Optical path compensation adjusting system

Abstract

An optical path compensation adjusting system relates to the technical field of optical path adjustment. A laser part of the system emits first laser and second laser; the delay line adjusting part comprises a driver, and a first reflecting mirror and a second reflecting mirror which are arranged along a light path; the first laser enters the sum frequency part, and the second laser enters the sum frequency part after being reflected by the first reflecting mirror and the second reflecting mirror in sequence; the sum frequency part mixes the first laser and the second laser so as to emit sum frequency laser to the detector; the detector receives the sum frequency laser and generates a feedback signal, and the driver drives the second reflecting mirror to move in the first direction to be close to or away from the first reflecting mirror according to the feedback signal and / or drives the second reflecting mirror to rotate; and / or driving a second reflector to move along a second direction, the first direction is perpendicular to the emitting direction of the first laser, and the first direction is perpendicular to the second direction. The system can monitor the sum frequency effect in real time, realizes dynamic compensation optical path adjustment, and improves the adjustment efficiency, stability and precision.

Description

An optical path compensation adjustment system Technical Field

[0001] This utility model relates to the field of optical path adjustment technology, and more specifically, to an optical path compensation adjustment system. Background Technology

[0002] In the fields of ultrafast lasers and multi-wavelength pulsed sum-frequency, precise adjustment of the optical path difference is crucial for achieving spatiotemporal synchronization of multi-wavelength lasers. However, environmental vibrations, temperature changes, and component replacements can dynamically alter the optical path, leading to a decrease in sum-frequency efficiency or even failure.

[0003] Existing technologies adjust the optical path length using a delay line displacement stage, such as by manually or electrically moving the mirror assembly or increasing or decreasing the number of mirrors. However, such adjustment methods lack the ability to adaptively correct for environmental disturbances and component errors, require frequent manual calibration, reduce laser efficiency, and have low adjustment accuracy. Summary of the Invention

[0004] The purpose of this invention is to provide an optical path compensation adjustment system that can automatically compensate and adjust according to environmental disturbances and component errors, thereby improving laser efficiency and adjustment accuracy.

[0005] The embodiments of this utility model are implemented as follows:

[0006] In one aspect, this utility model provides an optical path compensation adjustment system, including a laser unit, a delay line adjustment unit, a frequency summing unit, and a detector; the laser unit is used to emit a first laser and a second laser; the delay line adjustment unit is disposed between the laser unit and the frequency summing unit, including a driver, a first reflector and a second reflector arranged sequentially along the optical path, the second reflector being driven and connected to the driver; the first laser is directly incident on the frequency summing unit, and the second laser is incident on the frequency summing unit after being reflected sequentially by the first reflector and the second reflector; the frequency summing unit is used to mix the first laser and the second laser to emit a frequency summing laser towards the detector; the detector is signal-connected to the driver, the detector receives the frequency summing laser and generates a feedback signal, the driver drives the second reflector to move along a first direction to move closer to or further away from the first reflector according to the feedback signal, and / or drives the second reflector to rotate to adjust the angle between the mirror normal of the second reflector and the optical axis of the second laser reflected by the first reflector; and / or drives the second reflector to move relative to the first reflector along a second direction; the first direction is perpendicular to the emission direction of the first laser, and the first direction is perpendicular to the second direction.

[0007] Optionally, the delay line adjustment unit further includes a third and a fourth reflecting mirror disposed along the optical path. The third reflecting mirror is disposed along the second reflecting mirror in a second direction; the fourth reflecting mirror is disposed along the first direction and along the second direction with the third reflecting mirror; the second laser is incident on the frequency section after being reflected sequentially by the first, second, third, and fourth reflecting mirrors; the driver drives the second and third reflecting mirrors to move along the first direction to move closer to or further away from the first reflecting mirror according to the feedback signal, and / or drives the second and third reflecting mirrors to rotate to adjust the angle between the mirror normal of the second reflecting mirror and the optical axis of the second laser reflected by the first reflecting mirror and the angle between the mirror normal of the third reflecting mirror and the optical axis of the second laser reflected by the second reflecting mirror, and / or drives the second and third reflecting mirrors to move relative to the first and fourth reflecting mirrors in the second direction.

[0008] Optionally, the delay line adjustment section includes a sliding groove arranged along a first direction and a slider disposed in the sliding groove; the second reflector is rotatably and adjustablely disposed on the slider; the driver is driven to drive the slider to move the second reflector along the sliding groove to move closer to or away from the first reflector.

[0009] Optionally, the slider includes a sliding frame and a support plate. A sliding rod is inserted through the sliding frame along the second direction, and the support plate is sleeved on the outside of the sliding rod and slides along the second direction via the sliding rod.

[0010] Optionally, the sliding groove has a guide plate set in a first direction, the slider is set on the guide plate, and the driver can drive the slider to slide along the guide plate.

[0011] Optionally, the delay line adjustment part further includes a fine-tuning part; the side wall of the sliding groove has a through groove extending in the first direction, the fine-tuning part passes through the through groove and is fixedly connected to the side wall of the slider; by sliding the fine-tuning part along the through groove, the slider can be driven to slide along the sliding frame.

[0012] Optionally, the third reflector is rotatably mounted on the slider.

[0013] Optionally, the laser unit includes a first laser and a second laser, wherein the first laser is used to emit a first laser beam and the second laser is used to emit a second laser beam.

[0014] Optionally, the optical path compensation adjustment system also includes a processing platform located between the detector and the sum-frequency unit; the sum-frequency laser is emitted sequentially from the sum-frequency unit to the processing platform and the detector.

[0015] Optionally, the surfaces of the first and second reflectors are also covered with a high-reflectivity film.

[0016] The beneficial effects of this utility model include:

[0017] This application provides an optical path compensation adjustment system, including a laser unit, a delay line adjustment unit, a frequency summing unit, and a detector. The laser unit emits a first laser and a second laser. The delay line adjustment unit is disposed between the laser unit and the frequency summing unit, and includes a driver, a first reflector, and a second reflector arranged sequentially along the optical path. The second reflector is driven and connected to the driver. The first laser directly incident on the frequency summing unit, and the second laser is incident on the frequency summing unit after being reflected sequentially by the first and second reflectors. The frequency summing unit mixes the first and second lasers to emit a frequency summing laser towards the detector. The detector is signal-connected to the driver, receives the frequency summing laser, and generates a feedback signal. The driver, based on a feedback signal, moves the second reflector along a first direction to move closer to or further away from the first reflector, thereby adjusting the optical path length and achieving linear compensation for the optical path difference; and / or, drives the second reflector to rotate to adjust the angle between the mirror normal of the second reflector and the optical axis of the second laser reflected by the first reflector; by changing the reflection angle, the light path is finely adjusted, suitable for precise correction of small optical path differences; and / or, drives the second reflector to move relative to the first reflector along a second direction, which can compensate for higher-order errors caused by unevenness of the reflector surface or optical path offset; the first direction is perpendicular to the emission direction of the first laser, and the first direction is perpendicular to the second direction. The above-mentioned optical path compensation adjustment system monitors the sum-frequency effect in real time through a detector, drives the delay line adjustment unit to dynamically compensate for changes in optical path, replaces manual calibration, and improves efficiency and stability; at the same time, combined with the translation, rotation, and lateral movement of the reflector, the adjustment accuracy is improved. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 is one of the structural schematic diagrams of the optical path compensation adjustment system provided in an embodiment of this utility model;

[0020] Figure 2 is a second schematic diagram of the optical path compensation adjustment system provided in an embodiment of this utility model;

[0021] Figure 3 is one of the structural schematic diagrams of the delay line adjustment section of the optical path compensation adjustment system provided in the embodiment of this utility model;

[0022] Figure 4 is a second schematic diagram of the delay line adjustment section of the optical path compensation adjustment system provided in this embodiment of the present invention.

[0023] Icons: 100 - Optical path compensation adjustment system; 110 - Laser unit; 111 - First laser; 111a - First laser; 112 - Second laser; 112a - Second laser; 120 - Delay line adjustment unit; 121 - First reflector; 122 - Second reflector; 123 - Driver; 124 - Third reflector; 125 - Fourth reflector; 126 - Sliding groove; 1261 - Through groove; 127 - Slider; 1271 - Sliding frame; 1272 - Support plate; 1273 - Sliding rod; 128 - Guide plate; 129 - Fine adjustment unit; 130 - Sum frequency unit; 140 - Detector; 150 - Processing platform; 160 - Sum frequency laser; a - First direction; b - Second direction. Detailed Implementation

[0024] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0025] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this utility model is in use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0026] Furthermore, terms such as "horizontal" and "vertical" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0027] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0028] Referring to Figure 1, this embodiment provides an optical path compensation adjustment system 100, including a laser unit 110, a delay line adjustment unit 120, a frequency summing unit 130, and a detector 140. The laser unit 110 is used to emit a first laser 111a and a second laser 112a. The delay line adjustment unit 120 is disposed between the laser unit 110 and the frequency summing unit 130, and includes a driver 123, a first reflector 121 and a second reflector 122 arranged sequentially along the optical path, with the second reflector 122 being drivenly connected to the driver 123. The first laser 111a is directly incident on the frequency summing unit 130, and the second laser 112a is incident on the frequency summing unit 130 after being reflected sequentially by the first reflector 121 and the second reflector 122. The frequency summing unit 130 is used to mix the first laser 111a and the second laser 112a. 11a and 112a are used to emit a sum-frequency laser 160 towards detector 140; detector 140 is signal-connected to driver 123, detector 140 receives the sum-frequency laser 160 and generates a feedback signal, driver 123 drives second reflector 122 to move along a first direction a to move closer to or further away from first reflector 121 according to the feedback signal, and / or drives second reflector 122 to rotate to adjust the angle between the mirror normal of second reflector 122 and the optical axis of second laser 112a reflected by first reflector 121; and / or drives second reflector 122 to move relative to first reflector 121 along a second direction b; first direction a is perpendicular to the emission direction of first laser 111a, and first direction a is perpendicular to second direction b.

[0029] Specifically, as shown in Figure 1, the laser unit 110 consistently emits two different lasers, namely a first laser 111a and a second laser 112a. These two lasers are transmitted through different optical paths and are ultimately mixed at the frequency mixing unit 130.

[0030] The first laser 111a, emitted from the laser unit 110, directly enters the frequency-switching unit 130, making its optical path relatively simple and direct. The second laser 112a, however, needs to pass through the delay line adjustment unit 120. The delay line adjustment unit 120 changes the transmission path length of the laser, thereby enabling flexible adjustment of the optical path and achieving spatiotemporal synchronization of multi-wavelength lasers.

[0031] As shown in Figure 1, the delay line adjustment unit 120 includes a first reflector 121 and a second reflector 122 disposed along the optical path. The first reflector 121 and the second reflector 122 are used to change the direction of the optical path. The second laser 112a can be reflected sequentially by the first reflector 121 and the second reflector 122 and then incident parallel to the first laser 111a into the frequency response unit 130. The delay line adjustment unit 120 also includes a driver 123, which is drivenly connected to the second reflector 122.

[0032] As shown in Figure 3, the driver 123 can drive the second reflector 122 to move along the first direction a to approach or move away from the first reflector 121. This action can adjust the optical path length of the light, thereby achieving the effect of adjusting the optical path. Compared with the existing manual driving of the second reflector, this application can adjust the position of the second reflector 122 more quickly and accurately through the setting of the driver 123, improving the adjustment accuracy and adjustment efficiency.

[0033] Existing adjustment methods can only adjust the distance between the first and second reflectors, and cannot compensate for the effects of environmental vibration, cooling medium vibration, external torque, external temperature changes, and installation errors. To address this, the driver 123 of this application can also drive the second reflector 122 to move along the second direction b to further compensate for optical path offset and errors. Simultaneously, the driver 123 can drive the second reflector 122 to rotate, adjusting the angle between its mirror normal and the optical axis of the second laser 112a reflected by the first reflector 121, thereby achieving fine-tuning of the optical path and improving the quality of the sum-frequency laser beam 160.

[0034] The first direction 'a' is perpendicular to the emission direction of the first laser 111a. This setting allows the movement of the second reflector 122 along the first direction 'a' to effectively change the optical path length of the second laser 112a without interfering with the optical path of the first laser 111a. Simultaneously, the first direction 'a' is perpendicular to the second direction 'b'. This mutual perpendicularity ensures that the movement of the second reflector 122 in different directions is independent, avoiding mutual influence and interference between different movement modes. This precise spatial orientation setting provides a clear coordinate reference for the precise control of the second reflector 122 by the driver 123, making the entire optical path adjustment process more stable, accurate, and controllable, and better adaptable to complex and changing working environments and optical path adjustment requirements.

[0035] The frequency-switching section 130 is used to achieve frequency-switching of multi-wavelength lasers. Its main function is to mix the first laser 111a and the second laser 112a, which are transmitted from different optical paths. In the frequency-switching section 130, according to the principle of nonlinear optics, the two laser beams interact to generate a laser of a new frequency, namely the frequency-switched laser 160. The generation efficiency and quality of the frequency-switched laser 160 directly depend on the spatiotemporal synchronization of the first laser 111a and the second laser 112a when they enter the frequency-switching section 130, that is, whether the optical path difference between them is appropriate. The frequency-switching section 130 outputs the generated frequency-switched laser 160 and transmits it to the detector 140.

[0036] As shown in Figure 1, a signal connection is established between detector 140 and driver 123, forming a closed-loop feedback adjustment system. The function of detector 140 is to receive and analyze the sum-frequency laser 160 output from sum-frequency unit 130, and generate corresponding feedback signals based on the parameter characteristics of the sum-frequency laser 160. These feedback signals contain current optical path adjustment parameter information, enabling the determination of whether the sum-frequency process has reached its optimal state. After receiving the feedback signals from detector 140, driver 123 processes and analyzes the signals, and then drives the second reflector 122 to perform corresponding movements according to a preset algorithm and control strategy, further adjusting the optical path and compensating for optical path deviations and errors. Through the combination of these various movement modes, driver 123 can precisely control the second reflector 122 according to actual needs, thereby achieving precise adjustment of the optical path and ensuring that the sum-frequency process is always in its optimal state. Optionally, detector 140 can be any one of wavefront detector 140, CCD camera, or interferometer.

[0037] It should be noted that, in one possible embodiment of this application, firstly, as shown in FIG1 and FIG2, the laser unit 110 includes a first laser 111 and a second laser 112, wherein the first laser 111 is used to emit a first laser 111a; and the second laser 112 is used to emit a second laser 112a.

[0038] In the field of multi-wavelength pulse and frequency technology, the interaction of lasers of different wavelengths is required to achieve the frequency effect, thus necessitating multiple independent laser generating units. In this embodiment, the laser unit 110 is divided into a first laser 111 and a second laser 112, which together constitute the hardware foundation of the laser unit 110.

[0039] This split design not only ensures the output stability of each laser, but also facilitates the flexible selection and configuration of lasers with different parameters according to actual application needs, thereby adapting to diverse sum-frequency scenarios. Compared with a single laser integrating multiple functions, it has higher flexibility and scalability.

[0040] Second, as shown in Figures 1 and 2, the optical path compensation adjustment system 100 also includes a processing platform 150, which is located between the detector 140 and the frequency summing section 130; the frequency summing laser 160 is emitted sequentially from the frequency summing section 130 to the processing platform 150 and the detector 140.

[0041] In the field of ultrafast laser processing, the sum-frequency laser 160 is often used for tasks such as material cutting and surface micromachining. Placing the processing platform 150 in this position ensures that the sum-frequency laser 160 can act on the processing object after completing the sum-frequency process. At the same time, it also ensures that the detector 140 can receive the remaining laser signal in a timely manner after the laser completes the processing task, for feedback adjustment, forming a complete working link of sum-frequency, processing, and detection. This enables the system to not only achieve accurate optical path compensation, but also to efficiently complete actual processing operations, improving the system's practicality and integration.

[0042] After being emitted from the sum-frequency unit 130, the sum-frequency laser 160 directly irradiates the surface of the material to be processed on the processing platform 150. At this time, the high energy and specific wavelength characteristics of the sum-frequency laser 160 allow it to interact with the material, achieving processing effects such as melting, vaporization, and etching. After the sum-frequency laser 160 completes its processing task, a portion of the laser continues to propagate, eventually reaching the detector 140. The detector 140 captures parameters such as the intensity, wavelength, and phase of this portion of the laser, generates a feedback signal, and transmits it to the driver 123. Based on the feedback signal, the driver 123 adjusts the second reflector 122 in the delay line adjustment unit 120 again to optimize the optical path, ensuring that the processing accuracy and efficiency of the subsequent sum-frequency laser 160 remain at their optimal state, forming a dynamic, self-optimizing closed-loop working system.

[0043] Optionally, in a laser optical system, the reflection of laser light by a conventional mirror surface suffers from a certain degree of energy loss and wavelength-selective reflection. To minimize energy loss during laser reflection and ensure the stability and efficiency of laser transmission, the surfaces of the first mirror 121 and the second mirror 122 are also coated with a high-reflectivity film. The high-reflectivity film matches the wavelength of the second laser 112a, reducing absorption and scattering losses during reflection.

[0044] The aforementioned optical path compensation adjustment system 100 monitors the sum-frequency effect in real time through the detector 140, drives the delay line adjustment unit 120 to dynamically compensate for changes in optical path, replaces manual calibration, and improves efficiency and stability; at the same time, combined with the translation, rotation, and lateral movement of the reflector, it improves the adjustment accuracy.

[0045] As shown in Figure 2, for example, the delay line adjustment unit 120 further includes a third reflector 124 and a fourth reflector 125 disposed along the optical path. The third reflector 124 and the second reflector 122 are disposed along a second direction b; the fourth reflector 125 and the third reflector 124 are disposed along a first direction a and the second reflector 122 is disposed along the second direction b; the second laser 112a is incident on the frequency-switching unit 130 after being reflected sequentially by the first reflector 121, the second reflector 122, the third reflector 124, and the fourth reflector 125; the driver 123 drives the second reflector 124 according to the feedback signal. 2 and the third reflector 124 move along the first direction a to approach or move away from the first reflector 121, and / or drive the second reflector 122 and the third reflector 124 to rotate to adjust the angle between the mirror normal of the second reflector 122 and the optical axis of the second laser 112a reflected by the first reflector 121 and the angle between the mirror normal of the third reflector 124 and the optical axis of the second laser 112a reflected by the second reflector 122, and / or drive the second reflector 122 and the third reflector 124 to move relative to the first reflector 121 and the fourth reflector 125 along the second direction b.

[0046] Specifically, the number of reflectors can be increased or decreased according to the specific requirements of optical path adjustment. In another embodiment of this application, as shown in FIG2, the delay line adjustment unit 120 further includes a third reflector 124 and a fourth reflector 125 disposed along the optical path.

[0047] As shown in Figure 2, the second laser 112a is reflected by the first reflector 121 to the second reflector 122, and then by the second reflector 122 to the third reflector 124. At this time, the light path of the second laser 112a reflected from the first reflector 121 to the second reflector 122 is perpendicular to the light path reflected from the second reflector 122 to the third reflector 124. The second laser 112a is then reflected by the third reflector 124 to the fourth reflector 125. At this time, the light path of the second laser 112a reflected from the third reflector 124 to the fourth reflector 125 is parallel to the light path reflected from the first reflector 121 to the second reflector 122. After being reflected by the fourth reflector 125, the light path exits and is parallel to the light path of the first laser 111a.

[0048] The driver 123 can drive the second reflector 122 and the third reflector 124 to move along the first direction a, directly adjusting the optical path length of the second laser 112a. For example, when the detector 140 detects a decrease in sum-frequency efficiency and determines that the optical path difference is insufficient, the driver 123 can control the second reflector 122 and the third reflector 124 to move away from the first reflector 121 along the first direction a, extending the optical path and increasing the optical path difference. Furthermore, the driver 123 can independently control the rotation angle of the second reflector 122 and the third reflector 124, respectively adjusting the angle between their mirror normal and the corresponding incident laser optical axis to achieve minor offset correction of the optical path. The driver 123 can also drive the second reflector 122 and the third reflector 124 to move laterally relative to the first reflector 121 and the fourth reflector 125 along the second direction b to compensate for the effects of optical path offset caused by reflector installation errors, environmental vibration, cooling medium vibration, external torque, and external temperature changes.

[0049] It should be noted that this application does not impose any limitation on the specific number of reflectors. In addition to the four reflectors mentioned above, the number of reflectors may also be six, eight, etc.

[0050] In one possible embodiment of this application, as shown in FIG3, the delay line adjustment part 120 includes a sliding groove 126 disposed along a first direction a and a slider 127 disposed in the sliding groove 126; the second reflector 122 is rotatably and adjustablely disposed on the slider 127; the driver 123 is drivenly connected to the slider 127 and is used to drive the slider 127 to move the second reflector 122 along the sliding groove 126 to move closer to or away from the first reflector 121.

[0051] Specifically, as shown in Figure 3, the sliding groove 126 is set along the first direction a, providing a precise guide track for the movement of the slider 127. This linear track design effectively restricts the degree of freedom of the slider 127 in non-adjustment directions, avoiding optical path instability caused by excessive shaking. The slider 127 is installed in the groove, closely matching its shape and size. The material of the slider 127 is usually selected with high strength and low coefficient of friction to ensure that it can withstand the driving force of the driver 123 and maintain a smooth movement during long-term, high-frequency sliding, reducing the impact of wear on adjustment accuracy.

[0052] A second reflector 122 is provided on the slider 127. The second reflector 122 is adjustable and is provided on the slider 127 to adjust the angle between the normal of the mirror surface of the second reflector 122 and the optical axis of the second laser 112a reflected by the first reflector 121. Optionally, when the delay line adjustment part 120 also includes a third reflector 124 and a fourth reflector 125, the third reflector 124 can also be rotatably provided on the slider 127 to adjust the angle between the normal of the mirror surface of the third reflector 124 and the optical axis of the second laser 112a reflected by the second reflector 122.

[0053] When the detector 140 detects that the intensity or phase of the sum-frequency laser 160 deviates from the set value, the system will calculate the required optical path adjustment amount based on the feedback signal. The driver 123 will then drive the slider 127 to move the second reflector 122 along the sliding groove 126 toward the direction closer to or away from the first reflector 121.

[0054] For example, as shown in Figure 4, the slider 127 includes a sliding frame 1271 and a support plate 1272. A sliding rod 1273 is inserted through the sliding frame 1271 along the second direction b. The support plate 1272 is sleeved on the outside of the sliding rod 1273 and slides along the second direction b through the sliding rod 1273.

[0055] Specifically, as shown in Figure 4, the sliding frame 1271 is the basic frame of the slider 127. Its main function is to cooperate with the external sliding groove 126 to guide the entire slider 127 to slide along the first direction a. The support plate 1272 is the platform that directly supports the second reflector 122. It has good flatness and stability to ensure that the second reflector 122 can be accurately adjusted in angle and position after installation.

[0056] As shown in Figure 4, a slide rod 1273 is installed inside the sliding frame 1271 along the second direction b. The slide rod 1273 can be fixed to the sliding frame 1271 by means of locating pins, screws, or interference fits to ensure that it will not shift or loosen during use. The slide rod 1273 provides a guide track for the sliding of the support plate 1272 in the second direction b, and its straightness and surface finish directly affect the smoothness of the sliding and the adjustment accuracy of the support plate 1272. By setting the slide rod 1273 inside the sliding frame 1271, the internal space of the slider 127 is utilized, and the adjustment function of the second reflector 122 in the second direction b is realized without increasing the overall structural complexity.

[0057] The support plate 1272 is fitted onto the outside of the slide rod 1273 through internally machined through holes or bearing structures, forming a sliding pair similar to a linear guide. This design allows the support plate 1272 to slide freely along the slide rod 1273 in the second direction b, while restricting its movement in other directions, ensuring the singularity and controllability of the motion, and further improving the smoothness and accuracy of the sliding.

[0058] Optionally, as shown in FIG3, the sliding groove 126 has a guide plate 128 arranged in the first direction a, the slider 127 is disposed on the guide plate 128, and the driver 123 can drive the slider 127 to slide along the guide plate 128.

[0059] Specifically, as shown in Figure 3, the guide plate 128 is arranged along the first direction a and is fixedly connected to the inner wall of the sliding groove 126 through precision machining and assembly processes, such as bolt fixing, screw fixing, and pin fixing. The arrangement of the guide plate 128 ensures that the slider 127 always moves along a preset straight trajectory during the movement, avoiding the problem of optical path instability caused by shaking or deviation, providing physical constraints for the precise movement of the slider 127, and effectively reducing the influence of external interference on the movement trajectory of the slider 127.

[0060] In one possible embodiment of this application, as shown in FIG3, the delay line adjustment part 120 further includes a fine-tuning part 129; the side wall of the sliding groove 126 has a through groove 1261 extending along the first direction a, and the fine-tuning part 129 passes through the through groove 1261 and is fixedly connected to the side wall of the slider 127; by sliding the fine-tuning part 129 along the through groove 1261, the slider 127 can be driven to slide along the sliding frame 1271.

[0061] Specifically, as shown in Figure 3, the fine-tuning part 129 is rod-shaped or block-shaped. One end passes through the through groove 1261 and is firmly fixed to the side wall of the slider 127 by screws, pins, or welding. The other end is exposed outside the sliding groove 126, which facilitates the application of adjustment force or connection to the drive device. This connection method allows the movement of the fine-tuning part 129 to be directly transmitted to the slider 127. When the fine-tuning part 129 moves in the through groove 1261, the slider 127 moves synchronously with it, thereby driving the second reflector 122 mounted on the slider 127 to adjust its position, thereby achieving fine-tuning of the optical path length of the second laser 112a.

[0062] The above description is merely an optional embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

[0063] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable way without contradiction. In order to avoid unnecessary repetition, this utility model will not describe the various possible combinations separately.

Claims

1. An optical path compensation adjustment system, characterized in that, The system includes a laser unit (110), a delay line adjustment unit (120), a frequency summation unit (130), and a detector (140). The laser unit (110) emits a first laser (111a) and a second laser (112a). The delay line adjustment unit (120) is located between the laser unit (110) and the frequency summation unit (130), and includes a driver (123), a first reflector (121), and a second reflector (122) arranged sequentially along the optical path. The second reflector (122) is drivenly connected to the driver (123). The first laser (111a) directly enters the frequency summation unit (130), and the second laser (112a) enters the frequency summation unit (130) after being reflected by the first reflector (121) and the second reflector (122) in sequence. The frequency summation unit (130) mixes the first laser (111a) and the second laser (112a) to achieve a certain effect. A sum-frequency laser (160) is emitted to the detector (140); the detector (140) is signal-connected to the driver (123), the detector (140) receives the sum-frequency laser (160) and generates a feedback signal, the driver (123) drives the second reflector (122) to move along a first direction (a) to move closer to or further away from the first reflector (121) according to the feedback signal, and / or drives the second reflector (122) to rotate to adjust the angle between the mirror normal of the second reflector (122) and the optical axis of the second laser (112a) reflected by the first reflector (121); and / or drives the second reflector (122) to move relative to the first reflector (121) along a second direction (b); the first direction (a) is perpendicular to the emission direction of the first laser (111a), and the first direction (a) is perpendicular to the second direction (b).

2. The optical path compensation adjustment system according to claim 1, characterized in that, The delay line adjustment unit (120) further includes a third reflector (124) and a fourth reflector (125) arranged along the optical path. The third reflector (124) and the second reflector (122) are arranged along the second direction (b); the fourth reflector (125) and the third reflector (124) are arranged along the first direction (a) and the second reflector (122) are arranged along the second direction (b); the second laser (112a) is incident on the sum-frequency unit (130) after being reflected sequentially by the first reflector (121), the second reflector (122), the third reflector (124), and the fourth reflector (125); the driver (123) drives the second reflector (112a) according to the feedback signal. 122) and the third reflector (124) move along the first direction (a) to approach or move away from the first reflector (121), and / or drive the second reflector (122) and the third reflector (124) to rotate to adjust the angle between the mirror normal of the second reflector (122) and the optical axis of the second laser (112a) reflected by the first reflector (121) and the angle between the mirror normal of the third reflector (124) and the optical axis of the second laser (112a) reflected by the second reflector (122), and / or drive the second reflector (122) and the third reflector (124) to move relative to the first reflector (121) and the fourth reflector (125) along the second direction (b).

3. The optical path compensation adjustment system according to claim 2, characterized in that, The delay line adjustment unit (120) includes a sliding groove (126) disposed along the first direction (a) and a slider (127) disposed in the sliding groove (126); the second reflector (122) is rotatably and adjustablely disposed on the slider (127); the driver (123) is drivenly connected to the slider (127) and is used to drive the slider (127) to move the second reflector (122) along the sliding groove (126) to move closer to or away from the first reflector (121).

4. The optical path compensation adjustment system according to claim 3, characterized in that, The slider (127) includes a sliding frame (1271) and a support plate (1272). A sliding rod (1273) is inserted inside the sliding frame (1271) along the second direction (b). The support plate (1272) is sleeved on the sliding rod (1273) and slides along the second direction (b) via the sliding rod (1273).

5. The optical path compensation adjustment system according to claim 3, characterized in that, The sliding groove (126) has a guide plate (128) arranged in the first direction (a), the slider (127) is arranged on the guide plate (128), and the driver (123) can drive the slider (127) to slide along the guide plate (128).

6. The optical path compensation adjustment system according to claim 4, characterized in that, The delay line adjustment part (120) further includes a fine-tuning part (129); the side wall of the sliding groove (126) has a through groove (1261) extending along the first direction (a), the fine-tuning part (129) passes through the through groove (1261) and is fixedly connected to the side wall of the slider (127); by sliding the fine-tuning part (129) along the through groove (1261), the slider (127) can be driven to slide along the sliding frame (1271).

7. The optical path compensation adjustment system according to claim 4, characterized in that, The third reflector (124) is rotatably mounted on the slider (127).

8. The optical path compensation adjustment system according to claim 1, characterized in that, The laser unit (110) includes a first laser (111) and a second laser (112), wherein the first laser (111) is used to emit the first laser (111a); and the second laser (112) is used to emit the second laser (112a).

9. The optical path compensation adjustment system according to claim 1, characterized in that, The optical path compensation adjustment system (100) further includes a processing platform (150), which is located between the detector (140) and the frequency summation unit (130); the frequency summation laser (160) is emitted sequentially from the frequency summation unit (130) to the processing platform (150) and the detector (140).

10. The optical path compensation adjustment system according to claim 1, characterized in that, The surfaces of the first reflector (121) and the second reflector (122) are also covered with a high-reflectivity film.

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