Filtering device

Abstract

The utility model provides a filtering device which comprises an air bellow, a fan, a condensation assembly and a filter screen, the fan, the condensation assembly and the filter screen are all arranged in the air bellow, the air bellow is provided with an air inlet and an air outlet, the air outlet is used for being communicated with a process cavity, the condensation assembly is located between the air inlet and the air outlet, and the filter screen is located between the condensation assembly and the air outlet. Thus, the fan is started, air enters the air bellow from the air inlet from the atmospheric environment, and before the air enters the process cavity from the air outlet, the temperature in the air bellow is reduced through the condensation assembly, so that the molecular motility in the atmosphere can be reduced, water vapor in the atmosphere is condensed on the condensation assembly, and the air quality is improved. For example, soluble organic matters in the air are adsorbed and condensed, the content of particulate matters in the air is reduced, it is ensured that the air entering the process cavity does not cause unbalance of three additives in the ECP process, and the process defects of electroplating are reduced.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a filtration device. Background Technology

[0002] In the semiconductor integrated circuit manufacturing process, electrochemical plating (ECP) is a process that deposits a copper film on the surface of a wafer through electroplating and completes the copper wiring process. It is widely used in the field of advanced semiconductor manufacturing.

[0003] The widely used ECP (Electroplating Processing) relies on introducing three additives—accelerators, inhibitors, and leveling agents—into the electroplating bath (containing deionized water, copper sulfate, sulfuric acid, and chloride ions) to achieve bottom-up gap-filling. The balance of these three additives has a significant impact on the process. However, as the critical dimensions of wafers shrink, gap-filling in copper plating becomes increasingly difficult. Currently, declining cleanliness within equipment, especially in process chambers, and particularly increased particulate matter (such as organic matter) in the environment, can lead to an imbalance of the three additives, further resulting in electroplating process defects.

[0004] Currently, general-purpose fan filter units are commonly used to filter particulate matter in the atmosphere. However, their filtration capacity is limited and the filtration effect is not ideal. This leads to organic matter in the environment entering the electroplating equipment, causing an imbalance in the additive concentration within the process chamber, resulting in process defects. Utility Model Content

[0005] The purpose of this invention is to provide a filtration device to solve the problem that current general-purpose fan filter units have an unsatisfactory filtration effect on particulate matter in the atmospheric environment, which easily leads to an imbalance of the three additives in the ECP process, thereby causing process defects in electroplating.

[0006] To solve the above-mentioned technical problems, this utility model provides a filtration device, which includes:

[0007] The air box has an air inlet and an air outlet, the air outlet being used to communicate with the process chamber;

[0008] The fan is installed inside the air box;

[0009] A condenser assembly is disposed inside the air box and located between the air inlet and the air outlet;

[0010] A filter screen is installed inside the air box and located between the condenser assembly and the air outlet.

[0011] Optionally, the condensation assembly includes a condenser tube and fins disposed on the condenser tube.

[0012] Optionally, the open end of the condenser tube extends out of the air box.

[0013] Optionally, the fan is positioned between the filter and the air outlet.

[0014] Optionally, the air inlet and the air outlet are located on opposite sides of the air box.

[0015] Optionally, the air box has a return air inlet located between the air inlet and the condensation assembly. The filtration device further includes an air direction switching assembly disposed at the air outlet to switch the air direction to the process chamber or the return air inlet.

[0016] Optionally, the filtration device further includes a sensor disposed within the air box, the sensor being positioned between the filter screen and the air outlet; when the sensor detects that the particulate matter content exceeds the allowable range, the airflow direction switching component switches the airflow direction of the air outlet to the return air outlet; and when the sensor detects that the particulate matter content is within the allowable range, the airflow direction switching component switches the airflow direction of the air outlet to the process chamber.

[0017] Optionally, the airflow switching component includes a return air duct and a three-way valve. The inlet of the three-way valve is connected to the air outlet, one of the outlets of the three-way valve is connected to the return air outlet through the return air duct, and the other outlet of the three-way valve is connected to the process chamber.

[0018] Optionally, the return air inlet is equipped with a one-way valve, which is connected to the return air duct.

[0019] Optionally, the air outlet is connected to the process chamber via an air outlet pipe.

[0020] In summary, the filtration device provided by this utility model includes a wind box, a fan, a condenser assembly, and a filter screen, all housed within the wind box. The wind box has an air inlet and an air outlet, with the outlet communicating with the process chamber. The condenser assembly is located between the air inlet and the air outlet, and the filter screen is located between the condenser assembly and the air outlet. Thus, when the fan starts, air enters the wind box from the atmospheric environment through the air inlet. Before the air enters the process chamber from the air outlet, the condenser assembly lowers the temperature inside the wind box, thereby reducing the mobility of molecules in the atmosphere. This causes water vapor and particulate matter in the atmosphere to condense on the condenser assembly, such as soluble organic matter in the air, which is adsorbed and condensed, reducing the organic matter content in the air. This ensures that the air entering the process chamber does not cause an imbalance of the three additives in the ECP process, reducing electroplating process defects. Attached Figure Description

[0021] Those skilled in the art will understand that the accompanying drawings are provided to better understand the present invention and do not constitute any limitation on the scope of the present invention. Wherein:

[0022] Figure 1 This is a schematic diagram of a filtration device according to an embodiment of the present invention.

[0023] In the attached image:

[0024] 10-Blowbox; 11-Air inlet; 12-Air outlet; 13-Return air outlet; 20-Fan; 30-Condensation assembly; 31-Condensation tube; 32-Fin; 40-Filter screen; 50-Airflow direction switching assembly; 51-Return air duct; 52-Three-way valve; 60-Sensor; 70-One-way valve; 80-Air outlet duct. Detailed Implementation

[0025] To make the objectives, advantages, and features of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be noted that the drawings are all in a very simplified form and are not drawn to scale, and are only used to facilitate and clarify the explanation of the objectives of the embodiments of this utility model. Furthermore, the structures shown in the drawings are often part of the actual structure. In particular, different drawings may emphasize different aspects and sometimes use different scales.

[0026] As used in this invention, the singular forms “a,” “an,” and “the” include plural objects; the term “or” is generally used to include the meaning of “and / or”; the term “a number” is generally used to include the meaning of “at least one”; and the term “at least two” is generally used to include the meaning of “two or more”. Furthermore, the terms “first,” “second,” and “third” are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with “first,” “second,” or “third” may explicitly or implicitly include one or at least two of that feature. “One end” and “the other end,” as well as “proximal end” and “far end,” generally refer to two corresponding parts, including not only endpoints. The terms “installed,” “connected,” and “joined” should be interpreted broadly; for example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal connection of two elements or the interaction between two elements. Furthermore, as used in this invention, the phrase "one element is disposed on another element" generally only indicates that there is a connection, coupling, cooperation, or transmission relationship between the two elements. This connection, coupling, cooperation, or transmission can be direct or indirect through an intermediate element, and should not be construed as indicating or implying a spatial positional relationship between the two elements. That is, one element can be located arbitrarily inside, outside, above, below, or to one side of the other element, unless otherwise explicitly stated. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0027] Figure 1 This is a schematic diagram of a filtration device according to an embodiment of the present invention. (See attached diagram.) Figure 1This utility model schematically provides a filtration device, which includes a bellows 10, a fan 20, a condenser assembly 30, and a filter screen 40. The bellows 10 has an air inlet 11 and an air outlet 12, and the air outlet 12 is used to communicate with a process chamber. The air outlet 12 can be connected to the process chamber, for example, through an air outlet pipe 80. The process chamber is, for example, an ECP process chamber. Preferably, the air inlet 11 and the air outlet 12 are located on opposite sides of the bellows 10. For example, the bellows 10 has a cuboid structure, and the air inlet 11 and the air outlet 12 are located on opposite sides of the length of the bellows 10. The fan 20, the condenser assembly 30, and the filter screen 40 are all disposed inside the bellows 10. The condenser assembly 30 is located between the air inlet 11 and the air outlet 12; the filter screen 40 is located between the condenser assembly 30 and the air outlet 12 to filter particulate matter. The fan 20 can be disposed, for example, between the filter screen 40 and the air outlet 12. Thus, when the fan 20 starts, a negative pressure is generated inside the air box 10, causing air to enter the air box 10 from the atmospheric environment through the air inlet 11. Before the air enters the process chamber from the air outlet 12, the temperature inside the air box 10 is reduced by the condenser assembly 30, thereby reducing the mobility of molecules in the atmosphere. This causes water vapor in the atmosphere to condense on the condenser assembly 30, adsorbing and condensing particulate matter, such as soluble organic matter in the air, reducing the organic matter content in the air. This ensures that the air entering the process chamber will not cause an imbalance of the three additives in the ECP process, reducing process defects in electroplating.

[0028] In one embodiment, the condenser assembly 30 includes a condenser tube 31 and fins 32 disposed on the condenser tube 31. The fins 32 are disposed, for example, on the outer surface of the condenser tube 31, and the material of the fins 32 is, for example, aluminum. Refrigerant flows inside the condenser tube 31. Through the flow and condensation of the refrigerant within the tube, heat is transferred to the external environment, thereby achieving a cooling effect. The fins 32, disposed on the outer surface of the condenser tube 31, can increase the heat dissipation area and enhance air convection, accelerating heat dissipation.

[0029] Furthermore, the open end of the condenser pipe 31 extends out of the air box 10. Preferably, the open end of the condenser pipe 31 is connected to the cooling pipe (with ice water flowing inside) of the machine system, so that the condensate in the condenser pipe 31 can be collected and reused through the cooling pipe to achieve water cooling heat dissipation for the machine.

[0030] Furthermore, the air box 10 has a return air inlet 13, which is located between the air inlet 11 and the condenser assembly 30. The filtration device also includes an airflow direction switching assembly 50, which is located at the air outlet 12 and switches the airflow direction to either the process chamber or the return air inlet 13. Thus, by setting the airflow direction switching assembly 50, the airflow direction at the air outlet 12 can be switched. If it is necessary to filter the air at the air outlet 12 again, the airflow direction at the air outlet 12 can be switched to the return air inlet 13, and then the air is filtered again by the condenser assembly 30 and the filter screen 40 until the particulate matter content does not exceed the standard, or after the set number of filtrations has been reached, the airflow direction at the air outlet 12 is switched back to the process chamber by the airflow direction switching assembly 50, further reducing the particulate matter content in the air and ensuring that the air entering the process chamber does not cause an imbalance of the three additives in the ECP process, thus reducing process defects in electroplating.

[0031] In one embodiment, the airflow switching component 50 includes a return air duct 51 and a three-way valve 52. The inlet of the three-way valve 52 is connected to the air outlet 12, one outlet of the three-way valve 52 is connected to the return air outlet through the return air duct 51, and the other outlet of the three-way valve 52 is connected to the process chamber through the air outlet duct 80. A one-way valve 70 may be installed at the return air outlet 13, and the one-way valve 70 is connected to the return air duct 51.

[0032] Furthermore, the filtration device also includes a sensor 60, which is disposed within the air box 10 and between the filter screen 40 and the air outlet 12. The sensor 60 detects the particulate matter content in the air after passing through the filter screen 40 within the air box 10. When the sensor 60 detects that the particulate matter content exceeds the allowable range, the airflow direction switching component 50 switches the airflow direction of the air outlet 12 to the return air outlet 13; and when the sensor 60 detects that the particulate matter content is within the allowable range, the airflow direction switching component 50 switches the airflow direction of the air outlet 12 to the process chamber. In this embodiment, the sensor 60 is electrically connected to the airflow direction switching component 50, and the airflow direction switching of the airflow direction switching component 50 is directly controlled by the control signal generated by the particulate matter content detected by the sensor 60. Alternatively, the airflow direction switching of the airflow direction switching component 50 can be controlled by a controller. The sensor 60 is connected to the controller and sends the control signal generated by the detected particulate matter content to the controller, which then controls the airflow direction switching of the airflow direction switching component 50 based on this control signal.

[0033] Although the present invention has been disclosed above with reference to preferred embodiments, these embodiments are not intended to limit the present invention. For any person skilled in the art, many possible variations and modifications can be made to the technical solutions of the present invention based on the disclosed technical content, or equivalent embodiments can be modified accordingly, without departing from the scope of the present invention. Therefore, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present invention, without departing from the content of the present invention, shall still fall within the protection scope of the present invention.

Claims

1. A filtration device, characterized in that, include: The air box has an air inlet and an air outlet, the air outlet being used to communicate with the process chamber; The fan is installed inside the air box; A condenser assembly is disposed inside the air box and located between the air inlet and the air outlet; A filter screen is disposed inside the air box and located between the condenser assembly and the air outlet; The air box has a return air inlet located between the air inlet and the condensation component. The filtration device also includes an air direction switching component located at the air outlet to switch the air direction to the process chamber or the return air inlet.

2. The filtration device according to claim 1, characterized in that, The condensation assembly includes a condenser tube and fins disposed on the condenser tube.

3. The filtration device according to claim 2, characterized in that, The open end of the condenser tube extends out of the bellows.

4. The filtration device according to claim 1, characterized in that, The fan is positioned between the filter and the air outlet.

5. The filtration device according to claim 1, characterized in that, The air inlet and the air outlet are located on opposite sides of the air box.

6. The filtration device according to claim 1, characterized in that, The filtration device further includes a sensor disposed within the air box, the sensor being positioned between the filter screen and the air outlet; when the sensor detects that the particulate matter content exceeds the allowable range, the airflow direction switching component switches the airflow direction of the air outlet to the return air outlet; and when the sensor detects that the particulate matter content is within the allowable range, the airflow direction switching component switches the airflow direction of the air outlet to the process chamber.

7. The filtration device according to claim 1, characterized in that, The airflow switching component includes a return air duct and a three-way valve. The inlet of the three-way valve is connected to the air outlet, one of the outlets of the three-way valve is connected to the return air outlet through the return air duct, and the other outlet of the three-way valve is connected to the process chamber.

8. The filtration device according to claim 7, characterized in that, The return air inlet is equipped with a one-way valve, which is connected to the return air duct.

9. The filtration device according to claim 1, characterized in that, The air outlet is connected to the process chamber via an air outlet pipe.

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