Film inspection product rewinding device and film inspection product system provided with same

Abstract

The utility model provides a film inspection product recoiling device and a film inspection product system with the film inspection product recoiling device. A film inspection rewinding device (1) is provided with: a feeding unit (2) for feeding a long-strip-shaped film (10) that is wound into a roll; an inspection unit (3) that is disposed on the downstream side of the feeding unit (2) and that inspects defects in the fed film; a mark adding unit (4) that is disposed on the downstream side of the inspection unit and adds a mark to the film on the basis of the presence or absence of a defect in the film; and a winding part (5) which is arranged on the downstream side of the mark adding part and winds the film into a roll shape. According to the film inspection product rewinding device, defects of a film can be inspected with high precision and high efficiency when the film which is wound into a roll shape is rewound.

Description

Technical Field

[0001] This utility model relates to a membrane inspection rewinding device and a membrane inspection system equipped with the membrane inspection rewinding device. Background Technology

[0002] Various types of films with different functions are used in semiconductor manufacturing processes, such as laminates of adhesive films (die mounting films) and release liner, laminates of die mounting films (DAF) and dicing tapes (DC / T), and dicing tape monomers. Intermediate products obtained by rolling these films into rolls are then used in subsequent manufacturing processes.

[0003] Previously, defects in rolled-up films were inspected visually. This manual inspection was inefficient and prone to oversights. Moreover, the high time required for manual inspection resulted in high inspection costs. Utility Model Content

[0004] The problem to be solved by utility models

[0005] This invention provides a membrane inspection rewinding device and a membrane inspection system equipped with the membrane inspection rewinding device, which can inspect membrane defects with high precision and high efficiency.

[0006] Technical solutions for solving the problem

[0007] [1] A membrane inspection rewinding device, characterized in that it comprises: a feeding section for feeding out a strip of membrane rolled into a roll; an inspection section disposed downstream of the feeding section for inspecting defects in the fed membrane; a marking attachment section disposed downstream of the inspection section for attaching a mark to the membrane based on whether the membrane has defects; and a winding section disposed downstream of the marking attachment section for winding the membrane into a roll.

[0008] [1] The membrane inspection rewinding device involved has an inspection section and a marking attachment section, so it can inspect membrane defects with high precision and efficiency, and can mark the defective parts.

[0009] [2] In the membrane inspection rewinding device described in [1], the inspection unit is characterized by having at least one reflective inspection machine.

[0010] [2] The membrane inspection rewinding device involved is equipped with at least one reflective inspection machine, so it can inspect defects with high precision and high efficiency.

[0011] [3] In the membrane inspection rewinding apparatus described in [1] or [2], the inspection section is characterized by having at least one transmission inspection machine.

[0012] [3] The membrane inspection rewinding device involved has at least one through inspection machine, which can further improve the inspection accuracy of defects.

[0013] [4] In the membrane inspection rewinding device described in [2], the at least one reflective inspection machine comprises: a first reflective inspection machine that inspects the membrane in a flat state; and a second reflective inspection machine that inspects the membrane in a bent state.

[0014] [4] The membrane inspection rewinding device involved can further improve the inspection accuracy of defects by combining multiple reflective inspection machines.

[0015] [5] In the membrane inspection rewinding device described in [4], the first reflective inspection machine comprises: a first projector disposed on one side of the membrane to irradiate light onto the inspection area of ​​the membrane in a flat state; a first reflective member disposed separately from the membrane on the other side of the membrane to diffusely reflect the light irradiated by the first projector; and a first image analysis device disposed on one side of the membrane to perform image analysis on the inspection area.

[0016] [5] The reflective inspection machine of the membrane inspection rewinding device involved can inspect membrane defects by diffuse reflection of light, thus further improving the inspection accuracy of defects.

[0017] [6] In the membrane inspection rewinding device described in [4] or [5], the second reflective inspection machine comprises: a second projector disposed on one side of the membrane to irradiate light onto the inspection area of ​​the membrane in a bent state; a second reflective member disposed on the other side of the membrane to contact the membrane and bend the membrane, and reflect the light irradiated from the projector; and a second image analysis device disposed on one side of the membrane to perform image analysis on the inspection area.

[0018] [6] The reflective inspection machine of the membrane inspection rewinding device involved can inspect membrane defects by reflecting light, thus further improving the inspection accuracy of defects.

[0019] [7] In the membrane inspection rewinding device described in [3], the transmissive inspection machine comprises: a third light projector disposed on the other side of the membrane to irradiate light onto the inspection area of ​​the membrane in a flat state; and a third image analysis device disposed on one side of the membrane to perform image analysis on the inspection area.

[0020] [7] The membrane inspection rewinding device involved can inspect membrane defects by light transmission, thus further improving the inspection accuracy of defects. Moreover, by combining a transmission inspection machine and a reflection inspection machine, the inspection accuracy of defects can be further improved.

[0021] [8] A membrane inspection system, characterized in that it comprises a membrane inspection rewinding device as described in any one of [1] to [7], and a re-inspection rewinding device for a user to visually inspect the membrane inspected by the membrane inspection rewinding device, the re-inspection rewinding device comprising: a re-inspection delivery section for delivering a membrane rolled into a roll; an inspection worktable disposed downstream of the delivery section for a user to visually inspect the defects of the delivered membrane; and a re-inspection take-up section disposed downstream of the inspection worktable for taking the membrane into a roll, the inspection worktable having a fourth light projector disposed on the lower surface side of the membrane for irradiating light onto the inspection area of ​​the membrane in a flat state, and forming a space on the upper surface side of the membrane for the user to visually inspect the membrane.

[0022] [8] The membrane inspection system involved has a membrane inspection rewinding device that can automatically inspect membrane defects and a re-inspection rewinding device located downstream of it. Therefore, it can ensure the inspection accuracy of membrane defects and can also repair the defects while reconfirming the defects of the membrane.

[0023] Effects of the utility model

[0024] According to this invention, defects in a rolled-up film can be inspected with high precision and efficiency when the film is rewound. Attached Figure Description

[0025] Figure 1 This is a schematic diagram showing the structure of the membrane inspection and rewinding device of this utility model.

[0026] Figure 2 This is a schematic diagram showing the structure of the re-inspection and rewinding device of the membrane inspection system of this utility model. Detailed Implementation

[0027] Automatic Inspection and Rewinding Machine

[0028] exist Figure 1 The image shows the membrane inspection and rewinding device of this utility model. Figure 1 In the middle, the right side is the upstream side of the membrane's transport direction, and the left side is the downstream side of the membrane's transport direction.

[0029] The automatic inspection and rewinding machine 1 is used in the automatic inspection and rewinding process, and is equivalent to the film inspection and rewinding device of this utility model. The film 10, which is a laminate of chip mounting film (DAF) and cutting tape (DC / T), is equivalent to the film of this utility model. The film of this utility model is not limited to a laminate of chip mounting film (DAF) and cutting tape (DC / T), but can be various sheets such as chip mounting film and cutting tape.

[0030] like Figure 1As shown, the automatic inspection and rewinding machine 1 includes: a feed roller 2 that feeds out a long strip of film 10 rolled into a roll; an inspection section 3 located downstream of the feed roller 2 that inspects the fed film for defects; a marking attachment section 4 located downstream of the inspection section that marks the film based on whether it has defects; and a take-up roller 5 located downstream of the marking attachment section that takes the film into a roll. In other words, the automatic inspection and rewinding machine 1 has the feed roller 2, inspection section 3, marking attachment section 4, and take-up roller 5 arranged sequentially from upstream to downstream in the film conveying direction. The automatic inspection and rewinding machine 1 conveys the long strip of film 10 from the feed roller 2 through the inspection section 3 and the marking attachment section 4 to the take-up roller 5. Multiple conveying rollers 6 for conveying the film 10 are provided between the feed roller 2 and the take-up roller 5.

[0031] The delivery roller 2 has film 10 wound on it, which is equivalent to the delivery part of this utility model. The take-up roller 5 winds the inspected film 10 into a roll, which is equivalent to the take-up part of this utility model.

[0032] The inspection unit 3 can be equipped with various inspection machines. For example, the inspection unit 3 can be equipped with at least one of a reflection inspection machine 7, a reflection inspection machine 8, and a transmission inspection machine 9. It should be noted that the number of inspection machines is not limited to 3, but can also be 1, 2, or more than 4. The reflection inspection machine 7 corresponds to the first reflection inspection machine of this utility model. The reflection inspection machine 8 corresponds to the second reflection inspection machine of this utility model.

[0033] In this invention, the reflective inspection machine 7, the reflective inspection machine 8, and the transmissive inspection machine 9 are arranged from upstream to downstream in the film conveying direction between the delivery roller 2 and the marking attachment part 4.

[0034] The reflective inspection machine 7 includes: a first projector 71 disposed on the upper surface 10a side of the membrane 10, which irradiates light onto the inspection area of ​​the membrane in a flat state; a first reflective member 72 disposed separately from the membrane 10 on the lower surface 10b side of the membrane 10, which reflects the light irradiated from the first projector 71; and a first image analysis device 73 disposed on the upper surface 10a side of the membrane 10, which performs image analysis on the inspection area. Here, as an example, the upper surface of the membrane is designated as one side of the present invention, and the lower surface of the membrane is designated as the other side. Of course, the upper surface of the membrane can also be designated as the other side of the present invention, and the lower surface of the membrane as one side.

[0035] The first reflective member 72, for example, is a white plate that does not contact the membrane 10. It diffusely reflects light from the first projector 71 to the first image resolution device 73. The first image resolution device 73 uses the diffusely reflected light from the first reflective member 72 to check whether there are fibrous foreign objects or the like on the membrane 10.

[0036] The reflective inspection machine 8 includes: a second projector 81 disposed on the upper surface 10a side of the membrane 10, which irradiates light onto the inspection area of ​​the membrane 10 in a bent state; a second reflective member 82 disposed on the lower surface 10b side of the membrane 10, which contacts the membrane 10 to bend the membrane 10 and reflect the light emitted from the second projector 81; and a second image analysis device 83 disposed on the upper surface 10a side of the membrane 10, which performs image analysis on the inspection area.

[0037] The second reflective member 82, for example, is a black roller wound around the film 10, which reflects light from the second projector 81 to the second image analysis device 83. The second image analysis device 83 uses the reflected light from the second reflective member 82 to check whether there are streaks, stains, etc. on the film 10.

[0038] The inspection machine 9 includes: a third light projector 91 disposed on the lower surface 10b side of the membrane 10 to illuminate the inspection area of ​​the membrane 10 in a flat state; and a third image analysis device 93 disposed on the upper surface 10a side of the membrane 10 to perform image analysis on the inspection area. The third image analysis device 93 uses the transmitted light through the membrane 10 to inspect the membrane 10 for foreign objects, fisheyes, etc.

[0039] The first image analysis device 73, the second image analysis device 83, and the third image analysis device 93 are all known image analysis devices, such as including a camera that captures images of the inspection area and an analysis component that analyzes the images captured by the camera. The analysis component has built-in or installed known analysis software or hardware for analyzing images.

[0040] The label attachment 4 includes a label roller and a label wound on the label roller. If any of the reflective inspection machine 7, reflective inspection machine 8, and transmissive inspection machine 9 determines that the film 10 is defective, the label is affixed to the defective area of ​​the film 10 or its vicinity. It should be noted that, in order to facilitate the removal of the label in a process after the automatic inspection and rewinding process, it is preferable that a portion of the label affixed to the film 10 protrudes slightly from the product roller.

[0041] The take-up roller 5 is located downstream of the marking attachment section 4 and takes up the film 10, which may be labeled, after it has been inspected by the marking attachment section 4. The film 10 taken by the take-up roller 5 is shipped out or transferred to a process after the automatic inspection and rewinding process, etc.

[0042] It should be noted that, although not shown in the figure, the inspection results of the inspection unit 3 can be displayed on a display device such as a computer monitor. Based on the inspection results, the user can quickly and accurately repair defects in the membrane 10.

[0043] The automatic inspection and rewinding machine according to this utility model can inspect film defects with high precision and high efficiency.

[0044] <Inspection Rewinding Machine>

[0045] A rewinding machine 11 is provided downstream of the automatic rewinding machine 1 as a rewinding device for inspected products. The rewinding machine 11 includes: a rewinding feed roller 12 for feeding out the film 10; an inspection worktable 13 located downstream of the feed roller 12 for visual inspection of defects in the fed film 10 by a user; and a rewinding take-up roller 15 located downstream of the inspection worktable 13 for winding the film 10 into a roll. The feed roller 12 and the take-up roller 15 correspond to the rewinding feed section and the rewinding take-up section of this invention, respectively. It should be noted that the rewinding machine 11 can be located adjacent to the automatic rewinding machine 1 downstream of the automatic rewinding machine 1, or it can be located downstream of the automatic rewinding machine 1 via other devices.

[0046] The semi-transparent inspection worktable 13 has a fourth light projector 16, which is disposed on the lower surface 10b side of the film 10 to illuminate the inspection area of ​​the flat film 10. A space 17 is formed on the upper surface 10a side of the film 10 for the user to visually inspect the film. In this way, the user can visually inspect the portion of the film 10 between the arrival re-inspection feed roller 12 and the re-inspection take-up roller 15 by means of through-scan inspection. That is, the film 10 can be re-inspected by a person while it is being rewound. For example, by re-inspecting the portion of the film 10 that has been labeled by the marking attachment part 4 of the automatic inspection rewinding machine 1, defective parts can be reconfirmed. Of course, the user can also randomly inspect any part of the film 10 arriving at the inspection worktable 13 by visual inspection.

[0047] If further inspection of the film 10 delivered from the automatic inspection and rewinding machine 1 is required, the user visually inspects the film 10 in space 17. Based on the confirmed defects identified by the automatic inspection and rewinding machine 1, the defects are repaired.

[0048] The rewinding device for re-inspected products according to this utility model can further improve the inspection accuracy of film defects and repair them.

[0049] <Membrane Inspection System>

[0050] The membrane inspection system of this invention includes an automatic inspection and rewinding machine 1 and an inspection and rewinding machine 11 disposed downstream therefrom. According to this membrane inspection system, defects in the membrane can be inspected with high precision, and defects can also be repaired.

[0051] Figure label description

[0052] 1. Automatic inspection and rewinding machine 2. Feeding roller 3. Inspection unit 4. Marking attachment unit 5. Take-up roller 6. Conveyor roller 7. Reflection inspection machine 71. First projector 72. First reflective component 73. First image analysis device 8. Second reflection inspection machine 81. Second projector 82. Second reflective component 83. Second image analysis device 9. Transmission inspection machine 91. Third projector 93. Third image analysis device 10. Film 10a. One side 10b. Another side 11. Re-inspection and rewinding device 12. Re-inspection feeding roller 13. Inspection worktable 14. Conveyor roller 15. Re-inspection take-up roller 16. Fourth projector 17. Space.

Claims

1. A film product weight checking and rewinding device, characterized by comprising: The device comprises: a feeding section for feeding out a long strip of film wound into a roll; an inspection section disposed downstream of the feeding section for inspecting defects in the fed film; a marking attachment section disposed downstream of the inspection section for attaching marks to the film based on the presence or absence of defects; and a winding section disposed downstream of the marking attachment section for winding the film into a roll. The inspection unit includes at least one reflective inspection machine. The at least one reflection inspection machine includes: a first reflection inspection machine that inspects the membrane in a flat state; and a second reflection inspection machine that inspects the membrane in a bent state.

2. The membrane inspection sample rewinding device according to claim 1, characterized in that, The inspection unit includes at least one through-hole inspection machine.

3. The membrane inspection sample rewinding device according to claim 1, characterized in that, The first reflective inspection machine includes: a first projector disposed on one side of the membrane to irradiate light onto the inspection area of ​​the membrane in a flat state; a first reflective member disposed separately from the membrane on the other side of the membrane to diffusely reflect the light irradiated by the first projector; and a first image analysis device disposed on one side of the membrane to perform image analysis on the inspection area.

4. The membrane inspection rewinding device according to claim 1 or 3, characterized in that, The second reflective inspection machine includes: a second projector disposed on one side of the membrane to irradiate light onto the inspection area of ​​the membrane in a bent state; a second reflective member disposed on the other side of the membrane to contact the membrane and bend it, and reflect the light emitted from the projector; and a second image analysis device disposed on one side of the membrane to perform image analysis on the inspection area.

5. A film product weight checking and rewinding apparatus characterized by comprising: The device comprises: a feeding section for feeding out a long strip of film wound into a roll; an inspection section disposed downstream of the feeding section for inspecting defects in the fed film; a marking attachment section disposed downstream of the inspection section for attaching marks to the film based on the presence or absence of defects; and a winding section disposed downstream of the marking attachment section for winding the film into a roll. The inspection unit includes at least one through-hole inspection machine. The transmission inspection machine includes: a third light projector disposed on the other side of the membrane to illuminate the inspection area of ​​the membrane in a flat state; and a third image analysis device disposed on one side of the membrane to perform image analysis on the inspection area.

6. A film inspection system characterized by, The device comprises a membrane inspection rewinding apparatus according to any one of claims 1 to 5, and a re-inspection rewinding apparatus for allowing a user to visually re-inspect the membrane that has been inspected by the membrane inspection rewinding apparatus. The re-inspection rewinding device includes: a re-inspection product delivery unit that delivers a long strip of film wound into a roll; an inspection worktable disposed downstream of the delivery unit for a user to visually inspect the delivered film for defects; and a re-inspection product take-up unit disposed downstream of the inspection worktable for winding the film into a roll. The inspection station has a fourth light projector configured on the lower surface side of the film to irradiate light on an inspection region of the film in a flat state, A space for a user to visually inspect the film is formed on the upper surface side of the film.

Images