Modularly mounted getter pump

Abstract

The utility model relates to the field of vacuum equipment, and discloses a modularly-mounted getter pump, which comprises a bottom plate and a fixing piece which are respectively a square metal plate and a square metal plate and are used as a base of the getter pump; wherein the fixing pieces are spot-welded on four corners of the bottom plate and are used for being matched with the bottom plate so as to fix the getter pieces; and meanwhile, a ceramic chip, a heating wire and a clamp spring are sequentially placed between the bottom plate and the getter sheet. The getter pump is simple and compact in structure, the weight of the getter pump is not increased by excessive heating systems, the getter pump can be connected into a vacuum system through screw fixation, and various requirements of users can be met by changing the number of the getter pumps.

Description

Technical Field

[0001] This utility model relates to the field of vacuum equipment, specifically to a modularly installed getter pump. Background Technology

[0002] Getter pumps play a crucial role in vacuum and gas purification, eliminating impurities from the system to maintain the required vacuum level or ensure gas purity. While getter pumps offer high pumping speeds for light gases like hydrogen in ultra-high vacuum environments and operate cleanly and without contamination, traditional designs have significant limitations: their fixed structure results in large overall dimensions, increasing both the pump's size and installation space, posing a significant challenge for applications requiring compact designs; this single design struggles to meet the needs of vacuum systems with varying shapes, especially non-standard geometries, complicating installation and integration and limiting their flexibility in specific industries; furthermore, traditional getter pumps typically require complex installation steps, including additional support structures and connectors, increasing installation time and difficulty, raising overall costs, and in some cases requiring specialized technicians, further increasing labor and time costs. Utility Model Content

[0003] In view of the above-mentioned technical deficiencies, the technical problem to be solved by this utility model is to provide a modularly installed getter pump, which aims to solve the technical problem that the getter pumps in the prior art are all fixed structures and occupy a large space, which has greatly hindered the application in various fields.

[0004] To solve the above-mentioned technical problems, the present invention adopts the following technical solution: The present invention provides a modularly installed getter pump, comprising:

[0005] The base plate and the fixing plate are square metal plates and square metal sheets, respectively, serving as the base of the getter pump;

[0006] The fixing pieces are spot-welded to the four corners of the base plate to cooperate with the base plate and fix the getter pieces.

[0007] Meanwhile, a ceramic plate, a heating wire, and a retaining spring are placed sequentially between the substrate and the getter plate.

[0008] Furthermore, the ceramic plate is placed between the base plate and the heating wire to prevent a short circuit between the heating wire and the vacuum system during the activation process of the getter pump;

[0009] The heating wire, embedded under the ceramic plate, is used to activate the getter pump by heating it with electricity;

[0010] The retaining ring is placed between the base plate and the heating wire to prevent the getter sheet from shifting vertically due to thickness error.

[0011] Furthermore, the substrate and the fixing plate are made of ferroalloy, steel, titanium, or titanium alloy.

[0012] Furthermore, the getter tablet is made of one of titanium, zirconium, hafnium, yttrium, or an alloy of titanium, zirconium, hafnium, and yttrium.

[0013] Furthermore, the getter tablet is made of one of titanium, zirconium, hafnium and yttrium with a transition metal, or an alloy of titanium, zirconium, hafnium and yttrium with a transition metal; wherein the transition metal includes one of vanadium, iron, manganese, cobalt, aluminum, molybdenum and rare earth elements.

[0014] Furthermore, the retaining ring is made of shape memory alloy and is fixed to the base plate by spot welding.

[0015] Furthermore, the ceramic tile is made of alumina ceramic.

[0016] Furthermore, the square metal plate has several burrs in the four positive directions of its edge portion, and a through hole is provided at the center of the burr for screws to pass through and to mate with the screw holes reserved in the vacuum system.

[0017] The beneficial effects of this utility model are as follows:

[0018] 1. Solves the problem of large size of traditional getter pumps;

[0019] 2. It solves the problem that traditional getter pumps have a simple structure and are difficult to adapt to irregularly shaped vacuum systems.

[0020] 3. Simple structure and easy to process. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram of a modularly installed getter pump provided for an embodiment of the present invention.

[0023] Explanation of reference numerals in the attached drawings: 1. Film; 2. Fixing plate; 3. Ceramic plate; 4. Heating wire; 5. Getter plate. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] like Figure 1 As shown, this embodiment provides a modularly installed getter pump, including: a base plate 1 and a fixing plate 2, which are respectively a square metal plate and a square metal sheet, serving as the base of the getter pump; wherein, the fixing plate 2 is spot-welded to the four corners of the base plate 1 for cooperating with the base plate 1 to fix the getter sheet 5; at the same time, a ceramic sheet 3, a heating wire 4 and a retaining spring are also placed between the base plate 1 and the getter sheet 5 in sequence.

[0026] Specifically, the film 1 and the fixing plate 2 are made of iron alloy, steel, titanium or titanium alloy; the getter plate 5 is made of one of titanium, zirconium, hafnium, yttrium or an alloy of titanium, zirconium, hafnium and yttrium; it also includes getter plate 5 made of one of titanium, zirconium, hafnium and yttrium and a transition metal or an alloy of titanium, zirconium, hafnium and yttrium and a transition metal; wherein the transition metal includes one of vanadium, iron, manganese, cobalt, aluminum, molybdenum and rare earth.

[0027] Preferably, zirconium-vanadium-iron alloy powder, consisting of 70% zirconium, 25% vanadium, and the remainder iron, is pressed into square sheets with a length of 40mm, a width of 40mm, and a thickness of 2mm using a mold. These square sheets are then sintered firmly in a vacuum furnace to obtain getter sheets.

[0028] A square metal plate with a length of 50mm, a width of 50mm, and a thickness of 0.8mm is machined from titanium alloy. Four burrs with a total length of 6mm and a radius of 2.5mm are machined in the four positive directions of the metal ring. A through hole with a diameter of 3mm is machined at the center of the burr to obtain film 1.

[0029] A square metal sheet with a length of 6.5 mm, a height of 4.5 mm, and a thickness of 0.5 mm is machined from titanium alloy to obtain a fixing piece 2, which is then spot-welded to the four corners of the base piece 1.

[0030] Place a retaining ring, 1.1 mm long, 2 mm wide, and 0.35 mm thick, made of shape memory alloy, on the substrate 1. Fix the retaining ring to the substrate 1 by spot welding to ensure that the retaining ring will not shift or fall off.

[0031] Place a ceramic plate, 40mm long, 40mm wide, and 1.6mm high, made of alumina, on the circlip to ensure that the heating wire 4 is short-circuited with the system during the activation process of the getter pump.

[0032] Place the getter onto the circlip and secure it with the retaining piece 2 to ensure that the getter piece 5 does not shift or fall off.

[0033] Secure the vacuum system using four M3 screws through the pre-drilled screw holes on the flash edge of the substrate. Bake the vacuum system at a temperature no lower than 150 degrees Celsius for at least 12 hours. Two hours before the end of baking, activate the getter pump by applying electricity. The vacuum system baking and getter pump activation should end simultaneously. Ten hours after baking, allow the system to cool completely, achieving a vacuum level of approximately 1.6E-7 Pa.

[0034] The advantages of this invention are clearly evident from this embodiment: the structure is simple and compact, there is no extra heating system to increase the weight of the getter pump, it can be connected to the vacuum system by screw fixing, and the number of getter pumps can be changed to meet various user needs.

[0035] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A modularly installed getter pump, characterized in that, include: The base plate (1) and the fixing plate (2) are square metal plates and square metal sheets, respectively, serving as the base of the getter pump; Among them, the fixing piece (2) is spot welded to the four corners of the base piece (1) to cooperate with the base piece (1) to fix the getter piece (5). Meanwhile, a ceramic plate (3), a heating wire (4) and a retaining ring are placed between the substrate (1) and the getter plate (5).

2. The modularly installed getter pump as described in claim 1, characterized in that, The ceramic plate (3) is placed between the base plate (1) and the heating wire (4) to prevent the heating wire (4) from short-circuiting with the vacuum system during the activation process of the getter pump; The heating wire (4) is embedded under the ceramic plate (3) and is used to activate the getter pump by heating it with electricity; The retaining ring is placed between the base plate (1) and the heating wire (4) to prevent the getter sheet (5) from shifting in the vertical direction due to thickness error.

3. The modularly installed getter pump as described in claim 1, characterized in that, The substrate (1) and the fixing plate (2) are made of ferroalloy, steel, titanium or titanium alloy.

4. The modularly installed getter pump as described in claim 1, characterized in that, The snap ring is made of shape memory alloy and is fixed to the substrate (1) by spot welding.

5. A modularly installed getter pump as described in claim 1, characterized in that, The ceramic piece (3) is made of alumina ceramic.

6. A modularly installed getter pump as described in claim 1, characterized in that, The square metal plate has several burrs in the four positive directions of its edge portion, and a through hole is provided at the center of the burr for screws to pass through and to mate with the screw holes reserved in the vacuum system.

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