Embedded observation window for camera of ultrahigh vacuum equipment

Abstract

The utility model relates to the technical field of vacuum equipment, and particularly discloses an embedded observation window for a camera of ultrahigh vacuum equipment. The observation mechanism comprises an observation pipe, an observation window, four electric telescopic rods, a clamping support and a camera lens, the observation pipe is installed on the outer wall of the vacuum chamber, the observation window is installed at one end of the observation pipe, and the four electric telescopic rods are all installed on the inner wall of the observation pipe; the number of the clamping supports is two. According to the utility model, the observation tube is embedded in the vacuum chamber, and the pick-up lens is placed in the observation tube and is stably supported by the clamping bracket, so that the pick-up lens can be close to a sample as much as possible, the focal length of the focusing lens is shortened, and the definition of an image is improved; the observation mode can also reduce the use cost of equipment and effectively avoid the problems of image blurring, detail loss and the like.

Description

TECHNICAL FIELD

[0001] The utility model belongs to vacuum equipment technical field, concretely relates to a kind of for the embedded observation window of ultra-high vacuum equipment camera. BACKGROUND

[0002] At present, the configuration of vacuum equipment generally includes a sealed vacuum cavity, and an observation window with a support, which is communicated with the vacuum cavity, to ensure observation without destroying the vacuum environment. To achieve this goal, the lens of a high-performance camera is usually precisely aimed at the inside of the vacuum cavity, focusing on the sample placed therein. In this way, researchers or operators can clearly observe the real-time changes of the sample in the vacuum environment, including its morphology, color, reaction process and other details, providing valuable visual feedback for scientific research and industrial production.

[0003] Currently, the common practice is to place the observation window outside the vacuum equipment and fix the lens of the camera with the help of the support, so that it is precisely aimed at the observation window to observe the sample inside the vacuum equipment. However, this observation method has significant limitations. Specifically, since the camera is far from the sample, it requires a very high focal length for the camera. This not only leads to a significant increase in the cost of using the equipment, but also often results in unsatisfactory observation of the sample due to the complexity and limitations of focal length adjustment, which may cause image blurring and loss of details. SUMMARY

[0004] The purpose of the utility model is to provide an embedded observation window for the camera of ultra-high vacuum equipment to solve the problems raised in the background.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions:

[0006] An embedded observation window for the camera of ultra-high vacuum equipment, comprising:

[0007] a vacuum chamber;

[0008] an observation mechanism, the observation mechanism comprising an observation tube, an observation window, an electric telescopic rod, a clamping support and a camera lens, the observation tube being installed on the outer wall of the vacuum chamber, the observation window being installed on one end of the observation tube, the electric telescopic rod being provided with four, and the four electric telescopic rods being installed on the inner wall of the observation tube, the clamping support being provided with two, and the two clamping supports being respectively installed on the other end of the adjacent two electric telescopic rods, the camera lens being installed between the opposite faces of the two clamping supports;

[0009] a rotating mechanism, the rotating mechanism being installed on the bottom cavity wall of the vacuum chamber, and the rotating mechanism being capable of rotating the position of the observed object.

[0010] Preferably, the top end of the vacuum chamber is provided with a sealing groove, a sealing ring is arranged in the sealing groove, a top cover plate is arranged at the top end of the sealing ring, and a vacuum pipe is arranged at the top end of the top cover plate.

[0011] Preferably, a sample is arranged at the top end of the rotating mechanism, three fixing blocks are arranged at the upper portion of the outer wall of the vacuum chamber, reinforcing screws are arranged at the top ends of the three fixing blocks, reinforcing nuts are arranged at the upper portions of the outer surfaces of the three reinforcing screws, and three connecting blocks are arranged on the outer wall of the top cover plate.

[0012] Preferably, the observation tube is embeddedly arranged in the vacuum chamber, and the clamping support is arranged in a V-shaped structure.

[0013] Preferably, the rotating mechanism comprises a receiving box, a rotating column, a driven gear, a rotating table, a driver and a driving gear, the receiving box is arranged on the bottom cavity wall of the vacuum chamber, the rotating column is arranged between the top box wall and the bottom box wall of the receiving box through a bearing, the driven gear is arranged at the middle portion of the outer surface of the rotating column, the rotating table is arranged at the top end of the rotating column, the driver is arranged on the bottom box wall of the receiving box, the driving gear is arranged at the output end of the driver, and the top end of the driving gear is arranged on the top box wall of the receiving box through a bearing.

[0014] Preferably, the driving gear is engaged with the driven gear, the diameter of the driving gear is smaller than that of the driven gear, and the top end face of the rotating table is lower than the bottom end face of the observation tube.

[0015] Compared with the prior art, the utility model has the advantages that:

[0016] (1) The utility model discloses a vacuum chamber, which is characterized by embedding an observation mechanism on the outer wall of the vacuum chamber, embedding an observation tube in the interior of the vacuum chamber, placing a camera lens in the observation tube and stably supporting the camera lens through a clamping support.

[0017] (2) The utility model discloses a vacuum chamber, which is characterized by arranging a rotating mechanism in the interior of the vacuum chamber, rotating a driving gear through a driver, transmitting through the engagement between the driving gear and the driven gear, slowly rotating a sample through the rotating table, realizing the rotation display of the sample, comprehensively observing the sample through the camera lens and improving the efficiency of the experiment. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1The utility model discloses a perspective view of the utility model;

[0019] Figure 2 The utility model discloses an exploded view of the utility model;

[0020] Figure 3 The utility model discloses a sectional view of the observation mechanism of the utility model;

[0021] Figure 4 The utility model discloses a sectional view of the rotating mechanism of the utility model;

[0022] In the drawing: 1, vacuum chamber;2, observation mechanism;3, rotating mechanism;4, sealing ring;5, top cover plate;6, vacuum tube;7, connecting flange;8, sealing groove;9, sample;10, fixed block;11, reinforcing screw;12, reinforcing nut;13, connecting block;

[0023] 21, observation tube;22, observation window;23, electric telescopic rod;24, clamping support;25, camera lens;

[0024] 31, storage box;32, rotating column;33, driven gear;34, rotating table;35, driver;36, driving gear. DETAILED DESCRIPTION

[0025] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model and not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative work fall within the scope of the utility model.

[0026] Embodiment one:

[0027] Please refer to Figures 1 to 4 As shown in the figure, an embedded observation window for the camera of ultrahigh vacuum equipment includes:

[0028] Vacuum chamber 1;

[0029] Observation mechanism 2 includes observation tube 21, observation window 22, electric telescopic rod 23, clamping support 24 and camera lens 25. Observation tube 21 is installed on the outer wall of vacuum chamber 1. Observation window 22 is installed on one end of observation tube 21. Four electric telescopic rods 23 are arranged, and the four electric telescopic rods 23 are all installed on the inner wall of observation tube 21. Two clamping supports 24 are arranged, and the two clamping supports 24 are respectively installed on the other end of the adjacent two electric telescopic rods 23. Camera lens 25 is installed between the opposite faces of the two clamping supports 24.

[0030] Rotation mechanism 3 is installed on the bottom wall of vacuum chamber 1, and rotation mechanism 3 can rotate the position of the object being observed.

[0031] Depend on Figures 1 to 3 It can be seen that a sealing groove 8 is provided at the top of the vacuum chamber 1, a sealing ring 4 is installed inside the sealing groove 8, a top cover plate 5 is installed at the top of the sealing ring 4, a vacuum tube 6 is installed at the top of the top cover plate 5, and a connecting flange 7 is installed on the upper part of the outer surface of the vacuum tube 6.

[0032] Sample 9 is placed at the top of the rotating mechanism 3. Three fixing blocks 10 are installed on the upper part of the outer wall of the vacuum chamber 1. Reinforcing screws 11 are installed at the top of the three fixing blocks 10. Reinforcing nuts 12 are installed on the upper part of the outer surface of the three reinforcing screws 11. Three connecting blocks 13 are installed on the outer wall of the top cover plate 5.

[0033] As described above, firstly, a metal sample 9 with a size of one centimeter and a microstructure on its surface is placed on top of the rotating mechanism 3 inside the vacuum chamber 1. Next, the top cover plate 5 is placed on top of the vacuum chamber 1, ensuring that the sealing ring 4 is accurately inserted into the sealing groove 8. The top cover plate 5 is then tightened by passing the reinforcing screw 11 through the connecting block 13 and tightening it with the reinforcing nut 12, thus achieving a sealed installation between the top cover plate 5 and the vacuum chamber 1. Subsequently, the vacuum pump is connected to the vacuum tube 6 via the connecting flange 7, allowing the vacuum pump to extract air from the vacuum chamber 1 through the vacuum tube 6, creating a vacuum environment. Afterwards, the camera... The lens 25 is inserted into the observation tube 21, and the electric telescopic rod 23 is activated to push the clamping bracket 24 toward the camera lens 25 until it is firmly clamped. Since the observation tube 21 is embedded inside the vacuum chamber 1, the camera lens 25 can get as close as possible to the sample 9 through the observation window 22, thereby shortening the focal length of the focusing lens, improving image clarity, and reducing the complexity and limitations of focal length adjustment. In addition, this observation method not only reduces the focal length requirement of the camera lens 25, but also reduces the cost of using the equipment and effectively avoids problems such as image blurring and loss of detail.

[0034] For details, please refer to Figures 1 to 3 As shown, the observation tube 21 is embedded inside the vacuum chamber 1, and the clamping bracket 24 is set as a V-shaped structure.

[0035] As can be seen from the above, the camera lens 25 can be inserted into the observation tube 21 to observe the sample 9 at close range, and the V-shaped clamping bracket 24 can stably clamp and support the camera lens 25, thereby improving the stability of the camera lens 25.

[0036] Example 2:

[0037] refer to Figure 4As shown, the rotating mechanism 3 comprises a receiving box 31, a rotating column 32, a driven gear 33, a rotating table 34, a driver 35 and a driving gear 36, the receiving box 31 is installed on the bottom cavity wall of the vacuum chamber 1, the rotating column 32 is installed between the top box wall and the bottom box wall of the receiving box 31 through a bearing, the driven gear 33 is installed in the middle part of the outer surface of the rotating column 32, the rotating table 34 is installed at the top end of the rotating column 32, the driver 35 is installed on the bottom box wall of the receiving box 31, the driving gear 36 is installed at the output end of the driver 35, and the top end of the driving gear 36 is installed on the top box wall of the receiving box 31 through a bearing.

[0038] As can be seen from the above, during the observation of the sample 9, when it is necessary to observe other positions of the sample 9, the driver 35 can be started to drive the driving gear 36 to rotate, and then the rotating column 32 drives the rotating table 34 to rotate slowly through the meshing transmission between the driving gear 36 and the driven gear 33, and then the sample 9 can be driven to rotate slowly, so that the rotation display of the sample 9 can be realized, and the observation of the sample 9 by the camera lens 25 is more comprehensive, the efficiency of the experiment is improved, the microstructure features on the surface of the sample 9 can be captured more effectively, the accuracy of data analysis is improved, the limitation of the observation of the sample 9 in the vacuum is solved, and it is an ideal choice for the observation and analysis of the sample 9.

[0039] Preferably, referring to Figure 4 As shown, the driving gear 36 is engaged with the driven gear 33, the diameter of the driving gear 36 is smaller than that of the driven gear 33, and the top end surface of the rotating table 34 is lower than the bottom end surface of the observation tube 21.

[0040] As can be seen from the above, the driving gear 36 drives the driven gear 33 to rotate, and then drives the rotating table 34 to rotate, and by reducing the diameter of the driving gear 36, the transmission ratio can be increased, so that the rotating speed of the rotating table 34 is reduced, and it is ensured that the observation tube 21 will not interfere with the rotating table 34.

[0041] Application example:

[0042] The design is applied to scenes that need to observe the sample 9 in the vacuum environment at high definition and close range, which usually occurs in high-end technical fields such as scientific research, material analysis, semiconductor manufacturing, biomedical experiments, etc. The core principle of the design is to use the embedded observation mechanism 2 and the rotating mechanism 3 to realize the close-range and all-around observation of the sample 9 in the vacuum environment by the camera lens 25. The observation mechanism 2 is embeddedly installed in the inside of the vacuum chamber 1, so that the camera lens 25 can be as close to the sample 9 as possible, which can shorten the focal length requirement of the focusing lens, so that finer structures and defects can be captured, the observation precision and accuracy are improved, and the use cost is reduced. The position of the sample 9 can be adjusted by the rotating mechanism 3, which makes the observation of the sample 9 more comprehensive and reduces the observation blind area.

[0043] While the embodiments of the present application have been illustrated and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the spirit and scope of the application, which is defined by the appended claims and their equivalents.

Claims

1. An in-line view port for a camera head of an ultrahigh vacuum apparatus, characterized by, Include: Vacuum chamber (1); Observation mechanism (2), the observation mechanism (2) includes observation tube (21), observation window (22), electric telescopic rod (23), clamping support (24) and camera lens (25), the observation tube (21) is installed on the outer wall of vacuum chamber (1), the observation window (22) is installed at one end of observation tube (21), the electric telescopic rod (23) is provided with four, and four electric telescopic rods (23) are installed on the inner wall of observation tube (21), the clamping support (24) is provided with two, and two clamping supports (24) are respectively installed at the other end of adjacent two electric telescopic rods (23), the camera lens (25) is installed between the opposite faces of two clamping supports (24); Rotary mechanism (3) is installed on the bottom cavity wall of vacuum chamber (1), and the rotary mechanism (3) can rotate the position of the observed object.

2. The embedded view port for camera head of ultra-high vacuum equipment according to claim 1, characterized in that: The top end of the vacuum chamber (1) is provided with a sealing groove (8), the sealing groove (8) is internally provided with a sealing ring (4), the top end of the sealing ring (4) is provided with a top cover plate (5), the top end of the top cover plate (5) is provided with a vacuum tube (6), the outer surface of the vacuum tube (6) is provided with a connecting flange (7) on the upper part.

3. The embedded view port for camera head of ultra-high vacuum equipment according to claim 2, characterized in that: The top end of the rotary mechanism (3) is placed with a sample (9), the outer wall of the vacuum chamber (1) is provided with three fixing blocks (10) on the upper part, the top end of the three fixing blocks (10) is provided with a reinforcing screw rod (11), the outer surface of the three reinforcing screw rods (11) is provided with a reinforcing nut (12) on the upper part, the outer wall of the top cover plate (5) is provided with three connecting blocks (13).

4. The embedded view port for camera head of ultra-high vacuum equipment according to claim 3, characterized in that: The observation tube (21) is embeddedly installed in the inside of the vacuum chamber (1), and the clamping support (24) is provided with a V-shaped structure.

5. The embedded view port for camera head of ultra-high vacuum equipment according to claim 1, characterized in that: The rotary mechanism (3) includes a storage box (31), a rotating column (32), a driven gear (33), a rotating table (34), a driver (35) and a driving gear (36), the storage box (31) is installed on the bottom cavity wall of the vacuum chamber (1), the rotating column (32) is installed between the top box wall and the bottom box wall of the storage box (31) through a bearing, the driven gear (33) is installed on the middle part of the outer surface of the rotating column (32), the rotating table (34) is installed on the top end of the rotating column (32), the driver (35) is installed on the bottom box wall of the storage box (31), the driving gear (36) is installed on the output end of the driver (35), and the top end of the driving gear (36) is installed on the top box wall of the storage box (31) through a bearing.

6. The embedded view port for a camera head of an ultrahigh vacuum device according to claim 5, characterized in that: The driving gear (36) is engaged with the driven gear (33), and the diameter of the driving gear (36) is smaller than that of the driven gear (33), and the top end face of the rotating table (34) is lower than the bottom end face of the observation tube (21).

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