Liquid pressure measuring equipment

Abstract

The utility model discloses a liquid pressure intensity measuring device, comprising a distribution block, a pump chamber is arranged in the distribution block, a piston is movably connected in the pump chamber, the piston and the inner wall of the pump chamber are in dynamic seal, and the surface of the inner wall of the pump chamber is smooth; the driving part is provided with a driving shaft and a power source, one end of the driving shaft is fixedly connected with the piston, the other end of the driving shaft is fixedly connected with the power source, and the driving part is used for driving the piston to move in the pump chamber; the detection piece is arranged outside the pump chamber, the detection piece is located between the power source and the piston, and the detection piece is used for detecting the pressure of liquid in the pump chamber. By adopting the scheme, an area with poor flowability can be avoided when the pressure in the pump chamber of the liquid treatment device is measured.

Description

TECHNICAL FIELD

[0001] The utility model relates to semiconductor fluid control equipment technical field especially relates to a liquid pressure measuring equipment. BACKGROUND

[0002] In many industrial applications, it is important to precisely control the flow and rate of fluids, especially in the field of semiconductor processing. When applying photochemical substances such as photoresist type chemical products on a semiconductor wafer, it is necessary to ensure that the coating is evenly distributed on the entire wafer surface and to measure the flatness. The glue pump is used to deliver liquid such as photoresist to the wafer surface. Before delivery, the liquid is stationary in the flow channel during the preparation stage, and the liquid is allowed to flow out when the liquid pressure in the pump chamber meets the specified pressure value or range. In order to measure the pressure of the liquid in the pump chamber, a detection hole is provided in the inner wall of the pump chamber, and a pressure sensor is installed in the detection hole. The part of the sensor that contacts the liquid is treated with corrosion-resistant measures, such as fluororesin film.

[0003] However, the prior art usually provides a mounting hole for installing a pressure sensor in the area where the pump chambers are connected to each other, but the mounting hole for installing the pressure sensor will inevitably cause poor flow area, also known as dead zone or dead corner. These areas will cause the liquid such as photoresist to crystallize and aggregate other particulate matter, such as forming crystalline substances in the dead corner area. These particles will eventually accidentally flow with the fluid to the wafer surface, causing process defects in the wafer, and thus causing the wafer to be scrapped or reworked.

[0004] Therefore, it is necessary to provide a liquid pressure measuring device to solve the above problems existing in the prior art. SUMMARY

[0005] The utility model aims at providing a liquid pressure measuring device for avoiding poor flow area in the pump chamber of the liquid treatment device during pressure measurement.

[0006] To achieve the above-mentioned purpose, the utility model provides a liquid pressure measuring device, comprising:

[0007] The distribution block is internally provided with a pump chamber, the pump chamber is movably connected with a piston inside, the piston is dynamically sealed with the inner wall of the pump chamber, and the inner wall surface of the pump chamber is smooth;

[0008] The driving member has a driving shaft and a power source, one end of the driving shaft is fixedly connected with the piston, the other end is fixedly connected with the power source, and the driving member is used for driving the piston to move in the pump chamber;

[0009] A detection piece is arranged outside the pump chamber, the detection piece is located between the power source and the piston, and the detection piece is used for detecting the pressure of the liquid in the pump chamber.

[0010] The liquid pressure measuring device has the advantages that: the detection piece is arranged outside the pump chamber, so that the installation hole is not arranged in the pump chamber, and the poor flow area or dead area is eliminated. This helps to prevent the liquid such as photoresist from crystallizing and gathering particles in the pump chamber, thereby reducing the risk of process defects on the wafer surface and improving the process reliability. The detection piece is located between the power source and the piston, so that the pressure change of the liquid in the pump chamber can be more accurately detected through the piston. Since the detection piece does not directly contact the liquid, the corrosion and pollution of the sensor by the liquid are reduced, so that the measurement accuracy is improved. In addition, the detection piece is arranged outside the pump chamber, so that the overall structure of the liquid processing device is simplified, the shape coefficient is reduced, and the installation difficulty is reduced.

[0011] According to one embodiment of the utility model, detection piece set on driving shaft, detection piece with driving shaft coaxial.

[0012] According to one embodiment of the utility model, detection piece includes strain gauge load cell body, strain gauge load cell body set on driving shaft, strain gauge load cell body is used for detecting the push and pull force of driving shaft.

[0013] According to one embodiment of the utility model, strain gauge load cell body is located on the side of driving shaft close to piston.

[0014] According to one embodiment of the utility model, detection piece still includes first stud and second stud, driving shaft is arranged with first installation groove and second installation groove, first stud is connected with first installation groove by screw thread, second stud is connected with second installation groove by screw thread.

[0015] According to one embodiment of the utility model, the first stud and the strain gauge load cell body are provided with a shaft shoulder, and the diameter of the shaft shoulder is greater than the first stud and the second stud.

[0016] According to one embodiment of the utility model, the power source includes: a driving motor having a housing and an output end, the driving motor is used for providing rotary power; a screw rod connected with the output end of the driving motor, a nut is threadedly connected on the screw rod, and the nut is fixedly connected with the driving shaft; a guide rail is arranged along the length direction of the screw rod, and the guide rail is connected with the housing of the driving motor.

[0017] According to one embodiment of the present application, the power source comprises a cylinder, and an output end of the cylinder is fixedly connected with the driving shaft.

[0018] According to one embodiment of the present application, a temperature control module is further arranged, which is arranged close to the driving motor and is used for controlling the temperature of the driving motor.

[0019] According to one embodiment of the present application, a smooth coating is arranged on the inner wall of the pump chamber. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 is a sectional view of the structure of the pump chamber of the prior art;

[0021] Figure 2 is a sectional view of a liquid pressure measuring device according to an embodiment of the present application;

[0022] Figure 3 is a sectional view of the structure of a detection member according to an embodiment of the present application;

[0023] Figure 4 is a sectional view of the structure of a detection member according to an embodiment of the present application.

[0024] Reference signs: 1, distribution block; 11, piston; 2, driving member; 21, driving source; 22, driving shaft; 3, detection member; 31, strain gauge load cell body; 32, first stud; 33, second stud; 34, shaft shoulder; 4, crystalline substance; 5, sealing ring; 6, detection hole; 7, existing pressure sensor. DETAILED DESCRIPTION

[0025] In order to make the purpose, technical scheme and advantages of the embodiments of the present application more clear, the technical scheme of the embodiments of the present application will be described clearly and completely below. Obviously, the described embodiments are some embodiments of the present application, but not all the embodiments of the present application. Based on the embodiments of the present application, all the other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application. Unless otherwise defined, the technical terms or scientific terms used herein should be understood as the common meanings by those skilled in the art. The words such as "comprise" and the like used herein mean that the elements or objects before the words cover the elements or objects listed after the words and their equivalents, but do not exclude other elements or objects.

[0026] The prior art is as follows Figure 1As shown, the pump chamber is arranged in the interior of the distribution block 1, and photoresist or other optical medium flows in the pump chamber, a detection hole 6 is arranged in the region communicating with the pump chamber for mounting an existing pressure sensor 7, and a sealing ring 5 is arranged at the contact region of the pressure sensor and the pump chamber, but the detection hole 6 arranged for mounting the pressure sensor inevitably causes a poor flow region, also known as a dead zone or a dead corner. These regions can cause the liquid such as photoresist to crystallize and aggregate other particulate matters, and the formed crystalline matter 4 is located in the dead corner region. These particles can eventually accidentally flow to the wafer surface with the fluid, causing process defects of the wafer, and further causing the wafer to be scrapped or reworked.

[0027] The specific embodiments of the present application will be further described in detail below with reference to the accompanying drawings. Figure 1 - The accompanying drawings Figure 4 The specific embodiments of the present application will be further described in detail below with reference to the accompanying drawings.

[0028] Reference Figures 2-4 The liquid pressure measuring device of the present application comprises a distribution block 1, a driving member 2 and a detection member 3.

[0029] A pump chamber is arranged in the interior of the distribution block 1, and a piston 11 is movably connected in the interior of the pump chamber. Specifically, the piston 11 is slidingly installed in the interior of the pump chamber, and the piston 11 is dynamically sealed with the inner wall of the pump chamber. The pump chamber is further communicated with an inlet flow channel and an outlet flow channel for fluid inflow and outflow, respectively, which are not shown in the figure. The inner wall surface of the pump chamber is smooth, and no additional detection hole 6 is arranged. The driving member 2 has a driving shaft 22 and a power source, one end of the driving shaft 22 is fixedly connected with the piston 11, and the other end is fixedly connected with the power source, and the driving member 2 is used for driving the piston 11 to move in the pump chamber. The detection member 3 is arranged outside the pump chamber, and the detection member 3 is located between the power source and the piston 11, and the detection member 3 is used for detecting the pressure of the liquid in the pump chamber.

[0030] By arranging the detection member 3 outside the pump chamber, the installation hole in the pump chamber is avoided, and the poor flow region or dead zone is eliminated. This helps to prevent the liquid such as photoresist from crystallizing and aggregating particulate matters in the pump chamber, thereby reducing the risk of process defects on the wafer surface and improving the process reliability. By locating the detection member 3 between the power source and the piston 11, the pressure change of the liquid in the pump chamber can be more accurately detected through the piston 11. Since the detection member 3 does not directly contact the liquid, the corrosion and pollution of the sensor by the liquid are reduced, thereby improving the measurement accuracy. In addition, by arranging the detection member 3 outside the pump chamber, the overall structure of the liquid processing device is simplified, the shape coefficient is reduced, and the installation difficulty is also reduced.

[0031] In some embodiments of the utility model, detection piece 3 is arranged on driving shaft 22, detection piece 3 is coaxial with driving shaft 22. Detection piece 3 includes strain type force sensor body 31, strain type force sensor body 31 is arranged on driving shaft 22, and strain type force sensor body 31 is used to detect the push-pull force of driving shaft 22. Strain type force sensor is prior art, which has high sensitivity, can detect tiny strain change and is suitable for instruments such as photoresist pump because it can accurately capture the tiny change of liquid pressure in the pump chamber. In addition, strain type force sensor is small in size and light in weight, can be compactly installed on driving shaft 22 and will not significantly affect the overall structure and weight of the equipment. Strain type force sensor body 31 is arranged on driving shaft 22, which can realize coaxial arrangement with driving shaft 22 and further directly measure the push-pull force of driving shaft 22, so as to more accurately detect the pressure change of the liquid in the pump chamber. The above scheme makes the liquid flow uniformly in the pump chamber, avoids photoresist crystallization or impurity aggregation caused by dead zones, finally ensures that the photoresist and other liquids are uniformly delivered to the wafer surface, avoids wafer process defects and improves the manufacturing efficiency and quality of semiconductor wafers.

[0032] Working principle: move piston 11 in the pump chamber, driving piece 2 drives piston 11 through power source, and detection piece 3 is located between piston 11 and power source. Detection piece 3 is not located in the pump chamber, and the pressure of the liquid in the pump chamber can be accurately measured. The specific measurement method is: according to the force measured by the detection piece 3, the known surface area of the piston 11 along the movement direction, the pressure of the liquid can be calculated. The simple expression of the calculation formula is: liquid pressure=liquid force÷force area; liquid force=full load detection piece 3 detection force-axial resistance; axial resistance=pump chamber no-load detection piece 3 detection force.

[0033] In some embodiments of the utility model, strain type force sensor body 31 is located on the side of driving shaft 22 close to piston 11. Being closer to piston 11 will cause it to be closer to the liquid in the pump chamber, and thus can more directly feel the force exerted by the liquid on piston 11, thereby providing more accurate pressure measurement. Arranging the strain type force sensor on driving shaft 22 close to piston 11 can reduce the influence of other axial forces on the sensor, thereby reducing the interference with the sensor readings. In addition, assembly errors can cause deflection force, and arranging the strain type force sensor on driving shaft 22 can reduce the influence of such deflection force, because the sensor is closer to the source of force, thereby improving the accuracy of measurement.

[0034] In addition, the strain gauge load cell will have temperature drift with temperature change, which will affect its detection accuracy. Among them, the temperature drift of the sensitivity adopted in the embodiment is. %F.S. / ℃, FS is full scale, which means full scale. And because the strain gauge load cell is sensitive to temperature change, the sensor is set away from the heat source, which can reduce the influence of temperature change on the performance of the sensor, and facilitate the implementation of temperature compensation measures. The heat generated by the driving source 21 may affect the detection accuracy of the strain gauge load cell. The sensor is set close to the piston 11, away from the driving source 21, which can reduce the influence of temperature on the sensor, thereby improving the accuracy of measurement.

[0035] In some embodiments of the present application, the detection member 3 further comprises a first stud 32 and a second stud 33, and the driving shaft 22 is internally provided with a first mounting groove and a second mounting groove, the first stud 32 is threadedly connected with the first mounting groove, and the second stud 33 is threadedly connected with the second mounting groove. Threaded connection simplifies the assembly process, making the installation and disassembly of the first stud 32 and the second stud 33 more convenient. In addition, threaded connection can reduce errors in the assembly process by precisely controlling the screwing depth of the thread, thereby reducing the influence of the deflection force and improving the accuracy of measurement.

[0036] The existing strain gauge load cell does not have a reinforcing device between the first stud 32 and the strain gauge load cell body 31, resulting in low mechanical strength in this area. Therefore, in some other embodiments of the present application, a shaft shoulder 34 is provided between the first stud 32 and the strain force sensor body, and the diameter of the shaft shoulder 34 is greater than that of the first stud 32 and the second stud 33. The design of the shaft shoulder 34 increases the local diameter of the driving shaft 22, thereby improving the mechanical strength of this area, making the entire structure more stable, capable of bearing greater torque and enhancing the torsional resistance of the driving shaft 22.

[0037] In some other embodiments of the present application, the power source includes a driving motor, a screw rod and a guide rail (not shown in the figure). The driving motor has a housing and an output end, and is used to provide rotary power; the screw rod is connected with the output end of the driving motor, and a nut is threadedly connected with the screw rod, and the nut is fixedly connected with the driving shaft 22; the guide rail is arranged along the length direction of the screw rod, and is connected with the housing of the driving motor. The driving motor provides rotary power, which can be converted into precise linear movement through the threaded connection of the screw rod and the nut. The guide rail is arranged along the length direction of the screw rod and connected with the housing of the driving motor, which can provide stable guidance and reduce vibration and deviation.

[0038] In some other embodiments of the present application, the power source comprises a cylinder (not shown in the figure), and the output end of the cylinder is fixedly connected with the driving shaft 22. The cylinder can quickly respond to the control signal, and realize quick start and stop. In addition, the cylinder can generate a large thrust or pull force, which is very important for the application of the piston 11 which requires a large power output.

[0039] In some other embodiments of the present application, the temperature control module is arranged close to the driving motor, and is used for controlling the temperature of the driving motor. The temperature control module can keep the motor within a safe temperature range by monitoring the motor temperature and adjusting the cooling system, such as the cooling liquid flow and the fan speed, so as to improve the motor efficiency and service life.

[0040] In some other embodiments of the present application, a smooth coating is arranged on the inner wall of the pump chamber (not shown in the figure). For example, metal particles, ceramic particles and carbon fibers are added to the resin base. In other embodiments, a ceramic coating is used, which comprises a base coating and a surface coating. The base coating is composed of phenolic resin, aluminum oxide powder, zinc oxide powder and eutectic powder. The surface coating is composed of graphene structure molybdenum disulfide, silicon carbide powder, film forming additives and curing agent. The coating can significantly improve the smoothness of the surface of the pump chamber, reduce fluid resistance, reduce hydraulic loss and improve pump efficiency. The high polymer composite material has chemical corrosion resistance, can isolate the contact between air, water and other media and the pump chamber base material, and reduce rust and electrochemical corrosion.

[0041] In summary, the present application significantly improves the measurement accuracy and equipment reliability, reduces the flow dead zone, avoids photoresist crystallization and particle aggregation, improves the pump efficiency, prolongs the service life of the equipment, simplifies the assembly process, reduces the maintenance difficulty, and avoids the particle and process defects caused by the opening of the inner wall of the pump chamber.

[0042] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first" and "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions.

[0043] Unless otherwise defined, the terms "mounting", "connected", "connecting", "fixed", "fixing" should be construed as broad terms, for example, can be fixed connection, can also be detachable connection; can be mechanical connection, can also be electrical connection; can be directly connected, can also be indirectly connected through an intermediate medium, can be the internal communication of two elements or the interaction relationship of two elements. For those skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0044] Unless otherwise defined, "on" or "under" of the first feature to the second feature can include that the first feature and the second feature are in direct contact, or the first feature and the second feature are not in direct contact but are in contact through another feature between them. Moreover, the first feature "on", "above" and "above" of the second feature includes that the first feature is directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" of the second feature includes that the first feature is directly below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0045] Although the embodiments of the utility model are described in detail above, it is obvious for those skilled in the art that various modifications and changes can be made to these embodiments. However, it should be understood that such modifications and changes are within the scope and spirit of the utility model described in the claims. Moreover, the utility model described herein can have other embodiments, and can be implemented or realized in various ways.

Claims

1. A liquid pressure measuring device, characterized by, The application relates to a pump, which comprises the following parts: a distribution block (1) internally provided with a pump chamber, wherein a piston (11) is movably connected in the pump chamber, the piston (11) is dynamically sealed with the inner wall of the pump chamber, and the inner wall of the pump chamber is smooth; a driving member (2) provided with a driving shaft (22) and a power source, one end of the driving shaft (22) is fixedly connected with the piston (11), the other end is fixedly connected with the power source, and the driving member (2) is used for driving the piston (11) to move in the pump chamber; a detection member (3) arranged outside the pump chamber, the detection member (3) is located between the power source and the piston (11), and the detection member (3) is used for detecting the pressure of liquid in the pump chamber.

2. The liquid pressure measuring device according to claim 1, wherein The detection member (3) is arranged on the driving shaft (22), and the detection member (3) is coaxial with the driving shaft (22).

3. The liquid pressure measuring device of claim 1, wherein, The detection member (3) comprises a strain type force sensor body (31), the strain type force sensor body (31) is arranged on the driving shaft (22), and the strain type force sensor body (31) is used for detecting the push-pull force of the driving shaft (22).

4. The liquid pressure measuring device according to claim 3, wherein The strain type force sensor body (31) is located on the side of the driving shaft (22) close to the piston (11).

5. The liquid pressure measuring device of claim 3, wherein The detection member (3) further comprises a first stud (32) and a second stud (33), the driving shaft (22) is internally provided with a first mounting groove and a second mounting groove, the first stud (32) is threadedly connected with the first mounting groove, and the second stud (33) is threadedly connected with the second mounting groove.

6. The liquid pressure measuring device of claim 5, wherein, An axle shoulder (34) is arranged between the first stud (32) and the strain type force sensor body (31), and the diameter of the axle shoulder (34) is larger than that of the first stud (32) and the second stud (33).

7. The liquid pressure measuring device of claim 1, wherein The power source comprises: a driving motor provided with a shell and an output end, and used for providing rotary power; a screw rod connected with the output end of the driving motor, a nut is threadedly connected on the screw rod, and the nut is fixedly connected with the driving shaft (22); a guide rail arranged along the length direction of the screw rod, and connected with the shell of the driving motor.

8. The liquid pressure measuring device of claim 1, wherein, The power source comprises a gas cylinder, and the output end of the gas cylinder is fixedly connected with the driving shaft (22).

9. The liquid pressure measuring device of claim 7, wherein, A temperature control module is further arranged close to the driving motor, and the temperature control module is used for controlling the temperature of the driving motor.

10. The liquid pressure measuring device of claim 1, wherein, The inner wall of the pump chamber is provided with a smooth coating.

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