Radio frequency power supply controller

Abstract

The utility model relates to a radio frequency power supply controller. The radio frequency power supply controller comprises an adjusting module used for adjusting and outputting a first signal; the single chip microcomputer module is used for acquiring and storing at least one first signal; and circularly reading at least one stored first signal so as to circularly output at least one group of single-chip microcomputer output voltage and control switch signals corresponding to the first signal, the transmitting power of the radio frequency power supply is set based on the output voltage of the single-chip microcomputer, and the on-time length and the off-time length of the radio frequency power supply are controlled based on the control switch signal. Determining emission voltage information corresponding to the actual emission power of the radio frequency power supply according to the obtained input voltage of the first single-chip microcomputer, and determining reflection voltage information corresponding to the reflection power according to the obtained input voltage of the second single-chip microcomputer; and the display screen is used for displaying at least one piece of information including the first signal, the emission voltage information and the reflection voltage information. The utility model provides a small and convenient radio frequency power supply controller.

Description

Technical Field

[0001] The present application relates to the technical field of electronic measuring instruments, and in particular to a radio frequency power supply controller. Background Art

[0002] In semiconductor processing equipment, radio frequency (RF) power supplies are commonly used in etching equipment and thin-film deposition equipment to generate stable high-frequency electric fields to stimulate plasma reactions and achieve precise material etching and deposition. Because load impedance varies during various process steps, if the matching network between the RF power supply and the load is not well matched, the transmitted power will be reflected back to the power supply, causing cable heating and, in severe cases, damaging the RF power supply components. Therefore, it is necessary to frequently measure the transmitted and reflected power of the RF power supply.

[0003] Therefore, it is crucial to provide a compact and convenient RF power controller to meet the frequent demand for performing the above-mentioned measurements on the RF power supply. Utility Model Content

[0004] In view of this, embodiments of the present application provide a radio frequency power supply controller to solve at least one problem existing in the background technology.

[0005] The present invention provides a radio frequency power supply controller, which includes:

[0006] an adjusting module, configured to adjust and output a first signal; the first signal comprising a set voltage information, and on-time information and off-time information corresponding to the set voltage information;

[0007] a single-chip microcomputer module, connected to the adjustment module, configured to obtain and store at least one of the first signals; and cyclically read the stored at least one first signal to cyclically output at least one set of single-chip microcomputer output voltages and control switch signals corresponding to the first signal, so that the transmission power of the radio frequency power supply is set based on the single-chip microcomputer output voltage, and the on-time and off-time of the radio frequency power supply are controlled based on the control switch signal; and transmit voltage information corresponding to the actual transmit power of the radio frequency power supply is determined based on the obtained first single-chip microcomputer input voltage, and reflected voltage information corresponding to the reflected power is determined based on the obtained second single-chip microcomputer input voltage;

[0008] A display screen is connected to the single chip computer module and is used to display at least one item of information including the first signal, the emission voltage information, and the reflection voltage information.

[0009] In an optional embodiment, the RF power supply controller further includes at least one of the following:

[0010] A voltage output setting module is used to obtain the output voltage of the single-chip microcomputer; and to boost the output voltage of the single-chip microcomputer to a set voltage, so as to set the transmission power of the radio frequency power supply according to the set voltage;

[0011] A first feedback voltage input module is used to obtain a transmission voltage corresponding to the actual transmission power of the radio frequency power supply, and step down the transmission voltage to the first single-chip microcomputer input voltage;

[0012] The second feedback voltage input module is used to obtain a reflected voltage corresponding to the reflected power and step down the reflected voltage into the second single-chip microcomputer input voltage.

[0013] In an alternative embodiment,

[0014] The set voltage output module includes:

[0015] a third proportional operation circuit, configured to multiply the single chip microcomputer output voltage by a first magnification factor to obtain the set voltage;

[0016] The first feedback voltage input module includes:

[0017] a first proportional operation circuit, configured to multiply the emission voltage by a first reduction factor to obtain the first single-chip microcomputer input voltage;

[0018] The second feedback voltage input module includes:

[0019] The second proportional operation circuit is used to multiply the reflected voltage by a second reduction factor to obtain the second single-chip microcomputer input voltage.

[0020] In an optional embodiment, the RF power supply controller further includes:

[0021] The signal isolation module is used to obtain the control switch signal and isolate, convert and output the control switch signal.

[0022] In an optional embodiment, the signal isolation module includes:

[0023] The photoelectric coupler is used to output the control switch signal after photoelectric isolation conversion.

[0024] In an alternative embodiment,

[0025] The adjustment module is further configured to select and output a second signal; the second signal includes menu function information;

[0026] The single chip microcomputer module is further used to obtain the second signal and enter a function configuration state corresponding to the menu function information in the second signal according to the second signal to perform configuration;

[0027] The display screen is also used to display the menu function information.

[0028] In an alternative embodiment,

[0029] The adjustment module includes a knob;

[0030] The single chip microcomputer module is further used to detect the movement of the knob to increase or decrease the voltage setting register value according to the rotation direction of the knob; and determine the single chip microcomputer output voltage according to the voltage setting register value.

[0031] In an alternative embodiment,

[0032] The single-chip microcomputer module includes a first voltage input port and a second voltage input port; the first voltage input port is used to obtain the first single-chip microcomputer input voltage, and the second voltage input port is used to obtain the second single-chip microcomputer input voltage;

[0033] The single-chip microcomputer module is further used to detect voltage changes at the first voltage input port, so as to increase the value of the first voltage acquisition register when the voltage increases, or reduce the value of the first voltage acquisition register when the voltage decreases, and determine the first single-chip microcomputer input voltage based on the value of the first voltage acquisition register; detect voltage changes at the second voltage input port, so as to increase the value of the second voltage acquisition register when the voltage increases, or reduce the value of the second voltage acquisition register when the voltage decreases, and determine the second single-chip microcomputer input voltage based on the value of the second voltage acquisition register.

[0034] In an optional embodiment, the RF power supply controller further includes:

[0035] The communication transmission interface is connected between the single-chip microcomputer module and the radio frequency power supply, and is used to realize signal and data transmission between the single-chip microcomputer module and the radio frequency power supply.

[0036] In an optional implementation, the communication transmission interface includes a DB25 interface.

[0037] The technical solutions provided by the embodiments of the present application provide beneficial effects including: through the use of a single-chip microcomputer module, a regulating module, and a display screen, the use of multiple standard devices such as meters and timers is eliminated, and the setting and output of the single-chip microcomputer output voltage and control switch signal can be completed to achieve the setting of the transmission power of the RF power supply, as well as the control of the on and off time, that is, the timed on and off control of the transmission power, and the ability to display information such as the set voltage information, the transmission voltage information, and the reflected voltage information on the display screen, thereby greatly reducing the size of the RF power supply controller, making it compact and convenient. At the same time, it also reduces the number of wire connections and improves stability and reliability. In addition, the single-chip microcomputer module can uniformly control and schedule peripherals such as the regulating module and the display screen, while reducing the size, and can also achieve more powerful functions. For example, it can realize automatic on and off cycle control of multiple groups (such as 10 groups) of set voltages with different time lengths. Compared with the current control of a single group of set voltages with different time lengths, this greatly improves control efficiency, makes the testing of the RF power supply closer to the actual use scenario of the machine end, and greatly improves the credibility of the test results.

[0038] Additional aspects and advantages of the embodiments of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through practice of the embodiments of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The drawings are not necessarily drawn to scale, and local features may be enlarged or reduced to more clearly show the details of the local features. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation of the present application. In the drawings:

[0040] Figure 1 A schematic structural diagram of a specific example of a radio frequency power supply controller;

[0041] Figure 2 This is a schematic diagram of a principle block diagram of a specific example of a radio frequency power supply controller in an embodiment of the present application;

[0042] Figure 3 A schematic diagram of a specific example of menu function information displayed on a display screen in an embodiment of the present application;

[0043] Figure 4 This is a schematic diagram of another specific example of menu function information displayed on a display screen in an embodiment of the present application;

[0044] Figure 5 This is a schematic diagram of a specific example of information displayed on a display screen in the functional configuration state of PROCESS0 in an embodiment of the present application;

[0045] Figure 6 A schematic diagram of a specific example of information displayed on a display screen during the automatic on / off cycle control process in an embodiment of the present application;

[0046] Figure 7 This is a schematic diagram of a principle block diagram of another specific example of a radio frequency power supply controller in an embodiment of the present application. DETAILED DESCRIPTION

[0047] To make the technical solutions and beneficial effects of this application more clearly understood, the following detailed description is given by way of specific embodiments. The accompanying drawings are not necessarily drawn to scale, and local features may be enlarged or reduced to more clearly illustrate the details of the local features. Unless otherwise defined, the technical and scientific terms used herein have the same meanings as those in the technical field to which this application belongs.

[0048] The embodiments of the present application are not exhaustive, but are merely illustrative of some embodiments and are not intended to be a specific limitation on the scope of protection of the present application. In the absence of contradiction, each step in a certain embodiment can be implemented as an independent embodiment, and the steps can be arbitrarily combined. For example, a solution after removing some steps in a certain embodiment can also be implemented as an independent embodiment, and the order of the steps in a certain embodiment can be arbitrarily exchanged. In addition, the optional implementations in a certain embodiment can be arbitrarily combined; in addition, the embodiments can be arbitrarily combined. For example, some or all of the steps in different embodiments can be arbitrarily combined, and a certain embodiment can be arbitrarily combined with the optional implementations of other embodiments.

[0049] In each embodiment of the present application, unless otherwise specified or there is any logical conflict, the terms and / or descriptions between the embodiments are consistent and can be referenced by each other. The technical features in different embodiments can be combined to form a new embodiment based on their inherent logical relationships.

[0050] The terms used in the embodiments of the present application are only for the purpose of describing specific embodiments and are not intended to limit the present application.

[0051] In the embodiments of the present application, unless otherwise specified, elements expressed in the singular, such as "a", "an", "the", "above", "said", "the", "the", etc., can mean "one and only one", or "one or more", "at least one", etc. For example, when using articles such as "a", "an", "the" in English in translation, the noun following the article can be understood as a singular expression or a plural expression.

[0052] In the embodiments of the present application, "plurality" refers to two or more.

[0053] In some embodiments, the terms "at least one", "one or more", "a plurality of", "multiple" and the like can be used interchangeably.

[0054] The prefixes such as "first" and "second" in the embodiments of the present application are only used to distinguish different description objects and do not limit the position, order, priority, value or content of the description objects. For the statement of the description objects, please refer to the description in the context of the claims or embodiments, and no unnecessary restrictions should be imposed due to the use of prefixes. For example, the numerical value of the description object is not limited by the ordinal number and can be one or more. Taking "first device" as an example, the numerical value of "device" can be one or more. In addition, the objects modified by different prefixes can be the same or different. For example, if the description object is "device", then the "first device" and the "second device" can be the same device or different devices, and their types can be the same or different.

[0055] In some embodiments, the term "connection" may indicate the transmission of electrical signals or data between a connected end and a connected end, and may be understood as "electrical connection," "communication connection," etc. A "connection" may be a direct connection between two components, an indirect connection established through other components, internal connectivity between two components, or any other possible connection form.

[0056] In some embodiments, terms such as "greater than", "greater than or equal to", "not less than", "more than", "more than or equal to", "not less than", "higher than", "higher than or equal to", "not less than", "above", and "exceed" can be replaced with each other, and terms such as "less than", "less than or equal to", "not greater than", "less than", "less than or equal to", "not more than", "lower than", "lower than or equal to", "not higher than", and "below" can be replaced with each other.

[0057] During the implementation of this application, the inventors discovered the following problems in the related art:

[0058] Figure 1 The schematic diagram of the structure of a specific example of a radio frequency power controller (RF POWER CONTROLOR) is shown. As shown in the figure, the radio frequency power controller 100 includes a first meter 101, a second meter 102, a third meter 103, a potentiometer 104 and a timer 105.

[0059] The potentiometer 104 is used to adjust a set voltage value for controlling the transmission power of the RF power supply. For example, the potentiometer 104 is used in conjunction with a voltage regulating module, and the potentiometer 104 is adjusted using a knob.

[0060] The third meter 103 is used to display the voltage value SET currently set by the potentiometer 104 .

[0061] The first meter 101 is used to display the voltage value FWD corresponding to the RF power transmission power.

[0062] The second meter 102 is used to display the voltage value REF corresponding to the reflected power.

[0063] The timer 105 is used to configure the on time (ON TIME) and off time (OFF TIME) of the current set voltage value to perform timed on / off control on the RF power supply transmission power.

[0064] As can be seen, most current RF power controllers use standard components. For example, at least three meters, a potentiometer, and a timer must be placed on the front panel, making them difficult to reduce in size, resulting in bulk, difficulty in use, and inconvenience. Furthermore, these components require numerous wires to connect, making wiring complex and prone to errors, even compromising stability and reliability. These components also lack intercommunication and control, resulting in limited functional flexibility. Furthermore, since setting the voltage requires manually rotating a potentiometer, only a timed switch test with a set voltage output can be performed, resulting in insufficient testing capabilities.

[0065] To this end, an embodiment of the present application provides a radio frequency power supply controller, Figure 2 The following is a schematic block diagram of a specific example of a radio frequency power supply controller according to an embodiment of the present application. As shown in the figure, the radio frequency power supply controller 200 includes:

[0066] The adjustment module 203 is configured to adjust and output a first signal; the first signal includes a set voltage information, and on-time information and off-time information corresponding to the set voltage information;

[0067] The single-chip computer module 201 is connected to the regulating module 203 and is configured to obtain and store at least one of the first signals; cyclically read the stored at least one of the first signals to cyclically output at least one set of single-chip computer output voltages and control switch signals corresponding to the first signals, so as to set the transmit power of the RF power supply based on the single-chip computer output voltages and control the on and off durations of the RF power supply based on the control switch signals; and determine transmit voltage information corresponding to the actual transmit power of the RF power supply based on the obtained first single-chip computer input voltage, and determine reflected voltage information corresponding to the reflected power based on the obtained second single-chip computer input voltage.

[0068] The display screen 202 is connected to the single chip computer module 201 and is used to display at least one of the first signal, the emission voltage information, and the reflection voltage information.

[0069] Thus, the embodiment of the present application, through the single-chip microcomputer module, the adjustment module, and the display screen, eliminates the use of multiple standard devices such as multiple meters and timers, and can complete the setting and output of the single-chip microcomputer output voltage and control switch signal to achieve the setting of the transmission power of the RF power supply, as well as the control of the on and off time, that is, the timed on and off control of the transmission power, and can display information such as the set voltage information, the transmission voltage information, and the reflected voltage information on the display screen, thereby greatly reducing the size of the RF power supply controller, making it compact and convenient. At the same time, it also reduces the wire connection and improves stability and reliability. In addition, the single-chip microcomputer module can uniformly control and schedule peripherals such as the adjustment module and the display screen. While reducing the size, it can also achieve more powerful functions. For example, it can realize automatic on and off cycle control of multiple groups (such as 10 groups) of set voltages with different time lengths. Compared with the current single group set voltage with different time lengths, it greatly improves control efficiency, makes the testing of the RF power supply closer to the actual use scenario of the machine end, and greatly improves the credibility of the test results.

[0070] In the embodiment of the present application, the RF power supply controller may be referred to by different names, such as a radio frequency (RF) power supply test device, etc., and the name is not limited here.

[0071] In some possible implementations, the microcontroller module 201 may include at least one of a timer, an analog-to-digital conversion unit (ADC), a digital-to-analog conversion unit (DAC), a serial interface (SPI), a general input and output interface (GPIO), etc.

[0072] Display screen 202 can be connected to microcontroller module 201 via SPI. Adjustment module 203 can be connected to microcontroller module 201 via GPIO. Based on the on-time and off-time information, microcontroller module 201 can determine and output a control switch signal using a timer to control the on and off durations of the RF power supply. Microcontroller module 201 can use an ADC to convert analog signals representing the first and second microcontroller input voltages into digital signals for subsequent processing. Furthermore, it can use a DAC to convert the digital voltage signal set by adjustment module 203 into an analog signal representing the microcontroller output voltage for output to the RF power supply.

[0073] Exemplarily, the single-chip microcomputer module 201 may further include a memory for storing at least one set of set voltage information, as well as on-time information and off-time information corresponding to the set voltage information. Taking 10 groups as an example, the memory may store any group including PROCESS0, PROCESS1, PROCESS2, ..., PROCESS9, and any PROCESSi may store a set of set voltage information, as well as on-time information and off-time information corresponding to the set voltage information, i = 0, 1, 2, ..., 9. Then, PROCESS0 to PROCESS9 are traversed, and the information in the set PROCESSi is transferred to the automatic operation chain table. Then, each set of information stored in the automatic operation chain table can be cyclically read and cyclically operated to realize the automatic timing cyclic operation function of any number of groups within 10 groups, thereby realizing automatic on / off cyclic control of set voltages of different durations within 10 groups.

[0074] The single chip microcomputer in the single chip microcomputer module 201 may include single chip microcomputers such as MCS51, STM32, and AVR.

[0075] The display screen 202 may include at least one of an OLED display screen, a LED display screen, an LCD display screen, and the like.

[0076] In an optional embodiment, the RF power controller 200 further includes at least one of the following:

[0077] A voltage output setting module is used to obtain the output voltage of the single-chip microcomputer; and to boost the output voltage of the single-chip microcomputer to a set voltage, so as to set the transmission power of the radio frequency power supply according to the set voltage;

[0078] A first feedback voltage input module is used to obtain a transmission voltage corresponding to the actual transmission power of the radio frequency power supply, and step down the transmission voltage to the first single-chip microcomputer input voltage;

[0079] The second feedback voltage input module is used to obtain a reflected voltage corresponding to the reflected power and step down the reflected voltage into the second single-chip microcomputer input voltage.

[0080] In this way, the embodiment of the present application can provide a suitable set voltage value for the RF power supply and ensure that the voltage obtained at the voltage input port of the MCU module does not exceed the rated voltage by respectively boosting or stepping down the MCU output voltage, the first MCU input voltage and the second MCU input voltage, thereby improving the applicability and safety of the RF power supply controller.

[0081] For example, the voltage range of the voltage output port and the voltage input port of the single-chip microcomputer module 201 can be 0-2.5V, and the set voltage and output voltage received by the RF power supply can be 0-10V. Then, voltage conversion is performed through the set voltage output module, the first feedback voltage input module, or the second feedback voltage input module to obtain the set voltage output, feedback voltage input 1 and feedback voltage input 2, thereby achieving adaptation between different voltages.

[0082] The set voltage output module, the first feedback voltage input module, and the second feedback voltage input module can be configured according to actual needs to achieve voltage conversion, for example, they can include at least one of a voltage divider circuit, a proportional operation circuit, etc.

[0083] In an optional implementation manner, the set voltage output module includes:

[0084] A third proportional operation circuit U3 is used to multiply the output voltage of the single chip microcomputer by a first magnification factor to obtain the set voltage;

[0085] The first feedback voltage input module includes:

[0086] A first proportional operation circuit U1 is used to multiply the emission voltage by a first reduction factor to obtain the first single-chip microcomputer input voltage;

[0087] The second feedback voltage input module includes:

[0088] The second proportional operation circuit U2 is used to multiply the reflected voltage by a second reduction factor to obtain the second single-chip microcomputer input voltage.

[0089] In the embodiment of the present application, the first magnification factor, the first reduction factor, and the second reduction factor can be set according to actual needs. For example, the first magnification factor can be 5, and the first reduction factor and the second reduction factor can be 1 / 5.

[0090] The first proportional operation circuit U1 , the second proportional operation circuit U2 , and the third proportional operation circuit U3 may be proportional operational amplifier circuits formed by operational amplifiers.

[0091] In this way, the embodiment of the present application can improve input impedance, reduce output impedance, and improve linearity through the first proportional operation circuit U1, the second proportional operation circuit U2, and the third proportional operation circuit U3, and has good controllability of gain and frequency response, etc., and has a wide range of applications.

[0092] In an optional embodiment, the RF power controller 200 further includes:

[0093] The signal isolation module is used to obtain the control switch signal and isolate, convert and output the control switch signal.

[0094] In this way, the embodiment of the present application improves the accuracy and stability of the timing switch control of the RF power supply by isolating and converting the control switch signal and then outputting it, and can avoid the influence caused by signal interference and the like.

[0095] In the embodiment of the present application, the signal isolation module can be set according to actual needs, for example, it can include at least one of an optical isolation conversion device, a capacitive isolation conversion device, a magnetic isolation conversion device, etc.

[0096] In an optional embodiment, the signal isolation module includes:

[0097] The photoelectric coupler U4 is used to output the control switch signal after photoelectric isolation conversion.

[0098] In this way, the embodiment of the present application can improve the anti-interference capability and high safety through the optocoupler.

[0099] In an optional embodiment, the adjustment module 203 is further configured to select and output a second signal; the second signal includes menu function information;

[0100] The single chip microcomputer module 201 is further configured to obtain the second signal and enter a function configuration state corresponding to the menu function information in the second signal according to the second signal to perform configuration;

[0101] The display screen 202 is also used to display the menu function information.

[0102] In this way, the embodiment of the present application can configure the selected corresponding function by adjusting the module from the selection of menu function information displayed on the display screen, so that the control configuration can be performed according to the content displayed on the display screen, thereby expanding the function of the RF power supply controller and improving the operational convenience.

[0103] Figure 3 A schematic diagram showing a specific example of menu function information displayed on a display screen in an embodiment of the present application. Figure 4A schematic diagram of another specific example of menu function information displayed on a display screen in an embodiment of the present application is shown. As shown in the figure, the menu function information displayed on the display screen 202 may include OLED OFF, BACK CON, FR VAVG, PROCESS0, PROCESS1, PROCESS2, etc. The adjustment module 203 can select any one of the information, determine and output a second signal corresponding to the selected information, so that the single-chip microcomputer module 201 can enter the corresponding functional configuration. In addition, the information selected by the adjustment module 203 can be indicated by displaying a mark symbol on the display screen. For example, the mark symbol can be the "*" symbol shown in the figure, or other mark symbols can be selected according to actual needs.

[0104] Adjustment module 203 can be configured based on actual needs. For example, a knob with a push function, i.e., a digital encoder, also known as a digital potentiometer, can be selected, but is not limited to this. The knob can include three actions: pressing to enable the adjustment module to select and output the second signal; and rotating clockwise and counterclockwise to achieve adjustment.

[0105] Taking the configuration of PROCESS0 as an example, the knob is rotated to adjust the mark symbol to PROCESS0, and the knob is pressed to select and output the second signal corresponding to the PROCESS0 menu function information, and the single chip module 201 enters the function configuration state of PROCESS0.

[0106] Figure 5 A schematic diagram illustrates a specific example of information displayed on a display screen in the PROCESS0 functional configuration state in an embodiment of the present application. As shown, in the PROCESS0 functional configuration state, the display screen can display at least one of the following: set voltage information (SetPoint: 02400mV), and corresponding on-time information (OnTime: 010s) and off-time information (OffTime: 020s). Rotating the knob adjusts the value of each item of information, and pressing the knob saves the set value, causing the adjustment module 203 to output a first signal containing the set information. The single-chip microcomputer module 201 receives this first signal and stores it in the PROCESS0 position in the automatic operation list.

[0107] Figure 6A schematic diagram of a specific example of information displayed on the display screen during the automatic switch cycle control process in an embodiment of the present application is shown. As shown in the figure, after completing the configuration of any group in the multiple groups PROCESS0-PROCESS9 of the automatic operation list, the automatic switch cycle control can be started. The timer peripheral of the single-chip microcomputer module can be used to realize the control of multiple groups of switch durations. The set voltage (output voltage) can be automatically set in conjunction with the single-chip microcomputer, thereby realizing automatic switch cycle control of multiple groups of control voltages with different durations. At this time, the display screen can display at least one group of set voltage information (Set: 02.40V), emission voltage information (Fwd: 00.00V), reflection voltage information (Ref: 00.00V), on duration information (ON: 010), off duration information (OFF: 020), numbering information (NUM: 000), etc.

[0108] Figure 7 A schematic block diagram of another specific example of a radio frequency power supply controller in an embodiment of the present application is shown. As shown in the figure, in an optional embodiment, the adjustment module 203 includes a knob 2031;

[0109] The single chip microcomputer module 201 is further used to detect the movement of the knob 2031 to increase or decrease the voltage setting register value according to the rotation direction of the knob 2031; and determine the single chip microcomputer output voltage according to the voltage setting register value.

[0110] In this way, the embodiment of the present application realizes real-time increase or decrease adjustment of the voltage setting register value in the microcontroller module by rotating the knob, thereby obtaining the required microcontroller output voltage and improving the voltage regulation control accuracy.

[0111] For example, the output voltage of the microcontroller can be output through the DAC pin, and the calculation formula can be:

[0112]

[0113] like Figure 7 As shown, the display screen 202 may be an OLED display screen, and its resolution DPI may be 32×128, but is not limited thereto.

[0114] The MCU output voltage from the DAC pin is then amplified five times by the third proportional operation circuit U3 on the circuit board and connected to the DB25 interface. The MCU module 201 calculates the MCU output voltage, multiplies it by five, and displays it next to the "Set:" symbol on the OLED display. The MCU module's DAC, combined with the proportional operation circuit, achieves a continuously adjustable set voltage output.

[0115] In an optional embodiment, the single-chip microcomputer module 201 includes a first voltage input port and a second voltage input port; the first voltage input port is used to obtain the first single-chip microcomputer input voltage, and the second voltage input port is used to obtain the second single-chip microcomputer input voltage;

[0116] The single-chip computer module 201 is further configured to detect voltage changes at a first voltage input port, so as to increase the value of a first voltage acquisition register when the voltage increases, or decrease the value of the first voltage acquisition register when the voltage decreases, and determine the first single-chip computer input voltage based on the value of the first voltage acquisition register; and to detect voltage changes at a second voltage input port, so as to increase the value of a second voltage acquisition register when the voltage increases, or decrease the value of the second voltage acquisition register when the voltage decreases, and determine the second single-chip computer input voltage based on the value of the second voltage acquisition register.

[0117] In this way, the embodiment of the present application realizes real-time increase or decrease adjustment of the first voltage acquisition register value and the second voltage acquisition register value in the microcontroller module by real-time detection of the voltage changes of the first voltage input port and the second voltage input port, thereby detecting the first microcontroller input voltage and the second microcontroller input voltage in real time, thereby improving the voltage detection accuracy.

[0118] For example, the first single-chip microcomputer input voltage and the second single-chip microcomputer input voltage can be input through two pins of the ADC respectively, and the calculation formula can be:

[0119]

[0120] Feedback voltage input 1 received by the DB25 interface is scaled down by 1 / 5 by the first scaling circuit U1 on the circuit board, and feedback voltage input 2 is scaled down by 1 / 5 by the second scaling circuit U2 on the circuit board. These voltages are then input to two ADC pins. The microcontroller module calculates the ADC pin input voltages multiplied by 5, and displays these two voltages next to "Fwd:" and "Ref:" on the OLED display. The microcontroller module's ADC, combined with the scaling circuits, enables the acquisition of multiple feedback voltage inputs.

[0121] In an optional embodiment, the RF power controller 200 further includes:

[0122] The communication transmission interface 204 is connected between the single-chip microcomputer module 201 and the radio frequency power supply, and is used to realize signal and data transmission between the single-chip microcomputer module 201 and the radio frequency power supply.

[0123] In this way, the embodiment of the present application improves the convenience, stability, reliability and safety of the connection between the single-chip microcomputer module and the radio frequency power supply by using a communication transmission interface.

[0124] For example, the communication transmission interface 204 includes a DB25 interface, but is not limited thereto. By using the DB25 interface, electromagnetic interference can be effectively shielded and the use requirements of multiple pins can be met.

[0125] It should be understood that the above embodiments are exemplary and are not intended to include all possible implementation methods. Various modifications and changes may be made to the above embodiments without departing from the scope of the present disclosure. Similarly, the various technical features of the above embodiments may be arbitrarily combined to form other embodiments of the present application that may not be explicitly described. Therefore, the above embodiments merely express several implementation methods of the present application and do not limit the scope of protection of the patent application.

Claims

1. A radio frequency power supply controller, characterized in that: The radio frequency power supply controller includes: an adjusting module, configured to adjust and output a first signal; the first signal comprising a set voltage information, and on-time information and off-time information corresponding to the set voltage information; a single-chip microcomputer module, connected to the adjustment module, configured to obtain and store at least one of the first signals; and cyclically read the stored at least one first signal to cyclically output at least one set of single-chip microcomputer output voltages and control switch signals corresponding to the first signal, so that the transmission power of the radio frequency power supply is set based on the single-chip microcomputer output voltage, and the on-time and off-time of the radio frequency power supply are controlled based on the control switch signal; and transmit voltage information corresponding to the actual transmit power of the radio frequency power supply is determined based on the obtained first single-chip microcomputer input voltage, and reflected voltage information corresponding to the reflected power is determined based on the obtained second single-chip microcomputer input voltage; A display screen is connected to the single chip computer module and is used to display at least one item of information including the first signal, the emission voltage information, and the reflection voltage information.

2. The RF power controller according to claim 1, wherein: The RF power supply controller further includes at least one of the following: A voltage output setting module is used to obtain the output voltage of the single-chip microcomputer; and to boost the output voltage of the single-chip microcomputer to a set voltage, so as to set the transmission power of the radio frequency power supply according to the set voltage; A first feedback voltage input module is used to obtain a transmission voltage corresponding to the actual transmission power of the radio frequency power supply, and step down the transmission voltage to the first single-chip microcomputer input voltage; The second feedback voltage input module is used to obtain a reflected voltage corresponding to the reflected power and step down the reflected voltage into the second single-chip microcomputer input voltage.

3. The RF power controller according to claim 2, wherein: The set voltage output module includes: a third proportional operation circuit, configured to multiply the single chip microcomputer output voltage by a first magnification factor to obtain the set voltage; The first feedback voltage input module includes: a first proportional operation circuit, configured to multiply the emission voltage by a first reduction factor to obtain the first single-chip microcomputer input voltage; The second feedback voltage input module includes: The second proportional operation circuit is used to multiply the reflected voltage by a second reduction factor to obtain the second single-chip microcomputer input voltage.

4. The RF power controller according to claim 1, wherein: The radio frequency power supply controller further includes: The signal isolation module is used to obtain the control switch signal and isolate, convert and output the control switch signal.

5. The radio frequency power supply controller according to claim 4, characterized in that: The signal isolation module includes: The photoelectric coupler is used to output the control switch signal after photoelectric isolation conversion.

6. The radio frequency power supply controller according to claim 1, characterized in that: The adjustment module is further configured to select and output a second signal; the second signal includes menu function information; The single chip microcomputer module is further used to obtain the second signal and enter a function configuration state corresponding to the menu function information in the second signal according to the second signal to perform configuration; The display screen is also used to display the menu function information.

7. The radio frequency power supply controller according to claim 1, characterized in that: The adjustment module includes a knob; The single chip microcomputer module is further used to detect the movement of the knob to increase or decrease the voltage setting register value according to the rotation direction of the knob; and determine the single chip microcomputer output voltage according to the voltage setting register value.

8. The radio frequency power supply controller according to claim 1, wherein: The single-chip microcomputer module includes a first voltage input port and a second voltage input port; the first voltage input port is used to obtain the first single-chip microcomputer input voltage, and the second voltage input port is used to obtain the second single-chip microcomputer input voltage; The single-chip microcomputer module is further configured to detect a voltage change at the first voltage input port, so as to increase a value of a first voltage acquisition register when the voltage increases, or decrease a value of the first voltage acquisition register when the voltage decreases, and determine the first single-chip microcomputer input voltage based on the value of the first voltage acquisition register; Detecting the voltage change of the second voltage input port to increase the value of the second voltage acquisition register when the voltage increases, or to decrease the value of the second voltage acquisition register when the voltage decreases, and determining the second single-chip microcomputer input voltage according to the value of the second voltage acquisition register.

9. The radio frequency power supply controller according to any one of claims 1 to 8, characterized in that: The radio frequency power supply controller further includes: The communication transmission interface is connected between the single-chip microcomputer module and the radio frequency power supply, and is used to realize signal and data transmission between the single-chip microcomputer module and the radio frequency power supply.

10. The radio frequency power supply controller according to claim 9, characterized in that: The communication transmission interface includes a DB25 interface.

Images