Six-degree-of-freedom adjustment alignment platform

Abstract

The utility model discloses a six-degree-of-freedom adjusting alignment platform. The alignment platform comprises a three-degree-of-freedom platform, a UVW three-axis deviation rectifying alignment platform and a horizontal moving structure. Wherein the three-degree-of-freedom platform is provided with a UVW three-axis deviation rectifying and aligning platform, and the UVW three-axis deviation rectifying and aligning platform is of a horizontal moving structure. The three-degree-of-freedom platform comprises a lower platform and an upper platform, a plurality of horizontal hooke joints are arranged between the upper platform and the lower platform, and the horizontal hooke joints are reversely arranged between the upper platform and the lower platform of the three-degree-of-freedom platform. A cross roller bearing, a grinding lead screw and a double-feedback system are creatively fused, the functions of all-attitude adjustment, high-precision deviation correction and large-load translation are integrated in a breakthrough mode, the problem of multi-degree-of-freedom cooperative regulation and control of precise equipment butt joint under the complex working condition is solved, the positioning precision is improved by 40% or above, and the horizontal stroke is expanded to 300 mm.

Description

Technical Field

[0001] This utility model belongs to the field of precision docking platform technology, specifically relating to a novel high-precision six-degree-of-freedom adjustable alignment platform. Background Technology

[0002] In high-precision industrial fields such as precision manufacturing, semiconductor packaging, and aerospace, multi-degree-of-freedom adjustment platforms are core devices for achieving precision equipment posture adjustment, workpiece docking, and assembly. While traditional six-degree-of-freedom parallel platforms can achieve spatial posture adjustment, they face three major technical bottlenecks under complex working conditions: First, basic posture adjustment platforms (such as three-degree-of-freedom platforms) often use a series Hooke hinge structure, which has strong kinematic coupling, resulting in insufficient posture feedback accuracy (typically >0.1°), and is prone to accumulated hinge clearance errors under heavy loads; Second, existing correction mechanisms mostly adopt an XYθ three-axis independent drive mode, which is limited by the fit clearance between traditional ball screws and sliding guides, making it difficult to achieve sub-micron level (<0.5μm) dynamic correction, and there is a risk of motion interference when UVW axis linkage control is implemented; Third, horizontal movement modules often use single linear module drives, which are prone to module deflection deformation under heavy loads (>200kg), resulting in limited horizontal travel (typically <150mm) and poor motion stability.

[0003] Existing technologies propose a three-degree-of-freedom platform with dual closed-loop control, which improves attitude feedback accuracy by adding angle sensors. However, this does not solve the problem of uneven load distribution caused by the reverse installation of the Hooke joint, and still suffers from the limitation of platform deflection angle (within ±10°). Some published patents also provide a UVW axis linkage correction mechanism that uses crossed roller guides to reduce friction loss, but it lacks an integrated active / driven turntable collaborative drive mechanism, resulting in a delayed correction response speed (>50ms). Furthermore, most solutions neglect motion coupling interference between multi-level platforms. For example, the attitude adjustment of the lower-level platform can easily cause a reference offset in the upper-level correction mechanism, and existing feedback systems lack collaborative calibration of gyroscopes and linear modules, making it difficult to achieve dynamic error compensation across the entire link.

[0004] Therefore, there is an urgent need for a six-degree-of-freedom adjustment platform that integrates high-precision attitude feedback, sub-micron-level dynamic correction, and large-stroke stable translation. Through the deep integration of multi-level mechanism collaborative design and control algorithms, it is possible to break through the technical barriers of full attitude docking of precision equipment under complex working conditions. Utility Model Content

[0005] To address the shortcomings of the existing technology, the purpose of this utility model is to provide a novel high-precision six-degree-of-freedom adjustable alignment platform, which can enable the load to have six different adjustable postures on the platform, thereby docking related products and other objects to achieve the purpose of docking and installation.

[0006] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0007] This utility model discloses a six-degree-of-freedom adjustment and alignment platform, comprising three main parts: a three-degree-of-freedom platform, a UVW three-axis correction and alignment platform, and a horizontal movement structure; wherein...

[0008] The three-degree-of-freedom platform is equipped with a UVW three-axis alignment platform, which is a horizontally moving structure.

[0009] Furthermore, the three-degree-of-freedom platform includes a lower platform and an upper platform, and multiple horizontal Hooke hinges are provided between the upper platform and the lower platform. The horizontal Hooke hinges are installed in reverse between the upper platform and the lower platform of the three-degree-of-freedom platform.

[0010] Furthermore, the UVW three-axis alignment platform includes a lower platform and an upper platform. Between the lower platform and the upper platform of the UVW three-axis alignment platform, there is an alignment unit consisting of a servo motor, a lead screw assembly and a turntable. The servo motor is connected to the turntable through the lead screw assembly.

[0011] Furthermore, the horizontal moving structure includes a UVW three-degree-of-freedom adjustment platform and a horizontal moving platform. A linear module is provided on the upper surface of the UVW three-degree-of-freedom adjustment platform, and linear guide rails are provided parallel to each other on both sides of the linear module. The horizontal moving platform is mounted on the linear module and the linear guide rails, so that the horizontal moving platform can move horizontally relative to the UVW three-degree-of-freedom adjustment platform.

[0012] Furthermore, the UVW three-axis correction and alignment platform is equipped with a UVW degree-of-freedom active turntable and a UVW degree-of-freedom driven turntable. The UVW degree-of-freedom driven turntable is a single turntable, and the UVW degree-of-freedom active turntable is connected to the correction unit.

[0013] Furthermore, a first gyroscope is provided on the lower platform of the three-degree-of-freedom platform to provide feedback on the angle changes of the lower platform.

[0014] Furthermore, a second gyroscope is provided on the lower platform of the UVW three-axis alignment platform to provide feedback on the angle changes of the lower platform.

[0015] The beneficial effects of this utility model are:

[0016] This invention incorporates a UVW three-axis alignment and horizontal movement structure on a three-degree-of-freedom motion platform, thereby increasing the motion attitude of the three-degree-of-freedom motion platform and satisfying all the attitudes required during the docking process of the load, thus achieving the purpose of docking and installation.

[0017] A UVW three-axis alignment and correction structure was designed. The UVW three-axis uses crossed roller bearings, crossed roller linear guides, ground lead screws, and servo motors to improve the platform's positioning accuracy. The bottom layer is a three-degree-of-freedom platform, the middle layer houses the UVW three-axis alignment and correction platform, and the top layer is configured with a horizontal movement structure. The three-degree-of-freedom platform uses a reverse-mounted horizontal Hooke hinge to connect the upper and lower platforms, achieving basic attitude adjustment. The lower platform integrates a first gyroscope for angle feedback. The UVW platform uses a servo motor to drive the lead screw assembly to link the turntable mechanism, setting up active / driven turntables and a second gyroscope to achieve sub-micron level precision alignment. The top-level horizontal movement structure adopts a linear module and dual-guide rail collaborative design, enabling the load platform to have a large stroke horizontal movement capability. The innovative integration of crossed roller bearings, ground lead screws, and a dual feedback system breaks through the limitations of fully integrated attitude adjustment, high-precision alignment, and large-load translation functions, solving the problem of multi-degree-of-freedom collaborative control in the docking of precision equipment under complex working conditions. The positioning accuracy is improved by more than 40%, and the horizontal stroke is extended to 300mm.

[0018] A horizontal movement structure was designed, and two linear guide rails were added, allowing the platform to move a greater horizontal distance under heavy loads.

[0019] The design incorporates a gyroscope structure, allowing for feedback on the platform's motion posture and making its movement more precise. Attached Figure Description

[0020] Figure 1 This is a three-dimensional view of the six-DOF adjustment alignment platform of this application;

[0021] Figure 2 This is a side view of the six-DOF adjustment alignment platform of this application;

[0022] Figure 3 This is a side view of the six-DOF adjustment alignment platform of this application;

[0023] Figure 4 This is a cross-sectional view of the three-degree-of-freedom platform in the embodiment;

[0024] Figure 5 This is a cross-sectional view of the UVW triaxial alignment platform in the embodiment;

[0025] Figure 6 This is a schematic diagram of the UVW degree of freedom active turntable in the embodiment;

[0026] In the diagram, 1-linear guide rail, 2-linear guide rail pad, 3-linear module, 4-horizontal moving platform, 5-three-degree-of-freedom adjustment platform, 6-second gyroscope, 7-horizontal Hooke hinge, 8-electric cylinder, 9-first gyroscope, 10-upper platform of the three-degree-of-freedom platform, 11-lower platform of the three-degree-of-freedom platform, 12-UVW three-axis alignment platform, 13-UVW three-degree-of-freedom adjustment platform, 14-bearing seat, 15-UVW active turntable, 16-UVW driven turntable, 17-screw assembly, 18-lower platform of the UVW three-axis alignment platform, 19-servo motor. Detailed Implementation

[0027] To facilitate understanding by those skilled in the art, the present invention will be further described below with reference to embodiments and accompanying drawings. The content mentioned in the embodiments is not intended to limit the present invention.

[0028] Reference Figures 1 to 6 As shown, this utility model discloses a six-degree-of-freedom adjustable alignment platform.

[0029] This utility model discloses a six-degree-of-freedom adjustment and alignment platform, comprising three main parts: a three-degree-of-freedom platform, a UVW three-axis correction and alignment platform, and a horizontal movement structure; wherein...

[0030] The three-degree-of-freedom platform is equipped with a UVW three-axis alignment platform, which is a horizontally moving structure.

[0031] Furthermore, the three-degree-of-freedom platform includes a lower platform and an upper platform, and multiple horizontal Hooke hinges are provided between the upper platform and the lower platform. The horizontal Hooke hinges are installed in reverse between the upper platform and the lower platform of the three-degree-of-freedom platform.

[0032] Furthermore, the UVW three-axis alignment platform includes a lower platform and an upper platform. Between the lower platform and the upper platform of the UVW three-axis alignment platform, there is an alignment unit consisting of a servo motor, a lead screw assembly and a turntable. The servo motor is connected to the turntable through the lead screw assembly.

[0033] Furthermore, the horizontal movement structure includes a UVW three-degree-of-freedom adjustment platform and a horizontal movement platform. A linear module is provided on the upper surface of the UVW three-degree-of-freedom adjustment platform, and linear guide rails are arranged parallel to each other on both sides of the linear module. The horizontal movement platform is mounted on the linear module and the linear guide rails, enabling the horizontal movement platform to move horizontally relative to the UVW three-degree-of-freedom adjustment platform. In this embodiment, a crossed roller linear guide rail is selected, and a ground lead screw assembly is used. This application innovatively integrates crossed roller bearings, ground lead screws, and a dual feedback system, achieving a breakthrough in integrating full-attitude adjustment, high-precision correction, and high-load translation functions. It solves the problem of multi-degree-of-freedom coordinated control for precision equipment docking under complex working conditions, improving positioning accuracy by more than 40% and extending the horizontal stroke to 300mm.

[0034] Furthermore, the UVW three-axis correction and alignment platform is equipped with a UVW degree-of-freedom active turntable and a UVW degree-of-freedom driven turntable. The UVW degree-of-freedom driven turntable is a single turntable, and the UVW degree-of-freedom active turntable is connected to the correction unit.

[0035] Furthermore, a first gyroscope is provided on the lower platform of the three-degree-of-freedom platform to provide feedback on the angle changes of the lower platform.

[0036] Furthermore, a second gyroscope is provided on the lower platform of the UVW three-axis alignment platform to provide feedback on the angle changes of the lower platform.

[0037] The six-degree-of-freedom adjustment and alignment platform provided in this application has the following characteristics:

[0038] Feature 1: The horizontal Hooke hinge is reverse-mounted on the lower surface of the three-degree-of-freedom platform, which can increase the overall load capacity of the platform and reduce the platform deformation.

[0039] Feature 2: The three-degree-of-freedom platform is equipped with a first gyroscope, which can provide real-time feedback on changes in the platform's degree of freedom under the three degrees of freedom.

[0040] Feature 3: The three-degree-of-freedom motion platform is powered by a high-precision servo electric cylinder. The servo electric cylinder has a simple structure, low price, is sturdy and durable, and has high operating efficiency.

[0041] Feature 1: The linear module uses a ball screw and a servo motor for horizontal movement, resulting in high motion precision. The servo motor speed can be varied within a certain range, thereby controlling the speed of the linear module.

[0042] Feature 2: A linear guide rail is distributed on each side of the linear module. Each guide rail is equipped with 3 sliders, which can better support the platform and make the platform run more stably.

[0043] Feature 3: The horizontal moving platform is equipped with a gyroscope, which can provide real-time feedback on changes in the platform's motion angle and make corrections accordingly, resulting in more precise platform movement.

[0044] The high-precision six-degree-of-freedom (6DOF) alignment platform provided in this application is powered by three servo electric cylinders. These cylinders drive the three-DOF upper platform, which is equipped with a horizontal Hooke joint, to move or perform tilting, backward tilting, and side tilting movements. The UVW alignment platform operates on the three-point methodology, which uses the positional relationship of three measurement points to determine the three-dimensional coordinates of the object under test. When using the UVW alignment platform for measurement, the object under test is first placed on the U-platform. Then, by rotating and flipping the U-platform, the measuring pins under the U-platform are aligned with the first measurement point of the object. Next, the V-platform and W-platform are adjusted so that the measuring pins under them are aligned with the second and third measurement points of the object, respectively. During the adjustment process, the distance and angle between the three measuring pins must remain constant. Once the three measuring pins are aligned with the three measurement points, the three-dimensional coordinates of the object can be determined by calculating the distance and angle between these measurement points. Simultaneously, a linear module and servo motors enable horizontal movement of the platform. The above movements can be performed synchronously, allowing for richer platform postures.

[0045] There are many specific applications of this utility model. The above description is only a preferred embodiment of this utility model. It should be noted that for those skilled in the art, several improvements can be made without departing from the principle of this utility model, and these improvements should also be considered within the protection scope of this utility model.

Claims

1. A six degree of freedom adjustment alignment platform, characterized in that, The alignment platform comprises a three-degree-of-freedom platform, a UVW three-axis correction alignment platform and a horizontal movement structure three parts, wherein, The three-degree-of-freedom platform is loaded with the UVW three-axis correction alignment platform, and the UVW three-axis correction alignment platform is provided with a horizontal movement structure.

2. The six-degree-of-freedom adjustment alignment platform according to claim 1, wherein, The three-degree-of-freedom platform comprises a lower platform and an upper platform, and a plurality of horizontal hook hinges are arranged between the upper platform and the lower platform.

3. The six-degree-of-freedom adjustment and alignment platform according to claim 1, wherein, The UVW three-axis correction alignment platform comprises a lower platform and an upper platform, and a correction unit composed of a servo motor, a screw assembly and a rotary table is arranged between the lower platform and the upper platform.

4. The six-degree-of-freedom adjustment and alignment platform according to claim 1, wherein, The horizontal movement structure comprises a UVW three-degree-of-freedom adjustment platform and a horizontal movement platform, a linear module is arranged on the upper surface of the UVW three-degree-of-freedom adjustment platform, linear guides are arranged in parallel on both sides of the linear module, and the horizontal movement platform is installed on the linear module and the linear guides, so that the horizontal movement platform can move horizontally relative to the UVW three-degree-of-freedom adjustment platform.

5. The six-degree-of-freedom adjustment and alignment platform according to claim 3, wherein, The UVW three-axis correction alignment platform is internally provided with a UVW degree-of-freedom driven rotary table and a UVW degree-of-freedom driven rotary table, the UVW degree-of-freedom driven rotary table is a single rotary table, and the UVW degree-of-freedom driven rotary table is connected to the correction unit.

6. The six-degree-of-freedom adjustment and alignment platform according to claim 3, wherein, A first gyroscope is arranged on the lower platform of the three-degree-of-freedom platform to feed back the angle change of the three-degree-of-freedom lower platform.

7. The six-degree-of-freedom adjustment and alignment platform according to claim 3, wherein, A second gyroscope is arranged on the lower platform of the UVW three-axis correction alignment platform to feed back the angle change of the UVW three-axis correction alignment lower platform.

8. The six-degree-of-freedom adjustment and alignment platform of claim 5, wherein, The UVW three-axis correction alignment platform is internally provided with two groups of X-axis UVW degree-of-freedom active rotary tables and a group of Y-axis UVW degree-of-freedom active rotary tables, the screws in the two groups of X-axis UVW degree-of-freedom active rotary tables are parallel to each other, and the screws in the X-axis UVW degree-of-freedom active rotary tables are perpendicular to the screws in the Y-axis UVW degree-of-freedom active rotary tables.

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