the housing is squeezed to cause squeezing deformation or torsional deformation, through the cooperation of the first groove structure 3 array and the second groove structure 4 array, the first flexible functional layer 1 and the second flexible functional layer 2 can mesh with each other.

[0041] The groove structure will cause stress concentration, and the meshing of the groove structure makes the contact area between the two flexible functional layers more complex and dynamically changing. Therefore, when external force acts on the three-dimensional force sensor for shield tools, the force will be concentrated on the edges and tip positions of the first groove structure 3 and the second groove structure 4; this stress concentration effect makes even a small force change produce significant deformation in these areas, and the change in contact area will affect the conduction and distribution of force, so that the sensor can more keenly sense forces of different directions and sizes, thereby making it easier for the three-dimensional force sensor for shield tools to detect tiny force changes, improving the multi-dimensional perception capability of the three-dimensional force sensor for shield tools, thereby achieving the purpose of improving detection sensitivity.

[0042] Therefore, the presence of the groove structure in the present application enables the two flexible functional layers to produce more significant micromechanical deformation when subjected to force. The enhancement of this micromechanical deformation can improve the response speed and accuracy of the three-dimensional force sensor for the shield tool to external forces, so that the three-dimensional force sensor for the shield tool can capture subtle force changes faster and more accurately.

[0043] Furthermore, the design of the groove structure can adjust the local stiffness of the flexible layer, so that the three-dimensional force sensor for the shield tool exhibits a specific deformation mode under a specific force, thereby improving the sensitivity.

[0044] The three-dimensional force sensor for shield tool also includes a signal receiver 6, such as Figure 6 As shown, the signal receiver 6 is arranged on the outside of the housing and is electrically connected to the first flexible functional layer 1 and the second flexible functional layer 2 respectively; the signal receiver 6 is used to connect to the control system 7. The control system 7 is also electrically connected to the external alarm 8, so that when the force sensing signal received by the control system 7 exceeds the threshold value (that is, the external force detected by the three-dimensional force sensor for the shield tool exceeds the threshold value), a start signal is sent to the alarm 8, thereby starting the alarm 8.

[0045] It is understandable that if Figure 5 As shown, the three-dimensional force sensor for shield tool is connected in series with an external ammeter, and the resistance change of the three-dimensional force sensor for shield tool can be obtained through the reading of the ammeter, thereby obtaining the value of the force detected by the three-dimensional force sensor for shield tool.

[0046] Embodiment 1 of this application

[0047] like Figure 1 As shown, the first flexible functional layer 1 has a flexible layer, and the first groove structure 3 is arranged on the flexible layer.

[0048] Specifically, the first flexible functional layer 1 has only one flexible layer, which is engaged with the second flexible functional layer 2 through the first groove structure 3. Figure 1 As shown, the flexible layer includes a flexible layer body 11 and a conductive layer 12; the flexible layer body 11 is arranged on the first layer board 10, and the conductive layer 12 is arranged on the side of the flexible layer body 11 away from the first layer board 10 and covers the first groove structure 3; the conductive layer 12 is electrically connected to the signal receiver 6.

[0049] Similarly, the second flexible functional layer 2 also has only one flexible layer, the second groove structure 4 is arranged on the flexible layer, and the conductive layer of the flexible layer is electrically connected to the signal receiver 6 .

[0050] In one implementation of this embodiment, the conductive layer includes a gold nanoparticle conductive layer.

[0051] Embodiment 2 of this application

[0052] like Figure 2 As shown, the first flexible functional layer 1 includes a plurality of flexible layers 21, which are arranged in sequence along the arrangement direction of the first layer board 10 and the second layer board 20; one of the flexible layers 21 is bonded to the first layer board 10, and the remaining flexible layers 21 form a flexible layer unit 210 in pairs, and the two adjacent flexible layer units 210 are meshed with each other through the groove structure. The two flexible layers 21 in the flexible layer unit 210 are bonded to each other and electrically connected to each other, and the groove structures of the two flexible layers 21 are away from each other, so that the contact bonding area between the two flexible layers 21 is maximized.

[0053] The first flexible functional layer 1 also includes a plurality of third groove structures 22 and a plurality of fourth groove structures 23; the plurality of third groove structures 22 are arranged on the flexible layer 21 adhered to the first layer board 10, and face the flexible layer unit 210 closest to the first layer board 10; the plurality of fourth groove structures 23 are arranged on the flexible layer unit 210 closest to the first layer board 10, and are arranged opposite to and staggered with the plurality of third groove structures 22, so that the flexible layer unit 210 closest to the first layer board 10 can engage with the flexible layer 21 adhered to the first layer board 10; the first groove structure 3 is arranged on the flexible layer unit 210 closest to the second flexible functional layer 2.

[0054] In this embodiment, the first flexible functional layer 1 includes multiple flexible layers 21, and through the sequential engagement between the multiple flexible layers 21, the flexible layer 21 closest to the second flexible functional layer 2 can engage with the second flexible functional layer 2 through the cooperation of the first groove structure 3 and the second groove structure 4, thereby achieving the engagement of the first flexible functional layer 1 with the second flexible functional layer 2.

[0055] In this embodiment, compared with the first embodiment, the number of flexible layers 21 in the first flexible functional layer 1 is increased, and correspondingly, the number of groove structures is increased, so that the two flexible functional layers can generate more significant micro-mechanical deformations when stressed. The further enhancement of this micro-mechanical deformation can improve the response speed and accuracy of the three-dimensional force sensor for shield cutters to external forces, enabling the three-dimensional force sensor for shield cutters to capture subtle force changes faster and more accurately.

[0056] In this embodiment, the flexible layer 21 attached to the first layer board 10 is electrically connected to the signal receiver 6, and each flexible layer 21 has a corresponding conductive layer, thereby realizing the electrical connection between the first flexible functional layer 1 and the signal receiver 6. Similarly, the second flexible functional layer 2 also has only one flexible layer, the second groove structure 4 is arranged on this flexible layer, and the conductive layer of this flexible layer is electrically connected to the signal receiver 6.

[0057] It should be noted that in actual use, the meshing degree between two adjacent flexible layers is Figure 2 tighter, but in order to show each groove structure and the meshing relationship between two adjacent flexible layers, Figure 2 the gap between two adjacent flexible layers is exaggeratedly shown.

[0058] In one implementation manner of this embodiment, as Figure 2 shown, the flexible layer unit 210 is only one. Since when the number of flexible layer units 210 is too large, the overall thickness and volume of the three-dimensional force sensor for shield cutters will increase, which is not conducive to the installation and application of the three-dimensional force sensor for shield cutters. Therefore, in this implementation manner, the flexible layer unit 210 is only designed to be one.

[0059] It can be understood that, as Figure 3 shown, when the three-dimensional force sensor for shield cutters is squeezed and deformed due to external force, the contact between the meshing groove structures is closer; when the three-dimensional force sensor for shield cutters is stretched and deformed due to external force, the tightness of the contact between the meshing groove structures decreases; as Figure 4 shown, when the three-dimensional force sensor for shield cutters is torsionally deformed due to external force, the contact surface between the meshing groove structures has a certain offset.

[0060] Based on this implementation manner, the preparation method of the three-dimensional force sensor for shield cutters is described below:

[0061] Step S100: Place the polished side of the silicon wafer on the three-dimensional motion platform of the ultrafast laser processing system. The femtosecond laser generates ultrafast pulsed laser, which is incident on the convex lens for focusing after passing through the reflecting mirror. The focused laser acts on the surface of the silicon wafer, and the relative position of the light beam and the material is changed through the three-dimensional motion platform to achieve the processing of the groove array structure on the silicon surface;

[0062] Step S200: Put the processed silicon wafer into a 20wt% HF solution, assist with ultrasonic vibration corrosion for 30 minutes, and keep the temperature constant at room temperature of 20 °C;

[0063] Step S300: Wash the corroded silicon wafer 3 times with clean water for 5 minutes each time, and finally ultrasonically clean it with anhydrous ethanol for 10 minutes and air dry it;

[0064] Step S400: Mix the A and B glues of the epoxy resin in a mass ratio of 3:1, stir well, let it stand for 1 hour for degassing treatment, then coat it on the surface of the groove structure array of the silicon wafer, place it in a drying oven at 60 °C and keep it at a constant temperature for 1 hour. After drying, peel off the epoxy resin template from the silicon wafer;

[0065] Step S500: Mix the precursor of PDMS and the curing agent in a mass ratio of 10:1, stir well, let it stand for 1 hour for degassing treatment, then use a spin coater to uniformly coat PDMS on the epoxy resin template, and put it into a drying oven at 70 °C and heat it for 1 hour. After taking it out, peel off the PDMS film from the epoxy resin template;

[0066] Step S600: Use a magnetron sputtering coater to sputter a gold nanoparticle film with a thickness of about 50 nm on the surface of the flexible substrate with a groove structure array to obtain a flexible layer with a conductive layer and a groove structure;

[0067] Step S700: Take two flexible layers, bond the side without the groove structure through glue, and connect the side sprayed with the conductive layer through a wire to obtain a flexible layer unit;

[0068] Step S800: Attach a flexible layer to the first layer board and the second layer board respectively, and make the groove structure of the flexible layer on the first layer board 10 able to mesh with the groove structure on one side of the flexible layer unit, and the groove structure of the flexible layer on the second layer board able to mesh with the groove structure on the other side of the flexible layer unit.

[0069] In an embodiment of the present application, both the first groove structure 3 and the second groove structure 4 are square groove structures.

[0070] In this embodiment, a square groove structure is used to achieve the meshing between the first flexible functional layer 1 and the second flexible functional layer 2; the edges of the square groove structure are relatively sharp, which is easy to produce a large stress concentration; this stress concentration can improve the local deformation response, making the three-dimensional force sensor for the shield tool more sensitive to force changes; and, relatively speaking, the processing of the square groove structure is relatively simple, especially for micro-manufacturing processes, the production of the square groove structure may be easier to control. At the same time, the meshing part of the square groove structure has a large contact area and can provide relatively stable structural support, which is more beneficial for application scenarios that require stability and uniform force distribution.

[0071] In another embodiment of the present application, the first groove structure 3 and the second groove structure 4 are both tapered groove structures.

[0072] In this embodiment, a conical groove structure is used to achieve the meshing between the first flexible functional layer 1 and the second flexible functional layer 2; the conical groove structure can produce different stress distributions at different depths due to its gradually changing shape, which enables the three-dimensional force sensor for the shield tool to more delicately perceive the changes in the size and direction of the force, thereby possibly performing better in multi-dimensional force perception; and the shape of the conical groove structure allows the flexible functional layer to produce gradual deformation when subjected to force, which may contribute to more flexible stress transfer and higher sensitivity.

[0073] Compared with groove structures of other shapes, the processing of the conical groove structure in this embodiment is relatively complex and requires a more precise manufacturing process; however, this complex shape can bring better mechanical properties, especially in scenarios requiring high sensitivity.

[0074] The four sharp corners of the square slot structure are prone to high stress concentration, which may cause large local stress in these parts during torsional deformation; this stress concentration can amplify the detection effect of torsional force, but it may also cause excessive local stress in the structure, thereby affecting the durability and life of the sensor; and, due to the symmetry of the shape of the square slot structure, during the torsion process, uneven stress may occur on the edges of the square slot structure, resulting in uneven force transmission, which may affect the sensitivity and accuracy of the three-dimensional force sensor for the shield tool to torsional force.

[0075] For the conical groove structure, the gradually changing shape of the conical groove structure enables the stress to be more evenly distributed along the groove wall; during torsional deformation, the conical groove structure helps to more smoothly disperse the stress, reducing the risk of local stress concentration, which helps to improve the overall sensitivity and durability of the three-dimensional force sensor for shield cutters under torsional force; moreover, the conical groove structure can better adapt to complex mechanical changes during torsional deformation, and its gradually changing structure enables the deformation of the groove wall to maintain a good linear relationship at different torsional angles, thereby improving the detection accuracy of torsional force.

[0076] Considering the above comprehensively, since the three-dimensional force sensor for shield cutters has an application scenario of torsional deformation due to external forces, therefore, in this application, the conical groove structure is taken as a more preferred solution.

[0077] The three-dimensional force sensor for shield cutters further includes a support bracket, the support bracket is arranged between the first layer plate 10 and the second layer plate 20, and is detachably connected to the first layer plate 10 and the second layer plate 20 respectively; the support bracket is used to adjust the distance between the first layer plate 10 and the second layer plate 20, so as to adjust the meshing degree and contact area between the first flexible functional layer 1 and the second flexible functional layer 2 in the natural state (i.e., the initial state).

[0078] In an embodiment of this application, the support bracket includes an elastic member, and the elastic deformation direction of the elastic member is parallel to the arrangement direction of the first layer plate 10 and the second layer plate 20.

[0079] Both ends of the elastic member are detachably connected to the first layer plate 10 and the second layer plate 20 respectively, so that the elastic member can be disassembled and replaced with elastic members of different models, thereby adjusting the distance between the first layer plate 10 and the second layer plate 20 in the natural state.

[0080] As Figure 2 shown, a plurality of assembly holes 9 are provided on both the first layer plate 10 and the second layer plate 20, so that the three-dimensional force sensor for shield cutters can be assembled on the shield machine through the cooperation of the assembly holes 9 and the fittings.

[0081] In summary, the present application provides a three-dimensional force sensor for a shield tool, which includes a shell, the shell having a first layer and a second layer arranged relatively; a first flexible functional layer, located in the shell and fixed on the first layer; a plurality of first groove structures, arranged on the first flexible functional layer; a second flexible functional layer, located in the shell and fixed on the second layer; a plurality of second groove structures, arranged on the second flexible functional layer; a plurality of second groove structures are arranged relative to and staggered with a plurality of first groove structures, so that when the shell is squeezed, the first flexible functional layer and the second flexible functional layer are meshed with each other. When an external force acts on the three-dimensional force sensor for a shield tool, the force will be concentrated on the edge and tip positions of the first groove structure and the second groove structure; this stress concentration effect makes even a small force change produce significant deformation in these areas, and the change in contact area will affect the conduction and distribution of the force, so that the sensor can more sensitively sense forces of different directions and sizes, so that the three-dimensional force sensor for a shield tool can more easily detect small force changes, improve the multi-dimensional perception ability of the three-dimensional force sensor for a shield tool, and thus achieve the purpose of improving detection sensitivity.

[0082] It should be understood that the application of the present invention is not limited to the above examples. For ordinary technicians in this field, improvements or changes can be made according to the above description. All these improvements and changes should fall within the scope of protection of the claims attached to the present invention.

Claims

1. A three-dimensional force sensor for a shield tool, comprising a housing, wherein the housing has a first layer plate and a second layer plate arranged opposite to each other, characterized in that: It also includes: A first flexible functional layer is located in the housing and fixed to the first layer; A plurality of first groove structures are arranged on the first flexible functional layer; A second flexible functional layer is located in the housing and fixed to the second layer board; A plurality of second groove structures are arranged on the second flexible functional layer; The plurality of second groove structures are opposite to the plurality of first groove structures and are arranged in a staggered manner, so that when the housing is compressed, the first flexible functional layer and the second flexible functional layer are meshed with each other.

2. The three-dimensional force sensor for a shield tool according to claim 1, characterized in that: The first flexible functional layer has a flexible layer, and the first groove structure is arranged on the flexible layer.

3. The three-dimensional force sensor for a shield tool according to claim 2, characterized in that: The flexible layer comprises: A flexible layer body, arranged on the first layer board; The conductive layer is arranged on a side of the flexible layer body away from the first layer board and covers the first groove structure.

4. The three-dimensional force sensor for a shield tool according to claim 3, characterized in that: The conductive layer comprises a gold nanoparticle conductive layer.

5. The three-dimensional force sensor for a shield tool according to claim 1, characterized in that: The first flexible functional layer comprises: A plurality of flexible layers are sequentially arranged along the arrangement direction of the first layer board and the second layer board; one of the flexible layers is bonded to the first layer board, and the remaining flexible layers form a flexible layer unit in pairs, and two adjacent flexible layer units are meshed with each other through a groove structure; A plurality of third groove structures are arranged on the flexible layer attached to the first layer board; A plurality of fourth groove structures are arranged on the flexible layer unit closest to the first layer board, and are arranged opposite to and staggered with the plurality of third groove structures, so that the flexible layer unit closest to the first layer board can be engaged with the flexible layer attached to the first layer board; The first groove structure is arranged on the flexible layer unit closest to the second flexible functional layer.

6. The three-dimensional force sensor for a shield tool according to claim 1, characterized in that: It also includes: A signal receiver is arranged on the outside of the shell and is electrically connected to the first flexible functional layer and the second flexible functional layer respectively; the signal receiver is used to connect to a control system.

7. The three-dimensional force sensor for a shield tool according to claim 1, characterized in that: The first slot structure and the second slot structure are both square slot structures.

8. The three-dimensional force sensor for a shield tool according to claim 1, characterized in that: The first groove structure and the second groove structure are both tapered groove structures.

9. The three-dimensional force sensor for a shield tool according to claim 1, characterized in that: It also includes: A support bracket is arranged between the first layer board and the second layer board and is detachably connected to the first layer board and the second layer board respectively; the support bracket is used to adjust the distance between the first layer board and the second layer board.

10. The three-dimensional force sensor for a shield tool according to claim 1, characterized in that: A plurality of assembly holes are provided on the first layer board and the second layer board.

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