Large-size chip annealing furnace

Abstract

The utility model relates to the technical field of annealing furnaces, in particular to a large-size chip annealing furnace which comprises a frame and an annealing furnace pipe, and a gas mixing assembly used for utilizing waste heat in the annealing furnace pipe is installed in the frame. The gas mixing assembly comprises a gas mixing tank fixedly connected with the frame, one side of the gas mixing tank communicates with a plurality of three-way valves, the gas mixing tank communicates with the annealing furnace pipe through the three-way valves, a semi-cylinder with one end extending into the three-way valves is arranged in the gas mixing tank, and the end, away from the three-way valves, of the semi-cylinder is fixedly connected with a metal plate. The two sides of the metal plate are fixedly connected with elastic fins, and the elastic fins comprise small fins close to the ends of the semi-cylinders. The technical problems that hot air in an existing annealing furnace is difficult to convert into continuous warm air, then the continuous warm air is conveyed into the annealing furnace for a long time, the air with the proper temperature is continuously blown into the annealing furnace, and the dual purposes of cleaning ash in the annealing furnace and preheating a chip are achieved are solved.

Description

Technical Field

[0001] This utility model relates to the field of annealing furnace technology, specifically a large-size chip annealing furnace. Background Technology

[0002] Chip annealing furnaces are widely used in semiconductor device manufacturing and materials research. Chips undergo three steps in the annealing furnace: heating, holding, and cooling. A search revealed a patent with application number CN202322207429.5, which discloses a waste heat utilization device for a high-temperature annealing furnace for oriented silicon steel. The water pipe is folded inside the annealing furnace, passing through the furnace from one end on its outer surface and exiting from the other end. The water pipe is connected and fixed inside the annealing furnace by an installation device. This invention solves the problem of folding and connecting water pipes inside the annealing furnace.

[0003] The aforementioned device utilizes a circulating water pipe to absorb excess heat from the annealing furnace, converting it into hot water that flows out through the outlet pipe, thus utilizing the waste heat of the annealing furnace. However, the rate of heat absorption and utilization is fixed, and the waste heat can only be returned to the annealing furnace at a constant rate. Furthermore, the chips in the annealing furnace require different temperatures at different stages, with higher heat recovery occurring after the heat preservation stage. Ideally, when the chips are first placed into the annealing furnace, it is best to continuously blow air at a suitable temperature into the furnace to achieve the dual purpose of cleaning the furnace and preheating the chips. Existing waste heat utilization equipment struggles to convert the hot air inside the annealing furnace into continuous warm air for extended periods. Utility Model Content

[0004] To address the shortcomings of existing technologies, this utility model provides a large-size chip annealing furnace, which solves the technical problem that existing annealing furnaces cannot convert the internal hot air into continuous warm air and deliver it into the annealing furnace for a long time. By continuously blowing air at a suitable temperature into the annealing furnace, the furnace can achieve the dual purpose of cleaning dust and preheating the chips.

[0005] To solve the above-mentioned technical problems, the present invention provides the following technical solution: a large-size chip annealing furnace, including a frame and an annealing furnace chamber, wherein a gas mixing component for utilizing the waste heat inside the annealing furnace chamber is installed inside the frame;

[0006] The gas mixing assembly includes a gas mixing tank fixedly connected to the frame. A plurality of three-way valves are connected to one side of the gas mixing tank. The gas mixing tank is connected to the furnace liner of the annealing furnace through the three-way valves. A semi-cylinder with one end extending into the three-way valve is provided inside the gas mixing tank. A metal plate is fixedly connected to the end of the semi-cylinder away from the three-way valve. Elastic fins are fixedly connected to both sides of the metal plate.

[0007] Furthermore, the elastic fins include small fins near one end of the semi-cylinder and large fins away from the other end of the semi-cylinder, and insulation plates for covering the large fins are fixedly connected to both sides of the metal plate.

[0008] Furthermore, both the small fin and the large fin include an elastic part, a middle part, and an arc-shaped part. The elastic part is fixedly connected to the metal plate and perpendicular to its direction. The middle part is fixedly connected to the elastic part and parallel to the direction of the metal plate. The arc-shaped part is fixedly connected to the middle part.

[0009] Furthermore, an inclined mesh is installed on the outside of the metal plate, and a waste bin corresponding to the inclined mesh is installed on the bottom inner side of the mixing tank.

[0010] Furthermore, the bottom of the inclined mesh is provided with a limiting groove adapted to the metal plate, and the top of the metal plate is fixedly connected with a stop block that limits the inclined mesh from both sides. An inclined plate is fixedly connected to the side of the inclined mesh away from the semi-cylinder.

[0011] Furthermore, multiple protrusions are fixedly connected to the inner bottom of the mixing tank, and semi-circular plates are fixedly connected to both sides of the waste bin, with anti-slip strips provided on the top of the semi-circular plates.

[0012] By employing the above technical solution, this utility model provides a large-size chip annealing furnace, which has at least the following beneficial effects:

[0013] 1. This utility model, through the setting of the gas mixing component, utilizes the change in airflow direction from the annealing furnace chamber into the gas mixing tank and from the gas mixing tank into the annealing furnace chamber to change the surface area of ​​the metal plate and elastic fins at different stages. This allows for a longer period of heating of the surrounding air, converting the hot air inside the annealing furnace into continuous warm air and then delivering it into the annealing furnace for an extended period. By continuously blowing air at a suitable temperature into the annealing furnace, the dual purpose of cleaning the annealing furnace and preheating the chips is achieved.

[0014] 2. This utility model improves the absorption rate of residual heat in the annealing furnace by setting elastic fins, while slowing down the transfer of absorbed heat to the outside, thereby extending the time for continuously supplying heated air into the annealing furnace using the residual heat inside the furnace.

[0015] 3. This utility model, through the setting of the inclined net and waste bin, can clean and collect impurities in the annealing furnace during the utilization of waste heat in the annealing furnace, reducing the difficulty of cleaning impurities in the annealing furnace.

[0016] 4. In this invention, some of the air continues to move along the inclined plate towards the metal plate, prolonging the time for the hot air to transfer heat along the metal plate, so that more of the residual heat in the annealing furnace is transferred to the metal plate and the elastic fins. Attached Figure Description

[0017] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:

[0018] Figure 1 This is a schematic diagram of the annealing furnace of this utility model;

[0019] Figure 2 This is a schematic diagram of the structure of the air-mixing component of this utility model;

[0020] Figure 3 This is a partial cross-sectional view of the air-fuel mixing component of this utility model;

[0021] Figure 4 This is a schematic diagram of the internal components of the mixing tank of this utility model;

[0022] Figure 5 This is a schematic diagram of the structure of the semi-cylinder, metal plate and elastic fins of this utility model.

[0023] In the diagram: 1. Frame; 2. Annealing furnace liner; 3. Mixing assembly; 31. Mixing tank; 32. Three-way valve; 33. Semi-cylinder; 34. Metal plate; 35. Elastic fin; 351. Small fin; 352. Large fin; 353. Insulation board; 4. Elastic part; 5. Middle part; 6. Arc-shaped part; 7. Inclined mesh; 8. Waste bin; 9. Stop block; 10. Inclined plate; 11. Protrusion; 12. Semi-circular plate. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] Example

[0026] To achieve the goal of collecting hot air inside the annealing furnace and continuously supplying warm air into the furnace by reducing the temperature and extending the time, please refer to... Figures 1-5This embodiment proposes a large-size chip annealing furnace, including a frame 1 and an annealing furnace chamber 2. The frame 1 is equipped with a gas mixing assembly 3 for utilizing the residual heat in the annealing furnace chamber 2. The gas mixing assembly 3 includes a gas mixing tank 31 fixedly connected to the frame 1. One side of the gas mixing tank 31 is connected to multiple three-way valves 32. The gas mixing tank 31 is connected to the annealing furnace chamber 2 through the three-way valves 32. The gas mixing tank 31 is provided with a semi-cylinder 33 with one end extending into the three-way valve 32. The end of the semi-cylinder 33 away from the three-way valve 32 is fixedly connected to a metal plate 34. Both sides of the metal plate 34 are fixedly connected to elastic fins 35.

[0027] During use, the three-way valve 32 is closed, and the air inside the annealing furnace chamber 2 does not circulate with the air inside the mixing tank 31. At this time, the chip is placed into the annealing furnace chamber 2, and then the heating system is started to heat the inside of the annealing furnace chamber 2. The heating parameters are as follows: temperature 200-700℃, heating rate ≤5-20℃ / min, temperature control method adopts intelligent instrument PID control, 30 program segments can be set for multiple temperature control, which is intelligent and convenient. The thermocouple adopts K-type thermocouple suitable for medium and high temperature range, which has the characteristics of fast response and long service life. At the same time, it is used in conjunction with the in-tube temperature measuring thermocouple to maximize the temperature field uniformity and improve the repeatability of the experiment. There are 2 temperature control points. The furnace chamber adopts an upper and lower half assembly structure, and each half of the furnace chamber is independently temperature controlled to improve the temperature field uniformity.

[0028] The high temperature inside the annealing furnace chamber 2 is transferred to the three-way valve 32, which heats up the valve. Then, through thermal conduction, the heat is slowly transferred to the semi-cylinder 33, the metal plate 34, and the elastic fins 35, pre-storing some heat. After the chip completes the heating and heat preservation process inside the annealing furnace chamber 2, the three-way valve 32 is opened, and a vortex vacuum pump is used to draw the high-temperature air inside the annealing furnace chamber 2 into the mixing tank 31. The hot air flowing from the annealing furnace chamber 2 into the mixing tank 31 transfers heat to the elastic fins 35 on one hand, and pushes the elastic fins 35 to bend away from the metal plate 34 on the other hand, so that the elastic fins 35 are no longer attached to the metal plate 34, increasing the overall surface area of ​​the metal plate 34 and the elastic fins 35, and accelerating the speed at which heat is transferred to the metal plate 34 and the elastic fins 35.

[0029] After all the hot air inside the annealing furnace chamber 2 is drawn into the mixing tank 31, the three-way valve 32 is closed, the annealing furnace chamber 2 is opened, and the chips inside are allowed to cool before being removed. Then, the next batch of chips is placed into the annealing furnace chamber 2. The three-way valve 32 is then opened again, and the vortex vacuum pump gradually returns the air inside the annealing furnace chamber 2. At this time, because the elastic fins 35 are tightly attached to the metal plate 34, the overall surface area of ​​the elastic fins 35 and the metal plate 34 is reduced. The hot air inside the mixing tank 31 is first sent into the annealing furnace chamber 2, and then the external cold air is sent into the mixing tank 31 by the vortex vacuum pump. The cold air passes through the metal plate 34 and the elastic fins 35... When the fins 35 are heated, the heated air continues to be sent into the annealing furnace chamber 2. Since the surface area of ​​the metal plate 34 and the elastic fins 35 is relatively small, the heat is transferred to the surrounding air at a slower speed. By changing the airflow direction from the annealing furnace chamber 2 into the mixing tank 31 and from the mixing tank 31 into the annealing furnace chamber 2, the surface area of ​​the metal plate 34 and the elastic fins 35 at different stages can be changed. This allows the surrounding air to be heated for a longer period of time, thus converting the hot air inside the annealing furnace into continuous warm air and delivering it into the annealing furnace for a long time. By continuously blowing air at a suitable temperature into the annealing furnace, the dual purpose of cleaning the annealing furnace and preheating the chips is achieved.

[0030] To prolong the time that the metal plate 34 and the elastic fins 35 can heat the surrounding air, refer to Figure 5 The elastic fin 35 includes a small fin 351 near one end of the semi-cylinder 33 and a large fin 352 away from the other end of the semi-cylinder 33. Both sides of the metal plate 34 are fixedly connected with insulation plates 353 for covering the large fin 352. In use, the hot air flowing from the furnace chamber 2 of the annealing furnace to the mixing tank 31 first comes into contact with the small fin 351. Since the area of ​​the small fin 351 is small, its blocking effect on the air is also small. Some air will flow to the large fin 352. At the same time, the airflow pushes the ends of the small fin 351 and the large fin 352 away from the metal plate 34, increasing the overall heat absorption speed of the metal plate 34 and the elastic fin 35.

[0031] As air flows from the mixing tank 31 into the furnace chamber 2 of the annealing furnace, the large fins 352 are mostly blocked by the insulation plate 353, which reduces the speed at which heat from the metal plate 34 and the elastic fins 35 is transferred to the surrounding air. The large fins 352 only serve to store heat and then slowly transfer the heat to the surrounding air, thereby increasing the speed of absorbing residual heat in the annealing furnace and slowing down the speed of transferring the absorbed heat outward. This prolongs the time for the heated air to be continuously supplied to the annealing furnace using the residual heat inside the furnace.

[0032] To achieve the goal of adjusting the overall surface area of ​​the metal plate 34 and the elastic fins 35 according to different airflow directions, refer to Figure 5 Both the small fin 351 and the large fin 352 include an elastic part 4, a middle part 5 and an arc-shaped part 6. The elastic part 4 is fixedly connected to the metal plate 34 and perpendicular to its direction. The middle part 5 is fixedly connected to the elastic part 4 and parallel to the direction of the metal plate 34. The arc-shaped part 6 is fixedly connected to the middle part 5.

[0033] In use, the elastic part 4 drives the middle part 5 to adhere to the surface of the metal plate 34. Only when air flows from the inside of the annealing furnace liner 2 to the mixing tank 31, the flowing air pushes the arc-shaped part 6, thereby driving the middle part 5 away from the metal plate 34. This achieves the purpose of increasing the overall surface area of ​​the metal plate 34 and the elastic fin 35 when the hot air inside the annealing furnace liner 2 flows to the mixing tank 31.

[0034] In order to collect impurities from the annealing furnace, refer to Figure 4 An inclined mesh 7 is installed on the outside of the metal plate 34. A waste bin 8 corresponding to the inclined mesh 7 is installed on the bottom inner side of the mixing tank 31. A limiting groove adapted to the metal plate 34 is opened at the bottom of the inclined mesh 7. A stop block 9 is fixedly connected to the top of the metal plate 34 to limit the inclined mesh 7 from both sides. An inclined plate 10 is fixedly connected to the side of the inclined mesh 7 away from the semi-cylinder 33. Multiple protrusions 11 are fixedly connected to the bottom inner side of the mixing tank 31. Semi-circular plates 12 are fixedly connected to both sides of the waste bin 8. Anti-slip strips are provided on the top of the semi-circular plates 12.

[0035] During use, hot air inside the furnace chamber 2 of the annealing furnace is drawn into the mixing tank 31. The air passes through the inclined mesh 7, and some of the air continues to move along the inclined plate 10 towards the metal plate 34, prolonging the time for the hot air to transfer heat along the metal plate 34. This allows more of the residual heat in the annealing furnace to be transferred to the metal plate 34 and the elastic fins 35. Impurities in the air are blocked by the inclined mesh 7 and then fall into the waste bin 8 along the inclined mesh 7. When it is necessary to clean the impurities collected inside the mixing tank 31, the waste bin 8 is taken out, and then the inclined mesh 7 is moved upward until it detaches from the metal plate 34. The impurities inside the waste bin 8 are then poured out, and the inclined mesh 7 and the waste bin 8 are cleaned. Finally, the cleaned inclined mesh 7 and the waste bin 8 are put back into the mixing tank 31. This method can clean and collect impurities in the annealing furnace during the utilization of residual heat, reducing the difficulty of cleaning impurities in the annealing furnace.

[0036] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0037] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A large size chip annealing furnace comprising a frame (1) and an annealing furnace can (2), characterized in that, The frame (1) is internally provided with a mixed gas assembly (3) for utilizing the residual heat in the annealing furnace baffle (2); The mixed gas assembly (3) comprises a mixed gas tank (31) fixedly connected with the frame (1), a plurality of three-way valves (32) are communicated with one side of the mixed gas tank (31), the mixed gas tank (31) is communicated with the annealing furnace baffle (2) through the three-way valves (32), and a semicylinder (33) extending to the inside of the three-way valves (32) is arranged in the mixed gas tank (31). The semicylinder (33) is fixedly connected with a metal plate (34) away from the three-way valves (32), and the metal plate (34) is fixedly connected with elastic fins (35) on both sides.

2. The large size chip annealing furnace according to claim 1, wherein, The elastic fins (35) comprise small fins (351) close to one end of the semicylinder (33) and large fins (352) away from one end of the semicylinder (33), and heat preservation plates (353) for covering the large fins (352) are fixedly connected with the metal plate (34) on both sides.

3. A large chip annealing furnace according to claim 2, wherein The small fins (351) and the large fins (352) all comprise elastic portions (4), intermediate portions (5) and arc-shaped portions (6), the elastic portions (4) are fixedly connected with the metal plate (34) and perpendicular to the direction of the metal plate (34), the intermediate portions (5) are fixedly connected with the elastic portions (4) and parallel to the direction of the metal plate (34), and the arc-shaped portions (6) are fixedly connected with the intermediate portions (5).

4. The large size chip annealing furnace according to claim 1, wherein, An inclined net (7) is arranged outside the metal plate (34), and a waste box (8) corresponding to the inclined net (7) is arranged at the inner bottom of the mixed gas tank (31).

5. A large chip annealing furnace according to claim 4, wherein A limiting groove adapted to the metal plate (34) is formed in the bottom of the inclined net (7), the top of the metal plate (34) is fixedly connected with a stop block (9) limiting the inclined net (7) from both sides, and an inclined plate (10) is fixedly connected with the side of the inclined net (7) away from the semicylinder (33).

6. The large size chip annealing furnace according to claim 4, wherein, A plurality of convex blocks (11) are fixedly connected with the inner bottom of the mixed gas tank (31), semicircular plates (12) are fixedly connected with both sides of the waste box (8), and antiskid strips are arranged on the top of the semicircular plates (12).

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